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    Apparatus and method for extreme ultraviolet spectrometer calibration
    1.
    发明授权
    Apparatus and method for extreme ultraviolet spectrometer calibration 有权
    用于极紫外光谱仪校准的仪器和方法

    公开(公告)号：US09188485B1

    公开(公告)日：2015-11-17

    申请号：US14490948

    申请日：2014-09-19

    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Sun Ho Kim ,  Yong Soo Kim ,  Jae Hun Kim ,  Min-Chul Park ,  Young Tae Byun ,  Min Ah Seo ,  Joon Mo Ahn ,  Deok Ha Woo ,  Seok Lee ,  Taik Jin Lee ,  Young Min Jhon

    IPC: G01D18/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28

    CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/282

    Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

    Abstract translation: 本文公开了用于极紫外（EUV）分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块，Al滤光片，衍射光栅，CCD照相机，光谱转换模块和控制模块，该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序，从频谱转换模块转换成具有预定参考波长值的EUV光的顺序，以计算具有最接近参考波长值的差值，并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此，可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

    Plasmonic all-optical switch and light control method using the same
    2.
    发明授权
    Plasmonic all-optical switch and light control method using the same 有权
    等离子全光开关和光控制方法使用相同

    公开(公告)号：US09261714B2

    公开(公告)日：2016-02-16

    申请号：US14533297

    申请日：2014-11-05

    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Sun Ho Kim ,  Jae Hun Kim ,  Chulki Kim ,  Kyungsun Moon ,  Min Ah Seo ,  Deok Ha Woo ,  Seok Lee ,  Jong Chang Yi ,  Taikjin Lee ,  Youngchul Chung

    IPC: G02F1/03 ,  G02F1/01 ,  G02B5/00 ,  G02F1/00 ,  B82Y20/00

    CPC classification number: G02F1/0126 ,  B82Y20/00 ,  G02B5/008 ,  G02F2203/10 ,  Y10S977/834

    Abstract: A plasmonic all-optical switch includes a graphene layer, a first dielectric layer located on the graphene layer, a nano-antenna located on the first dielectric layer, and a second dielectric layer located on the nano-antenna. An incident beam is propagated by means of a surface plasmon wave generated at an interface between the graphene layer and the first dielectric layer. Further, localized surface plasmon resonance is selectively generated at an interface between the nano-antenna and the second dielectric layer by means of a pump beam incident to the nano-antenna to decrease an intensity of the incident beam. The plasmonic all-optical switch may operate at an ultrahigh speed just with a small light energy without any electric method, greatly reduce power consumption of an IT device by applying to an all-optical transistor or the like, and increase a processing rate.

    Abstract translation: 等离子体全光开关包括石墨烯层，位于石墨烯层上的第一电介质层，位于第一电介质层上的纳米天线和位于纳米天线上的第二电介质层。 入射光束通过在石墨烯层和第一介电层之间的界面处产生的表面等离子体波传播。 此外，通过入射到纳米天线的泵浦光束在纳米天线和第二介电层之间的界面选择性地产生局部表面等离子体共振，以降低入射光束的强度。 等离子体全光开关可以在没有任何电气方式的情况下以超轻的光能运行，通过施加到全光晶体管等来大大降低IT设备的功耗，并且提高处理速率。

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