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1.发明授权公开(公告)号：US07878061B2
公开(公告)日：2011-02-01
申请号：US12323653
申请日：2008-11-26
IPC分类号： H01L21/76
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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公开(公告)号：US20100107762A1
公开(公告)日：2010-05-06
申请号：US12610961
申请日：2009-11-02
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0831 , Y10T29/49124
摘要： An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.
摘要翻译： 描述了一种加速度传感器，其具有基底基板，相对于基底基板以固定方式设置的第一电极结构，具有第一电极区域的传感器元件和具有至少一个弹簧元件的弹簧装置。 通过弹簧元件，传感器元件联接到基底基板，使得由于作用在传感器元件上的加速度，传感器元件相对于基底基板偏转，从而改变第一电极结构与第一电极结构之间的距离 电极区域。 传感器元件和第一电极结构至少部分地位于另一个之上，并且由公共功能层形成。
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公开(公告)号：US08336382B2
公开(公告)日：2012-12-25
申请号：US12610961
申请日：2009-11-02
IPC分类号： G01P15/125
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0831 , Y10T29/49124
摘要： An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.
摘要翻译： 描述了一种加速度传感器，其具有基底基板，相对于基底基板以固定方式设置的第一电极结构，具有第一电极区域的传感器元件和具有至少一个弹簧元件的弹簧装置。 通过弹簧元件，传感器元件联接到基底基板，使得由于作用在传感器元件上的加速度，传感器元件相对于基底基板偏转，从而改变第一电极结构与第一电极结构之间的距离 电极区域。 传感器元件和第一电极结构至少部分地位于另一个之上，并且由公共功能层形成。
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公开(公告)号：US20090152654A1
公开(公告)日：2009-06-18
申请号：US12323653
申请日：2008-11-26
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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公开(公告)号：US20100043549A1
公开(公告)日：2010-02-25
申请号：US12543649
申请日：2009-08-19
申请人： Johannes Classen , Arnd Kaelberer , Lars Tebje
发明人： Johannes Classen , Arnd Kaelberer , Lars Tebje
IPC分类号： G01P15/10
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
摘要翻译： 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。
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公开(公告)号：US08272268B2
公开(公告)日：2012-09-25
申请号：US12543649
申请日：2009-08-19
申请人： Johannes Classen , Arnd Kaelberer , Lars Tebje
发明人： Johannes Classen , Arnd Kaelberer , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
摘要翻译： 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。
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公开(公告)号：US20110197678A1
公开(公告)日：2011-08-18
申请号：US13057121
申请日：2009-08-04
申请人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
发明人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
摘要翻译： 电容微机械加速度传感器具有位于衬底上方的衬底和微机械功能层。 地震质量，悬架和固定电极位于微机械功能层。 固定电极分别在使用掩埋导体轨道的悬架的第一和第二侧上彼此电连接。 固定电极使用微机械功能层中的第一和第二导体在悬架的第一和第二侧之间彼此连接。
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公开(公告)号：US08573059B2
公开(公告)日：2013-11-05
申请号：US13057121
申请日：2009-08-04
申请人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
发明人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
摘要翻译： 电容微机械加速度传感器具有位于衬底上方的衬底和微机械功能层。 地震质量，悬架和固定电极位于微机械功能层。 固定电极分别在使用掩埋导体轨道的悬架的第一和第二侧上彼此电连接。 固定电极使用微机械功能层中的第一和第二导体在悬架的第一和第二侧之间彼此连接。
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9.发明申请公开(公告)号：US20110154899A1
公开(公告)日：2011-06-30
申请号：US12736609
申请日：2009-04-01
申请人： Johannes Classen , Lars Tebje
发明人： Johannes Classen , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0817 , G01P2015/0831
摘要： A micromechanical component comprising a substrate, a seismic mass, and first and second detection means, the substrate having a main extension plane and the first detection means being provided for detection of a substantially translational first deflection of the seismic mass along a first direction substantially parallel to the main extension plane, and the second detection means further being provided for detection of a substantially rotational second deflection of the seismic mass about a first rotation axis parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be embodied as an asymmetrical rocker, with the result that accelerations can be sensed as rotations. Detection can be accomplished via capacitive sensors.
摘要翻译： 一种微机械部件，包括基板，地震块以及第一和第二检测装置，所述基板具有主延伸平面，并且所述第一检测装置被提供用于检测所述地震块沿着基本平行的第一方向的基本平移的第一偏转 并且第二检测装置还被设置用于检测围绕平行于基本上垂直于主延伸平面的第二方向的第一旋转轴线的地震质量的基本上旋转的第二偏转。 地震质量可以被体现为不对称的摇杆，结果可以将加速度感测为旋转。 可以通过电容式传感器进行检测。
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公开(公告)号：US20080141774A1
公开(公告)日：2008-06-19
申请号：US11985254
申请日：2007-11-13
申请人： Johannes Classen , Markus Heitz , Lars Tebje , Fouad Bennini
发明人： Johannes Classen , Markus Heitz , Lars Tebje , Fouad Bennini
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.
摘要翻译： 加速度传感器包括悬挂在基板上方的弹簧上并且可以在垂直于基板的表面的方向上偏转的地震质量。 为了减少由于干扰加速度导致的地震质体沿着衬底表面的偏转，这导致了垂直于衬底表面的地震质量偏转测量的伪造，弹簧包括两个弯曲杆 通过横档相互连接。
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