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公开(公告)号：US11189794B2
公开(公告)日：2021-11-30
申请号：US16883597
申请日：2020-05-26
发明人： In Soo Kim , Young Hwan Kim , Kwan Il Lee , Chun Keun Kim , Byung Hyun Nam , Hye Jun Kim
摘要： A method of manufacturing a perovskite multilayered structure includes providing a substrate, forming a first perovskite layer on the substrate, forming a second perovskite layer by a reaction between the halogen compounds and at least one of the metal halides, the metal oxides, or the metal sulfides.
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公开(公告)号：US10700278B2
公开(公告)日：2020-06-30
申请号：US16201295
申请日：2018-11-27
发明人： Young Min Jhon , Yong Tae Kim , Chun Keun Kim , Young-Hwan Kim , Minho Choi , Sehyun Kwon
摘要： The present invention provides a chalcogenide phase-change material represented by the following Chemical Formula 1, and a memory device including the same. Ma(AxSbyTe(1-x-y))b [Chemical Formula 1] In Chemical Formula 1, M denotes an element having a doping formation energy ΔEf in a range of −3 eV/atom to 0.5 eV/atom, A denotes indium (In) or germanium (Ge), a and b are each positive numbers and selected to satisfy a+b=1, x ranges from 0.15 to 0.3, and y ranges from 0.05 to 0.25.
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公开(公告)号：US10964550B2
公开(公告)日：2021-03-30
申请号：US16270594
申请日：2019-02-08
发明人： Gumin Kang , Il Ki Han , S. Joon Kwon , Young-Hwan Kim , Hyungduk Ko , Chun Keun Kim
IPC分类号： H01L21/321 , H01L21/66 , H01L21/3105 , H01L21/306
摘要： A method for surface planarization of an object using a light source of a specific wavelength according to an embodiment includes: providing an object in a main chamber; injecting an etching gas into the main chamber; inputting the light source of a specific wavelength onto a surface of the object; and controlling a temperature of the object. According to the method, it is possible to minimize the side effects such as scratches or contamination of the sample that occur in a conventional chemical-mechanical planarization process. In addition, it is possible to allow precise planarization in nanometers (nm) and simultaneously perform planarization to a side surface of a device as well as a large-sized surface, thereby reducing cost and time required for the planarization process. Moreover, since the surface roughness and the electrical conductivity are improved, it is possible to increase the efficiency and output of the LED device.
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公开(公告)号：US20210091309A1
公开(公告)日：2021-03-25
申请号：US16883597
申请日：2020-05-26
发明人： In Soo Kim , Young Hwan Kim , Kwan II Lee , Chun Keun Kim , Byung Hyun Nam , Hye Jun Kim
摘要： A method of manufacturing a perovskite multilayered structure includes providing a substrate, forming a first perovskite layer on the substrate, forming a second perovskite layer by a reaction between the halogen compounds and at least one of the metal halides, the metal oxides, or the metal sulfides.
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