Amorphous carbon film forming method and device
    4.
    发明授权
    Amorphous carbon film forming method and device 有权
    无定形碳膜成膜方法及装置

    公开(公告)号:US07803433B2

    公开(公告)日:2010-09-28

    申请号:US10544674

    申请日:2004-02-12

    摘要: An amorphous carbon film forming apparatus according to the present invention is characterized by being provided with a film forming furnace 11; plural workpiece fixtures 23 for supporting plural plate-like workpieces 22 in a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpieces 22 being in a range of 2 to 30 millimeters, the plural workpiece fixtures 23 being arranged within the film forming furnace 11 at a regular angular interval on a circle and being connected to a negative electrode; nozzles 31, 32 provided for supplying a processing gas and including at least one nozzle arranged at a center of the circle on which the plural workpiece fixtures 23 are arranged and plural nozzles arranged at a regular angular interval on another circle which surrounds the workpieces fixtures 23 radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures 23. By controlling the supply gas pressure to be in a range of 13 to 1,330 Pa and a sheath width to be made in a range of 2 to 30 mm, the discharge is kept stably. As a consequence, it can be realized to form amorphous carbon films efficiently at a low cost.

    摘要翻译: 根据本发明的无定形碳膜形成装置的特征在于设置有成膜炉11; 多个用于支撑多个板状工件22的工件夹具23处于2至30毫米的范围内的状态下,垂直于两个垂直相邻的板状工件22的相对表面之间的间隔垂直堆叠。 多个工件固定件23以规定的角度间隔布置在成膜炉11内并连接到负极; 用于供给处理气体的喷嘴31,32,并且包括布置在其上布置有多个工件固定件23的圆的中心处的至少一个喷嘴和在围绕工件固定件23的另一个圆周上以规则的角度间隔布置的多个喷嘴 径向地在其外面; 以及与至少工件夹具23连接的等离子体电源。通过将供给气体压力控制在13〜1330Pa的范围内,将鞘宽度设定在2〜30mm的范围内,进行放电 稳定地 因此,可以实现以低成本有效地形成无定形碳膜。

    Amorphous Carbon Film Forming Method and Device
    5.
    发明申请
    Amorphous Carbon Film Forming Method and Device 有权
    无定形碳膜成型方法及装置

    公开(公告)号:US20080317976A1

    公开(公告)日:2008-12-25

    申请号:US10544674

    申请日:2004-02-12

    IPC分类号: C23C16/26 C23C16/513

    摘要: An amorphous carbon film forming apparatus according to the present invention is characterized by being provided with a film forming furnace 11; plural workpiece fixtures 23 for supporting plural plate-like workpieces 22 in a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpieces 22 being in a range of 2 to 30 millimeters, the plural workpiece fixtures 23 being arranged within the film forming furnace 11 at a regular angular interval on a circle and being connected to a negative electrode; nozzles 31, 32 provided for supplying a processing gas and including at least one nozzle arranged at a center of the circle on which the plural workpiece fixtures 23 are arranged and plural nozzles arranged at a regular angular interval on another circle which surrounds the workpieces fixtures 23 radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures 23. By controlling the supply gas pressure to be in a range of 13 to 1,330 Pa and a sheath width to be made in a range of 2 to 30 mm, the discharge is kept stably. As a consequence, it can be realized to form amorphous carbon films efficiently at a low cost.

    摘要翻译: 根据本发明的无定形碳膜形成装置的特征在于设置有成膜炉11; 多个用于支撑多个板状工件22的工件夹具23处于2至30毫米的范围内的状态下,垂直于两个垂直相邻的板状工件22的相对表面之间的间隔垂直堆叠。 多个工件固定件23以规定的角度间隔布置在成膜炉11内并连接到负极; 用于供给处理气体的喷嘴31,32,并且包括布置在其上布置有多个工件固定件23的圆的中心处的至少一个喷嘴和在围绕工件固定件23的另一个圆周上以规则的角度间隔布置的多个喷嘴 径向地在其外面; 以及与至少工件夹具23连接的等离子体电源。通过将供给气体压力控制在13〜1330Pa的范围内,将鞘宽度设定在2〜30mm的范围内,进行放电 稳定地 因此,可以实现以低成本有效地形成无定形碳膜。

    Drive power transmission device
    7.
    发明授权
    Drive power transmission device 有权
    驱动传动装置

    公开(公告)号:US07004297B2

    公开(公告)日:2006-02-28

    申请号:US10649730

    申请日:2003-08-28

    IPC分类号: F16D13/04

    摘要: A drive power transmission device is disclosed having a drive mechanism for transmitting a drive power between first and second rotary members rotatable relative to each other, by the operation of an electromagnetic type clutch mechanism which brings a friction clutch into connection. A magnetic path generated around an electromagnet of the electromagnetic type clutch mechanism includes a clutch magnetic path in which a magnetic flux passes to reciprocate plural times across th friction clutch, and diamond-like carbon surface treatment is given on a part or all of the friction contact surfaces of the friction clutch to form a hard amorphous carbon film thereon. Thus, the transmission device can be constructed using a smaller number of the outer and inner plates for the electromagnetic type clutch mechanism, so that it can take a small construction with a longer durability life.

    摘要翻译: 公开了一种驱动动力传递装置,其具有用于通过使摩擦离合器连接的电磁式离合器机构的操作来传递在相对于彼此可旋转的第一和第二旋转构件之间的驱动力的驱动机构。 在电磁型离合器机构的电磁体周围产生的磁路包括离合器磁路,其中磁通量在摩擦离合器之间往复运动多次,并且在部分或全部摩擦上给出类金刚石碳表面处理 摩擦离合器的接触表面以在其上形成硬的无定形碳膜。 因此,可以使用较少数量的用于电磁式离合器机构的外板和内板来构造变速器装置,从而可以采用具有较长耐用寿命的小结构。

    Clutch plate, friction clutch, and coupling device
    9.
    发明授权
    Clutch plate, friction clutch, and coupling device 有权
    离合器板,摩擦离合器和联轴器

    公开(公告)号:US06920968B2

    公开(公告)日:2005-07-26

    申请号:US10290146

    申请日:2002-11-08

    摘要: A friction clutch has a plurality of iron inner clutch plates and a plurality of iron outer clutch plates. Both the clutch plates have sliding surfaces which are friction-engaged each other. A thin carbon film in a diamond form, which functions as a solid lubricant, is formed on each of the sliding surfaces of the outer clutch plates by a known method such as the Chemical Vapor Deposition method. A known nitride treatment or quenching and tempering treatment is applied to the sliding surfaces of the inner clutch plates. A coupling device has a pilot clutch mechanism with the friction clutch and an electromagnetic actuator. As a result, the friction clutch is resistant to wear and the coupling device is excellent in durability.

    摘要翻译: 摩擦离合器具有多个铁内离合器片和多个铁外离合器片。 两个离合器片都具有彼此摩擦接合的滑动表面。 通过已知的方法如化学气相沉积方法,在外离合器板的每个滑动表面上形成用作固体润滑剂的金刚石形式的薄碳膜。 将已知的氮化物处理或淬火回火处理应用于内部离合器板的滑动表面。 联接装置具有带有摩擦离合器和电磁致动器的先导离合器机构。 结果,摩擦离合器耐磨损,并且连接装置的耐久性优异。