公开(公告)号：US4634886A

公开(公告)日：1987-01-06

申请号：US579588

申请日：1984-02-13

申请人： Katsunori Hatanaka ,  Yasuo Kuroda ,  Shunichi Uzawa

发明人： Katsunori Hatanaka ,  Yasuo Kuroda ,  Shunichi Uzawa

IPC分类号： H04N1/028 ,  G06T1/00 ,  H01L27/146 ,  H04N1/40 ,  H04N5/30

CPC分类号： H04N1/40056

摘要： An elongated photoelectric converter unit having a good S/N characteristic but no crosstalk without using any blocking diode. The photoelectric converter comprising: a signal amplifying device having m photosensor groups each consisting of n photosensor elements and n signal amplifying elements connected to the photosensor elements in each group; first and second sample and hold device each having n sample and hold elements connected to the signal amplifying elements; first and second input signal selecting device connected to those first and second sample and hold device, respectively, each of the first and second input signal selecting device having n input signal selecting elements provided corresponding to the respective sample and hold elements of each sample and hold device; and an amplifying device for amplifying the difference between the values of the signals to be transferred from the respective first and second input signal selecting device as a signal and outputting.

摘要翻译： 一个细长的光电转换器单元具有良好的S / N特性，但没有串扰，而不使用任何阻塞二极管。 该光电转换器包括：具有m个光电传感器组的信号放大装置，每个光传感器组由n个光电传感器元件和连接到每个组中的光传感器元件的n个信号放大元件组成; 第一和第二采样和保持装置，每个具有连接到信号放大元件的n个采样和保持元件; 第一和第二输入信号选择装置，分别连接到第一和第二采样和保持装置，第一和第二输入信号选择装置中的每一个具有对应于每个采样和保持的相应采样和保持元件提供的n个输入信号选择元件 设备; 以及放大装置，用于将要从第一和第二输入信号选择装置传送的信号的值之差作为信号放大并输出。

公开(公告)号：US4965570A

公开(公告)日：1990-10-23

申请号：US388713

申请日：1989-08-02

申请人： Katsunori Hatanaka ,  Shunichi Uzawa ,  Katsumi Nakagawa ,  Toshiyuki Komatsu

发明人： Katsunori Hatanaka ,  Shunichi Uzawa ,  Katsumi Nakagawa ,  Toshiyuki Komatsu

IPC分类号： H04N1/40 ,  H04N3/15

CPC分类号： H04N1/40056 ,  H04N3/1575

摘要： A photoelectric conversion apparatus has a plurallity of photoelectric conversion elements each providing an output signal to a storage capacitor. A matrix wiring unit is arranged opposite the photoelectric conversion elements so as not to cross the signal lines extending from the capacitors. The matrix wiring unit matrix transfers the signals from the capacitors. A switch array unit includes a first switch unit for sequentially transferring the matrix transferred signals, and a first readout device for reading out, as a voltage signal, the signals transferred by the first switch section. The switch array also includes a second switch unit arranged in correspondence with the first switch unit and operated synchronously therewith. The second switch unit receives signals corresponding to noise. A second readout device reads out, as a voltage signal, the output from the second switch unit. A differential amplifier is included for receiving the outputs from the first and second readout devices and outputs a signal corresponding to a difference therebetween.

摘要翻译： 光电转换装置具有多个光电转换元件，每个光电转换元件向存储电容器提供输出信号。 矩阵布线单元布置成与光电转换元件相对，以便不与从电容器延伸的信号线交叉。 矩阵布线单元矩阵传送来自电容器的信号。 开关阵列单元包括用于顺序传送矩阵传送信号的第一开关单元和用于读出由第一开关部分传送的信号作为电压信号的第一读出装置。 开关阵列还包括与第一开关单元对应地布置并与其同步操作的第二开关单元。 第二开关单元接收对应于噪声的信号。 第二读出装置从第二开关单元读出作为电压信号的输出。 包括差分放大器，用于接收来自第一和第二读出装置的输出，并输出对应于它们之间的差值的信号。

公开(公告)号：US4461956A

公开(公告)日：1984-07-24

申请号：US558573

申请日：1983-12-06

申请人： Katsunori Hatanaka ,  Yutaka Hirai ,  Naoki Ayata ,  Shunichi Uzawa

发明人： Katsunori Hatanaka ,  Yutaka Hirai ,  Naoki Ayata ,  Shunichi Uzawa

IPC分类号： H01L27/146 ,  H04N1/193 ,  H01J40/14

CPC分类号： H04N1/1938 ,  H01L27/14665 ,  H04N1/193

摘要： A photoelectric converter in solid-state assembly, comprising the following sections formed on the same substrate: a photoelectric converting section constituted of a number of photoelectric converting elements arranged in an array, each element having a light-receiving surface for input of light-information; and a signal processing circuit section comprising a number of accumulating means, each provided for each of said photoelectric converting elements, for accumulation of signals produced as output from the corresponding photoelectric converting elements, a number of transfer means for transferring the signals accumulated in the corresponding accumulating means to other places, and an array of a number of transistors wired in a two-dimensional matrix to drive a number of the transfer means in time series, said photoelectric converting elements, and the transfer means and the transistors constituting said signal processing circuit section being constituted of thin semi-conductor films.

摘要翻译： 一种固态组件的光电转换器，包括形成在同一衬底上的以下部分：由排列成阵列的多个光电转换元件构成的光电转换部，每个元件具有用于输入光信息的光接收表面 ; 以及信号处理电路部分，包括为每个所述光电转换元件提供的多个累积装置，用于累积作为相应光电转换元件的输出的信号，多个传送装置，用于传送累积在相应的光电转换元件中的信号 累积装置到其他地方，以及以二维矩阵连接的多个晶体管的阵列，以时间序列驱动多个传送装置，所述光电转换元件，以及构成所述信号处理电路的传输装置和晶体管 部分由薄的半导体膜构成。

公开(公告)号：US4390791A

公开(公告)日：1983-06-28

申请号：US247752

申请日：1981-03-26

申请人： Katsunori Hatanaka ,  Shunichi Uzawa ,  Yutaka Hirai ,  Naoki Ayata

发明人： Katsunori Hatanaka ,  Shunichi Uzawa ,  Yutaka Hirai ,  Naoki Ayata

IPC分类号： H01L27/146 ,  H01J40/14

CPC分类号： H01L27/14665

摘要： A solid-state photoelectric transducer comprises a plurality of output units for photoelectrically converted signals which units are constructed of: a plurality of photoelectric converter elements, a plurality of signal accumulators for accumulating signals output from said photoelectric converter elements corresponding to an amount of light incident on said photoelectric converter elements, each of said signal accumulators being connected with an associated one of said photoelectric converter elements; a plurality of devices for returning the signal accumulators from a signal accumulating state to an initial state, each of said devices being connected with an associated one of the signal accumulators; a plurality of signal amplifiers for outputting amplified signals corresponding to the signals accumulated in the signal accumulators, each signal amplifier being connected with an associated signal accumulator; and a plurality of cross-talk preventors for preventing cross-talk of the signal output from each signal amplifier, each signal amplifier being provided with one of the cross-talk preventors; a plurality of said signal amplifiers being exclusively selected by a unit selecting signal in each of said output units, said output units having a controlling line which transmits a controlling signal for controlling each of the return devices to the initial state in common, and the signal amplifiers of the same level in each output unit having a signal output line in common.

摘要翻译： 固态光电变换器包括多个用于光电转换信号的输出单元，其单元由以下构成：多个光电转换元件，多个信号累加器，用于累积从所述光电转换元件输出的信号，该信号对应于入射光量 在所述光电转换元件上，每个所述信号存储器与所述光电转换元件中的相关联的一个连接; 用于将信号累加器从信号累积状态返回到初始状态的多个装置，每个所述装置与相关联的一个信号累加器连接; 多个信号放大器，用于输出对应于积累在信号累加器中的信号的放大信号，每个信号放大器与相关联的信号累加器连接; 以及用于防止从每个信号放大器输出的信号的串扰的多个串扰防止器，每个信号放大器设置有串扰防止器之一; 多个所述信号放大器由每个所述输出单元中的单元选择信号专门选择，所述输出单元具有控制线，所述控制线将用于将每个返回装置的每个返回装置共同控制到初始状态，并且所述信号 每个输出单元中具有相同电平的放大器具有共同的信号输出线。

公开(公告)号：US4532536A

公开(公告)日：1985-07-30

申请号：US311892

申请日：1981-10-15

申请人： Katsunori Hatanaka ,  Shunichi Uzawa

发明人： Katsunori Hatanaka ,  Shunichi Uzawa

IPC分类号： H01L27/146 ,  H01L31/10 ,  H04N1/028 ,  H04N5/335 ,  H04N5/365 ,  H04N5/369 ,  H01L27/14 ,  H01L27/02 ,  H01L29/78 ,  H01L45/00

CPC分类号： H01L27/14665

摘要： A photo-electric transducer comprises a photo-electric transducing element which includes a semiconductor layer formed of a photosensitive semiconductor material; first and second gate electrodes juxtaposed on the semiconductor layer through an insulating layer; a drain electrode disposed outside of the first gate electrode; a source electrode disposed outside of the second gate electrode; and an output electrode disposed between the drain electrode and source electrode on the semiconductor layer to take up output signals, wherein one of the area A of the semiconductor layer opposed to said first gate electrode and the area B of the semiconductor layer opposed to the second gate electrode is formed as light incidence part and the other area is formed as non-light incidence part.

摘要翻译： 光电换能器包括光电转换元件，其包括由光敏半导体材料形成的半导体层; 第一和第二栅电极通过绝缘层并置在半导体层上; 设置在所述第一栅电极的外侧的漏电极; 设置在所述第二栅电极的外侧的源电极; 以及输出电极，设置在所述半导体层上的所述漏电极和所述源极之间以吸收输出信号，其中所述半导体层的与所述第一栅电极相对的区域A和所述半导体层的与所述第二栅电极相对的区域B之一 栅电极形成为光入射部分，另一区域形成为非光入射部分。

公开(公告)号：US4405857A

公开(公告)日：1983-09-20

申请号：US246290

申请日：1981-03-23

申请人： Yutaka Hirai ,  Katsunori Hatanaka ,  Naoki Ayata ,  Shunichi Uzawa

发明人： Yutaka Hirai ,  Katsunori Hatanaka ,  Naoki Ayata ,  Shunichi Uzawa

IPC分类号： H01L27/146 ,  H04N1/03 ,  H01J40/14

CPC分类号： H01L27/14665 ,  H04N1/03

摘要： A photoelectric converter in solid-state assembly, comprising the following sections juxtaposed integrally on the same substrate: a photoelectric converting section constituted of a number of photoelectric converting elements arranged in an array, each element having a light-receiving surface for input of light-information; a charge accumulating section constituted of a number of accumulating means, each being provided for each of said photoelectric converting elements, for accumulation of charge signals photoelectrically converted by corresponding photoelectric converting elements; a transistor section for transfer constituted of a number of transistors for transfer, each being provided for each of said accumulating means, to perform a switching operation for transfer of the signals accumulated in corresponding accumulating means; and a BBD transfer section for outputting the signals transferred from each of said accumulating means by arrangement in time series thereof; said BBD section being constituted of a number of transistor and a number of capacitors; and said photoelectric converting elements, said transistors for transfer and the transistors constituting said BBD transfer section being constituted of thin semiconductor films.

摘要翻译： 一种固态组装的光电转换器，包括以下部分，其整体地并置在同一基板上：光电转换部，其由排列成阵列的多个光电转换元件构成，每个元件具有用于输入发光元件的光接收表面， 信息; 由各个所述光电转换元件提供的多个累积装置构成的电荷累积部分，用于累积由相应的光电转换元件光电转换的电荷信号; 用于传送的晶体管部分，用于传送的晶体管，每个用于传送的晶体管分别为每个所述累积装置提供，以执行用于传送累积在相应的累积装置中的信号的切换操作; 以及BBD传送部分，用于按照其时间序列布置输出从每个所述累积装置传送的信号; 所述BBD部分由多个晶体管和多个电容器构成; 并且所述光电转换元件，所述用于转移的晶体管和构成所述BBD转移部分的晶体管由薄的半导体膜构成。

公开(公告)号：US06645707B2

公开(公告)日：2003-11-11

申请号：US09534334

申请日：2000-03-24

申请人： Mitsuaki Amemiya ,  Shunichi Uzawa ,  Keiko Chiba ,  Yutaka Watanabe

发明人： Mitsuaki Amemiya ,  Shunichi Uzawa ,  Keiko Chiba ,  Yutaka Watanabe

IPC分类号： G03C556

CPC分类号： G03F7/70466 ,  G03F7/2022

摘要： A device manufacturing method includes a first exposure step for executing a multiple exposure of a first layer of a substrate by use of plural first masks, a development step for developing the first layer of the substrate and a second exposure step, executed after the development step, for executing a multiple exposure of a second layer of the substrate by use of plural second masks. A portion of at least one of the first masks has a pattern the same as a pattern formed in a portion of at least one of the second masks.

摘要翻译： 一种器件制造方法包括：第一曝光步骤，用于通过使用多个第一掩模来执行衬底的第一层的多次曝光;显影步骤，用于显影衬底的第一层;以及第二曝光步骤，在显影步骤之后执行 ，用于通过使用多个第二掩模来执行所述基板的第二层的多次曝光。 第一掩模中的至少一个的一部分具有与形成在至少一个第二掩模的部分中的图案相同的图案。

公开(公告)号：US6018395A

公开(公告)日：2000-01-25

申请号：US766928

申请日：1996-12-16

申请人： Makiko Mori ,  Shunichi Uzawa ,  Kunitaka Ozawa ,  Hirohisa Ohta ,  Noriyuki Nose

发明人： Makiko Mori ,  Shunichi Uzawa ,  Kunitaka Ozawa ,  Hirohisa Ohta ,  Noriyuki Nose

IPC分类号： G03F9/00 ,  G01B11/00

CPC分类号： G03F9/70

摘要： An alignment method useable with an original having a pattern and a substrate having a surface area on which the pattern of the original is printed. The alignment method comprises detecting plural marks, calculating plural times, the amount of rotational deviation on the basis of different combinations of marks, calculating the quantity of rotational correction of the original and the substrate by using the computed rotational deviations, and aligning on the basis of the calculated quantity of the rotational deviation.

摘要翻译： 可用于具有图案的原稿的对准方法和具有印刷原稿图案的表面积的基板。 对准方法包括基于不同的标记组合来检测多个标记，多次计算旋转偏差量，通过使用计算出的旋转偏差来计算原件和基板的旋转校正量，并基于 的计算量的旋转偏差。

公开(公告)号：US5566922A

公开(公告)日：1996-10-22

申请号：US481826

申请日：1995-06-07

申请人： Yutaka Tanaka ,  Kunitaka Ozawa ,  Takao Kariya ,  Shunichi Uzawa

发明人： Yutaka Tanaka ,  Kunitaka Ozawa ,  Takao Kariya ,  Shunichi Uzawa

IPC分类号： F16K3/18 ,  H01L21/027 ,  F16K25/00

CPC分类号： F16K3/188

摘要： A gate valve device which includes a partition wall having an opening, a valve member movable along the partition wall to open or close the opening, a driving system for moving the valve member, and a pressing mechanism for pressing the valve member toward the partition wall. The pressing mechanism has a pressing member projectable toward and retractable from the valve member, wherein the pressing mechanism presses the valve member against the partition wall when the valve member is in a position closing the opening.

摘要翻译： 一种闸阀装置，包括具有开口的分隔壁，可沿着分隔壁移动以打开或关闭开口的阀构件，用于移动阀构件的驱动系统，以及用于将阀构件朝向分隔壁 。 按压机构具有可从阀构件朝向和伸出的按压构件，其中当阀构件处于关闭开口的位置时，按压机构将阀构件压靠在隔壁上。

公开(公告)号：US5498501A

公开(公告)日：1996-03-12

申请号：US416503

申请日：1995-04-04

申请人： Isamu Shimoda ,  Takao Kariya ,  Nobutoshi Mizusawa ,  Kunitaka Ozawa ,  Shunichi Uzawa

发明人： Isamu Shimoda ,  Takao Kariya ,  Nobutoshi Mizusawa ,  Kunitaka Ozawa ,  Shunichi Uzawa

IPC分类号： G03F7/20 ,  G03F9/00

CPC分类号： G03F7/70066 ,  G03F7/2022 ,  G03F7/7045 ,  Y10S438/949

摘要： A method of manufacturing of semiconductor devices, includes exposing different portions of a semiconductor substrate with a first exposure apparatus having a first exposure range; placing and aligning the semiconductor substrate with respect to a second exposure range of a second exposure apparatus, which range is larger than the first exposure range of the first exposure apparatus; detecting an alignment error of each of the portions of the semiconductor substrate as covered by the second exposure range of the second exposure apparatus; calculating an overall alignment error of those portions of the semiconductor substrate with respect to the entire second exposure range of the second exposure apparatus, on the basis of the detected alignment errors; and controlling the exposure operation of the second exposure apparatus on the basis of the calculated overall alignment error.

摘要翻译： 一种半导体器件的制造方法，包括用具有第一曝光范围的第一曝光装置曝光半导体衬底的不同部分; 将半导体衬底相对于第二曝光装置的第二曝光范围放置和对准，该范围大于第一曝光装置的第一曝光范围; 检测由第二曝光装置的第二曝光范围所覆盖的半导体衬底的每个部分的对准误差; 基于检测到的对准误差，计算半导体衬底的这些部分相对于第二曝光装置的整个第二曝光范围的总体对准误差; 并根据计算的整体对准误差来控制第二曝光装置的曝光操作。