公开(公告)号：US20060262320A1

公开(公告)日：2006-11-23

申请号：US11433485

申请日：2006-05-15

申请人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  David Sesko

发明人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  David Sesko

IPC分类号： G01B9/02

CPC分类号： G01B9/02048 ,  G01B9/02004 ,  G01B9/02081 ,  G01B2290/45 ,  G01B2290/70

摘要： A wavelength-variable light source is configured to emit a light with a wavelength (λ), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.

摘要翻译： 波长可变光源被配置为发射波长（λ）的光，其在扫描宽度（Deltalambda）内是可变的。 干涉仪具有相干长度（DeltaL），其可以从（Deltalambda）和（λ）确定。 控制器确定扫描宽度（Deltalambda）的合适幅度，而CCD照相机在曝光时间（Te）中拍摄条纹图像，曝光时间（Te）设置为比波长扫描时间长。

公开(公告)号：US20060250618A1

公开(公告)日：2006-11-09

申请号：US11411809

申请日：2006-04-27

申请人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  David Sesko

发明人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  David Sesko

IPC分类号： G01B11/02

CPC分类号： G01B9/0201 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70

摘要： An interferometer comprises a wavelength-variable light source. A reference light and a measurement light are synthesized, and the synthesized light is split into a plurality of split lights. A certain phase difference is provided between the split lights through phase shifting optical members. A plurality of interference fringe images formed by the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes and the amounts of phase shift of the interference fringes formed by the plurality of split lights are calculated, based on interference fringe intensities of the imaged interference fringes, which are obtained by disposing a calibrating substrate instead of the measuring object varying the wavelength of the emitted light to plural values, and operating the imaging unit to capture a plurality of images of interference fringes obtained by the split lights.

公开(公告)号：US20070229843A1

公开(公告)日：2007-10-04

申请号：US11396368

申请日：2006-03-31

申请人： David Sesko

发明人： David Sesko

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B2290/45 ,  G01B2290/70

摘要： A detector for interferometric distance or displacement measurement. The detector may receive orthogonally polarized object and reference path output beams, which are directed to a polarization-sensitive beam deflecting element. The beam deflecting element deflects one or both orthogonally polarized beams to provide a desired divergence angle between the beams. The diverging beams are input to a mixing polarizer. The beams exiting the mixing polarizer are similarly polarized and therefore interfere. The interfering diverging beams form interference fringes. The spatial phase of the fringes relative to a photodetector array characterizes the phase difference between the object and reference beams of the interferometer.

摘要翻译： 用于干涉距离或位移测量的检测器。 检测器可以接收正交极化物体和参考路径输出光束，其被引导到偏振敏感光束偏转元件。 光束偏转元件偏转一个或两个正交偏振光束以在光束之间提供期望的发散角。 发散光束被输入到混合偏振器。 离开混合偏振器的光束类似地偏振，因此是干涉的。 干扰发散光束形成干涉条纹。 条纹相对于光电检测器阵列的空间相位表征干涉仪的物体和参考光束之间的相位差。

公开(公告)号：US20060087658A1

公开(公告)日：2006-04-27

申请号：US10972403

申请日：2004-10-26

申请人： David Sesko ,  Mark Feldman

发明人： David Sesko ,  Mark Feldman

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B2290/45 ,  G01B2290/70

摘要： A compact monolithic quadrature detector generates four signals from an input beam including orthogonally polarized object and reference beam components provided by an interferometer. The single input beam may be split into four output beams using a first beam splitting interface between two prisms, reflections at two air interface surfaces of the prisms, and a second beam splitting element. Different respective predetermined phase shifts may be imposed on the respective output beams by coatings on the beam splitting surfaces, which impart a different phase shift to the components of a transmitted beam as compared to a reflected beam. The four relatively phase shifted output beams may be directed through polarizers onto respective detectors to provide four signals usable to eliminate many common mode errors and determine the phase difference between the components of the original input beam with high accuracy.

摘要翻译： 紧凑的单片正交检测器从包括由干涉仪提供的正交偏振对象和参考光束分量的输入光束产生四个信号。 单个输入光束可以使用两个棱镜之间的第一光束分离界面，在棱镜的两个空气界面处的反射和第二分束元件被分割成四个输出光束。 可以通过分束表面上的涂层对相应的输出光束施加不同的各自的预定相移，与反射光束相比，其对发射光束的分量赋予不同的相移。 四个相移的输出光束可以通过偏振器引导到相应的检测器上，以提供可用于消除许多共模误差的四个信号，并以高精度确定原始输入光束的分量之间的相位差。

公开(公告)号：US20050105565A1

公开(公告)日：2005-05-19

申请号：US10705903

申请日：2003-11-13

申请人： Joseph Tobiason ,  David Sesko

发明人： Joseph Tobiason ,  David Sesko

IPC分类号： H01S3/106 ,  H01S5/14 ,  H01S3/10

CPC分类号： H01S3/1062 ,  H01S3/08059 ,  H01S5/02248 ,  H01S5/141

摘要： An external cavity laser has a wavelength of the laser output that is tuned by a rotary tuning element mounted on the axle of a motor. The rotary tuning element includes a variable thickness interference film for wavelength selection, and a variable thickness compensation prism to adjust the cavity length appropriately for the selected wavelength, to stable wavelengths and mode-hop-free tuning ranges as the tuning element is rotated.

摘要翻译： 外腔激光器具有由安装在电动机轴上的旋转调谐元件调谐的激光输出的波长。 旋转调谐元件包括用于波长选择的可变厚度干涉膜和可调节厚度补偿棱镜，用于在调谐元件旋转时将所选择的波长适当地调节腔长度，到稳定波长和无跳跃调谐范围。

公开(公告)号：US20070024860A1

公开(公告)日：2007-02-01

申请号：US11193437

申请日：2005-08-01

申请人： Joseph Tobiason ,  David Sesko

发明人： Joseph Tobiason ,  David Sesko

IPC分类号： G01B11/02

CPC分类号： G01B9/02004 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02048 ,  G01B9/02081 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70

摘要： An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wavelengths simultaneously, to allow reduction or elimination of certain common-mode error components, including dynamic error components. The device may scan at least one of the laser wavelengths over a relatively narrow range and may use quadrature detectors to provide enough signal data to allow certain self-corrections to be performed on the resulting scanned signals and measurements. A novel tunable laser and/or quadrature detector may provide advantages in combination with the device.

公开(公告)号：US20070008550A1

公开(公告)日：2007-01-11

申请号：US11175271

申请日：2005-07-07

申请人： Joseph Tobiason ,  David Sesko ,  Benjamin Jones ,  Michelle Milvich ,  Vidya Venkatachalam

发明人： Joseph Tobiason ,  David Sesko ,  Benjamin Jones ,  Michelle Milvich ,  Vidya Venkatachalam

IPC分类号： G01B11/02

CPC分类号： G01B9/02032 ,  G01B9/02019 ,  G01B9/02097 ,  G01B11/26

摘要： A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.

摘要翻译： 确定倾斜量的方法可以包括将至少两个相干波前投射到目标表面，波前从目标表面反射以在检测器上产生干涉条纹图案，并将光束传送到目标表面，透射光束 从目标表面反射以在检测器上形成束斑。 可以基于干涉条纹图案来确定表示到目标表面的距离的条纹间距。 可以确定当目标表面相对于光束的入射角相对于光束点的标称位置时，光斑的检测器上的位移。 目标表面相对于标称入射角的倾斜量可以基于束斑的位移和所确定的边缘间距来确定。

公开(公告)号：US20060215724A1

公开(公告)日：2006-09-28

申请号：US11088961

申请日：2005-03-24

申请人： David Sesko

发明人： David Sesko

IPC分类号： H01S3/08

CPC分类号： H01S5/141 ,  H01S5/143

摘要： An external cavity diode laser may have an output wavelength that is tuned by an end mirror mounted on an element having a flexure hinge. The flexure hinge may be designed to exhibit a stationary pivot point over a desired tuning range, and may allow the external cavity to be tuned without the laser hopping between longitudinal modes. Chromatic dispersion of the laser medium may be accommodated by adjusting a distance between a laser diode and a grating included within the external cavity. The position may be adjusted to find an operating configuration which allows mode-hop-free tuning over the entire desired tuning range.

摘要翻译： 外腔二极管激光器可以具有由安装在具有挠曲铰链的元件上的端镜调谐的输出波长。 弯曲铰链可以被设计成在期望的调谐范围上展现固定的枢轴点，并且可以允许在纵向模式之间不激光跳跃的情况下调谐外部空腔。 激光介质的色散可以通过调节激光二极管和包含在外腔内的光栅之间的距离来适应。 可以调整位置以找到允许在整个期望调谐范围内进行无跳跃调谐的操作配置。

公开(公告)号：US20060012772A1

公开(公告)日：2006-01-19

申请号：US10891138

申请日：2004-07-15

申请人： David Sesko

发明人： David Sesko

IPC分类号： G01C3/08

CPC分类号： G01S17/32

摘要： An external cavity laser has an external cavity that is formed between a target surface and a laser diode facet located farthest from the target surface. A chromatic dispersive element is disposed in the external cavity, and focuses light from the laser diode such that one wavelength is focused at a focal spot on the target surface. Light reflected from the focal spot on the target surface is the predominant wavelength coupled back into the laser waveguide, which provides a feedback signal that determines the oscillation wavelength of the laser diode. The laser diode therefore outputs a well-defined wavelength of light which corresponds to the distance between the chromatic dispersive element and the target surface.

摘要翻译： 外腔激光器具有形成在目标表面和距目标表面最远的激光二极管面之间的外部空腔。 色散元件设置在外部空腔中，并且聚焦来自激光二极管的光，使得一个波长聚焦在目标表面上的焦斑处。 从目标表面上的焦点反射的光是主要波长耦合回激光波导，其提供确定激光二极管的振荡波长的反馈信号。 因此，激光二极管输出对应于色散元件和目标表面之间的距离的明确定义的光波长。