公开(公告)号：US5331275A

公开(公告)日：1994-07-19

申请号：US987959

申请日：1992-12-09

申请人： Kazuyuki Ozaki ,  Shinichi Wakana ,  Yoshiro Goto ,  Akio Ito ,  Kazuo Okubo ,  Soichi Hama ,  Akira Fujii ,  Yoko Sato

发明人： Kazuyuki Ozaki ,  Shinichi Wakana ,  Yoshiro Goto ,  Akio Ito ,  Kazuo Okubo ,  Soichi Hama ,  Akira Fujii ,  Yoko Sato

IPC分类号： G01R1/067 ,  G01R31/26 ,  G01R1/073 ,  G01R31/02

CPC分类号： G01Q20/04 ,  B82Y35/00 ,  G01Q60/30 ,  G01R1/067 ,  G01R1/06705 ,  G01R1/06711 ,  G01R1/06727 ,  Y10S977/852

摘要： A probing device includes a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, a unit for moving the moving member relatively to the sample, a transducing unit for generating information of voltage or current by means of light, a connecting unit having a low electric resistance, for connecting the transducing unit and the end portion of the probe, a detecting unit for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring unit for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting unit, by way of the transducing unit when the probe is contacted with the measurement point. By the constitution, it is possible to realize a voltage measurement with both an enhanced space resolution and an enhanced time resolution. Also, by using the probing device in an integrated circuit testing apparatus or system, it is possible to realize a stable probing to a minute wiring without increasing an electrical load with respect to the minute wiring and thus contribute to an improvement in the precision of a voltage measurement.

摘要翻译： 探测装置包括微小探针，其中至少一个端部由导电材料形成，悬臂具有一个连接有探针的端部，另一端固定在可沿着X方向移动相对于样品的移动部件 ，Y和Z，用于相对于样品移动移动部件的单元，用于通过光产生电压或电流的信息的转换单元，具有低电阻的连接单元，用于连接换能单元和端部 的检测单元，用于通过所述移动构件与所述样本的相对接近来检测由所述探针和所述样本之间产生的力而在所述悬臂中产生的物理量的变化的检测单元，以及用于测量所述电极的电压的电压测量单元 在探针与测量点接触时，通过换能单元，基于检测单元的输出确定样本上的测量点。 通过该结构，可以实现具有增强的空间分辨率和增强的时间分辨率的电压测量。 此外，通过在集成电路检测装置或系统中使用探测装置，可以在不增加相对于微小布线的电负载的情况下实现对微小布线的稳定探测，并且因此有助于提高 电压测量。

公开(公告)号：US5999005A

公开(公告)日：1999-12-07

申请号：US863278

申请日：1997-05-27

申请人： Akira Fujii ,  Yoko Sato ,  Soichi Hama ,  Kazuyuki Ozaki ,  Yoshiro Goto ,  Yasutoshi Umehara ,  Yoshiaki Ogiso

发明人： Akira Fujii ,  Yoko Sato ,  Soichi Hama ,  Kazuyuki Ozaki ,  Yoshiro Goto ,  Yasutoshi Umehara ,  Yoshiaki Ogiso

IPC分类号： G01B11/00 ,  G01N37/00 ,  G01Q30/20 ,  G01Q60/24 ,  G01R1/067 ,  G01R1/07 ,  G01R19/00 ,  G01R31/302 ,  H01L21/66 ,  G01R29/12

CPC分类号： G01R1/071 ,  Y10S977/87

摘要： A voltage and displacement sensitive probe with an electro-optic crystal, electrically conductive transparent films and adhered to a pair of parallel surfaces on the electro-optic crystal, a transparent elastic film which circumferential portion is bonded to the frame and which is symmetric with respect to any plane through the axis thereof, a probing needle bonded at its reflective bottom surface to the central portion on the film, a holder for holding the electro-optic crystal and the transparent elastic film via frame concentrically, a lead for grounding, and electrically conductive films for connecting between the films. Displacement detection of the probing needle is based upon the change in the length of the path of the light travelling through the electro-optic crystal being reflected by the surface and travelling in reverse direction. Voltage detection of the probing needle is based upon the phase difference between the two linearly-polarized light components.

摘要翻译： 具有电光晶体的电压和位移敏感探针，导电透明膜并粘附到电光晶体上的一对平行表面，透明弹性膜，其周向部分结合到框架上并且相对于 通过其轴线到任何平面，探针在其反射底表面处连接到膜上的中心部分，用于通过框架同心地保持电光晶体和透明弹性膜的保持器，用于接地的引线和电 用于连接膜之间的导电膜。 探针的位移检测是基于通过电光晶体传播的光的路径的长度随表面反射并沿相反方向行进的变化。 探针的电压检测基于两个线性偏振光分量之间的相位差。

公开(公告)号：US5677635A

公开(公告)日：1997-10-14

申请号：US282265

申请日：1994-07-29

申请人： Akira Fujii ,  Yoko Sato ,  Soichi Hama ,  Kazuyuki Ozaki ,  Yoshiro Goto ,  Yasutoshi Umehara ,  Yoshiaki Ogiso

发明人： Akira Fujii ,  Yoko Sato ,  Soichi Hama ,  Kazuyuki Ozaki ,  Yoshiro Goto ,  Yasutoshi Umehara ,  Yoshiaki Ogiso

IPC分类号： G01B11/00 ,  G01N37/00 ,  G01Q30/20 ,  G01Q60/24 ,  G01R1/067 ,  G01R1/07 ,  G01R19/00 ,  G01R31/302 ,  H01L21/66 ,  G01R29/12

CPC分类号： G01R1/071 ,  Y10S977/87

摘要： A voltage and displacement sensitive probe with an electro-optic crystal, electrically conductive transparent films and adhered to a pair of parallel surfaces on the electro-optic crystal, a transparent elastic film which circumferential portion is bonded to the frame and which is symmetric with respect to any plane through the axis thereof, a probing needle bonded at its reflective bottom surface to the central portion on the film, a holder for holding the electro-optic crystal and the transparent elastic film via frame concentrically, a lead for grounding, and electrically conductive films for connecting between the films. Displacement detection of the probing needle is based upon the change in the length of the path of the light travelling through the electro-optic crystal being reflected by the surface and travelling in reverse direction. Voltage detection of the probing needle is based upon the phase difference between the two linearly-polarized light components.

摘要翻译： 具有电光晶体的电压和位移敏感探针，导电透明膜并粘附到电光晶体上的一对平行表面，透明弹性膜，其周向部分结合到框架上并且相对于 通过其轴线到任何平面，探针在其反射底表面处连接到膜上的中心部分，用于通过框架同心地保持电光晶体和透明弹性膜的保持器，用于接地的引线和电 用于连接膜之间的导电膜。 探针的位移检测是基于通过电光晶体传播的光的路径的长度随表面反射并沿相反方向行进的变化。 探针的电压检测基于两个线性偏振光分量之间的相位差。

公开(公告)号：US5550479A

公开(公告)日：1996-08-27

申请号：US498911

申请日：1995-07-06

申请人： Shinichi Wakana ,  Kazuyuki Ozaki ,  Yoshiro Goto ,  Yasutoshi Umehara

发明人： Shinichi Wakana ,  Kazuyuki Ozaki ,  Yoshiro Goto ,  Yasutoshi Umehara

IPC分类号： G01R31/302 ,  G01R31/303 ,  H01L21/66

CPC分类号： G01R31/303 ,  Y10S977/85

摘要： In a signal measuring apparatus a distance between a sample and a probe is adjusted, a voltage is applied through the sample and the probe and a signal is measured using a current flowing through the sample and the probe. That is, a current flowing through the sample and the probe is chopped by a laser beam at a prescribed frequency and is fetched into a sampling apparatus to generate a sample value of the current. The sample value is compared with a current setting value arbitrarily set in a comparator, and a reference voltage is generated according to a compared result in a control logic circuit and a D/A converter. The reference voltage is fed back to the sampling apparatus to converge the current flowing through the sample and the probe at the current setting value. Therefore, a signal of the sample is measured according to the reference voltage on condition that the current is converged at the current setting value.

摘要翻译： 在信号测量装置中，调整样品和探针之间的距离，通过样品和探针施加电压，并使用流过样品和探针的电流测量信号。 也就是说，流过样品和探针的电流以规定的频率被激光束切断，并被取入到采样装置中以产生电流的样本值。 将采样值与比较器中任意设定的当前设定值进行比较，并根据控制逻辑电路和D / A转换器中的比较结果生成参考电压。 将参考电压反馈到采样装置，使流过样品和探针的电流以当前设定值收敛。 因此，在电流以当前设定值收敛的条件下，根据参考电压来测量样品的信号。

公开(公告)号：US4755749A

公开(公告)日：1988-07-05

申请号：US897857

申请日：1986-08-19

申请人： Kazuo Ookubo ,  Akio Ito ,  Yoshiro Goto ,  Toshihiro Ishizuka ,  Kazuyuki Ozaki

发明人： Kazuo Ookubo ,  Akio Ito ,  Yoshiro Goto ,  Toshihiro Ishizuka ,  Kazuyuki Ozaki

IPC分类号： H01L21/66 ,  G01Q30/02 ,  G01R31/302 ,  G01R31/305 ,  H01J37/28 ,  G01N23/00

CPC分类号： G01R31/305

摘要： A strobo electron beam apparatus is provided having an energy analyzer, which: measures the voltage in the integrated circuit; samples a secondary electron signal by setting and connecting a retarding voltage of the energy analyzer to the measured phase; obtains the waveform of the secondary electron signal by a one time or several times phase scanning; and adds the product of a suitable coefficient and a difference between the secondary electron signal waveform, and a slice level to the retarding voltage and corrects the same. Multiple units are provided for: judging the conversion of the retarding voltage, from the value of the dispersion for the slice level of the secondary electron signal waveform; for adding and giving a mean of the retarding voltage, for obtaining a measured value of retarding voltage having a desired S/N ratio; and for random phase scanning so that the measured value having a desired S/N ratio can be easily obtained.

摘要翻译： 提供了一种频闪电子束装置，其具有：能量分析器，其测量集成电路中的电压; 通过将能量分析仪的延迟电压设置并连接到测量相位来对二次电子信号进行采样; 通过一次或多次相位扫描获得二次电子信号的波形; 并将二次电子信号波形和限幅电平之间的适当系数和差值的乘积加到延迟电压上并进行校正。 提供多个单元，用于从二次电子信号波形的限幅电平的色散值判断延迟电压的转换; 为了获得具有期望S / N比的延迟电压的测量值，用于添加和给出平均延迟电压; 并进行随机相位扫描，从而可以容易地获得具有期望S / N比的测量值。

公开(公告)号：US06259244B1

公开(公告)日：2001-07-10

申请号：US09487897

申请日：2000-01-19

申请人： Shin-ichi Wakana ,  Akinori Miyamoto ,  Soichi Hama ,  Kazuyuki Ozaki ,  Toshiaki Nagai

发明人： Shin-ichi Wakana ,  Akinori Miyamoto ,  Soichi Hama ,  Kazuyuki Ozaki ,  Toshiaki Nagai

IPC分类号： G01R31308

CPC分类号： G01R31/308 ,  G01R13/347

摘要： An electrooptic voltage waveform measuring apparatus, which includes an electrooptic element having an electrooptic effect; a first electrode mounted on the electrooptic element and electrically coupled to an object to be measured; and a first light source irradiating a light on the electrooptic element. The electrooptic voltage waveform measuring apparatus further includes a polarization analyzer for analyzing a polarization state of the light passed through the electrooptic element and detecting a voltage waveform of the object; a second electrode mounted on the electrooptic element and separated from the first electrode; and an amplifier having an input terminal coupled to the second electrode and outputting a low-frequency component of the voltage waveform of the object. The electrooptic voltage waveform measuring apparatus further includes a voltage waveform combining processor obtaining a measured voltage waveform of the object by combining a high-frequency component of the voltage waveform of the object obtained from an output of the polarization analyzer and the low-frequency component of the voltage waveform of the object output from the amplifier.

摘要翻译： 一种电光电压波形测量装置，其包括具有电光效应的电光元件; 安装在电光元件上并电耦合到待测量物体的第一电极; 以及将光照射在电光元件上的第一光源。 电波电压波形测量装置还包括：偏振分析器，用于分析通过电光元件的光的偏振态，并检测物体的电压波形; 安装在电光元件上并与第一电极分离的第二电极; 以及放大器，其具有耦合到所述第二电极的输入端子并输出所述对象的电压波形的低频分量。 电波电压波形测量装置还包括电压波形组合处理器，通过将从偏振分析器的输出获得的对象的电压波形的高频分量与低频分量的低频分量相组合，获得对象的测量电压波形 从放大器输出的物体的电压波形。

公开(公告)号：US6057677A

公开(公告)日：2000-05-02

申请号：US844995

申请日：1997-04-23

申请人： Shin-ichi Wakana ,  Akinori Miyamoto ,  Soichi Hama ,  Kazuyuki Ozaki ,  Toshiaki Nagai

发明人： Shin-ichi Wakana ,  Akinori Miyamoto ,  Soichi Hama ,  Kazuyuki Ozaki ,  Toshiaki Nagai

IPC分类号： G01R13/34 ,  G01R31/308

CPC分类号： G01R31/308 ,  G01R13/347

摘要： An electrooptic voltage waveform measuring apparatus, which includes an electrooptic element having an electrooptic effect; a first electrode mounted on the electrooptic element and electrically coupled to an object to be measured; and a first light source irradiating a light on the electrooptic element. The electrooptic voltage waveform measuring apparatus further includes a polarization analyzer for analyzing a polarization state of the light passed through the electrooptic element and detecting a voltage waveform of the object; a second electrode mounted on the electrooptic element and separated from the first electrode; and an amplifier having an input terminal coupled to the second electrode and outputting a low-frequency component of the voltage waveform of the object. The electrooptic voltage waveform measuring apparatus further includes a voltage waveform combining processor obtaining a measured voltage waveform of the object by combining a high-frequency component of the voltage waveform of the object obtained from an output of the polarization analyzer and the low-frequency component of the voltage waveform of the object output from the amplifier.

摘要翻译： 一种电光电压波形测量装置，其包括具有电光效应的电光元件; 安装在电光元件上并电耦合到待测量物体的第一电极; 以及将光照射在电光元件上的第一光源。 电波电压波形测量装置还包括：偏振分析器，用于分析通过电光元件的光的偏振态，并检测物体的电压波形; 安装在电光元件上并与第一电极分离的第二电极; 以及放大器，其具有耦合到所述第二电极的输入端子并输出所述对象的电压波形的低频分量。 电波电压波形测量装置还包括电压波形组合处理器，通过将从偏振分析器的输出获得的对象的电压波形的高频分量与低频分量的低频分量相组合，获得对象的测量电压波形 从放大器输出的物体的电压波形。

公开(公告)号：US5680056A

公开(公告)日：1997-10-21

申请号：US251953

申请日：1994-05-31

申请人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

发明人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

IPC分类号： G01R31/02 ,  G01R31/302 ,  G01R31/309 ,  H01L21/66

CPC分类号： G01R31/309

摘要： An apparatus for testing a circuit board has a holder for holding the circuit board, a detector for detecting the electrical characteristics of the circuit board, and a controller for controlling laser plasma switches. The detector has a path forming unit positioned away from the circuit board by a predetermined gap. The path forming unit forms a first conductive path between a position corresponding to a first test pad on a trace of the circuit board and a first power source, as well as a second conductive path between a position corresponding to a second test pad on another trace of the circuit board and a second power source. The controller emits a laser beam to a first space between the first test pad and the first conductive path and another laser beam toward a second space between the second test pad and the second conductive path, to make the first and second spaces conductive. The detector has a sampler connected to one of the first and second conductive paths, to sample electrical characteristic values of the circuit board.

摘要翻译： 用于测试电路板的装置具有用于保持电路板的保持器，用于检测电路板的电特性的检测器和用于控制激光等离子体开关的控制器。 检测器具有路径形成单元，该路径形成单元以预定的间隙远离电路板。 路径形成单元在对应于电路板的轨迹上的第一测试焊盘的位置与第一电源之间形成第一导电路径，以及在对应于另一迹线上的第二测试焊盘的位置之间的第二导电路径 的电路板和第二电源。 控制器将激光束发射到第一测试焊盘和第一导电路径之间的第一空间，另一激光束朝向第二测试焊盘和第二导电路径之间的第二空间，以使第一和第二空间导通。 检测器具有连接到第一和第二导电路径中的一个的采样器，以采样电路板的电特性值。

公开(公告)号：US6154038A

公开(公告)日：2000-11-28

申请号：US859266

申请日：1997-05-20

申请人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

发明人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

IPC分类号： G01R31/02 ,  G01R31/302 ,  G01R31/309 ,  H01L21/66

CPC分类号： G01R31/309

摘要： An apparatus for testing a circuit board has a holder for holding the circuit board, a detector for detecting the electrical characteristics of the circuit board, and a controller for controlling laser plasma switches. The detector has a path forming unit positioned away from the circuit board by a predetermined gap. The path forming unit forms a first conductive path between a position corresponding to a first test pad on a trace of the circuit board and a first power source, as well as a second conductive path between a position corresponding to a second test pad on another trace of the circuit board and a second power source. The controller emits a laser beam to a first space between the first test pad and the first conductive path and another laser beam toward a second space between the second test pad and the second conductive path, to make the first and second spaces conductive. The detector has a sampler connected to one of the first and second conductive paths, to sample electrical characteristic values of the circuit board.

公开(公告)号：US06366100B1

公开(公告)日：2002-04-02

申请号：US09634551

申请日：2000-08-08

申请人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

发明人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

IPC分类号： G01R3102

CPC分类号： G01R31/309

摘要： An apparatus for testing a circuit board has a holder for holding the circuit board, a detector for detecting the electrical characteristics of the circuit board, and a controller for controlling laser plasma switches. The detector has a path forming unit positioned away from the circuit board by a predetermined gap. The path forming unit forms a first conductive path between a position corresponding to a first test pad on a trace of the circuit board and a first power source, as well as a second conductive path between a position corresponding to a second test pad on another trace of the circuit board and a second power source. The controller emits a laser beam to a first space between the first test pad and the first conductive path and another laser beam toward a second space between the second test pad and the second conductive path, to make the first and second spaces conductive. The detector has a sampler connected to one of the first and second conductive paths, to sample electrical characteristic values of the circuit board.

摘要翻译： 用于测试电路板的装置具有用于保持电路板的保持器，用于检测电路板的电特性的检测器和用于控制激光等离子体开关的控制器。 检测器具有路径形成单元，该路径形成单元以预定的间隙远离电路板。 路径形成单元在对应于电路板的轨迹上的第一测试焊盘的位置与第一电源之间形成第一导电路径，以及在对应于另一迹线上的第二测试焊盘的位置之间的第二导电路径 的电路板和第二电源。 控制器将激光束发射到第一测试焊盘和第一导电路径之间的第一空间，另一激光束朝向第二测试焊盘和第二导电路径之间的第二空间，以使第一和第二空间导通。 检测器具有连接到第一和第二导电路径中的一个的采样器，以采样电路板的电特性值。