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    Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same
    4.
    发明申请
    Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same 有权
    具有氧化缓冲层的磁隧道结结构及其制造方法

    公开(公告)号：US20050035386A1

    公开(公告)日：2005-02-17

    申请号：US10915872

    申请日：2004-08-10

    申请人： Young-Ki Ha ,  Jang-Eun Lee ,  Hyun-Jo Kim ,  Se-Chung Oh ,  Jun-Soo Bae ,  In-Gyu Baek

    发明人： Young-Ki Ha ,  Jang-Eun Lee ,  Hyun-Jo Kim ,  Se-Chung Oh ,  Jun-Soo Bae ,  In-Gyu Baek

    IPC分类号： G11C11/15 ,  H01L21/00 ,  H01L43/08 ,  H01L43/12

    CPC分类号： H01L43/12 ,  H01L43/08

    摘要： There are provided a magnetic tunnel junction structure and a method of fabricating the same. The magnetic tunnel junction structure includes a lower electrode, a lower magnetic layer pattern and a tunnel layer pattern, which are sequentially formed on the lower electrode. The magnetic tunnel junction structure further includes an upper magnetic layer pattern, a buffer layer pattern, and an upper electrode, which are sequentially formed on a portion of the tunnel layer pattern. The sidewall of the upper magnetic layer pattern is surrounded by an oxidized upper magnetic layer, and the sidewall of the buffer layer pattern is surrounded by an oxidized buffer layer. The depletion of the upper magnetic layer pattern and the lower magnetic layer pattern in the magnetic tunnel junction region can be prevented by the oxidized buffer layer.

    摘要翻译： 提供了一种磁性隧道结结构及其制造方法。 磁性隧道结结构包括依次形成在下电极上的下电极，下磁层图案和隧道层图案。 磁隧道结结构还包括依次形成在隧道层图案的一部分上的上磁层图案，缓冲层图案和上电极。 上部磁性层图案的侧壁由氧化的上部磁性层包围，缓冲层图案的侧壁由氧化的缓冲层包围。 可以通过氧化缓冲层来防止磁性隧道结区域中上部磁性层图案和下部磁性层图案的消耗。

    Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same
    7.
    发明授权
    Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same 有权
    具有氧化缓冲层的磁隧道结结构及其制造方法

    公开(公告)号：US07141438B2

    公开(公告)日：2006-11-28

    申请号：US10915872

    申请日：2004-08-10

    申请人： Young-Ki Ha ,  Jang-Eun Lee ,  Hyun-Jo Kim ,  Se-Chung Oh ,  Jun-Soo Bae ,  In-Gyu Baek

    发明人： Young-Ki Ha ,  Jang-Eun Lee ,  Hyun-Jo Kim ,  Se-Chung Oh ,  Jun-Soo Bae ,  In-Gyu Baek

    IPC分类号： H01L21/00

    CPC分类号： H01L43/12 ,  H01L43/08

    摘要： There are provided a magnetic tunnel junction structure and a method of fabricating the same. The magnetic tunnel junction structure includes a lower electrode, a lower magnetic layer pattern and a tunnel layer pattern, which are sequentially formed on the lower electrode. The magnetic tunnel junction structure further includes an upper magnetic layer pattern, a buffer layer pattern, and an upper electrode, which are sequentially formed on a portion of the tunnel layer pattern. The sidewall of the upper magnetic layer pattern is surrounded by an oxidized upper magnetic layer, and the sidewall of the buffer layer pattern is surrounded by an oxidized buffer layer. The depletion of the upper magnetic layer pattern and the lower magnetic layer pattern in the magnetic tunnel junction region can be prevented by the oxidized buffer layer.

    摘要翻译： 提供了一种磁性隧道结结构及其制造方法。 磁性隧道结结构包括依次形成在下电极上的下电极，下磁层图案和隧道层图案。 磁隧道结结构还包括依次形成在隧道层图案的一部分上的上磁层图案，缓冲层图案和上电极。 上部磁性层图案的侧壁由氧化的上部磁性层包围，缓冲层图案的侧壁由氧化的缓冲层包围。 可以通过氧化缓冲层来防止磁性隧道结区域中上部磁性层图案和下部磁性层图案的消耗。

    Method of writing to MRAM devices
    9.
    发明申请
    Method of writing to MRAM devices 有权
    写入MRAM设备的方法

    公开(公告)号：US20060039190A1

    公开(公告)日：2006-02-23

    申请号：US11097495

    申请日：2005-04-01

    申请人： Hyun-Jo Kim ,  Jang-Eun Lee ,  Se-Chung Oh ,  Jun-Soo Bae ,  Young-Ki Ha ,  Kyung-Tae Nam

    发明人： Hyun-Jo Kim ,  Jang-Eun Lee ,  Se-Chung Oh ,  Jun-Soo Bae ,  Young-Ki Ha ,  Kyung-Tae Nam

    IPC分类号： G11C11/00

    CPC分类号： G11C11/16

    摘要： A method of writing to magnetic random access memory (MRAM) devices is provided. The method includes preparing a digit line disposed on a semiconductor substrate, a bit line crossing over the digit line, and a magnetic tunnel junction (MTJ) interposed between the digit line and the bit line. The MTJ has a pinned layer, a tunneling insulating layer, and a synthetic anti-ferromagnetic (SAF) free layer which are sequentially stacked. In addition, the SAF free layer has a bottom free layer and a top free layer which are separated by an exchange spacer layer. An initial magnetization state of the MTJ is read and compared with a desired magnetization state. When the initial magnetization state is different from the desired magnetization state, a first write line pulse is applied to one of the digit line and the bit line, and a second write line pulse is applied to the other of the digit line and the bit line, thereby changing the magnetization state of the MTJ. The MTJ may be disposed at an angle equal to or greater than 0° and less than 90° to a line to which the second write line pulse is applied.

    摘要翻译： 提供了一种写入磁性随机存取存储器（MRAM）器件的方法。 该方法包括准备设置在半导体衬底上的数字线，与数字线交叉的位线以及置于数字线和位线之间的磁性隧道结（MTJ）。 MTJ具有钉扎层，隧道绝缘层和顺序层叠的合成反铁磁（SAF）层。 此外，SAF自由层具有由交换间隔层隔开的无底层和顶部自由层。 读取MTJ的初始磁化状态并与期望的磁化状态进行比较。 当初始磁化状态不同于期望的磁化状态时，第一写入线脉冲被施加到数字线和位线之一，并且第二写入线脉冲被施加到数字线和位线中的另一个 ，从而改变MTJ的磁化状态。 MTJ可以以与第二写入线脉冲施加的线等于或大于0°且小于90°的角度布置。