公开(公告)号：US20100062157A1

公开(公告)日：2010-03-11

申请号：US12525719

申请日：2008-02-04

申请人： Kenji Hata ,  Satoshi Yasuda ,  Motoo Yumura

发明人： Kenji Hata ,  Satoshi Yasuda ,  Motoo Yumura

IPC分类号： C23C16/455 ,  C23C16/00 ,  C23C16/22

CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/162 ,  C01B2202/08 ,  C23C16/0281 ,  C23C16/26 ,  C23C16/45565

摘要： An apparatus (CVD apparatus (1)) having a reaction chamber (3) for accommodating a substrate (2) formed with a metal catalyst film and means (gas supply pipes (5, 6)) for supplying a feedstock gas (9) and a catalyst activating material (10) into the reaction chamber (3) for manufacturing CNTs aligned in a direction perpendicular to the catalyst film surface (2a) of the substrate (2), wherein the means for supplying the feedstock gas (9) and the catalyst activating material (10) have a plurality of ejection holes placed at positions facing the catalyst film surface (2a) of the substrate (2), and the ejecting direction of the ejection holes is adjusted to the direction of alignment of CNTs grown from the metal catalyst film. This can provide a manufacturing technology for CNTs capable of mass-producing aligned CNTs at lower cost.

摘要翻译： 具有用于容纳形成有金属催化剂膜的基板（2）的反应室（3）和用于供给原料气体（9）的装置（气体供给管（5,6））的装置（CVD装置（1））和 催化剂活化材料（10）进入反应室（3），用于制造沿着与基板（2）的催化剂膜表面（2a）垂直的方向排列的CNT，其中用于供应原料气体（9）和 催化剂活化材料（10）在基板（2）的面向催化剂膜表面（2a）的位置处具有多个喷射孔，并且喷射孔的喷射方向被调整为从 金属催化剂膜。 这可以提供能够以更低成本批量生产对准的CNT的CNT的制造技术。

公开(公告)号：US08455050B2

公开(公告)日：2013-06-04

申请号：US12525719

申请日：2008-02-04

申请人： Kenji Hata ,  Satoshi Yasuda ,  Motoo Yumura

发明人： Kenji Hata ,  Satoshi Yasuda ,  Motoo Yumura

IPC分类号： C23C16/00

CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/162 ,  C01B2202/08 ,  C23C16/0281 ,  C23C16/26 ,  C23C16/45565

摘要： An apparatus (CVD apparatus (1)) having a reaction chamber (3) for accommodating a substrate (2) formed with a metal catalyst film and means (gas supply pipes (5, 6)) for supplying a feedstock gas (9) and a catalyst activating material (10) into the reaction chamber (3) for manufacturing CNTs aligned in a direction perpendicular to the catalyst film surface (2a) of the substrate (2), wherein the means for supplying the feedstock gas (9) and the catalyst activating material (10) have a plurality of ejection holes placed at positions facing the catalyst film surface (2a) of the substrate (2), and the ejecting direction of the ejection holes is adjusted to the direction of alignment of CNTs grown from the metal catalyst film. This can provide a manufacturing technology for CNTs capable of mass-producing aligned CNTs at lower cost.

摘要翻译： 具有用于容纳形成有金属催化剂膜的基板（2）的反应室（3）和用于供给原料气体（9）的装置（气体供给管（5,6））的装置（CVD装置（1））和 催化剂活化材料（10）进入反应室（3），用于制造沿着与基板（2）的催化剂膜表面（2a）垂直的方向排列的CNT，其中用于供应原料气体（9）和 催化剂活化材料（10）在基板（2）的面向催化剂膜表面（2a）的位置处具有多个喷射孔，并且喷射孔的喷射方向被调整为从 金属催化剂膜。 这可以提供能够以更低成本批量生产对准的CNT的CNT的制造技术。

公开(公告)号：US20120231163A1

公开(公告)日：2012-09-13

申请号：US13378128

申请日：2010-06-17

申请人： Kenji Hata ,  Satoshi Yasuda ,  Don N. Futaba ,  Motoo Yumura

发明人： Kenji Hata ,  Satoshi Yasuda ,  Don N. Futaba ,  Motoo Yumura

IPC分类号： C23C16/455 ,  C23C16/26 ,  B82Y40/00

CPC分类号： C01B31/0226 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16

摘要： A method and an apparatus for efficiently producing a high-purity CNT assembly of a high specific surface area are provided in which a feedstock gas is contacted to a catalyst in an optimum form for CNT growth.A carbon nanotube producing apparatus of the present invention includes: a synthesis furnace; a gas supply pipe and a gas exhaust pipe in communication with the synthesis furnace; heating means that heats inside of the synthesis furnace to a predetermined temperature; and gas blowing means that blows a feedstock gas into the synthesis furnace after the feedstock gas is supplied through the gas supply pipe. The feedstock gas supplied through the gas supply pipe is supplied into a heating region of the synthesis furnace heated by the heating means, so as to produce a carbon nanotube from a surface of a catalyst layer provided on a base. The feedstock gas is evacuated through the gas exhaust pipe. The carbon nanotube producing apparatus further includes residence time adjusting means that allows the feedstock gas to contact the surface of the catalyst layer on the base in a substantially uniform amount after substantially the same residence time.

摘要翻译： 提供了一种用于有效地生产高比表面积的高纯度CNT组件的方法和设备，其中原料气体以最佳形式与催化剂接触以用于CNT生长。 本发明的碳纳米管制造装置包括：合成炉; 与合成炉连通的气体供给管和排气管; 加热是指将合成炉内部加热至预定温度; 气体吹送装置，在通过气体供给管供给原料气体之后，将原料气体吹入合成炉。 通过气体供给管供给的原料气体被供给到由加热装置加热的合成炉的加热区域，以从设置在基材上的催化剂层的表面制造碳纳米管。 原料气体通过排气管排出。 碳纳米管制造装置还包括停留时间调节装置，其允许原料气体在基本上相同的停留时间之后以基本均匀的量与基底上的催化剂层的表面接触。

公开(公告)号：US08883260B2

公开(公告)日：2014-11-11

申请号：US13378128

申请日：2010-06-17

申请人： Kenji Hata ,  Satoshi Yasuda ,  Don N. Futaba ,  Motoo Yumura

发明人： Kenji Hata ,  Satoshi Yasuda ,  Don N. Futaba ,  Motoo Yumura

IPC分类号： C23C16/00 ,  C01B31/02 ,  B82Y30/00 ,  B82Y40/00

CPC分类号： C01B31/0226 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16

摘要： A method and an apparatus for efficiently producing a high-purity CNT assembly of a high specific surface area are provided in which a feedstock gas is contacted to a catalyst in an optimum form for CNT growth.A carbon nanotube producing apparatus of the present invention includes: a synthesis furnace; a gas supply pipe and a gas exhaust pipe in communication with the synthesis furnace; heating means that heats inside of the synthesis furnace to a predetermined temperature; and gas blowing means that blows a feedstock gas into the synthesis furnace after the feedstock gas is supplied through the gas supply pipe. The feedstock gas supplied through the gas supply pipe is supplied into a heating region of the synthesis furnace heated by the heating means, so as to produce a carbon nanotube from a surface of a catalyst layer provided on a base. The feedstock gas is evacuated through the gas exhaust pipe. The carbon nanotube producing apparatus further includes residence time adjusting means that allows the feedstock gas to contact the surface of the catalyst layer on the base in a substantially uniform amount after substantially the same residence time.

摘要翻译： 提供了一种用于有效地生产高比表面积的高纯度CNT组件的方法和设备，其中原料气体以最佳形式与催化剂接触以用于CNT生长。 本发明的碳纳米管制造装置包括：合成炉; 与合成炉连通的气体供给管和排气管; 加热是指将合成炉内部加热至预定温度; 气体吹送装置，在通过气体供给管供给原料气体之后，将原料气体吹入合成炉。 通过气体供给管供给的原料气体被供给到由加热装置加热的合成炉的加热区域，以从设置在基材上的催化剂层的表面制造碳纳米管。 原料气体通过排气管排出。 碳纳米管制造装置还包括停留时间调节装置，其允许原料气体在基本上相同的停留时间之后以基本均匀的量与基底上的催化剂层的表面接触。

公开(公告)号：US20090232965A1

公开(公告)日：2009-09-17

申请号：US12379803

申请日：2009-03-02

申请人： Kenji Hata ,  Satoshi Yasuda ,  Motoo Yumura

发明人： Kenji Hata ,  Satoshi Yasuda ,  Motoo Yumura

IPC分类号： C23C16/52 ,  B05C11/00

CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/16 ,  C01B2202/08 ,  C01B2202/34 ,  C23C16/26

摘要： The present invention provides a method and an apparatus capable of mass-producing an aligned CNT aggregate of a desired height through automatic control of a CVD apparatus according to a growth height of the aligned CNT aggregate. According to the present invention, an aligned carbon nanotube aggregate growing on a substrate is irradiated with a parallel ray, and the size of a resulting shadow is measured with a measurement section using a telecentric optical system, which acts as if it has an infinite focal length, so as to detect, in real time, a growth height of the aligned carbon nanotube aggregate being synthesized, and the synthesis of the aligned carbon nanotube aggregate is terminated when the growth height of the aligned carbon nanotube aggregate reaches a predetermined state.

摘要翻译： 本发明提供一种能够通过根据对准的CNT集合体的生长高度自动控制CVD装置来大规模生产具有所需高度的排列的CNT集料的方法和装置。 根据本发明，使用平行光照射在基板上生长的排列的碳纳米管集束体，并且使用远心光学系统测量所得到的阴影的大小，该远心光学系统的作用就好像具有无限焦点 长度，以便实时检测正在合成的排列的碳纳米管集合体的生长高度，并且当对准的碳纳米管集合体的生长高度达到预定状态时，排列的碳纳米管集合体的合成终止。

公开(公告)号：US09598285B2

公开(公告)日：2017-03-21

申请号：US13148619

申请日：2010-02-08

申请人： Akiyoshi Shibuya ,  Keiichi Kawata ,  Kenji Hata ,  Motoo Yumura

发明人： Akiyoshi Shibuya ,  Keiichi Kawata ,  Kenji Hata ,  Motoo Yumura

IPC分类号： C23C16/26 ,  C23C16/44 ,  B82Y40/00 ,  C01B31/02 ,  B01J15/00 ,  B01J19/08 ,  B01J19/12 ,  B01J19/22 ,  B82Y30/00 ,  C23C16/46

CPC分类号： C01B31/0226 ,  B01J15/005 ,  B01J19/088 ,  B01J19/126 ,  B01J19/22 ,  B01J2219/0009 ,  B01J2219/00094 ,  B01J2219/00123 ,  B01J2219/00135 ,  B01J2219/00139 ,  B01J2219/00148 ,  B01J2219/00159 ,  B01J2219/00164 ,  B01J2219/0894 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/158 ,  C01B32/16 ,  C01B32/164 ,  C01B2202/08 ,  C23C16/26 ,  C23C16/46

摘要： An apparatus of the present invention for producing aligned carbon nanotube aggregates is an apparatus for producing aligned carbon nanotube aggregates, the apparatus being configured to grow the aligned carbon nanotube aggregate by: causing a catalyst formed on a surface of a substrate to be surrounded by a reducing gas environment constituted by a reducing gas; heating at least either the catalyst or the reducing gas; causing the catalyst to be surrounded by a raw material gas environment constituted by a raw material gas; and heating at least either the catalyst or the raw material gas, at least either an apparatus component exposed to the reducing gas or an apparatus component exposed to the raw material gas being made from a heat-resistant alloy, and having a surface plated with molten aluminum.

公开(公告)号：US08178203B2

公开(公告)日：2012-05-15

申请号：US12318443

申请日：2008-12-30

申请人： Kenji Hata ,  Sumio Iijima ,  Motoo Yumura ,  Don N. Futaba

发明人： Kenji Hata ,  Sumio Iijima ,  Motoo Yumura ,  Don N. Futaba

IPC分类号： B32B9/00 ,  D01F9/12

CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/08 ,  C01B2202/32 ,  Y10S977/742 ,  Y10S977/75 ,  Y10T428/273 ,  Y10T428/2918 ,  Y10T428/30

摘要： This invention provides an aligned single-walled CNT aggregate comprising a substrate, fine particles of iron catalyst with a density of 1×1011 to 1×1014/cm2 disposed on an alumina co-catalyst above the substrate, and a plurality of single-walled CNTs grown from the fine particles of the iron catalyst, in which the plurality of single-walled CNTs have a specific surface area of 600 m2/g to 2600 m2/g, and a weight density from 0.002 g/cm3 to 0.2 g/cm3, and the alignment degree which satisfies a few of specific conditions. This invention also provides a bulk aligned single-walled carbon nanotube aggregate and a powdered aligned single-walled carbon nanotube aggregate.

摘要翻译： 本发明提供了一种排列的单层CNT聚集体，其包含基材，设置在基材上方的氧化铝助催化剂上的密度为1×1011至1×1014 / cm2的铁催化剂的细颗粒，以及多个单壁 由铁催化剂的细颗粒生长的CNT，其中多个单壁CNT的比表面积为600m 2 / g至2600m 2 / g，重量密度为0.002g / cm 3至0.2g / cm 3 ，以及满足几个具体条件的取向度。 本发明还提供了体积比较的单壁碳纳米管集合体和粉末排列的单壁碳纳米管集合体。

公开(公告)号：US08114518B2

公开(公告)日：2012-02-14

申请号：US12945073

申请日：2010-11-12

申请人： Kenji Hata ,  Sumio Iijima ,  Motoo Yumura ,  Don N. Futaba

发明人： Kenji Hata ,  Sumio Iijima ,  Motoo Yumura ,  Don N. Futaba

IPC分类号： B32B9/00 ,  D01F9/12

CPC分类号： B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B32/17 ,  C01B32/178 ,  C01B2202/02 ,  C01B2202/08 ,  C01B2202/30 ,  C01B2202/34 ,  Y02E60/324 ,  Y10S977/742 ,  Y10S977/75 ,  Y10T428/2918 ,  Y10T428/30

摘要： This invention provides an aligned single-layer carbon nanotube bulk structure, which comprises an assembly of a plurality of aligned single-layer carbon nanotube and has a height of not less than 10 μm, and an aligned single-layer carbon nanotube bulk structure which comprises an assembly of a plurality of aligned single-layer carbon nanotubes and has been patterned in a predetermined form. This structure is produced by chemical vapor deposition (CVD) of carbon nanotubes in the presence of a metal catalyst in a reaction atmosphere with an oxidizing agent, preferably water, added thereto. An aligned single-layer carbon nanotube bulk structure, which has realized high purify and significantly large scaled length or height, its production process and apparatus, and its applied products are provided.

公开(公告)号：US20100196600A1

公开(公告)日：2010-08-05

申请号：US12679869

申请日：2009-04-02

申请人： Akiyoshi Shibuya ,  Keiichi Kawata ,  Kohei Arakawa ,  Kenji Hata ,  Motoo Yumura

发明人： Akiyoshi Shibuya ,  Keiichi Kawata ,  Kohei Arakawa ,  Kenji Hata ,  Motoo Yumura

IPC分类号： C23C16/44 ,  C23C16/00

CPC分类号： C23C16/26 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B32/164 ,  C01B2202/08 ,  C01P2004/13 ,  C23C16/0281

摘要： An apparatus of the present invention for producing an aligned carbon-nanotube aggregate is an apparatus for producing an aligned carbon-nanotube aggregate by synthesizing the aligned carbon-nanotube aggregate on a base material having a catalyst on a surface thereof, the apparatus including: a formation unit that processes a formation step of causing an environment surrounding the catalyst to be an environment of a reducing gas and heating at least either the catalyst or the reducing gas; a growth unit that processes a growth step of synthesizing the aligned carbon-nanotube aggregate by causing the environment surrounding the catalyst to be an environment of a raw material gas and by heating at least either the catalyst or the raw material gas; and a transfer unit that transfers the base material at least from the formation unit to the growth unit. Thus provided is a production apparatus and a production method that are capable of improving efficiency in the production of aligned CNT aggregates by preventing a decrease in production volume and deterioration in quality of aligned CNT aggregates in serial production and by making it easy to increase the size of the apparatus.

摘要翻译： 本发明的用于制造取向碳纳米管集合体的装置是通过在其表面具有催化剂的基材上合成取向的碳纳米管集合体来制造排列的碳纳米管集合体的装置，该装置包括： 处理使催化剂周围的环境成为还原气体的环境并且至少对催化剂或还原气体进行加热的形成工序; 生长单元，其通过使所述催化剂周围的环境成为原料气体的环境，并且通过加热所述催化剂或所述原料气中的至少一种来处理所述排列的碳纳米管集合体的合成步骤; 以及将基材至少从形成单元传递到生长单元的转印单元。 因此，提供了一种制造装置和制造方法，其能够通过在生产中防止生产量的降低和排列的CNT集合体的质量劣化，并且容易地增加尺寸而提高对准的CNT集合体的生产效率 的装置。

公开(公告)号：US08202505B2

公开(公告)日：2012-06-19

申请号：US12461802

申请日：2009-08-25

申请人： Kenji Hata ,  Don N. Futaba ,  Motoo Yumura ,  Sumio Iijima

发明人： Kenji Hata ,  Don N. Futaba ,  Motoo Yumura ,  Sumio Iijima

IPC分类号： D01F9/12 ,  B32B9/00

CPC分类号： D01F9/1273 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16 ,  C01B2202/08 ,  C01B2202/20 ,  C01B2202/32 ,  Y10S977/742 ,  Y10S977/843 ,  Y10T428/30

摘要： An aligned carbon nanotube bulk structure capable of attaining high density and high hardness not found so far. The aligned carbon nanotube bulk structure has a plurality of carbon nanotubes (CNTs) applied with a density-increasing treatment, and having alignment in a predetermined direction, the structure has a degree of anisotropy of 1:3 or more between the direction of alignment and the direction vertical to the direction of alignment, and the intensity by irradiating X-rays along the direction of alignment is higher than the intensity by irradiating X-rays from the direction vertical to the direction of alignment at a (002) peak in X-ray diffraction data, and the degree of alignment thereof satisfies predetermined conditions.

摘要翻译： 迄今尚未发现能够获得高密度和高硬度的排列碳纳米管块状结构。 对准的碳纳米管块结构具有多个施加增密处理的碳纳米管（CNT），并且在预定方向上具有对准，该结构在取向方向和/或对准方向之间具有1或3以上的各向异性程度 与取向方向垂直的方向以及沿着取向方向照射X射线的强度高于通过在X轴上的（002）峰处从垂直于取向方向的方向照射X射线的强度， 射线衍射数据，其取向度满足规定条件。