Fine contact hole forming method employing thermal flow process
    1.
    发明授权
    Fine contact hole forming method employing thermal flow process 有权
    采用热流程的精细接触孔成型方法

    公开(公告)号:US07344827B2

    公开(公告)日:2008-03-18

    申请号:US10838955

    申请日:2004-05-04

    IPC分类号: G03F7/00

    CPC分类号: G03F7/40 H01L21/76802

    摘要: Provided is a contact hole forming method, wherein in a thermal flow step the contact hole size can be fixed after thermal flow even if the resist material lot changes, or, wherein at the same bake temperature the contracted size, namely the flow amount, can be fixed. More specifically, provided is a contact hole forming method comprising a step of coating a resist material onto a substrate, a step of heating the coated resist material, a step of exposing the heated resist material to light through a photo mask adapted for a contact hole pattern, a step of heating the exposed resist material, a step of forming the contact hole pattern subsequently by developing with a developing fluid and a step of thermal flow treatment for heating the obtained contact hole pattern, wherein the resist material comprises an organic compound which does not react with the other components within the resist material and does not change a resolution property, and wherein when the resist material lot is changed, an amount of the organic compound to be added is changed so as to keep the contact hole pattern identical before and after the lot change.

    摘要翻译: 提供一种接触孔形成方法,其中在热流动步骤中,即使抗蚀剂材料批次改变,接触孔尺寸也可以在热流动之后固定,或者其中在相同的烘烤温度下,收缩尺寸即流量可以 被固定。 更具体地,提供了一种接触孔形成方法,包括将抗蚀剂材料涂覆到基底上的步骤,加热涂覆的抗蚀剂材料的步骤,将经加热的抗蚀剂材料曝光到通过适于接触孔的光掩模的步骤 图案,加热曝光的抗蚀剂材料的步骤,随后通过用显影液显影形成接触孔图案的步骤和用于加热所获得的接触孔图案的热流动处理步骤,其中抗蚀剂材料包含有机化合物,其中 不与抗蚀剂材料内的其它成分反应,也不会改变分辨率,并且,当改变抗蚀剂材料批次时,改变添加的有机化合物的量,以便使接触孔图案保持在相同之前 经过多次变更。

    EXPANSION VALVE
    2.
    发明申请
    EXPANSION VALVE 有权
    膨胀阀

    公开(公告)号:US20100237270A1

    公开(公告)日:2010-09-23

    申请号:US12680991

    申请日:2008-09-18

    IPC分类号: F16K1/00

    摘要: An expansion valve for reducing the quantity of material required for the valve body by contriving the arrangement of bolt fitting grooves. In the expansion valve (20), displacement of a valve member driver (36) provided in the valve body (21) is transmitted to a valve member by a valve member drive rod (36f) and the valve opening is altered to control the flow rate of the refrigerant. The valve body (21) consists of a body upper portion (40) and a body lower portion (41) narrower than the body upper portion (40), and bolt fitting grooves (43, 43) opening in the flank of the valve body (21), preferably opening obliquely downward, are formed at the boundary (42) of the body upper portion (40) and the body lower portion (41). With such a layout, the material required at the boundary (42) can be reduced furthermore and the quantity of material required for the valve body (21) can be reduced furthermore, as a result. Since the opening width (minimum spatial dimension) w is smaller than the diameter of bolt, a seating surface is assured sufficiently around the bolt fitting groove (43) and the bolt does not drop off from the bolt fitting groove (43).

    摘要翻译: 一种膨胀阀,用于通过设计螺栓安装槽来减少阀体所需的材料的数量。 在膨胀阀(20)中,设置在阀体(21)中的阀构件驱动器(36)的位移通过阀构件驱动杆(36f)传递到阀构件,并且改变阀开度以控制流量 制冷剂的比例。 阀体(21)由主体上部(40)和比主体上部(40)窄的主体下部(41)构成,在阀体的侧面开口的螺栓嵌合槽(43,43) (21),优选地向下倾斜地开口,形成在主体上部(40)和主体下部(41)的边界(42)处。 通过这样的布局,可以进一步减少在边界(42)处所需的材料,并且可以进一步降低阀体(21)所需的材料量。 由于开口宽度(最小空间尺寸)w小于螺栓的直径,因此在螺栓配合槽(43)周围充分确保就座面,并且螺栓不会从螺栓配合槽(43)脱落。

    Connector connection apparatus
    3.
    发明授权
    Connector connection apparatus 有权
    连接器连接装置

    公开(公告)号:US07677910B2

    公开(公告)日:2010-03-16

    申请号:US11893863

    申请日:2007-08-17

    IPC分类号: H01R13/64

    摘要: The present invention is to provide a connector connection apparatus to avoid drop of a connector without increase of cost. The connector connection apparatus includes a holder for receiving therein and holding the connector, a receiving portion main body for receiving therein and holding the holder, and a plate for fixing the holder attached to the receiving portion main body. The receiving portion main body includes a receiving hole having a diameter larger than an outer diameter of the holder and receiving the holder therein. The holder is inserted from an upper opening of the receiving hole into the receiving portion main body. The holder is then held between the plate and the receiving portion main body.

    摘要翻译: 本发明是提供一种连接器连接装置,以避免连接器的下降而不增加成本。 连接器连接装置包括:保持器,用于容纳连接器;容纳部分主体,用于容纳在其中并保持保持器;以及用于固定安装在容纳部分主体上的保持架的板。 接收部分主体包括容纳孔,该容纳孔的直径大于保持器的外径,并且在其中容纳保持器。 保持器从容纳孔的上开口插入到容纳部主体内。 然后将保持器保持在板和容纳部主体之间。

    Connector unit
    4.
    发明授权
    Connector unit 有权
    连接器单元

    公开(公告)号:US07578693B2

    公开(公告)日:2009-08-25

    申请号:US11893730

    申请日:2007-08-17

    IPC分类号: H01R13/627

    摘要: The connector unit includes: a first holder to be attached to a first article; a first connector to be received in the first holder; a second holder to be attached to a second article; and a second connector to be received in the second holder to be coupled with the first connector, wherein the first holder includes a hold engaging part having an arm body and a projection which engages with the first connector, the connector unit further includes: an engagement-removing part which removes an engagement between the hold engaging part and the first connector when the first and second connectors are coupled with eachother; and an entrance-permitting part provided on the second holder to allow the projection of the disengaged hold engaging part to enter therein after the first and second connectors move with respect to the first holder.

    摘要翻译: 连接器单元包括:第一保持器,用于附接到第一物品; 要接收在第一保持器中的第一连接器; 附着在第二制品上的第二支架; 以及第二连接器,其被接收在第二保持器中以与第一连接器联接,其中第一保持器包括具有臂体的保持接合部分和与第一连接器接合的突起,连接器单元还包括:接合部 - 当第一和第二连接器与彼此耦合时,移除保持接合部分和第一连接器之间的接合部; 以及设置在所述第二保持器上以允许所述脱离保持接合部分的突出部在所述第一和第二连接器相对于所述第一保持器移动之后进入其中的入口许可部分。

    Positive resist composition, and patterning process using the same
    5.
    发明申请
    Positive resist composition, and patterning process using the same 审中-公开
    正型抗蚀剂组合物和使用其的图案化工艺

    公开(公告)号:US20060183051A1

    公开(公告)日:2006-08-17

    申请号:US11339590

    申请日:2006-01-26

    IPC分类号: G03C1/76

    CPC分类号: G03F7/0392

    摘要: The present invention-provides a positive resist composition wherein at least a polymer included in a base resin has a repeating unit with an acid labile group having absorption at the 248 nm wavelength light and the repeating unit is included with a ratio of 1-10% of all repeating units of polymers included in the base resin. There can be provided a positive resist composition with equal or higher sensitivity and resolution than those of conventional positive resist compositions, and in particular, by which a pattern profile on a substrate with high reflectivity is excellent and generation of a standing wave and line edge roughness are reduced.

    摘要翻译: 本发明提供一种正型抗蚀剂组合物,其中至少包含在基础树脂中的聚合物具有在248nm波长的光下具有吸收性的酸不稳定基团的重复单元,重复单元的比例为1-10% 包括在基础树脂中的聚合物的所有重复单元。 可以提供与常规正性抗蚀剂组合物相同或更高的灵敏度和分辨率的正性抗蚀剂组合物,特别是通过其具有高反射率的基板上的图案轮廓优异并产生驻波和线边缘粗糙度 减少了

    Stirling refrigerating system
    8.
    发明授权
    Stirling refrigerating system 失效
    斯特林制冷系统

    公开(公告)号:US5927079A

    公开(公告)日:1999-07-27

    申请号:US969487

    申请日:1997-11-13

    IPC分类号: F25B9/14 F25D17/02 F25B9/00

    CPC分类号: F25D17/02 F25B9/14

    摘要: A Stirling refrigerating system comprising a freezing chamber, a Stirling refrigerator, and a heat carrying means including a pipe arrangement thermally connected to a cooling portion of the Stirling refrigerator so as to carry low temperature heat of the cooling portion to the freezing chamber by means of a refrigerant, wherein when the Stirling refrigerator is driven, the refrigerant circulates in the freezing chamber and the cooling portion through the pipe arrangement. Thus, it is possible to obtain a Stirling refrigerating system in which not only it can cope with the current flon regulation but also it can use ethyl alcohol or the like as a refrigerant other than HCFC or HFC which may be subjected to legal regulation in the future, and it can increase the refrigerating capacity and improve the coefficient of performance in comparison with the existing system.

    摘要翻译: 一种斯特林制冷系统,包括冷冻室,斯特林制冷机,以及包括与斯特林制冷机的冷却部分热连接的管道装置的热承载装置,以便通过冷却部分将冷却部分的低温热量运送到冷冻室 制冷剂,其中当斯特林制冷机被驱动时,制冷剂通过管道装置在冷冻室和冷却部分中循环。 因此,可以获得斯特林制冷系统,其不仅可以应付目前的氟利昂调节,而且可以使用乙醇等作为除了氟化氢或氢氟酸的制冷剂,其可以在 未来,与现有系统相比,可以提高制冷能力,提高性能系数。

    Connector checking device
    9.
    发明授权
    Connector checking device 失效
    连接器检查装置

    公开(公告)号:US5512833A

    公开(公告)日:1996-04-30

    申请号:US294572

    申请日:1994-08-23

    摘要: A connector checking apparatus includes a connector checking device having a main body operable by a lever to move toward a connector. The connector checking device also has a connector support. Detection pins are slideably disposed within the main body and are connected to checking terminals. The detection pins have a conductive contact face and detection fingers on a detection piece. Upon insertion of the detection pins into the connector, complete insertion of the terminals within the terminal receiving cavities of the connector permits contact between the conductive face and an end of the terminal C. The connector has cantilever resilient supporting pieces which include a locking projection 14a. The device can detect whether or not the connector checking device A is completely engaged with the connector.

    摘要翻译: 连接器检查装置包括连接器检查装置,其具有可由杠杆操作的主体朝向连接器移动。 连接器检查装置还具有连接器支撑。 检测销可滑动地设置在主体内并连接到检查端子。 检测针在检测片上具有导电接触面和检测指。 在将检测销插入连接器中之后,将端子完全插入连接器的端子容纳腔内可允许导电面与端子C的端部之间的接触。连接器具有悬臂弹性支撑件,其包括锁定突起14a 。 该装置可以检测连接器检查装置A是否完全与连接器接合。

    Microwave oven with inverter controlled power source
    10.
    发明授权
    Microwave oven with inverter controlled power source 失效
    带逆变器控制电源的微波炉

    公开(公告)号:US5149929A

    公开(公告)日:1992-09-22

    申请号:US677246

    申请日:1991-03-29

    IPC分类号: G05D23/26 H01J25/50 H05B6/68

    CPC分类号: G05D23/26 H05B6/666

    摘要: A microwave oven with an invertor control power source produces a microwave by the use of the magnetron in relation to the high frequency power generated by the invertor control power source. The heat sensitive ferreit beads provided on the lead wire for transmitting the high frequency power to the magnetron changes the inductance of the wire from the high level to the low level at around a threshold temperature lower than the working equilibrium temperature of the magnetron. The cathode filament current remains within the allowable range, and the moding of the magnetron is prevented. The magnetron can operate in a long life time.