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    PROCESS FOR PRODUCING HOLLOW SILICON BODIES
    1.
    发明申请
    PROCESS FOR PRODUCING HOLLOW SILICON BODIES 有权
    生产中空硅体的工艺

    公开(公告)号：US20160155871A1

    公开(公告)日：2016-06-02

    申请号：US14950787

    申请日：2015-11-24

    申请人： Juergen Erwin LANG ,  Hartwig RAULEDER ,  Julia LYUBINA ,  Janaina Pérez

    发明人： Juergen Erwin LANG ,  Hartwig RAULEDER ,  Julia LYUBINA ,  Janaina Pérez

    IPC分类号： H01L31/0352 ,  H01M4/38 ,  C01B33/029 ,  H01L31/028

    CPC分类号： H01L31/035281 ,  C01B33/027 ,  C01B33/029 ,  C01B33/03 ,  C01P2004/04 ,  C01P2004/34 ,  C01P2004/64 ,  H01L31/0284 ,  H01M4/386

    摘要： Hollow bodies having a silicon-comprising shell, are produced by, in a gas comprising at least one silane of the general formula SinH2n+2−mXm with n=1 to 4, m=0 to 2n+2 and X=halogen, (a) generating a non-thermal plasma by an AC voltage of frequency f, or operating a light arc, or introducing electromagnetic energy in the infrared region into the gas, giving a resulting phase which (b) is dispersed in a wetting agent and distilled, and then (c) the distillate is contacted at least once with a mixture of at least two of the substances hydrofluoric acid, nitric acid, water, giving a solid residue comprising hollow bodies having a silicon-comprising shell after the conversion reaction of the distillate with the mixture has abated or ended.

    摘要翻译： 具有含硅壳体的空心体通过包含至少一种通式SinH 2 + 2-m X m的硅烷，n = 1〜4，m = 0〜2n + 2，X =卤素的气体，（ a）通过频率f的交流电压产生非热等离子体，或者操作光弧，或者将红外区域的电磁能引入气体中，得到（b）分散在润湿剂中并蒸馏出的相 ，然后（c）馏出物与氢氟酸，硝酸，水中的至少两种物质的混合物至少接触一次，得到包含中空体的固体残余物，所述固体残余物在具有含硅壳体的转化反应之后 馏出物与混合物已经减少或结束。