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公开(公告)号：US20100310757A1
公开(公告)日：2010-12-09
申请号：US12795259
申请日：2010-06-07
IPC分类号： B05C9/08
CPC分类号： H01L21/6715 , B05B12/08 , B05B12/084 , B05B15/52 , B05B15/555 , B05B15/557 , B05C5/0216 , B05C5/0291 , B05C11/08 , B05D1/005 , B41J2/165 , B41J2/16579 , H01L21/67051
摘要： According to one embodiment, a film forming system includes: a stage including a placement surface on which an object to be coated is placed; a rotating mechanism rotating the stage in a rotational direction along the placement surface; an application nozzle discharging a material onto the object placed on the stage for application; a moving mechanism relatively moving the stage and the application nozzle along the placement surface in a cross direction crossing the rotational direction; a controller performing a control to rotate the stage on which the object is placed through the rotating mechanism while relatively moving the stage and application nozzle along the placement surface in the cross direction through the moving mechanism and applying the material to the object on the stage through the application nozzle; and a cleaning apparatus cleaning the application nozzle.
摘要翻译： 根据一个实施例，一种成膜系统包括：包括放置表面的载物台，放置被涂物体; 旋转机构沿着所述放置面沿旋转方向旋转所述平台; 一种施加喷嘴，将材料排放到放置在载物台上的物体上以供施用; 沿与所述旋转方向交叉的方向沿所述放置面相对移动所述台和所述施加喷嘴的移动机构; 所述控制器通过所述移动机构使所述台架和所述施加喷嘴沿着所述布置表面沿所述横向方向相对移动，并且将所述材料施加到所述台架上的物体上，同时通过所述旋转机构旋转放置所述物体的台阶， 应用喷嘴; 以及清洁施加喷嘴的清洁装置。
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公开(公告)号：US20120025145A1
公开(公告)日：2012-02-02
申请号：US13268230
申请日：2011-10-07
申请人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
发明人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
CPC分类号： H01L21/6715 , B05C13/02 , B05D1/002 , B05D1/26
摘要： A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.
摘要翻译： 具有扁平端部的圆柱形喷嘴放置在旋转的涂覆物体的上方。 通过在涂布喷嘴的端部排出涂布溶液，同时使涂布喷嘴相对于被涂物在与涂布体的旋转方向相交的方向移动，将涂布液涂布在涂布体的表面上。 涂层喷嘴在其一端的一部分上形成有成角度的凹口。 旋转控制单元以涂覆喷嘴的凹口位于将涂布溶液供给到被旋转的涂布体的位置的上游位置的方式来控制涂布喷嘴的旋转。
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公开(公告)号：US08919277B2
公开(公告)日：2014-12-30
申请号：US13268230
申请日：2011-10-07
申请人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
发明人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
CPC分类号： H01L21/6715 , B05C13/02 , B05D1/002 , B05D1/26
摘要： A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.
摘要翻译： 具有扁平端部的圆柱形喷嘴放置在旋转的涂覆物体的上方。 通过在涂布喷嘴的端部排出涂布溶液，同时使涂布喷嘴相对于被涂物在与涂布体的旋转方向相交的方向移动，将涂布液涂布在涂布体的表面。 涂层喷嘴在其一端的一部分上形成有成角度的凹口。 旋转控制单元以涂覆喷嘴的凹口位于将涂布溶液供给到被旋转的涂布体的位置的上游位置的方式来控制涂布喷嘴的旋转。
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公开(公告)号：US08887657B2
公开(公告)日：2014-11-18
申请号：US12795259
申请日：2010-06-07
IPC分类号： B05C11/08 , B05B5/00 , B05B3/04 , H01L21/67 , B05B15/02 , B05B12/08 , B41J2/165 , B05C5/02 , B05D1/00
CPC分类号： H01L21/6715 , B05B12/08 , B05B12/084 , B05B15/52 , B05B15/555 , B05B15/557 , B05C5/0216 , B05C5/0291 , B05C11/08 , B05D1/005 , B41J2/165 , B41J2/16579 , H01L21/67051
摘要： According to one embodiment, a film forming system includes: a stage including a placement surface on which an object to be coated is placed; a rotating mechanism rotating the stage in a rotational direction along the placement surface; an application nozzle discharging a material onto the object placed on the stage for application; a moving mechanism relatively moving the stage and the application nozzle along the placement surface in a cross direction crossing the rotational direction; a controller performing a control to rotate the stage on which the object is placed through the rotating mechanism while relatively moving the stage and application nozzle along the placement surface in the cross direction through the moving mechanism and applying the material to the object on the stage through the application nozzle; and a cleaning apparatus cleaning the application nozzle.
摘要翻译： 根据一个实施例，一种成膜系统包括：包括放置表面的载物台，放置被涂物体; 旋转机构沿着所述放置面沿旋转方向旋转所述平台; 一种施加喷嘴，将材料排放到放置在载物台上的物体上以供施用; 沿与所述旋转方向交叉的方向沿所述放置面相对移动所述台和所述施加喷嘴的移动机构; 所述控制器通过所述移动机构使所述台架和所述施加喷嘴沿着所述布置表面沿所述横向方向相对移动，并且将所述材料施加到所述台架上的物体上，同时通过所述旋转机构旋转放置所述物体的台阶， 应用喷嘴; 以及清洁施加喷嘴的清洁装置。
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公开(公告)号：US08714103B2
公开(公告)日：2014-05-06
申请号：US13007087
申请日：2011-01-14
申请人： Tsutomu Nishio , Takao Tokumoto
发明人： Tsutomu Nishio , Takao Tokumoto
CPC分类号： B05C5/0254 , B05C5/0283 , B05C9/04
摘要： It is provided a double side coating device which can maintain a thickness of a coated film in constant. The double side coating device has a back up roller supporting a web material, a first coating head that is placed opposite to the back up roller and that applies a coating material onto a first surface of the web material, a suction roller that is provided with a plurality of supporting portions which projects annularly so as to contact with a uncoated portion of the first surface of the web material and on circumference of which suction holes are opened to suck atmosphere, and a second coating head that is placed opposite to the suction roller and that coats second surface of the web material with a coating material.
摘要翻译： 提供了可以将涂膜的厚度保持恒定的双面涂布装置。 双面涂布装置具有支撑卷筒纸材料的支撑辊，与第一涂布头相对放置的第一涂布头，并将涂料施加在卷筒纸材料的第一表面上;抽吸辊， 多个支撑部分，其环形地突出，以便与幅材材料的第一表面的未涂覆部分接触，并且在其周围开有吸孔以吸入气氛;以及第二涂覆头，其与吸辊对置放置 并用涂层材料涂覆纤维网材料的第二表面。
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