公开(公告)号：US20100244632A1

公开(公告)日：2010-09-30

申请号：US12659997

申请日：2010-03-26

申请人： Kazuya Maekawa ,  Takao Noguchi ,  Kenichi Tochi ,  Ken Unno

发明人： Kazuya Maekawa ,  Takao Noguchi ,  Kenichi Tochi ,  Ken Unno

IPC分类号： H01L41/04

CPC分类号： G01C19/5607 ,  H01L41/0815 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.

摘要翻译： 提供了具有能够使压电膜形成为无应力状态的晶体结构的压电元件。 压电膜包含a轴取向晶体和c轴取向晶体，其中a轴取向晶体和c轴取向晶体之间的晶格常数差不大于0.06。 本发明人新发现，当a轴取向晶体和c轴取向晶体之间的晶格常数差不大于0.06的条件时，可以在保持良好的压电特性的同时，减小在压电膜中累积的应力 Å满意 当满足条件时，c轴取向晶体和a轴取向晶体被适当地平衡，结果在理想状态下，压电膜的晶体颗粒在其基极上最紧密堆积，这有助于减小应力 。

公开(公告)号：US08127609B2

公开(公告)日：2012-03-06

申请号：US12318329

申请日：2008-12-24

申请人： Ken Unno ,  Takao Noguchi ,  Kenichi Tochi ,  Kazuya Maekawa

发明人： Ken Unno ,  Takao Noguchi ,  Kenichi Tochi ,  Kazuya Maekawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.

摘要翻译： 提供了一种角速度感测元件，其即使在给出过大的冲击时也能够防止振动臂的破损。 根据本实施例的角速度感测元件2包括由半导体材料形成的振荡臂22,23和24以及用于限制振荡臂的振荡范围的止动构件。 作为这样的止动构件，例如设置有至少在臂的单个平面内限制摆动臂的摆动范围的第一止动构件25。 固定部21，摆动臂22,23,24以及第一止动构件25通过加工硅等半导体材料而一体形成。

公开(公告)号：US08166815B2

公开(公告)日：2012-05-01

申请号：US12382274

申请日：2009-03-12

申请人： Kenichi Tochi ,  Takao Noguchi ,  Ken Unno ,  Kazuya Maekawa

发明人： Kenichi Tochi ,  Takao Noguchi ,  Ken Unno ,  Kazuya Maekawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5642

摘要： An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element 2 according to the present embodiment has a fixing portion 21 in the form of a frame, an element portion 20 disposed in the frame of the fixing portion 21 and having vibrating arms 21 to 24 in a drive system and a detection system, and a connecting portion 25 formed as a fixed-fixed beam having its both ends connected to the fixing portion 21 and having its intermediate portion connected to the element portion 20.

摘要翻译： 提供一种角速度传感器元件，其能够通过吸收振动来防止突然的外部施加的振动到元件部分的传播。 根据本实施例的角速度传感器元件2具有框架形式的固定部分21，设置在固定部分21的框架中并且在驱动系统中具有振动臂21至24的元件部分20和检测 系统，以及形成为固定梁的连接部分25，其两端连接到固定部分21，并且其中间部分连接到元件部分20。

公开(公告)号：US20090165556A1

公开(公告)日：2009-07-02

申请号：US12318329

申请日：2008-12-24

申请人： Ken Unno ,  Takao Noguchi ,  Kenichi Tochi ,  Kazuya Maekawa

发明人： Ken Unno ,  Takao Noguchi ,  Kenichi Tochi ,  Kazuya Maekawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.

摘要翻译： 提供了一种角速度感测元件，其即使在给出过大的冲击时也能够防止振动臂的破损。 根据本实施例的角速度感测元件2包括由半导体材料形成的振荡臂22,23和24以及用于限制振荡臂的振荡范围的止动构件。 作为这样的止动构件，例如设置有至少在臂的单个平面内限制摆动臂的摆动范围的第一止动构件25。 固定部21，摆动臂22,23,24以及第一止动构件25通过加工硅等半导体材料而一体形成。

公开(公告)号：US08148878B2

公开(公告)日：2012-04-03

申请号：US12659997

申请日：2010-03-26

申请人： Kazuya Maekawa ,  Takao Noguchi ,  Kenichi Tochi ,  Ken Unno

发明人： Kazuya Maekawa ,  Takao Noguchi ,  Kenichi Tochi ,  Ken Unno

IPC分类号： H01L41/04

CPC分类号： G01C19/5607 ,  H01L41/0815 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.

摘要翻译： 提供了具有能够使压电膜形成为无应力状态的晶体结构的压电元件。 压电膜包含a轴取向晶体和c轴取向晶体，其中a轴取向晶体和c轴取向晶体之间的晶格常数差不大于0.06。 本发明人新发现，当a轴取向晶体和c轴取向晶体之间的晶格常数差不大于0.06的条件时，可以在保持良好的压电特性的同时，减小在压电膜中累积的应力 Å满意 当满足条件时，c轴取向晶体和a轴取向晶体被适当地平衡，结果在理想状态下，压电膜的晶体颗粒在其基极上最紧密堆积，这有助于减小应力 。

公开(公告)号：US20090126551A1

公开(公告)日：2009-05-21

申请号：US12355110

申请日：2009-01-16

申请人： Kiyoshi TAKAMATSU ,  Kazuya Maekawa ,  Noriyuki Ogasawara

发明人： Kiyoshi TAKAMATSU ,  Kazuya Maekawa ,  Noriyuki Ogasawara

IPC分类号： B26D3/08

CPC分类号： C03B33/107 ,  B28D1/225 ,  C03B33/027 ,  C03B33/03 ,  C03B33/07 ,  Y10T83/0237 ,  Y10T83/0341 ,  Y10T83/0385 ,  Y10T83/9372 ,  Y10T225/10 ,  Y10T225/12 ,  Y10T225/321 ,  Y10T225/325 ,  Y10T225/371

摘要： In a glass cutter wheel where a blade edge is formed on a disk-shaped wheel, grooves having a predetermined shape are formed at a predetermined pitch in a 1/4 or smaller or 3/4 or smaller blade edge line portion of the entire perimeter of the blade edge. The ratio of the groove portion to the entire perimeter, which largely contributes to a scribing characteristic, is changed such that a desired scribing characteristic can be obtained.

摘要翻译： 在盘形轮上形成叶片边缘的玻璃切割轮中，在整个周边的1/4或更小或3/4或更小的叶片边缘线部分中以预定间距形成具有预定形状的槽 的刀刃。 改变了槽部分与整个周边的比例，这很大程度上有助于划线特性，使得可以获得期望的划线特性。

公开(公告)号：US20060042433A1

公开(公告)日：2006-03-02

申请号：US10532023

申请日：2003-10-23

申请人： Kazuya Maekawa ,  Akira Ejimatani

发明人： Kazuya Maekawa ,  Akira Ejimatani

IPC分类号： B26D1/00 ,  B23D35/00 ,  B27B33/12

CPC分类号： C03B33/023 ,  C03B33/027 ,  C03B33/107 ,  Y02P40/57 ,  Y10T83/0237 ,  Y10T83/04 ,  Y10T83/9341 ,  Y10T83/9403

摘要： A scribe method for a brittle material substrate is a method in which a plurality of scribe lines are formed in directions intersecting with one another in a surface of the brittle material substrate, wherein at least one scribe line in a first direction is formed by a scribe means generating a high-penetration vertical crack in the brittle material substrate by applying impacts of a short period to the point on the surface of the brittle material substrate. After this, at least one scribe line of a second direction in a direction intersecting with the at least one scribe line of the first direction is formed with the scribe means by scribing without producing intersections with the scribe lines of the first direction.

摘要翻译： 用于脆性材料基板的划片方法是在脆性材料基板的表面上彼此相交的方向上形成多条划线的方法，其中通过划线器形成至少一个沿第一方向的划线 意味着通过施加短时间对脆性材料基板的表面上的点的冲击，在脆性材料基板中产生高穿透垂直裂纹。 在此之后，通过划线而在与第一方向的划线相交的方向上与划线装置形成与第一方向的至少一个划线交叉的方向上的第二方向的至少一个划线。

公开(公告)号：US06796212B2

公开(公告)日：2004-09-28

申请号：US09924465

申请日：2001-08-09

申请人： Kazuya Maekawa ,  Haruo Wakayama

发明人： Kazuya Maekawa ,  Haruo Wakayama

IPC分类号： B26D308

CPC分类号： C03B33/107 ,  Y10T83/0385 ,  Y10T83/9403

摘要： A cutter wheel for brittle materials includes a disk with two side planes and an outer peripheral portion between the planes. The outer peripheral portion includes two bevel portions and a ridge portion between the bevel portions. The ridge portion has a plurality of peaks aligned along a circumferential line. For example, the ridge portion includes a straight line connecting two adjacent peaks in the plurality of peaks. Alternatively, the ridge portion is a depression between two adjacent peaks in the plurality of peaks, and the depth of the depression is deeper than the straight line connecting the two adjacent peaks. Preferably, the peaks are spaced apart at an equal distance.

摘要翻译： 用于脆性材料的切割轮包括具有两个侧面的盘和在该平面之间的外周部分。 外周部包括两个斜面部和斜边部之间的脊部。 脊部具有沿圆周线排列的多个峰。 例如，脊部包括连接多个峰中的两个相邻峰的直线。 或者，脊部是多个峰中的两个相邻峰之间的凹陷，并且凹陷的深度比连接两个相邻峰的直线更深。 优选地，峰以相等的距离间隔开。

公开(公告)号：US06532647B1

公开(公告)日：2003-03-18

申请号：US09506604

申请日：2000-02-18

申请人： Kazuya Maekawa ,  Akio Iijima ,  Tetsuya Mino

发明人： Kazuya Maekawa ,  Akio Iijima ,  Tetsuya Mino

IPC分类号： G11B5129

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/3903 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49117

摘要： A manufacturing method of a composite type thin-film magnetic head with a reading head element and an inductive writing head element, includes a step of forming the reading head element and its lead conductor layers on a first insulation layer, a step of forming a second insulation layer to cover the reading head element and the lead conductor layers, a step of forming a second shield layer on the second insulation layer, a step of forming a third insulation layer, and a step of forming via holes and a back gap hole. The via holes and back gap hole forming step is executed by reactive ion etching (RIE) for simultaneously removing the second insulation layer and the third insulation layer located at the via holes and the third insulation layer located at the back gap hole.

摘要翻译： 具有读取头元件和感应写入头元件的复合型薄膜磁头的制造方法包括在第一绝缘层上形成读取头元件及其引线导体层的步骤，形成第二绝缘层的步骤 绝缘层覆盖读头元件和引线导体层，在第二绝缘层上形成第二屏蔽层的步骤，形成第三绝缘层的步骤，以及形成通孔和后间隙孔的步骤。 通孔和后隙孔形成步骤通过反应离子蚀刻（RIE）来执行，用于同时去除位于通孔的第二绝缘层和第三绝缘层以及位于后间隙孔处的第三绝缘层。

公开(公告)号：US08292142B2

公开(公告)日：2012-10-23

申请号：US12669298

申请日：2008-06-16

申请人： Hirotake Haraguchi ,  Kazuya Maekawa

发明人： Hirotake Haraguchi ,  Kazuya Maekawa

IPC分类号： B26F3/00

CPC分类号： C03B33/12 ,  B28D1/00 ,  B28D1/225 ,  Y10T225/379

摘要： A manual breaker for cutting sheet glass. The manual breaker includes a rotational shaft (6) that rotatably holds first and second arms (2) and (4). A sheet glass having a scribe line formed thereon in advance is pinched among rollers (24) and (45). When handles (20) and (40) are actuated to narrow a distance between rollers (24) and (45), the roller (45) moves in a Y-axis direction and an impact shaft (51) impacts the sheet glass, accordingly. The sheet glass can be thereby easily cut into pieces along the scribe line and a sectional quality having a smooth cut surface can be ensured for the sheet glass.

摘要翻译： 用于切割玻璃板的手动断路器。 手动断路器包括可旋转地保持第一和第二臂（2）和（4）的旋转轴（6）。 预先在其上形成有划线的平板玻璃被夹在辊（24）和（45）中。 当手柄（20）和（40）被致动以缩小辊（24）和（45）之间的距离时，辊（45）沿Y轴方向移动，冲击轴（51）相应地冲击玻璃板 。 因此，能够将片状玻璃沿着划线容易地切断，能够确保平板玻璃具有平滑切削面的部分质量。