公开(公告)号：US09793677B1

公开(公告)日：2017-10-17

申请号：US15378632

申请日：2016-12-14

Applicant: Korea Institute of Science and Technology

Inventor： Young Min Jhon ,  Joon Mo Ahn ,  Min Ah Seo ,  Chul Ki Kim ,  Jae Hun Kim ,  Taik Jin Lee ,  Jae Bin Choi ,  Deok Ha Woo

IPC: H01S3/10 ,  H01S3/11 ,  H01S3/106 ,  H01S3/13 ,  H01S3/117 ,  H01S3/115 ,  H01S3/127 ,  H01S3/102 ,  H01S3/094 ,  H01S3/107

CPC classification number: H01S3/10046 ,  H01S3/08027 ,  H01S3/08054 ,  H01S3/094076 ,  H01S3/1024 ,  H01S3/1062 ,  H01S3/1068 ,  H01S3/1075 ,  H01S3/1103 ,  H01S3/1106 ,  H01S3/1109 ,  H01S3/115 ,  H01S3/117 ,  H01S3/127 ,  H01S3/1305 ,  H01S3/1306 ,  H01S2301/02

Abstract: Disclosed herein is a single pulse laser apparatus that includes: a resonator having a first mirror, a second mirror, a gain medium, an electro-optic modulator (EOM) configured to perform single pulse switching, and an acousto-optic modulator (AOM) configured to perform mode-locking; a photodiode configured to measure a laser beam oscillated in the resonator; a synchronizer configured to convert an electrical signal, which is generated by measuring the laser beam, into a transistor-transistor logic (TTL) signal; a delay unit configured to set a delay time for the TTL signal to synchronize the EOM and the AOM and output a trigger TTL signal according to the delay time; an AOM driver configured to input the trigger TTL signal to the AOM that performs mode-locking and drive the AOM; and an EOM driver configured to input the trigger TTL signal to the EOM that performs single pulse switching and drive the EOM.

公开(公告)号：US09188485B1

公开(公告)日：2015-11-17

申请号：US14490948

申请日：2014-09-19

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sun Ho Kim ,  Yong Soo Kim ,  Jae Hun Kim ,  Min-Chul Park ,  Young Tae Byun ,  Min Ah Seo ,  Joon Mo Ahn ,  Deok Ha Woo ,  Seok Lee ,  Taik Jin Lee ,  Young Min Jhon

IPC: G01D18/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/282

Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

Abstract translation: 本文公开了用于极紫外（EUV）分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块，Al滤光片，衍射光栅，CCD照相机，光谱转换模块和控制模块，该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序，从频谱转换模块转换成具有预定参考波长值的EUV光的顺序，以计算具有最接近参考波长值的差值，并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此，可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

公开(公告)号：US09825421B2

公开(公告)日：2017-11-21

申请号：US15165568

申请日：2016-05-26

Applicant: Korea Institute of Science and Technology

Inventor： Young Min Jhon ,  Joon Mo Ahn ,  Seok Lee ,  Jae Hun Kim ,  Min Ah Seo ,  Chul Ki Kim ,  Taik Jin Lee ,  Deok Ha Woo ,  Min Chul Park

IPC: H01S3/115 ,  H01S3/11 ,  H01S3/13 ,  H01S3/127

CPC classification number: H01S3/1109 ,  H01S3/115 ,  H01S3/127 ,  H01S3/1305

Abstract: Provided is a single pulse laser apparatus. The apparatus including a resonator having a first mirror, a second mirror, a gain medium, and electro-optic modulators (EOMs) which perform each mode-locking and Q-switching, the apparatus includes a photodiode which measures laser light that oscillates from the resonator, a synchronizer which converts an electrical signal generated by measuring the laser light into a transistor-transistor logic (TTL) signal, a delay unit which sets a latency determined in order to synchronize a mode-locked pulse with a Q-switched pulse to the TTL signal, and outputs a trigger TTL signal according to the latency, and a Q-driver which inputs the trigger TTL signal to the EOM which performs Q-switching, and causes the EOM to operates.

公开(公告)号：US09844125B2

公开(公告)日：2017-12-12

申请号：US14979729

申请日：2015-12-28

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min Jhon ,  Yong Soo Kim ,  Joon Mo Ahn ,  Min Ah Seo ,  Jae Hun Kim ,  Min Chul Park ,  Young Tae Byun ,  Chul Ki Kim ,  Seok Lee ,  Deok Ha Woo

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/008

Abstract: Provided is an extreme ultra-violet (EUV) beam generation apparatus using multi-gas cell modules in which a gas is prevented from directly flowing into a vacuum chamber by adding an auxiliary gas cell serving as a buffer chamber to a main gas cell, a diffusion rate of the gas is decreased, a high vacuum state is maintained, and a higher power EUV beam is continuously generated.

公开(公告)号：US09124067B2

公开(公告)日：2015-09-01

申请号：US14448227

申请日：2014-07-31

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min Jhon ,  Joon Mo Ahn ,  Jae Hun Kim ,  Seok Lee ,  Min Chul Park ,  Deok Ha Woo ,  Young Tae Byun ,  Taik Jin Lee ,  Sun Ho Kim

IPC: H01S3/11 ,  H01S3/117 ,  H01S3/106

CPC classification number: H01S3/117 ,  H01S3/08027 ,  H01S3/1062 ,  H01S3/1068 ,  H01S3/11 ,  H01S3/1103 ,  H01S3/1106 ,  H01S3/1109 ,  H01S3/1112 ,  H01S3/1623

Abstract: Provided is a pulse laser apparatus for generating laser light. The apparatus includes a first mirror and a second mirror which are disposed at both ends of a resonator and configured to reflect the laser light, a gain medium disposed between the first and second mirrors and configured to amplify and output light incident from an outside, an etalon configured to adjust a pulse width of the laser light, and an acousto-optic modulator disposed between the first and second mirrors and configured to form a mode-locked and Q-switched signal from the laser light, in which some of the laser light is output through either the first or second mirror to outside the resonator.

Abstract translation: 提供了一种用于产生激光的脉冲激光装置。 该装置包括：第一反射镜和第二反射镜，其设置在谐振器的两端并被配置为反射激光;增益介质，设置在第一和第二反射镜之间并且被配置为放大并输出从外部入射的光， 标准准则被配置为调整激光的脉冲宽度，以及声光调制器，其布置在第一和第二反射镜之间并被配置为从激光形成锁模和Q开关信号，其中一些激光 通过第一或第二反射镜输出到谐振器外部。