METHOD OF FABRICATING SEMICONDUCTOR DEVICE
    1.
    发明申请
    METHOD OF FABRICATING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号:US20110189851A1

    公开(公告)日:2011-08-04

    申请号:US13016228

    申请日:2011-01-28

    IPC分类号: H01L21/28

    CPC分类号: H01L21/28

    摘要: A method of fabricating a semiconductor device, the method including providing a substrate; forming an underlying layer on the substrate; forming a sacrificial layer on the underlying layer; forming an opening in the sacrificial layer by patterning the sacrificial layer such that the opening exposes a predetermined region of the underlying layer; forming a mask layer in the opening; forming an oxide mask by partially or completely oxidizing the mask layer; removing the sacrificial layer; and etching the underlying layer using the oxide mask as an etch mask to form an underlying layer pattern.

    摘要翻译: 一种制造半导体器件的方法,所述方法包括提供衬底; 在衬底上形成下层; 在下层上形成牺牲层; 通过图案化所述牺牲层在所述牺牲层中形成开口,使得所述开口暴露所述下层的预定区域; 在开口中形成掩模层; 通过部分或完全氧化掩模层形成氧化物掩模; 去除牺牲层; 并使用氧化物掩模作为蚀刻掩模蚀刻下层,以形成下层图案。

    Method of fabricating semiconductor device
    2.
    发明授权
    Method of fabricating semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08288289B2

    公开(公告)日:2012-10-16

    申请号:US13016228

    申请日:2011-01-28

    IPC分类号: H01L21/302

    CPC分类号: H01L21/28

    摘要: A method of fabricating a semiconductor device, the method including providing a substrate; forming an underlying layer on the substrate; forming a sacrificial layer on the underlying layer; forming an opening in the sacrificial layer by patterning the sacrificial layer such that the opening exposes a predetermined region of the underlying layer; forming a mask layer in the opening; forming an oxide mask by partially or completely oxidizing the mask layer; removing the sacrificial layer; and etching the underlying layer using the oxide mask as an etch mask to form an underlying layer pattern.

    摘要翻译: 一种制造半导体器件的方法,所述方法包括提供衬底; 在衬底上形成下层; 在下层上形成牺牲层; 通过图案化所述牺牲层在所述牺牲层中形成开口,使得所述开口暴露所述下层的预定区域; 在开口中形成掩模层; 通过部分或完全氧化掩模层形成氧化物掩模; 去除牺牲层; 并使用氧化物掩模作为蚀刻掩模蚀刻下层以形成下层图案。

    Magnetic device
    3.
    发明授权
    Magnetic device 有权
    磁性装置

    公开(公告)号:US08772887B2

    公开(公告)日:2014-07-08

    申请号:US13475520

    申请日:2012-05-18

    IPC分类号: H01L29/82 H01L43/00

    CPC分类号: H01L43/08

    摘要: A magnetic tunnel junction element is provided. The magnetic tunnel junction element has first magnetic layer and second magnetic layer formed adjacent, e.g., on lower and upper portions of an insulating layer, respectively and each having a perpendicular magnetic anisotropy, a magnetic field adjustment layer formed on the second magnetic layer and having a perpendicular magnetic anisotropy, and a bather layer formed between the magnetic field adjustment layer and the second magnetic layer. The second magnetic layer and the magnetic field adjustment layer are magnetically decoupled from each other.

    摘要翻译: 提供磁性隧道结元件。 磁性隧道结元件分别具有第一磁性层和第二磁性层,该第一磁性层和第二磁性层分别形成在例如绝缘层的下部和上部上并且各自具有垂直的磁各向异性,磁场调节层形成在第二磁性层上并具有 垂直磁各向异性,以及形成在磁场调整层和第二磁性层之间的沐浴层。 第二磁性层和磁场调节层彼此磁耦合。

    Methods of forming pattern structures
    6.
    发明授权
    Methods of forming pattern structures 有权
    形成图案结构的方法

    公开(公告)号:US08334148B2

    公开(公告)日:2012-12-18

    申请号:US13184127

    申请日:2011-07-15

    IPC分类号: H01L21/00

    CPC分类号: H01L27/228 H01L43/12

    摘要: An example embodiment relates to a method of forming a pattern structure, including forming an object layer on a substrate, and forming a hard mask on the object layer. A plasma reactive etching process is performed on the object layer using an etching gas including a fluorine containing gas and ammonia (NH3) gas together with oxygen gas to form a pattern. The oxygen gas is used for suppressing the removal of the hard mask during the etching process.

    摘要翻译: 示例性实施例涉及一种形成图案结构的方法,包括在基底上形成物体层,并在物体层上形成硬掩模。 使用包含含氟气体和氨(NH 3)气体的蚀刻气体与氧气一起在物体层上进行等离子体反应蚀刻工艺以形成图案。 氧气用于在蚀刻过程中抑制硬掩模的去除。

    Methods of forming pattern structures
    7.
    发明申请
    Methods of forming pattern structures 有权
    形成图案结构的方法

    公开(公告)号:US20110272380A1

    公开(公告)日:2011-11-10

    申请号:US13184127

    申请日:2011-07-15

    IPC分类号: B44C1/22

    CPC分类号: H01L27/228 H01L43/12

    摘要: An example embodiment relates to a method of forming a pattern structure, including forming an object layer on a substrate, and forming a hard mask on the object layer. A plasma reactive etching process is performed on the object layer using an etching gas including a fluorine containing gas and ammonia (NH3) gas together with oxygen gas to form a pattern. The oxygen gas is used for suppressing the removal of the hard mask during the etching process.

    摘要翻译: 示例性实施例涉及一种形成图案结构的方法,包括在基底上形成物体层,并在物体层上形成硬掩模。 使用包含含氟气体和氨(NH 3)气体的蚀刻气体与氧气一起在物体层上进行等离子体反应蚀刻工艺以形成图案。 氧气用于在蚀刻过程中抑制硬掩模的去除。

    Non-Volatile Memory Devices and Methods of Fabricating the Same
    9.
    发明申请
    Non-Volatile Memory Devices and Methods of Fabricating the Same 有权
    非易失性存储器件及其制造方法

    公开(公告)号:US20140264680A1

    公开(公告)日:2014-09-18

    申请号:US14195891

    申请日:2014-03-04

    IPC分类号: H01L27/22 H01L43/02

    摘要: A nonvolatile memory device is provided. The nonvolatile memory device comprises a plurality of impurity regions formed in a substrate, a first contact electrically connected to at least one of the impurity regions, a second contact electrically connected to at least one of the impurity regions, a first information storage portion formed at a first height from the substrate and electrically connected to the first contact, and a second information storage portion formed at a second height, which is different from the first height, from the substrate and electrically connected to the second contact.

    摘要翻译: 提供非易失性存储器件。 非易失性存储器件包括形成在衬底中的多个杂质区,与至少​​一个杂质区电连接的第一触点,与至少一个杂质区电连接的第二触点,形成在第一信息存储部 与基板电连接并与第一触点电连接的第一高度,以及形成在与第一高度不同的第二高度处的与第二触点电连接的第二信息存储部。

    Method and apparatus to automatically control power of address data for plasma display panel, and plasma display panel device including the apparatus
    10.
    发明申请
    Method and apparatus to automatically control power of address data for plasma display panel, and plasma display panel device including the apparatus 审中-公开
    用于自动控制等离子体显示面板的地址数据的功率的方法和装置,以及包括该装置的等离子体显示面板装置

    公开(公告)号:US20080284711A1

    公开(公告)日:2008-11-20

    申请号:US12153264

    申请日:2008-05-15

    IPC分类号: G09G3/36

    摘要: A method and apparatus for automatically controlling power of address data in a plasma display panel (PDP), and a PDP device including the apparatus are provided. In this method, first, a difference-sum of pixel value differences between adjacent pixels successively arranged along a column of block is calculated. Then, an address power control level corresponding to the calculated difference-sum for each block is determined. Thereafter, gain information for each block on the basis of the address power control level for each block is determined. Next, a gain for each block corresponding to the gain information for each block is output. Then, the input image signal is multiplied by the gain for each block to correct the input image signal to output the corrected image signal. Accordingly, power consumption, noise, and generation of heat are reduced, and also the brightness is improved.

    摘要翻译: 提供一种用于自动控制等离子体显示面板(PDP)中的地址数据的功率的方法和装置,以及包括该装置的PDP装置。 在该方法中,首先,计算沿着一列的连续排列的相邻像素之间的像素值差的差分和。 然后,确定与每个块的计算差分和相对应的地址功率控制电平。 此后,确定基于每个块的地址功率控制电平的每个块的增益信息。 接下来,输出与每个块的增益信息相对应的每个块的增益。 然后,输入图像信号乘以每个块的增益以校正输入图像信号以输出校正的图像信号。 因此,能量消耗,噪声和热量的产生减少,亮度提高。