公开(公告)号：US07274450B1

公开(公告)日：2007-09-25

申请号：US10857774

申请日：2004-05-28

申请人： Steven E. Green ,  Ping He ,  Galen L. Pfeiffer ,  Brian D. Guenther ,  Gerald T. Cooney ,  John A. Woollam ,  Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger

发明人： Steven E. Green ,  Ping He ,  Galen L. Pfeiffer ,  Brian D. Guenther ,  Gerald T. Cooney ,  John A. Woollam ,  Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger

IPC分类号： G01J4/00

CPC分类号： G01N21/21 ,  G01N21/211

摘要： A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subspace discourage atmospheric contaminates from entering into the subspace. Contained within the generally enclosed space is a spectrophotometer, ellipsometer or polarimeter or the like system which operates at wavelengths, (eg. UV), which are adversely affected, (eg. absorbed), by typical atmospheric contents.

摘要翻译： 允许进入腔室中的子空间的样本隔离系统，其包围大致封闭的空间，用于在子空间向大气开放时用于进入和移除样品。 足够的净化气体从通常封闭的空间内流入子空间，阻止大气污染物进入子空间。 包含在通常封闭的空间内的是分光光度计，椭偏仪或偏振计等，其工作波长（例如UV），通过典型的大气含量受到不利影响（例如吸收）。

公开(公告)号：US07327456B1

公开(公告)日：2008-02-05

申请号：US11145470

申请日：2005-06-06

申请人： John A. Woollam ,  Steven E. Green ,  Ping He ,  Blaine D. Johs ,  Craig M. Herzinger ,  Galen L. Pfeiffer ,  Brian D. Guenther ,  Martin M. Liphardt ,  Gerald T. Cooney

发明人： John A. Woollam ,  Steven E. Green ,  Ping He ,  Blaine D. Johs ,  Craig M. Herzinger ,  Galen L. Pfeiffer ,  Brian D. Guenther ,  Martin M. Liphardt ,  Gerald T. Cooney

IPC分类号： G01J4/00

CPC分类号： G01J3/02 ,  G01J1/02 ,  G01J1/0266 ,  G01J3/0202 ,  G01J3/0224 ,  G01J3/0235 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/04 ,  G01J3/18 ,  G01J4/00 ,  G01N21/211

摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

摘要翻译： 公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。

公开(公告)号：US06982792B1

公开(公告)日：2006-01-03

申请号：US10376677

申请日：2003-02-28

申请人： John A. Woollam ,  Steven E. Green ,  Ping He ,  Blaine D. Johs ,  Craig M. Herzinger ,  Galen L. Pfeiffer ,  Brian D. Guenther ,  Martin M. Liphardt

发明人： John A. Woollam ,  Steven E. Green ,  Ping He ,  Blaine D. Johs ,  Craig M. Herzinger ,  Galen L. Pfeiffer ,  Brian D. Guenther ,  Martin M. Liphardt

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0235 ,  G01J3/0237 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/12 ,  G01J4/00 ,  G01N2021/213

摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

摘要翻译： 公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。

公开(公告)号：US07633625B1

公开(公告)日：2009-12-15

申请号：US11901225

申请日：2007-09-17

申请人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

发明人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC分类号： G01B9/02 ,  G01J3/45 ,  G01J4/00

CPC分类号： G01J3/02 ,  G01J3/0213 ,  G01J3/0224 ,  G01J3/10 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

公开(公告)号：US07616319B1

公开(公告)日：2009-11-10

申请号：US11890354

申请日：2007-08-05

申请人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

发明人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC分类号： G01B9/02 ,  G01J3/45 ,  G01J4/00

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

摘要翻译： 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。

公开(公告)号：US07508510B2

公开(公告)日：2009-03-24

申请号：US11636786

申请日：2006-12-12

申请人： Galen L. Pfeiffer ,  Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Christopher A. Goeden ,  Ping He ,  John A. Woollam ,  James D. Welch

发明人： Galen L. Pfeiffer ,  Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Christopher A. Goeden ,  Ping He ,  John A. Woollam ,  James D. Welch

IPC分类号： G01J4/00

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/0289 ,  G01N21/21 ,  G01N21/211 ,  G01N21/55 ,  G01N2021/213

摘要： System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzing data obtained at those wavelengths.

摘要翻译： 使用在相对于样本的各个位置处以至少两个波长提供相同焦距的透镜系统来分析具有多个波长的基本上与其上的基本上完全相同的小点处的样本的系统和方法，包括分析获得的数据 在那些波长。

公开(公告)号：US07158231B1

公开(公告)日：2007-01-02

申请号：US10699540

申请日：2003-11-01

申请人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

发明人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC分类号： G01J4/00

CPC分类号： G01J3/447 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/10 ,  G01J4/00 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

摘要： A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.

摘要翻译： 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统存在于环境控制室中。

公开(公告)号：US07304737B1

公开(公告)日：2007-12-04

申请号：US11497920

申请日：2006-08-03

申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/215

摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.

摘要翻译： 光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统 的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。

公开(公告)号：US07623237B1

公开(公告)日：2009-11-24

申请号：US11452483

申请日：2006-06-14

申请人： Martin M. Liphardt ,  Thomas E. Tiwald ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  Ronald A. Synowicki ,  John A. Woollam

发明人： Martin M. Liphardt ,  Thomas E. Tiwald ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  Ronald A. Synowicki ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01N21/55

摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。

公开(公告)号：US07336361B1

公开(公告)日：2008-02-26

申请号：US11256891

申请日：2005-10-25

申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01J4/00 ,  G01N21/211 ,  G01N2021/213

摘要： A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.

摘要翻译： 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统还具有至少一个多元件透镜，并且可选地存在于环境控制室中。