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公开(公告)号：US07791124B2
公开(公告)日：2010-09-07
申请号：US12124186
申请日：2008-05-21
申请人： Kangguo Cheng , Herbert L. Ho , Paul C. Parries , Geng Wang
发明人： Kangguo Cheng , Herbert L. Ho , Paul C. Parries , Geng Wang
IPC分类号： H01L27/108
CPC分类号： H01L29/945 , H01L21/84 , H01L27/1087 , H01L27/1203 , H01L29/66181
摘要： A bottle shaped trench for an SOI capacitor is formed by a simple processing sequence. A non-conformal dielectric layer with an optional conformal dielectric diffusion barrier layer underneath is formed on sidewalls of a deep trench. Employing an isotropic etch, the non-conformal dielectric layer is removed from a bottom portion of the deep trench, leaving a dielectric spacer covering sidewalls of the buried insulator layer and the top semiconductor layer. The bottom portion of the deep trench is expanded to form a bottle shaped trench, and a buried plated is formed underneath the buried insulator layer. The dielectric spacer may be recessed during formation of a buried strap to form a graded thickness dielectric collar around the upper portion of an inner electrode. Alternately, the dielectric spacer may be removed prior to formation of a buried strap.
摘要翻译： 用于SOI电容器的瓶形沟槽通过简单的处理顺序形成。 在深沟槽的侧壁上形成具有可选的适形电介质扩散阻挡层的非保形介电层。 采用各向同性蚀刻，从深沟槽的底部去除非共形电介质层，留下覆盖掩埋绝缘体层和顶部半导体层的侧壁的电介质间隔物。 深沟槽的底部被膨胀以形成瓶形沟槽，并且在掩埋绝缘体层的下方形成埋入的电镀层。 在形成掩埋带的过程中，电介质间隔物可以是凹陷的，以形成围绕内电极的上部的分级厚度的介质环。 或者，可以在形成掩埋带之前去除电介质间隔物。
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公开(公告)号：US20090289291A1
公开(公告)日：2009-11-26
申请号：US12124186
申请日：2008-05-21
申请人： Kangguo Cheng , Herbert L. Ho , Paul C. Parries , Geng Wang
发明人： Kangguo Cheng , Herbert L. Ho , Paul C. Parries , Geng Wang
CPC分类号： H01L29/945 , H01L21/84 , H01L27/1087 , H01L27/1203 , H01L29/66181
摘要： A bottle shaped trench for an SOI capacitor is formed by a simple processing sequence. A non-conformal dielectric layer with an optional conformal dielectric diffusion barrier layer underneath is formed on sidewalls of a deep trench. Employing an isotropic etch, the non-conformal dielectric layer is removed from a bottom portion of the deep trench, leaving a dielectric spacer covering sidewalls of the buried insulator layer and the top semiconductor layer. The bottom portion of the deep trench is expanded to form a bottle shaped trench, and a buried plated is formed underneath the buried insulator layer. The dielectric spacer may be recessed during formation of a buried strap to form a graded thickness dielectric collar around the upper portion of an inner electrode. Alternately, the dielectric spacer may be removed prior to formation of a buried strap.
摘要翻译： 用于SOI电容器的瓶形沟槽通过简单的处理顺序形成。 在深沟槽的侧壁上形成具有可选的适形电介质扩散阻挡层的非保形介电层。 采用各向同性蚀刻，从深沟槽的底部去除非共形电介质层，留下覆盖掩埋绝缘体层和顶部半导体层的侧壁的电介质间隔物。 深沟槽的底部被膨胀以形成瓶形沟槽，并且在掩埋绝缘体层的下方形成埋入的电镀层。 在形成掩埋带的过程中，电介质间隔物可以是凹陷的，以形成围绕内电极的上部的分级厚度的介质环。 或者，可以在形成掩埋带之前去除电介质间隔物。
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3.发明授权Deep trench capacitor in a SOI substrate having a laterally protruding buried strap 有权SOI衬底中的深沟槽电容器具有横向突出的埋入带公开(公告)号：US08198169B2
公开(公告)日：2012-06-12
申请号：US12974451
申请日：2010-12-21
IPC分类号： H01L21/425
CPC分类号： H01L29/66181 , H01L21/84 , H01L27/1087
摘要： A deep trench is formed to a depth midway into a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A top semiconductor layer is laterally recessed by an isotropic etch that is selective to the buried insulator layer. The deep trench is then etched below a bottom surface of the buried insulator layer. Ion implantation is performed at an angle into the deep trench to dope the sidewalls of the deep trench beneath the buried insulator layer, while the laterally recessed sidewalls of the top semiconductor layer are not implanted with dopant ions. A node dielectric and trench fill materials are deposited into the deep trench. A buried strap has an upper buried strap sidewall that is offset from a lower buried strap sidewall and a deep trench sidewall.
摘要翻译： 深沟槽形成在绝缘体上半导体（SOI）衬底的埋入绝缘体层的中间的深度处。 顶部半导体层通过对掩埋绝缘体层有选择性的各向同性蚀刻而横向凹陷。 然后将深沟槽蚀刻在掩埋绝缘体层的底表面下方。 离子注入以一定角度进入深沟槽以掺杂隐埋绝缘体层下面的深沟槽的侧壁，而顶部半导体层的侧向凹入的侧壁不注入掺杂离子。 节点电介质和沟槽填充材料沉积到深沟槽中。 掩埋带具有从下埋置带侧壁和深沟槽侧壁偏移的上掩埋带侧壁。
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公开(公告)号：US07705386B2
公开(公告)日：2010-04-27
申请号：US11969989
申请日：2008-01-07
IPC分类号： H01L27/108 , H01L21/8244
CPC分类号： H01L27/1087 , H01L27/10891
摘要： A memory cell has an access transistor and a capacitor with an electrode disposed within a deep trench. STI oxide covers at least a portion of the electrode, and a liner covers a remaining portion of the electrode. The liner may be a layer of nitride over a layer of oxide. Some of the STI may cover a portion of the liner. In a memory array a pass wordline may be isolated from the electrode by the STI oxide and the liner.
摘要翻译： 存储单元具有存取晶体管和具有设置在深沟槽内的电极的电容器。 STI氧化物覆盖电极的至少一部分，衬垫覆盖电极的剩余部分。 衬垫可以是一层氧化物上的氮化物层。 一些STI可以覆盖衬垫的一部分。 在存储器阵列中，可以通过STI氧化物和衬垫从电极隔离通过字线。
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5.发明申请DEEP TRENCH CAPACITOR IN A SOI SUBSTRATE HAVING A LATERALLY PROTRUDING BURIED STRAP 有权在具有横向延伸的带状纹的SOI衬底中的深度TRENCH电容器公开(公告)号：US20110092043A1
公开(公告)日：2011-04-21
申请号：US12974451
申请日：2010-12-21
IPC分类号： H01L21/02
CPC分类号： H01L29/66181 , H01L21/84 , H01L27/1087
摘要： A deep trench is formed to a depth midway into a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A top semiconductor layer is laterally recessed by an isotropic etch that is selective to the buried insulator layer. The deep trench is then etched below a bottom surface of the buried insulator layer. Ion implantation is performed at an angle into the deep trench to dope the sidewalls of the deep trench beneath the buried insulator layer, while the laterally recessed sidewalls of the top semiconductor layer are not implanted with dopant ions. A node dielectric and trench fill materials are deposited into the deep trench. A buried strap has an upper buried strap sidewall that is offset from a lower buried strap sidewall and a deep trench sidewall.
摘要翻译： 深沟槽形成在绝缘体上半导体（SOI）衬底的埋入绝缘体层的中间的深度处。 顶部半导体层通过对掩埋绝缘体层有选择性的各向同性蚀刻而横向凹陷。 然后将深沟槽蚀刻在掩埋绝缘体层的底表面下方。 离子注入以一定角度进入深沟槽以掺杂隐埋绝缘体层下面的深沟槽的侧壁，而顶部半导体层的侧向凹入的侧壁不注入掺杂离子。 节点电介质和沟槽填充材料沉积到深沟槽中。 掩埋带具有从下埋置带侧壁和深沟槽侧壁偏移的上掩埋带侧壁。
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6.发明申请DEEP TRENCH CAPACITOR IN A SOI SUBSTRATE HAVING A LATERALLY PROTRUDING BURIED STRAP 有权在具有横向延伸的带状纹的SOI衬底中的深度TRENCH电容器公开(公告)号：US20090184356A1
公开(公告)日：2009-07-23
申请号：US12016312
申请日：2008-01-18
CPC分类号： H01L29/66181 , H01L21/84 , H01L27/1087
摘要： A deep trench is formed to a depth midway into a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A top semiconductor layer is laterally recessed by an isotropic etch that is selective to the buried insulator layer. The deep trench is then etched below a bottom surface of the buried insulator layer. Ion implantation is performed at an angle into the deep trench to dope the sidewalls of the deep trench beneath the buried insulator layer, while the laterally recessed sidewalls of the top semiconductor layer are not implanted with dopant ions. A node dielectric and trench fill materials are deposited into the deep trench. A buried strap has an upper buried strap sidewall that is offset from a lower buried strap sidewall and a deep trench sidewall.
摘要翻译： 深沟槽形成在绝缘体上半导体（SOI）衬底的埋入绝缘体层的中间的深度处。 顶部半导体层通过对掩埋绝缘体层有选择性的各向同性蚀刻而横向凹陷。 然后将深沟槽蚀刻在掩埋绝缘体层的底表面下方。 离子注入以一定角度进入深沟槽以掺杂隐埋绝缘体层下面的深沟槽的侧壁，而顶部半导体层的侧向凹入的侧壁不注入掺杂离子。 节点电介质和沟槽填充材料沉积到深沟槽中。 掩埋带具有从下埋置带侧壁和深沟槽侧壁偏移的上掩埋带侧壁。
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公开(公告)号：US20090173980A1
公开(公告)日：2009-07-09
申请号：US11969989
申请日：2008-01-07
IPC分类号： H01L21/8242 , H01L27/108
CPC分类号： H01L27/1087 , H01L27/10891
摘要： A memory cell has an access transistor and a capacitor with an electrode disposed within a deep trench. STI oxide covers at least a portion of the electrode, and a liner covers a remaining portion of the electrode. The liner may be a layer of nitride over a layer of oxide. Some of the STI may cover a portion of the liner. In a memory array a pass wordline may be isolated from the electrode by the STI oxide and the liner.
摘要翻译： 存储单元具有存取晶体管和具有设置在深沟槽内的电极的电容器。 STI氧化物覆盖电极的至少一部分，衬垫覆盖电极的剩余部分。 衬垫可以是一层氧化物上的氮化物层。 一些STI可以覆盖衬垫的一部分。 在存储器阵列中，可以通过STI氧化物和衬垫从电极隔离通过字线。
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8.发明授权Deep trench capacitor in a SOI substrate having a laterally protruding buried strap 有权SOI衬底中的深沟槽电容器具有横向突出的埋入带公开(公告)号：US07888723B2
公开(公告)日：2011-02-15
申请号：US12016312
申请日：2008-01-18
IPC分类号： H01L29/94
CPC分类号： H01L29/66181 , H01L21/84 , H01L27/1087
摘要： A deep trench is formed to a depth midway into a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A top semiconductor layer is laterally recessed by an isotropic etch that is selective to the buried insulator layer. The deep trench is then etched below a bottom surface of the buried insulator layer. Ion implantation is performed at an angle into the deep trench to dope the sidewalls of the deep trench beneath the buried insulator layer, while the laterally recessed sidewalls of the top semiconductor layer are not implanted with dopant ions. A node dielectric and trench fill materials are deposited into the deep trench. A buried strap has an upper buried strap sidewall that is offset from a lower buried strap sidewall and a deep trench sidewall.
摘要翻译： 深沟槽形成在绝缘体上半导体（SOI）衬底的埋入绝缘体层的中间的深度处。 顶部半导体层通过对掩埋绝缘体层有选择性的各向同性蚀刻而横向凹陷。 然后将深沟槽蚀刻在掩埋绝缘体层的底表面下方。 离子注入以一定角度进入深沟槽以掺杂隐埋绝缘体层下面的深沟槽的侧壁，而顶部半导体层的侧向凹入的侧壁不注入掺杂离子。 节点电介质和沟槽填充材料沉积到深沟槽中。 掩埋带具有从下埋置带侧壁和深沟槽侧壁偏移的上掩埋带侧壁。
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公开(公告)号：US08395217B1
公开(公告)日：2013-03-12
申请号：US13283031
申请日：2011-10-27
申请人： Kangguo Cheng , Joseph Ervin , Jeffrey B. Johnson , Pranita Kulkarni , Kevin McStay , Paul C. Parries , Chengwen Pei , Geng Wang , Yanli Zhang
发明人： Kangguo Cheng , Joseph Ervin , Jeffrey B. Johnson , Pranita Kulkarni , Kevin McStay , Paul C. Parries , Chengwen Pei , Geng Wang , Yanli Zhang
CPC分类号： H01L21/84 , H01L21/76289 , H01L21/823878 , H01L27/1203
摘要： A semiconductor device structure having an isolation region and method of manufacturing the same are provided. The semiconductor device structure includes a silicon-on-insulator (SOI) substrate. A plurality of gates is formed on the SOI substrate. The semiconductor device structure further includes trenches having sidewalls, formed between each of the plurality of gates. The semiconductor device structure further includes an epitaxial lateral growth layer formed in the trenches. The epitaxial lateral growth layer is grown laterally from the opposing sidewalls of the trenches, so that the epitaxial lateral growth layer encloses a portion of the trenches extended into the SOI substrate. The epitaxial lateral growth layer is formed in such way that it includes an air gap region overlying a buried dielectric layer of the SOI substrate.
摘要翻译： 提供了具有隔离区域的半导体器件结构及其制造方法。 半导体器件结构包括绝缘体上硅（SOI）衬底。 在SOI衬底上形成多个栅极。 半导体器件结构还包括形成在多个栅极中的每一个之间的具有侧壁的沟槽。 半导体器件结构还包括形成在沟槽中的外延横向生长层。 外延横向生长层从沟槽的相对侧壁横向生长，使得外延横向生长层包围延伸到SOI衬底中的沟槽的一部分。 外延横向生长层以这样的方式形成，使得其包括覆盖SOI衬底的掩埋介电层的气隙区域。
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10.发明授权公开(公告)号：US07923815B2
公开(公告)日：2011-04-12
申请号：US11969986
申请日：2008-01-07
IPC分类号： H01L21/02
CPC分类号： H01L29/66181 , G11C11/404 , H01L27/0805 , H01L27/10861
摘要： By controlling buried plate doping level and bias condition, different capacitances can be obtained from capacitors on the same chip with the same layout and deep trench process. The capacitors may be storage capacitors of DRAM/eDRAM cells. The doping concentration may be less than 3E19cm−3, a voltage difference between the biases of the buried electrodes may be at least 0.5V, and a capacitance of one capacitor may be at least 1.2 times, such as 2.0 times the capacitance of another capacitor.
摘要翻译： 通过控制掩埋板掺杂水平和偏置条件，可以在相同芯片上的电容器中获得不同的电容，具有相同的布局和深沟槽工艺。 电容器可以是DRAM / eDRAM单元的存储电容器。 掺杂浓度可以小于3E19cm-3，掩埋电极的偏压之间的电压差可以至少为0.5V，并且一个电容器的电容可以是至少1.2倍，例如另一个电容器的电容的2.0倍 。
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