Method of manufacturing pram using laser interference lithography
    1.
    发明授权
    Method of manufacturing pram using laser interference lithography 有权
    使用激光干涉光刻制造婴儿车的方法

    公开(公告)号:US08652876B2

    公开(公告)日:2014-02-18

    申请号:US13672943

    申请日:2012-11-09

    Abstract: A method of manufacturing a phase-change random access memory includes: sequentially depositing an insulating layer, a first electrode layer, a phase change material layer, and a transfer material layer on a substrate; forming an array pattern in the transfer material layer using a laser interference lithography process; forming a metal layer on the transfer material layer having the array pattern formed; forming a second electrode layer by removing the transfer material layer; and forming a phase change layer by etching the phase change material layer using the second electrode layer as a mask. Accordingly, the manufacturing process of the phase-change random access memory may achieve an increase in speed and may be simplified.

    Abstract translation: 制造相变随机存取存储器的方法包括:在衬底上依次沉积绝缘层,第一电极层,相变材料层和转移材料层; 使用激光干涉光刻工艺在转印材料层中形成阵列图案; 在形成有阵列图案的转印材料层上形成金属层; 通过去除转移材料层形成第二电极层; 以及通过使用第二电极层作为掩模蚀刻相变材料层来形成相变层。 因此,相变随机存取存储器的制造过程可以实现速度的提高并且可以被简化。

    Concentration-ratio controllable system in the solar simulator for the concentrate type solar cells
    4.
    发明授权
    Concentration-ratio controllable system in the solar simulator for the concentrate type solar cells 有权
    浓缩型太阳能电池太阳能模拟器中的浓度比可控系统

    公开(公告)号:US08941931B2

    公开(公告)日:2015-01-27

    申请号:US13687098

    申请日:2012-11-28

    Abstract: Provided is a concentration ratio controlling apparatus for concentration type solar cells. The concentration ratio controlling apparatus may include a first condensing unit to primarily concentrate quantity of light that is irradiated from a light source; a second condensing unit disposed between a lower portion of the first condensing unit and a solar cell to secondarily concentrate the quantity of light that has passed through the first condensing unit and thereby irradiate the secondarily concentrated light toward the solar cell; an adjustment unit disposed in an optical path between the light source and the first condensing unit to adjust a concentration area of the first condensing unit based on an external force, and thereby adjust the quantity of light that is concentrated by the first condensing unit; and a control unit to analyze an input signal and thereby supply a corresponding drive control signal to the adjustment unit.

    Abstract translation: 提供了一种用于浓缩型太阳能电池的浓度比控制装置。 浓缩比控制装置可以包括:第一聚光单元,用于主要集中从光源照射的光量; 第二聚光单元,设置在第一聚光单元的下部和太阳能电池之间,以二次浓缩已经通过第一聚光单元的光量,从而将二次浓缩的光照射到太阳能电池; 调整单元,设置在光源和第一聚光单元之间的光路中,以基于外力调节第一聚光单元的浓度区域,从而调节由第一冷凝单元聚集的光量; 以及控制单元,用于分析输入信号,从而将相应的驱动控制信号提供给调节单元。

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