公开(公告)号：US06295977B1

公开(公告)日：2001-10-02

申请号：US09434582

申请日：1999-11-04

申请人： Bert Ripper ,  Christian Andrae ,  Karl Egglhuber ,  Holger Lundt ,  Helmut Kölker ,  Jochen Greim

发明人： Bert Ripper ,  Christian Andrae ,  Karl Egglhuber ,  Holger Lundt ,  Helmut Kölker ,  Jochen Greim

IPC分类号： B28D106

CPC分类号： B23D57/0061 ,  B23D57/0046 ,  B28D5/0082 ,  B28D5/045

摘要： A method is for simultaneously cutting off a multiplicity of wafers from a hard, brittle workpiece which has a longitudinal axis and a peripheral surface. The workpiece is guided, by means of a translational relative movement, directed perpendicular to the longitudinal axis, between the workpiece and a wire web of a wire saw with the aid of a feed device, through the wire web which is formed by a sawing wire. The workpiece is rotated about the longitudinal axis while the wafers are being cut off. There is also a wire saw which is suitable for carrying out the method and has a device for holding and for rotating the workpiece about the longitudinal axis.

摘要翻译： 一种方法是同时从具有纵向轴线和外围表面的硬的脆性工件切断多个晶片。 通过平行相对运动，通过平行相对运动，通过平行相对运动，通过由卷绕线形成的线材，借助于进给装置，在垂直于纵向轴线的工件和线锯的线材卷材之间引导工件， 。 当晶片被切断时，工件围绕纵向轴线旋转。 还有一种适用于执行该方法的线锯，并且具有用于保持和围绕纵向轴线旋转工件的装置。

公开(公告)号：US6098610A

公开(公告)日：2000-08-08

申请号：US109623

申请日：1998-07-02

申请人： Karl Egglhuber

发明人： Karl Egglhuber

IPC分类号： B26D1/46 ,  B23D57/00 ,  B26D1/547 ,  H01L21/304 ,  B24B49/00

CPC分类号： B23D57/0053

摘要： A wire saw has rotatably mounted two or more wire-guide rollers, around wh a sawing wire is wound, two adjacent wire-guide rollers forming the boundary of a wire web, which has a certain width. The wire saw has at least one drive, by means of which the wire-guide rollers are caused to rotate. The wire-guide roller, which forms a boundary of the wire web, is supported on an elongated support which is connected at one end to a machine frame and has an opposite, freely suspended end. There is also a method which can be carried out with the wire saw. The wire saw has the support passed through the wire-guide roller in its longitudinal direction and forms a fixed unit with the machine frame. A wire-guide roller forming a boundary for the wire web is designed as a sleeve which sits on a support roller. Allocated to the wire-guide roller is at least one thrust bearing so that an axial center of the wire-guide roller is not displaced or is only slightly displaced during an axial thermal expansion of the wire-guide roller as a result of overheating.

摘要翻译： 线锯可旋转地安装两根或多根线引导辊，绕线缠绕在其上，两个相邻的导丝辊形成有一定宽度的金属丝网的边界。 线锯具有至少一个驱动器，通过该驱动器引导导丝辊旋转。 形成网状物边界的线引导辊被支撑在细长的支撑件上，细长的支架一端连接到机架上并具有相对的，自由悬挂的端部。 还有一种可以用线锯进行的方法。 线锯具有沿其纵向方向穿过导丝辊的支撑件，并与机架形成固定单元。 形成网状物的边界的线引导辊被设计为位于支撑辊上的套筒。 分配给导丝辊的是至少一个止推轴承，使得导丝辊的轴向中心在过热导致导丝辊的轴向热膨胀过程中不会发生位移或仅稍微移动。

公开(公告)号：US5771876A

公开(公告)日：1998-06-30

申请号：US638982

申请日：1996-04-25

申请人： Karl Egglhuber

发明人： Karl Egglhuber

IPC分类号： B23D57/00 ,  B28D5/04 ,  B28D1/02

CPC分类号： B23D57/0023 ,  B23D57/0046 ,  B28D5/045

摘要： A wire saw for, and a method of, cutting off slices from a workpiece. The re saw has a cutting head, which contains a plurality of wire guide rollers and around which a multiplicity of wire sections lying parallel to one another and forming plane wire webs are moved, a holding arm which carries the workpiece, and a feed, by means of which the wire sections of one of the wire frames cut through the workpiece while an auxiliary sawing medium is supplied. In one embodiment of the wire saw, the feed guide is arranged at the side of the cutting head and the holding arm can be swivelled parallel to the wire web. In another embodiment, holding arm is swivellable parallel to the wire web and the feed has a feed guide which guides the cutting head with the wire web toward the workpiece. For the purpose of a change of workpiece, the workpiece is transported by a holding arm carrying it from a sawing position above a wire web into a deposit position, the workpiece is released from the holding arm in the deposit position, a new workpiece is picked up from a pick-up position by the holding arm, and the new workpiece is transported by the holding arm into a sawing position above a wire web. The cutting head and a second cutting head may be used alternately for cutting off slices, in which the cutting head not in use is being prepared for future use while the other cutting head is currently in use.

摘要翻译： 用于切割切片的线锯用于切割工件。 线锯具有切割头，其包含多个线引导辊，并且围绕该切割头移动多个彼此平行并且形成平面线网的线段，携带工件的保持臂和馈送器 当提供辅助锯切介质时，其中一个线框架的线段切割通过工件的装置。 在线锯的一个实施例中，进给引导件布置在切割头的侧面，并且保持臂可以平行于线网旋转。 在另一个实施例中，保持臂可平行于线网转动，并且进给具有馈送导向器，该导向器将切割头与导线网向工件引导。 为了改变工件的目的，通过一个保持臂将工件运送到工件上方，该支撑臂将它从金属丝网上方的锯切位置运送到沉积位置，工件在沉积位置从保持臂释放，新的工件被拾起 通过保持臂从拾取位置向上移动，并且新工件被保持臂传送到线网上方的锯切位置。 切割头和第二切割头可以交替地用于切割切片，其中未使用的切割头正在准备将来使用，而另一个切割头当前正在使用中。

公开(公告)号：US06640796B2

公开(公告)日：2003-11-04

申请号：US10209115

申请日：2002-07-31

申请人： Karl Egglhuber ,  Jörg Lukschandel

发明人： Karl Egglhuber ,  Jörg Lukschandel

IPC分类号： B28D108

CPC分类号： B23D57/0061 ,  B28D5/045

摘要： A method for separating slices from a hard brittle workpiece involves subjecting the workpiece to an advancing movement and pressing it onto wires of a wire web of a wire saw, the wires being under a defined wire tension and making contact with the workpiece over a cutting depth along a cutting contour. The wires are lifted off the cutting contour an number of times while the wire tension is kept substantially unchanged, with the aid of rolls of a roll system. The roll system comprises at least one roll that is moved onto the wire web and back, the roll system comprising at least two moveable rolls which flank the workpiece. A wire saw is suitable for carrying out the method.

公开(公告)号：US06234159B1

公开(公告)日：2001-05-22

申请号：US09150658

申请日：1998-09-10

申请人： Karl Egglhuber

发明人： Karl Egglhuber

IPC分类号： B28D106

CPC分类号： B28D5/045 ,  B23D57/0023 ,  B23D57/0061 ,  B28D5/0064

摘要： A wire saw for cutting shaped articles from a workpiece, having at least two wire webs made from sawing wire, which are used for cutting off the shaped articles and which lie one above the other at a distance h and are tensioned between wire-guide rollers. The wire webs are formed by one or more adjacent and parallel wire segments. In this wire saw, no wire segment covers any other wire segment congruently when the wire webs are viewed from above. The invention also relates to a process for cutting a workpiece with the wire saw.

摘要翻译： 一种用于从工件切割成形制品的线锯，具有由锯线制成的至少两根丝网，其用于切割成形制品，并且以一定距离h彼此上下并且在导丝辊之间张紧 。 线网由一个或多个相邻且平行的线段形成。 在这种线锯中，当从上方观察丝网时，没有丝线段一致地覆盖任何其它线段。 本发明还涉及一种用线锯切割工件的方法。

公开(公告)号：US6073878A

公开(公告)日：2000-06-13

申请号：US86852

申请日：1998-05-29

申请人： Karl Egglhuber

发明人： Karl Egglhuber

IPC分类号： B24B27/06 ,  B23D57/00 ,  B28D5/04 ,  B65H54/28 ,  B65H59/38 ,  B65H75/38 ,  B65H27/00 ,  B65H57/00 ,  B65H75/18

CPC分类号： B23D57/0053 ,  B65H54/2803 ,  B65H59/384

摘要： A device and method for unwinding or winding a sawing wire from a reel or to a reel which rotates. The sawing wire runs from the reel or toward the reel over a pulley and in so doing, assumes a defined axial position on the reel. In the method, the reel is moved along its rotational shaft while the sawing wire is unwound or wound up. The sawing wire however remains aligned perpendicular to the rotational shaft of the reel in the region between the reel and the pulley. There is a pivot arm which is moved concomitantly by a carriage system. The pivot arm has an end piece connected to one of the clamping elements. Thus it is possible to move the pivot arm from a reel-holding position into a reel-release position.

摘要翻译： 一种用于将卷线器从卷轴或卷轴上展开或卷绕的装置和方法，所述卷轴旋转。 锯线从卷轴或者卷轴穿过滑轮，并且在这样做时，呈现在卷轴上的限定的轴向位置。 在该方法中，当绕线被展开或卷绕时，卷轴沿其旋转轴移动。 然而锯线在卷轴和滑轮之间的区域中保持垂直于卷轴的旋转轴对齐。 有一个枢轴臂，由支架系统同时移动。 枢转臂具有连接到一个夹紧元件的端件。 因此，可以将枢转臂从卷轴保持位置移动到卷轴释放位置。

公开(公告)号：US6050254A

公开(公告)日：2000-04-18

申请号：US56831

申请日：1998-04-07

申请人： Karl Egglhuber

发明人： Karl Egglhuber

IPC分类号： B24B27/06 ,  B23D57/00 ,  B28D1/08

CPC分类号： B23D57/0053

摘要： A wire saw for cutting wafers from a workpiece, has a cutting head in which at least two adjacent wire-guiding rollers are mounted rotatably in each case between a moveable bearing and a fixed bearing. These are adjacent wire-guiding rollers, together with a wire wound around them, form a wire web. Each wire-guiding roller and the moveable bearing and fixed bearing assigned to it form a wire-guiding-roller unit, which can only be removed from the cutting head as an entire unit. There is also a repair station and a maintenance and testing station for the wire-guiding-roller unit and a method of exchanging the wire-guiding-roller unit.

摘要翻译： 用于从工件切割晶片的线锯具有切割头，其中至少两个相邻的导丝辊可旋转地安装在可移动的轴承和固定的轴承之间。 这些是相邻的导丝辊，以及围绕它们缠绕的丝线，形成丝网。 每个导线辊和分配给它的可移动轴承和固定轴承形成一个导丝辊单元，其仅能作为整个单元从切割头移除。 还有用于导丝辊单元的修理站和维护和测试站以及更换导丝辊单元的方法。

公开(公告)号：US5616065A

公开(公告)日：1997-04-01

申请号：US603541

申请日：1996-02-21

申请人： Karl Egglhuber

发明人： Karl Egglhuber

IPC分类号： B24B27/06 ,  B23D57/00 ,  B23D59/00 ,  B28D5/04 ,  B24B49/00

CPC分类号： B23D57/0046 ,  B23D57/0053 ,  B23D59/002 ,  B28D5/045

摘要： A sawing method and a wire saw for cutting wafers from a workpiece comprises a guidance system for the guidance of wire segments into the intended cutting planes, having at least one measuring device and at least one controlling device, the measuring device detecting an incorrect position of the wire segments in relation to the intended cutting planes by measuring the distance to a measurement point whose spatial position is dependent on the incorrect position of the wire segments, and the controlling device effecting, if necessary, a compensating movement by means of force transmission, which compensating movement brings the wire segments into the intended cutting planes.

摘要翻译： 用于从工件切割晶片的锯切方法和线锯包括用于将线段引导到预期切割平面中的引导系统，具有至少一个测量装置和至少一个控制装置，所述测量装置检测不正确的位置 通过测量到其空间位置取决于线段的不正确位置的测量点的距离，并且如果需要，通过力传递影响补偿运动，控制装置相对于预期切割平面的线段， 该补偿运动使线段进入预期的切割平面。

公开(公告)号：US4777926A

公开(公告)日：1988-10-18

申请号：US526327

申请日：1983-08-25

申请人： Wolfgang Ermer ,  Karl Egglhuber

发明人： Wolfgang Ermer ,  Karl Egglhuber

IPC分类号： B27B3/30 ,  B28D5/04

CPC分类号： B27B3/30 ,  B28D5/042

摘要： A spacer for automatic parallel aligning and clamping of the blades in a gang saw which uses spacer plates which are trapezoidally enlarged toward their top and bottom edges. The supporting inner surface of the frame portion is designed as clamping mouth bevelled to fit the spacer configuration.

摘要翻译： 用于在组合锯中自动平行对准和夹紧叶片的间隔件，其使用间隔板，其朝向其顶部和底部边缘梯形扩大。 框架部分的支撑内表面设计为夹紧口，以适应间隔件配置。