摘要:
An ultrasound transducer includes a substrate, an ultrasound transducer cell placed on one surface of the substrate and having a lower electrode, a first gap portion placed on the lower electrode and an upper electrode placed on the first gap portion, a first conductive layer placed on the other surface of the substrate and electrically connected to one of the lower electrode and the upper electrode, an electret film placed on the first conductive layer, an insulating layer placed on the electret film, and a second conductive layer placed on the insulating layer and electrically connected to the one of the lower electrode and the upper electrode not electrically connected to the first conductive layer.
摘要:
A ultrasonic transducer of the invention comprises: a transducer cell including a first electrode and a second electrode disposed separated from the first electrode by an air gap portion; and an electret for applying a potential difference between the first electrode and the second electrode. The electret is disposed in a region where at least a part thereof does not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves.
摘要:
An ultrasound transducer includes a substrate and a lower electrode layer, a lower insulating layer, an upper insulating layer, and an upper electrode layer. The lower insulating layer and the upper insulating layer are arranged to be opposed to each other via an air gap section. The upper insulating layer and the lower insulating layer are different in a material and thickness and satisfy Equation 1 below. In Equation 1, K1 represents a relative dielectric constant of the lower insulating layer, K2 represents a relative dielectric constant of the upper insulating layer, T1 represents thickness of the lower insulating layer, T2 represents thickness of the upper insulating layer, ρ1(x) represents a charge density distribution in the lower insulating layer, and ρ2(y) represents a charge density distribution in the upper insulating layer. 1 K 1 ∫ 0 T 1 x × ρ 1 ( x ) x = 1 K 2 ∫ 0 T 2 y × ρ 2 ( y ) y ( Equation 1 )
摘要:
An ultrasonic transducer cell according to the present invention includes: a substrate; a charge holding portion provided on the substrate; a lower electrode provided on the charge holding portion and used to input and output a signal; and a vibration membrane provided above the lower electrode to be separated from the lower electrode with a cavity, and configured to include at least an insulating film and an upper electrode provided on the insulating film.
摘要:
An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.
摘要:
A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate; a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT; a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal; and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.
摘要:
An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.
摘要:
An ultrasound endoscope has an ultrasound probe which is disposed at a distal end side of a distal end rigid portion configuring a distal end portion out of a flexible tube portion, a bending portion and the distal end rigid portion configuring an insertion portion, and forms an ultrasound scanning surface having a normal line in a direction orthogonal to an endoscope insertion axis L1, and a treatment instrument outlet of a treatment hole in the distal end rigid portion. The ultrasound probe is configured by a plurality of ultrasound transducers arranged in a convex circular arc shape, and a center of curvature of the plurality of ultrasound transducers is disposed at a proximal end side from the treatment instrument outlet.
摘要:
A micromachined ultrasound transducer including a plurality of ultrasound transducer cells each of which includes a substrate on which a bottom electrode is formed, and a membrane provided apart from the substrate and having an upper electrode formed thereon, said ultrasound transducer generating ultrasound with the membrane vibrating when voltage is applied between the bottom electrode and the upper electrode, comprises: a vibration propagation suppression unit suppressing propagation of vibration of said each ultrasound transducer cell to an adjacent ultrasound transducer cell.
摘要:
A transducer wiring pad group provided in a distal end portion of an ultrasound transducer printed circuit board provided with signal patterns that transmit and receive signals to and from a plurality of ultrasound transducers, a flexible printed circuit board wiring pad group arranged in a longitudinal axis direction of the ultrasound transducer printed circuit board, a second signal pattern group that is connected between the transducer wiring pad group and the flexible printed circuit board wiring pad group and bends at substantially degrees in the middle thereof, and a relay flexible printed circuit board that is connected to the flexible printed circuit board wiring pad group and changes a direction of a signal pattern into the longitudinal axis direction are provided.