公开(公告)号：US20120144938A1

公开(公告)日：2012-06-14

申请号：US13390973

申请日：2010-09-06

申请人： Katsuyasu Inagaki ,  Kenji Aiko ,  Masaru Kamada ,  Toshiro Kubo ,  Yusuke Miyazaki

发明人： Katsuyasu Inagaki ,  Kenji Aiko ,  Masaru Kamada ,  Toshiro Kubo ,  Yusuke Miyazaki

IPC分类号： G01N1/34

CPC分类号： H01L21/67288 ,  G01N21/9501 ,  H01L21/67017

摘要： Inspection units have moving parts such as XY-movement stage mechanisms and high-speed rotation mechanisms for inspecting the entire surfaces of substrates, and it is difficult for fan filter units (FFUs) to completely remove all foreign materials. The provided inspection device has: a fan filter unit divided into a plurality of regions; an exhaust unit, divided into a plurality of regions, for getting rid of air from the fan filter unit; and a transfer system disposed between the fan filter unit and the exhaust unit. The chief characteristic of the provided inspection device is that the flow rate in some of the regions of the fan filter unit and the flow rate in some of the regions of the exhaust unit are controlled in accordance with the operations of the transfer system.

摘要翻译： 检查单元具有运动部件，例如XY移动台机构和用于检查基板整个表面的高速旋转机构，并且风扇过滤器单元（FFU）难以完全去除所有异物。 所提供的检查装置具有：分为多个区域的风扇过滤器单元; 排气单元，分成多个区域，用于从风扇过滤器单元除去空气; 以及设置在风扇过滤器单元和排气单元之间的传送系统。 提供的检查装置的主要特征是根据传送系统的操作来控制风扇过滤器单元的一些区域中的流量和排气单元的一些区域中的流量。

公开(公告)号：US06979821B2

公开(公告)日：2005-12-27

申请号：US10730106

申请日：2003-12-09

申请人： Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

发明人： Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

IPC分类号： H01J37/244 ,  G01Q30/02 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/04753 ,  H01J2237/04756

摘要： Image observation at high resolution is realized and irregularity information of a sample is obtained.The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.

摘要翻译： 实现高分辨率的图像观察，获得样品的不规则信息。 通过布置在磁场泄漏型物镜7的电子源1侧的检测器10a和10b来检测与样品8的表面成小角度方向发射的反射电子12a和 形成样品图像。 从样本图像中出现的光和阴影的效果获得样本的不规则信息。

公开(公告)号：US20050199808A1

公开(公告)日：2005-09-15

申请号：US11020255

申请日：2004-12-27

申请人： Kenji Obara ,  Toshifumi Honda ,  Toshiro Kubo

发明人： Kenji Obara ,  Toshifumi Honda ,  Toshiro Kubo

IPC分类号： G01N23/225 ,  H01J37/28 ,  H01L21/66

CPC分类号： H01J37/28 ,  H01J37/241 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/2809 ,  H01J2237/2817

摘要： To acquire defect images even when a defect exists below an optically transparent film, an electron optical system of an electron microscope is set to a first imaging condition. A defect position of a specimen is set so as to fall within the visual field of the electron microscope, using position data of a defect of the specimen. The position of the defect is imaged by the electron microscope set to the first imaging condition to obtain a first image corresponding to the defect position. The first image is processed to determine whether a defect exists. The electron optical system is then set to a second imaging condition on the basis of the result of determination. A point imaged under the first imaging condition is imaged by the electron microscope set to the second imaging condition to acquire a second image corresponding to a defect position.

摘要翻译： 为了获得缺陷图像，即使当缺陷存在于光学透明膜下方时，将电子显微镜的电子光学系统设置为第一成像条件。 使用试样的缺陷的位置数据，将试样的缺陷位置设定为落入电子显微镜的视野内。 通过设置为第一成像条件的电子显微镜对缺陷的位置成像，以获得对应于缺陷位置的第一图像。 处理第一个图像以确定是否存在缺陷。 然后基于确定的结果将电子光学系统设置为第二成像条件。 在第一成像条件下成像的点通过设置为第二成像条件的电子显微镜成像，以获得对应于缺陷位置的第二图像。

公开(公告)号：US06555819B1

公开(公告)日：2003-04-29

申请号：US09679006

申请日：2000-10-04

申请人： Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

发明人： Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

IPC分类号： H01J37244

CPC分类号： H01J37/28 ,  H01J2237/04753 ,  H01J2237/04756

摘要： Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.

摘要翻译： 实现高分辨率的图像观察并获得样品的不规则信息。在与样品8的表面成小角度的方向上发射的反射电子12a被布置在电子侧的检测器10a和10b检测 形成磁场泄漏型物镜7的源极1和样本图像。 从样本图像中出现的光和阴影的效果获得样本的不规则信息。

公开(公告)号：US5442182A

公开(公告)日：1995-08-15

申请号：US145161

申请日：1993-11-03

申请人： Toshiro Kubo ,  Toshiyuki Ohashi ,  Mikio Ichihashi ,  Yuji Sato

发明人： Toshiro Kubo ,  Toshiyuki Ohashi ,  Mikio Ichihashi ,  Yuji Sato

IPC分类号： G01Q30/02 ,  G01Q30/20 ,  H01J37/141

CPC分类号： H01J37/141

摘要： An electron lens comprising a first exciting coil, a second exciting coil, a casing for encompassing the first and second exciting coils, and an excitation control apparatus for controlling the excitation state of at least the first exciting coil independently of the second exciting coil. The excitation control apparatus independently controls currents applied to the first and second exciting coils, respectively. At this time, exothermy of each coil can be kept constant and thermal deformation of the casing can be prevented by keeping the sum of the absolute values of the currents applied to the coils.

摘要翻译： 一种电子透镜，包括第一激励线圈，第二激励线圈，用于包围第一和第二激励线圈的壳体，以及用于独立于第二激励线圈来控制至少第一励磁线圈的激励状态的励磁控制装置。 励磁控制装置分别独立地控制施加到第一和第二励磁线圈的电流。 此时，可以通过保持施加到线圈的电流的绝对值的总和来保持每个线圈的放热恒定并且可以防止壳体的热变形。

公开(公告)号：US20050087686A1

公开(公告)日：2005-04-28

申请号：US10954421

申请日：2004-10-01

申请人： Toshifumi Honda ,  Toshiro Kubo

发明人： Toshifumi Honda ,  Toshiro Kubo

IPC分类号： G01N23/225 ,  G06T1/00 ,  G21K7/00 ,  H01J37/20 ,  H01L21/66 ,  G01N23/00

CPC分类号： G01N23/2251 ,  H01J2237/2814 ,  H01J2237/2815 ,  H01J2237/2817

摘要： This invention provides a technique for observing defects, which can automatically decide a direction from inclined observation and take an inclined review image. In a defect observing system for detecting the defects and thereafter observing images of the defects from various directions in detail, positions of inclined images to be taken are automatically displayed on a display screen from a planar image (top-down image) of a SEM using CAD data, and the defects are selected from the images displayed on the display screen based on specification by a user, an inclined angle and direction are determined per selected image to take an inclined image (beam-tilt image), and the inclined image of each defect is acquired.

摘要翻译： 本发明提供了一种用于观察缺陷的技术，其可以自动地确定倾斜观察的方向并采取倾斜的审查图像。 在用于检测缺陷的缺陷观察系统中，然后详细地从各个方向观察缺陷的图像，将要采用的倾斜图像的位置从SEM的平面图像（自顶向下图像）自动显示在显示屏上，使用 CAD数据，并且根据用户的指定从显示屏上显示的图像中选择缺陷，根据所选图像确定倾斜角度和方向以获取倾斜图像（波束倾斜图像），并且倾斜图像 每个缺陷获得。

公开(公告)号：US07105815B2

公开(公告)日：2006-09-12

申请号：US11020255

申请日：2004-12-27

申请人： Kenji Obara ,  Toshifumi Honda ,  Toshiro Kubo

发明人： Kenji Obara ,  Toshifumi Honda ,  Toshiro Kubo

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/28 ,  H01J37/241 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/2809 ,  H01J2237/2817

摘要： To acquire defect images even when a defect exists below an optically transparent film, an electron optical system of an electron microscope is set to a first imaging condition. A defect position of a specimen is set so as to fall within the visual field of the electron microscope, using position data of a defect of the specimen. The position of the defect is imaged by the electron microscope set to the first imaging condition to obtain a first image corresponding to the defect position. The first image is processed to determine whether a defect exists. The electron optical system is then set to a second imaging condition on the basis of the result of determination. A point imaged under the first imaging condition is imaged by the electron microscope set to the second imaging condition to acquire a second image corresponding to a defect position.

摘要翻译： 为了获得缺陷图像，即使当缺陷存在于光学透明膜下方时，将电子显微镜的电子光学系统设置为第一成像条件。 使用试样的缺陷的位置数据，将试样的缺陷位置设定为落入电子显微镜的视野内。 通过设置为第一成像条件的电子显微镜对缺陷的位置成像，以获得对应于缺陷位置的第一图像。 处理第一个图像以确定是否存在缺陷。 然后基于确定的结果将电子光学系统设置为第二成像条件。 在第一成像条件下成像的点通过设置为第二成像条件的电子显微镜成像，以获得对应于缺陷位置的第二图像。

公开(公告)号：US06765205B2

公开(公告)日：2004-07-20

申请号：US10601531

申请日：2003-06-24

申请人： Isao Ochiai ,  Toshiei Kurosaki ,  Toshiro Kubo ,  Naomasa Suzuki

发明人： Isao Ochiai ,  Toshiei Kurosaki ,  Toshiro Kubo ,  Naomasa Suzuki

IPC分类号： G01N2300

CPC分类号： G01N23/2251 ,  H01J37/256 ,  H01J37/265 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/2561 ,  H01J2237/2817

摘要： An electron microscope including an apparatus for x-ray analysis, is capable of performing elemental analysis with X-rays emitted from a specimen by electron beam irradiation, that is, inspection of foreign particles, for enhancement of yields in manufacturing, at high speed and with high precision and high space resolving power. The current quantity of the electron beam is automatically controlled such that an X-ray count rate falls within a range of 1000 to 2000 counts per second, a plurality of X-ray energy regions are set up when checking an X-ray spectrum against reference spectra stored in a database for analysis of the X-ray spectrum, matching is performed for each of the X-ray energy regions, and the distribution of the elements observed is analyzed on the basis of an intensity ratio between X-ray sample spectra obtained by electron beam irradiation at not less than two varied acceleration voltages.

摘要翻译： 包括用于X射线分析的装置的电子显微镜能够通过电子束照射进行从样品发射的X射线进行元素分析，即外来粒子的检查，以提高制造中的产率，高速度和 具有高精度和高空间分辨能力。 自动控制电子束的电流量，使得X射线计数率落在每秒1000〜2000个计数的范围内，在检查基准X射线光谱时建立多个X射线能量区域 存储在用于X射线光谱分析的数据库中的光谱，对每个X射线能量区域进行匹配，并且基于获得的X射线样品光谱之间的强度比分析观察到的元素的分布 通过电子束照射不少于两个变化的加速电压。

公开(公告)号：US5310156A

公开(公告)日：1994-05-10

申请号：US933703

申请日：1992-08-24

申请人： Tadanobu Matsumura ,  Yasuhide Iwamoto ,  Yoshio Makino ,  Osamu Nishina ,  Katuei Satou ,  Takasi Watanabe ,  Yujiro Hata ,  Toshiro Kubo ,  Wataru Ishizu ,  Takashi Simura

发明人： Tadanobu Matsumura ,  Yasuhide Iwamoto ,  Yoshio Makino ,  Osamu Nishina ,  Katuei Satou ,  Takasi Watanabe ,  Yujiro Hata ,  Toshiro Kubo ,  Wataru Ishizu ,  Takashi Simura

IPC分类号： A47B91/00 ,  F16M13/00

CPC分类号： A47B91/00

摘要： An earthquake-proof leg support structure (10) of an electronic apparatus comprising a leg (12) vertically downwardly extending from the outer case (1) and a dish-shaped leg support seat (20) to receive the leg (12). The leg support seat (20) includes a metal element (28) having an upper surface (22) over which the leg (12) slides and a peripheral flange (24) against which the leg (12) abuts, and a plastic liner (30) having a lower flat smooth surface (26) which is slidable on the floor. The lower end surface (14) of the leg is of a convex spherical shape and the upper surface (22) of the leg support seat includes a central surface portion (22a) of a concave spherical shape and a cone-shaped slope portion (22b) arranged around and tangential to the central surface portion, with the radius of curvature of the leg (12) being smaller than that of the upper surface (22) of the leg support seat (20 ).

摘要翻译： 电子设备的防震腿部支撑结构（10）包括从外壳（1）垂直向下延伸的腿部（12）和用于接收腿部（12）的碟形腿支撑座（20）。 腿支撑座（20）包括具有上表面（22）的金属元件（28），腿部（12）滑过该金属元件（28），腿部（12）邻接的周边凸缘（24）和塑料衬垫 30）具有可在地板上滑动的较低平坦平滑表面（26）。 腿部的下端面（14）为凸状，腿部支撑座的上表面（22）具有凹球面状的中央面部（22a）和锥形倾斜部（22b ），其中所述腿部（12）的曲率半径小于所述腿部支撑座（20）的上表面（22）的曲率半径。