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8 条记录 (耗时 0.019 秒)

    Method of fabricating semiconductor device with capacitor
    1.
    发明授权
    Method of fabricating semiconductor device with capacitor 失效
    制造具有电容器的半导体器件的方法

    公开(公告)号：US06709991B1

    公开(公告)日：2004-03-23

    申请号：US09084578

    申请日：1998-05-26

    申请人： Jun Kawahara ,  Shinobu Saito ,  Yukihiko Maejima ,  Yoshihiro Hayashi

    发明人： Jun Kawahara ,  Shinobu Saito ,  Yukihiko Maejima ,  Yoshihiro Hayashi

    IPC分类号： H01L21469

    CPC分类号： H01L28/57 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02216 ,  H01L21/02219 ,  H01L21/02271 ,  H01L21/31612 ,  H01L21/76801 ,  H01L21/76802

    摘要： A fabrication method of a semiconductor device with a capacitor is provided, which prevents leakage current from increasing and dielectric breakdown resistance from decreasing during a CVD or dry etching process for forming an insulating film to cover the capacitor. In this method, a lower electrode of a capacitor is formed on a first insulating film. The first insulating film is typically formed on or over a semiconductor substrate. A dielectric film of the capacitor is formed on the lower electrode to be overlapped therewith. An upper electrode of the capacitor is formed on the dielectric film to be overlapped therewith. A second insulating film is formed to cover the capacitor by a thermal CVD process in an atmosphere containing no plasma at a substrate temperature in which hydrogen is prevented from being activated due to heat. A source material of the second insulating film has a property that no hydrogen is generated in the atmosphere through decomposition of the source material during the thermal CVD process.

    摘要翻译： 提供了具有电容器的半导体器件的制造方法，其防止了在用于形成绝缘膜以覆盖电容器的CVD或干蚀刻工艺期间泄漏电流增加和绝缘击穿电阻降低。 在该方法中，在第一绝缘膜上形成电容器的下电极。 第一绝缘膜通常形成在半导体衬底上或上方。 电容器的电介质膜形成在下电极上以与其重叠。 电容器的上电极形成在电介质膜上以与其重叠。 形成第二绝缘膜，通过热CVD法在不防止由于热而被活化的基板温度下的不含等离子体的气氛中覆盖电容器。 第二绝缘膜的源材料具有通过在热CVD工艺期间源材料分解而在大气中不产生氢的性质。

    Semiconductor device with conductive plugs
    2.
    发明授权
    Semiconductor device with conductive plugs 失效
    带导电插头的半导体器件

    公开(公告)号：US6004839A

    公开(公告)日：1999-12-21

    申请号：US804112

    申请日：1997-02-20

    申请人： Yoshihiro Hayashi ,  Nobuhiro Tanabe ,  Tsuneo Takeuchi ,  Shinobu Saito

    发明人： Yoshihiro Hayashi ,  Nobuhiro Tanabe ,  Tsuneo Takeuchi ,  Shinobu Saito

    IPC分类号： H01L21/768 ,  H01L21/8242 ,  H01L21/8246 ,  H01L21/8238

    CPC分类号： H01L27/11502 ,  H01L21/768 ,  H01L27/10844 ,  H01L27/10852 ,  H01L27/11507

    摘要： In a method of manufacturing a semiconductor device, a CMOS section composed of an N-channel MOS transistor and a P-channel MOS transistor and a memory section composed of at least a transfer gate MOS transistor is formed on a substrate. A plurality of conductive plugs is formed to penetrate a laminate insulating film to the MOS transistors. The laminate insulating film is composed of a first insulating film and a second insulating film. A capacitor section is formed on the laminate insulating film and the capacitor section is composed of an upper electrode, a dielectric film and a lower electrode. A third insulating film is formed on the laminate insulating film and the capacitor section. A wiring pattern is formed on the third insulating film to partially penetrate the second insulating film connect to the plurality of conductive plugs. A wiring pattern may be disposed in the laminate insulating film to connect at least two of the plurality of conductive plugs.

    摘要翻译： 在制造半导体器件的方法中，在衬底上形成由N沟道MOS晶体管和P沟道MOS晶体管组成的CMOS部分和至少由传输门MOS晶体管组成的存储部分。 形成多个导电插塞以穿透层压绝缘膜到MOS晶体管。 层叠绝缘膜由第一绝缘膜和第二绝缘膜构成。 在层叠绝缘膜上形成电容器部，电容部由上部电极，电介质膜和下部电极构成。 在层压绝缘膜和电容器部分上形成第三绝缘膜。 在第三绝缘膜上形成布线图案，以部分地穿透连接到多个导电插塞的第二绝缘膜。 布线图案可以布置在层压绝缘膜中以连接多个导电插塞中的至少两个。

    Bearings for rotary machines
    4.
    发明授权
    Bearings for rotary machines 失效
    旋转机轴承

    公开(公告)号：US4668105A

    公开(公告)日：1987-05-26

    申请号：US826329

    申请日：1986-02-05

    申请人： Hiromu Furukawa ,  Yuji Masumoto ,  Shinobu Saito

    发明人： Hiromu Furukawa ,  Yuji Masumoto ,  Shinobu Saito

    IPC分类号： F16C27/00 ,  F01D25/16 ,  F02C7/06 ,  F16C27/04

    CPC分类号： F01D25/164 ,  F16C27/045 ,  F16C19/06

    摘要： A pin which acts as a spring directly extends through an outer race without use of an outer-race casing and a pin holder and the central portion of the pin supports the outer race. Axial movement of the pin beyond a predetermined range is restricted by snap rings fitted on the both ends of the pin. An oil film is formed between the outer peripheral surface of the outer race and the inner peripheral surface of casings and oil reservoirs are also defined to damp axial movement of the outer race. That is, the pin which acts as a spring directly extends through the outer race of the bearing in parallel with a rotating shaft and the central portion of the pin elastically supports the outer race. The ends of the pin are supported by the casings through the snap rings. A space in which an oil film functioning as an oil film damper is formed is defined by the outer peripheral surface of the outer race and the inner peripheral surface of the casings. Furthermore, the oil reservoirs which act to damp the axial movement of the outer race are defined by the end faces of the outer race and the casings.

    摘要翻译： 用作弹簧的销直接延伸穿过外圈而不使用外圈外壳和销保持器，并且销的中心部分支撑外圈。 销超过预定范围的轴向运动受到安装在销的两端的卡环限制。 在外圈的外周面和壳体的内周面之间形成油膜，并且油槽也被限定为阻止外圈的轴向移动。 也就是说，作为弹簧的销直接通过轴承的外圈平行于旋转轴延伸，并且销的中心部分弹性地支撑外圈。 销的端部通过卡环支撑在壳体上。 形成作为油膜阻尼器的油膜的空间由外圈的外周面和箱体的内周面形成。 此外，用于抑制外圈的轴向运动的储油器由外圈和外壳的端面限定。

    Connector for heavy current substrate
    5.
    发明授权
    Connector for heavy current substrate 失效
    大电流衬底连接器

    公开(公告)号：US5827094A

    公开(公告)日：1998-10-27

    申请号：US858495

    申请日：1997-05-19

    申请人： Eiichi Aizawa ,  Shinobu Saito

    发明人： Eiichi Aizawa ,  Shinobu Saito

    IPC分类号： H01R4/48 ,  H01R11/22 ,  H01R24/00 ,  H01R9/09

    CPC分类号： H01R24/66 ,  H01R11/22 ,  H01R24/20 ,  H01R12/7088 ,  H01R2101/00 ,  Y10S439/947

    摘要： A connector for a heavy current substrate in which a power source wire for passing the heavy current is connected to a substrate comprises a male terminal which is flexibly formed by a pair of side walls to be directly attached to the substrate and a base wall so that the section thereof may be generally U-shaped, a female terminal which is flexibly formed so as to be integrated with a pair of elastic side walls for holding the male terminal therebetween and a base wall in which a connecting portion to be connected to the power source wire is extended, and an insulating cover which is flexibly formed so as to be integrated with a pair of elastic side walls for covering and holding the female terminal therebetween and a base wall. The power source wire can be easily connected to the substrate. Furthermore, an outer surface of the side wall of the male terminal is in a surficial contact with an inner surface of the elastic side wall of the female terminal, so that a contact area of the terminals can be sufficiently ensured.

    摘要翻译： 用于使用于使重电流通过的电源线连接到基板的大电流基板的连接器包括由一对侧壁柔性地形成以直接附接到基板的阳端子和基壁，使得 其一部分可以是大致U形的，阴端子被柔性地形成为与一对弹性侧壁一体地保持在其间的阳端子和底壁，其中连接部分连接到电源 源极线延伸，以及绝缘盖，其被柔性地形成为与一对弹性侧壁成一体，用于覆盖和保持阴端子和底壁。 电源线可以容易地连接到基板。 此外，阳端子的侧壁的外表面与阴端子的弹性侧壁的内表面面接触，从而可以充分确保端子的接触面积。

    Squeeze film damper bearing
    7.
    发明授权
    Squeeze film damper bearing 失效
    挤压薄膜阻尼轴承

    公开(公告)号：US5988888A

    公开(公告)日：1999-11-23

    申请号：US89160

    申请日：1998-06-02

    申请人： Soichiro Une ,  Osamu Saito ,  Shinobu Saito ,  Masao Kobayashi

    发明人： Soichiro Une ,  Osamu Saito ,  Shinobu Saito ,  Masao Kobayashi

    IPC分类号： F16C27/02 ,  F16C27/04 ,  F16C32/06

    CPC分类号： F16C27/02 ,  F16C2360/24

    摘要： A squeeze film damper bearing comprises a bearing metal 2 for supporting a rotation shaft 1, a bearing casing 3 for covering the bearing metal 2 and a concentricity spring 4 between the bearing metal 2 and the bearing casing 3. The bearing casing 3 is provided at its inner periphery with a circumferential groove 3a for accommodating the spring. The spring 4 is made of an elongate steel sheet 4a and has a plurality of recesses 4b formed on a surface of the steel sheet 4a to provide a plurality of longitudinally aligned projections 4c on the other surface of the steel sheet. The steel sheet is bent into cylindrical shape. Each of the projections 4c has a curved surface with a generating line in parallel with the rotation shaft 1.

    摘要翻译： 挤压薄膜阻尼器轴承包括用于支撑旋转轴1的轴承金属2，用于覆盖轴承金属2的轴承壳体3和在轴承金属2和轴承壳体3之间的同心弹簧4.轴承壳体3设置在 其内周边具有容纳弹簧的圆周槽3a。 弹簧4由细长的钢板4a制成，并且在钢板4a的表面上形成有多个凹部4b，以在钢板的另一个表面上形成多个纵向排列的突出部4c。 钢板弯曲成圆柱形。 每个突起4c具有与旋转轴1平行的发生线的曲面。

    BEARING DAMPER ELEMENT, BEARING, AND GAS TURBINE ENGINE
    8.
    发明申请
    BEARING DAMPER ELEMENT, BEARING, AND GAS TURBINE ENGINE 审中-公开
    轴承阻尼器元件，轴承和气体涡轮发动机

    公开(公告)号：US20090263057A1

    公开(公告)日：2009-10-22

    申请号：US12064534

    申请日：2006-08-14

    申请人： Hiroshi Kanki ,  Shinobu Saito

    发明人： Hiroshi Kanki ,  Shinobu Saito

    IPC分类号： F16C27/00 ,  B21D53/10

    CPC分类号： F16F1/10 ,  B23H9/00 ,  F01D25/164 ,  F05D2230/13 ,  F16C17/02 ,  F16C19/06 ,  F16C27/02 ,  F16C27/045 ,  F16C33/64 ,  F16C35/077 ,  F16C2360/23 ,  F16F15/0237 ,  Y10T29/49647

    摘要： A damper element of the present invention is applied to a bearing damper element disposed between a rotating object and a supporting object. The damper element includes a slit that is formed between an inner surface and an outer surface of an annulus being supported by the supporting object, and a viscous fluid that is filled in the slit. The slit is extended substantially along a circumferential direction of the annulus. The annulus is, for example, an outer ring or an inner ring of a rolling element bearing, a plane bearing, or a collar that holds a bearing.

    摘要翻译： 本发明的阻尼元件适用于设置在旋转体与支撑体之间的轴承阻尼元件。 阻尼器元件包括形成在由支撑物体支撑的环的内表面和外表面之间的狭缝，以及填充在狭缝中的粘性流体。 狭缝基本上沿着环的圆周方向延伸。 环形圈例如是滚动元件轴承，平面轴承或保持轴承的轴环的外圈或内圈。