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    ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS
    2.
    发明申请
    ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS 失效
    用于加工结晶硅太阳能电池的先进平台

    公开(公告)号：US20100087028A1

    公开(公告)日：2010-04-08

    申请号：US12575088

    申请日：2009-10-07

    申请人： Keith Brian Porthouse ,  Peter G. Borden ,  Tristan R. Holtam ,  Lisong Zhou ,  Ian Scott Latchford ,  Derek Aqui ,  Vinay K. Shah

    发明人： Keith Brian Porthouse ,  Peter G. Borden ,  Tristan R. Holtam ,  Lisong Zhou ,  Ian Scott Latchford ,  Derek Aqui ,  Vinay K. Shah

    IPC分类号： H01L31/18 ,  H01L21/677

    CPC分类号： H01L21/67236 ,  H01L21/67069 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/67213 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

    摘要： The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. The processing chambers may be, for example, physical vapor deposition (PVD) or sputtering chambers, plasma enhanced chemical vapor deposition (PECVD) chambers, low pressure chemical vapor deposition (LPCVD) chambers, hot wire chemical vapor deposition (HWCVD) chambers, plasma nitridation (DPN) chambers, ion implant/doping chambers, atomic layer deposition (ALD) chambers, plasma etching chambers, annealing chambers, rapid thermal oxidation (RTO) chambers, rapid thermal annealing (RTA) chambers, substrate reorientation chambers, laser annealing chambers, and/or plasma cleaning stations. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.

    摘要翻译： 本发明通常提供用于原位处理用于形成太阳能电池装置区域的薄膜叠层的批量基板处理系统或集群工具。 在一种构造中，在批次中形成在每个基板上的薄膜叠层包含一个或多个含硅层和一个或多个金属层，其在包含在基板处理系统中的各个室内被沉积和进一步处理。 处理室可以是例如物理气相沉积（PVD）或溅射室，等离子体增强化学气相沉积（PECVD）室，低压化学气相沉积（LPCVD）室，热线化学气相沉积（HWCVD）室，等离子体 氮化（DPN）室，离子注入/掺杂室，原子层沉积（ALD）室，等离子体蚀刻室，退火室，快速热氧化（RTO）室，快速热退火（RTA）室，基板重新取向室，激光退火室 ，和/或等离子体清洁站。 在一个实施例中，一批太阳能电池基板在真空或惰性环境中同时转移，以防止污染影响太阳能电池的形成过程。

    Self aligning vacuum seal assembly
    5.
    发明授权
    Self aligning vacuum seal assembly 失效
    自调心真空密封组件

    公开(公告)号：US5773841A

    公开(公告)日：1998-06-30

    申请号：US372257

    申请日：1995-01-13

    申请人： Derek Aqui

    发明人： Derek Aqui

    IPC分类号： G02B7/00 ,  C23C14/00 ,  C23C16/52 ,  G01N21/01 ,  H01L21/02 ,  G01N21/49

    CPC分类号： G01N21/01 ,  C23C16/52

    摘要： A system and a method provide a vacuum seal to be used when mounting an optical device onto a process chamber or a pump line removing exhaust gas from a process chamber. The system of the present invention includes: (a) a threaded nipple, having an internal mating surface and a threaded external surface, that is attached to the process chamber or to the pump line; (b) an internally threaded coupling, provided for accommodating the optical device, that is screwed onto the threaded external surface of the nipple, and having internally a first mating surface touching the internal mating surface of the nipple and a second mating surface; (c) a window placed on the second mating surface of the coupling; (d) means for creating a vacuum seal, e.g. an elastomer O-ring, between the first mating surface of the coupling and the mating surface of the nipple; and (e) means for creating a vacuum seal, e.g. an elastomer O-ring, between the second mating surface of the coupling and the mating surface of the window. In one embodiment, an externally threaded retaining ring located adjacent to the window is screwed into the coupling until the second mating surface of the coupling and the mating surface of the window touch.

    摘要翻译： 当将光学装置安装到从处理室排出废气的处理室或泵管线上时，系统和方法提供一种真空密封。 本发明的系统包括：（a）具有内部匹配表面和螺纹外表面的螺纹接头，其连接到处理室或泵管线; （b）用于容纳所述光学装置的内螺纹联接器，其被旋拧到所述接头的螺纹外表面上，并且具有内部接触所述接头的内部配合表面的第一配合表面和第二配合表面; （c）放置在联接器的第二配合表面上的窗口; （d）用于产生真空密封件的装置，例如。 弹性体O形环，在联接器的第一配合表面和接头的配合表面之间; 和（e）用于产生真空密封件的装置，例如。 弹性体O形环，在联接器的第二配合表面和窗口的配合表面之间。 在一个实施例中，与窗口相邻的外螺纹保持环被螺纹连接到联接器中，直到联接器的第二配合表面和窗口的配合表面接触。

    Method to detect non-spherical particles using orthogonally polarized light
    7.
    发明授权
    Method to detect non-spherical particles using orthogonally polarized light 失效
    使用正交偏振光检测非球形颗粒的方法

    公开(公告)号：US5637881A

    公开(公告)日：1997-06-10

    申请号：US421572

    申请日：1995-04-11

    申请人： Raymond Burghard ,  Derek Aqui ,  Peter Borden

    发明人： Raymond Burghard ,  Derek Aqui ,  Peter Borden

    IPC分类号： G01N15/02 ,  G01N21/21 ,  G01N15/06

    CPC分类号： G01N15/0205 ,  G01N21/21

    摘要： A structure and a method provide a quasi bright field particle sensor for the detection of non-spherical particles, using a laser beam of predetermined polarization. A phase shift caused by non-spherical particles passing through the laser beam is utilized to detect the presence of such particles. In one embodiment, a single laser beam is used to detect the concentration of non-spherical particles in the pump line receiving the exhaust gas from a process chamber.

    摘要翻译： 结构和方法使用预定极化的激光束提供用于检测非球形颗粒的准亮场粒子传感器。 利用通过激光束的非球形颗粒引起的相移来检测这种颗粒的存在。 在一个实施例中，单个激光束用于检测在接收来自处理室的废气的泵管线中的非球形颗粒的浓度。