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公开(公告)号：US20140190150A1
公开(公告)日：2014-07-10
申请号：US14237239
申请日：2011-09-06
申请人： Kenji Sakurai , Toru Kidokoro , Yasuyuki Irisawa , Yuji Miyoshi
发明人： Kenji Sakurai , Toru Kidokoro , Yasuyuki Irisawa , Yuji Miyoshi
IPC分类号： F01N3/18
CPC分类号： F01N3/18 , F01N3/0842 , F01N3/085 , F01N3/0885 , F01N3/101 , F01N3/2073 , F01N13/009 , F01N2550/03 , F01N2570/24 , F01N2610/02 , F02D41/024 , F02D41/028 , Y02T10/20 , Y02T10/22 , Y02T10/24 , Y02T10/26
摘要： In cases where at the upstream side of an NOx selective reduction catalyst there is provided another catalyst, sulfur poisoning of both the catalysts is recovered in an appropriate manner. To this end, provision is made for an NH3 generation catalyst arranged in an exhaust passage of an internal combustion engine for generating NH3, the NOx selective reduction catalyst arranged in the exhaust passage at a location downstream of the NH3 generation catalyst for reducing NOx in a selective manner, an upstream side recovery unit to recover sulfur poisoning of the NH3 generation catalyst, and a downstream side recovery unit to recover sulfur poisoning of the NOx selective reduction catalyst after the sulfur poisoning of the NH3 generation catalyst has been recovered by the upstream side recovery unit.
摘要翻译： 在NOx选择还原催化剂的上游侧设置有另一种催化剂的情况下，以适当的方式回收两种催化剂的硫中毒。 为此，提供了排列在用于产生NH 3的内燃机的排气通道中的NH 3代催化剂，该NOx选择还原催化剂在NH 3代催化剂的下游位置排列在排气通道中，用于还原NOx 选择性地，用于回收NH 3代催化剂的硫中毒的上游侧回收单元，以及在NH 3代催化剂的硫中毒已经被上游侧回收了用于回收NOx选择还原催化剂的硫中毒的下游侧回收单元 恢复单位。
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公开(公告)号：US09010093B2
公开(公告)日：2015-04-21
申请号：US14237239
申请日：2011-09-06
申请人： Kenji Sakurai , Toru Kidokoro , Yasuyuki Irisawa , Yuji Miyoshi
发明人： Kenji Sakurai , Toru Kidokoro , Yasuyuki Irisawa , Yuji Miyoshi
CPC分类号： F01N3/18 , F01N3/0842 , F01N3/085 , F01N3/0885 , F01N3/101 , F01N3/2073 , F01N13/009 , F01N2550/03 , F01N2570/24 , F01N2610/02 , F02D41/024 , F02D41/028 , Y02T10/20 , Y02T10/22 , Y02T10/24 , Y02T10/26
摘要： In cases where at the upstream side of an NOx selective reduction catalyst there is provided another catalyst, sulfur poisoning of both the catalysts is recovered in an appropriate manner. To this end, provision is made for an NH3 generation catalyst arranged in an exhaust passage of an internal combustion engine for generating NH3, the NOx selective reduction catalyst arranged in the exhaust passage at a location downstream of the NH3 generation catalyst for reducing NOx in a selective manner, an upstream side recovery unit to recover sulfur poisoning of the NH3 generation catalyst, and a downstream side recovery unit to recover sulfur poisoning of the NOx selective reduction catalyst after the sulfur poisoning of the NH3 generation catalyst has been recovered by the upstream side recovery unit.
摘要翻译： 在NOx选择还原催化剂的上游侧设置有另一种催化剂的情况下，以适当的方式回收两种催化剂的硫中毒。 为此，提供了排列在用于产生NH 3的内燃机的排气通道中的NH 3代催化剂，该NOx选择还原催化剂在NH 3代催化剂的下游位置排列在排气通道中，用于还原NOx 选择性地，用于回收NH 3代催化剂的硫中毒的上游侧回收单元，以及在NH 3代催化剂的硫中毒已经被上游侧回收了用于回收NOx选择还原催化剂的硫中毒的下游侧回收单元 恢复单位。
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公开(公告)号：US20150167521A1
公开(公告)日：2015-06-18
申请号：US14409122
申请日：2012-06-19
申请人： Kenji Sakurai , Yuji Miyoshi , Toru Kidokoro
发明人： Kenji Sakurai , Yuji Miyoshi , Toru Kidokoro
CPC分类号： F01N3/20 , B01D53/9495 , F01N3/0842 , F01N3/0885 , F01N3/2066 , F01N3/22 , F01N9/00 , F01N13/009 , F01N2610/02 , F02D41/025 , F02D41/028 , F02D2200/0808 , F02D2200/0811 , Y02A50/2325 , Y02T10/24 , Y02T10/47
摘要： An exhaust gas purification catalyst is recovered from the sulfur poisoning more appropriately. For this purpose, an exhaust gas purification apparatus for an internal combustion engine selectively executes first control in which an air-fuel ratio of an exhaust gas allowed to flow into an exhaust gas purification catalyst is set to be not more than a theoretical air-fuel ratio to remove a sulfur component from the exhaust gas purification catalyst; and second control in which the air-fuel ratio of the exhaust gas allowed to flow into the exhaust gas purification catalyst is set to an air-fuel ratio that is lower than the air-fuel ratio of the exhaust gas set in the first control to remove the sulfur component from the exhaust gas purification catalyst; wherein the exhaust gas purification apparatus for the internal combustion engine comprises a control unit which executes any one of the first control and the second control on the basis of at least one of purification performance of the exhaust gas purification catalyst, a travel distance of a vehicle that carries the internal combustion engine, and a number of times of removal of the sulfur component from the exhaust gas purification catalyst.
摘要翻译： 更适当地从硫中毒中回收废气净化催化剂。 为此，内燃机的废气净化装置选择性地执行第一控制，其中允许流入排气净化催化剂的废气的空燃比被设定为不大于理论空燃比 以从废气净化催化剂中除去硫成分; 并且允许流入排气净化催化剂的废气的空燃比被设定为低于设定在第一控制中的排气的空燃比的空燃比的第二控制， 从废气净化催化剂中除去硫成分; 其特征在于，所述内燃机的废气净化装置具有控制单元，其基于所述排气净化催化剂的净化性能，车辆的行驶距离，行驶距离，所述第一控制和所述第二控制中的至少一个， 其承载内燃机，并且从废气净化催化剂中多次除去硫成分。
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公开(公告)号：US09528412B2
公开(公告)日：2016-12-27
申请号：US14409122
申请日：2012-06-19
申请人： Kenji Sakurai , Yuji Miyoshi , Toru Kidokoro
发明人： Kenji Sakurai , Yuji Miyoshi , Toru Kidokoro
CPC分类号： F01N3/20 , B01D53/9495 , F01N3/0842 , F01N3/0885 , F01N3/2066 , F01N3/22 , F01N9/00 , F01N13/009 , F01N2610/02 , F02D41/025 , F02D41/028 , F02D2200/0808 , F02D2200/0811 , Y02A50/2325 , Y02T10/24 , Y02T10/47
摘要： An exhaust gas purification catalyst is recovered from the sulfur poisoning more appropriately. For this purpose, an exhaust gas purification apparatus for an internal combustion engine selectively executes first control in which an air-fuel ratio of an exhaust gas allowed to flow into an exhaust gas purification catalyst is set to be not more than a theoretical air-fuel ratio to remove a sulfur component from the exhaust gas purification catalyst; and second control in which the air-fuel ratio of the exhaust gas allowed to flow into the exhaust gas purification catalyst is set to an air-fuel ratio that is lower than the air-fuel ratio of the exhaust gas set in the first control to remove the sulfur component from the exhaust gas purification catalyst; wherein the exhaust gas purification apparatus for the internal combustion engine comprises a control unit which executes any one of the first control and the second control on the basis of at least one of purification performance of the exhaust gas purification catalyst, a travel distance of a vehicle that carries the internal combustion engine, and a number of times of removal of the sulfur component from the exhaust gas purification catalyst.
摘要翻译： 更适当地从硫中毒中回收废气净化催化剂。 为此，内燃机的废气净化装置选择性地执行第一控制，其中允许流入排气净化催化剂的废气的空燃比被设定为不大于理论空燃比 以从废气净化催化剂中除去硫成分; 并且允许流入排气净化催化剂的废气的空燃比被设定为低于设定在第一控制中的排气的空燃比的空燃比的第二控制， 从废气净化催化剂中除去硫成分; 其特征在于，所述内燃机的废气净化装置具有控制单元，其基于所述排气净化催化剂的净化性能，车辆的行驶距离，行驶距离，所述第一控制和所述第二控制中的至少一个， 其承载内燃机，并且从废气净化催化剂中多次除去硫成分。
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公开(公告)号：US09850840B2
公开(公告)日：2017-12-26
申请号：US14900792
申请日：2013-06-26
CPC分类号： F02D41/126 , F01N3/08 , F01N13/009 , F01N2560/025 , F01N2560/14 , F01N2900/0416 , F02D41/1439 , F02D41/1441 , F02D41/1456 , F02D41/1495
摘要： An electronic control unit (ECU) of an internal combustion engine, which includes an air-fuel ratio sensor arranged at a downstream side of an exhaust purification catalyst, is configured to judge if a state of the air-fuel ratio sensor is normal or abnormal based on the first characteristic of change of air-fuel ratio and, if a judgment cannot be made based on the first characteristic, the ECU is configured to judge if the state of the air-fuel ratio sensor is normal or abnormal based on a second characteristic of change of air-fuel ratio. As a result, it is possible to suppress the effects of the change of state of the exhaust purification catalyst while accurately diagnosing the abnormality of deterioration of response of a downstream side air-fuel ratio sensor.
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公开(公告)号：US08189205B2
公开(公告)日：2012-05-29
申请号：US12979885
申请日：2010-12-28
申请人： Yuji Miyoshi , Tomohiro Funakoshi
发明人： Yuji Miyoshi , Tomohiro Funakoshi
IPC分类号： G01B11/30
CPC分类号： G01B11/303 , G01B11/30 , G01N21/9501
摘要： An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.
摘要翻译： 本发明的目的是提供一种表面检查工具，其中可以无视觉地搜索能够以高精度和非破坏性的方式测量具有图案的晶片的表面粗糙度的平坦检查范围。 为了解决该问题，在表面检查工具110中，通过与图案的晶片200上的测定坐标相关联地测量由照射的照射光产生的散射光的散射光强度并检查晶片200的表面粗糙度的表面检查工具110， 检查工具包括提取等于或大于下限阈值L的测量散射光强度的测量坐标的控制器250，将部分布局405a中的部分布局405a的表面粗糙度检查的检查范围406设置为整体的一部分 对应于提取的测量坐标的周边的图案的布局401，并且获得检查范围406中的表面粗糙度。
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公开(公告)号：US20110255080A1
公开(公告)日：2011-10-20
申请号：US13141737
申请日：2009-12-14
申请人： Yuji Miyoshi , Kazuhisa Hasumi
发明人： Yuji Miyoshi , Kazuhisa Hasumi
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/93 , G01N21/94 , H01L22/12
摘要： The inspection conditions of a known inspection apparatus necessary for inspection are such that wafers are individually prepared for respective layer types and layer thicknesses, and standard particles having different sizes are applied to all of the wafers. Moreover, the wafers to which standard particles have been applied and which have been prepared for the respective layer types and layer thicknesses are inspected by the inspection apparatus to determine the optimal inspection conditions for the respective layer types and layer thicknesses. Therefore, there are problems that it requires long time and involves high cost to determine the inspection conditions. In the invention, the relation between the layer thickness and the scattering intensity in the inspection apparatus is calculated. The scattering intensity is divided into a plurality of intensity regions, and the inspection conditions optimized for the respective divided regions are determined. The inspection conditions are shared in each divided intensity region, whereby the time and cost necessary to determine the inspection conditions can be dramatically reduced.
摘要翻译： 检查所必需的已知检查装置的检查条件是为各层和层的厚度单独制备晶片，并且将所有晶片应用于具有不同尺寸的标准颗粒。 此外，由检查装置检查已经施加标准颗粒并已经为各层类型和层厚制备的晶片，以确定各层类型和层厚度的最佳检查条件。 因此，存在需要长时间并且需要高成本来确定检查条件的问题。 在本发明中，计算出检查装置中的层厚与散射强度之间的关系。 散射强度被分为多个强度区域，并且确定针对各个分割区域优化的检查条件。 在每个分割强度区域中共享检查条件，从而可以显着地减少确定检查条件所需的时间和成本。
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公开(公告)号：US20090185178A1
公开(公告)日：2009-07-23
申请号：US12353515
申请日：2009-01-14
申请人： Yuji Miyoshi , Tomohiro Funakoshi
发明人： Yuji Miyoshi , Tomohiro Funakoshi
IPC分类号： G01N21/00
CPC分类号： G01B11/303 , G01B11/30 , G01N21/9501
摘要： An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.
摘要翻译： 本发明的目的是提供一种表面检查工具，其中可以无视觉地搜索能够以高精度和非破坏性的方式测量具有图案的晶片的表面粗糙度的平坦检查范围。 为了解决该问题，在表面检查工具110中，通过与图案的晶片200上的测定坐标相关联地测量由照射的照射光产生的散射光的散射光强度并检查晶片200的表面粗糙度的表面检查工具110， 检查工具包括提取等于或大于下限阈值L的测量散射光强度的测量坐标的控制器250，将部分布局405a中的部分布局405a的表面粗糙度检查的检查范围406设置为整体的一部分 对应于提取的测量坐标的周边的图案的布局401，并且获得检查范围406中的表面粗糙度。
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9.发明授权公开(公告)号：US08490385B2
公开(公告)日：2013-07-23
申请号：US13055062
申请日：2009-07-22
申请人： Yuji Miyoshi , Hiroshi Sawada , Daisuke Shibata
发明人： Yuji Miyoshi , Hiroshi Sawada , Daisuke Shibata
CPC分类号： F01N11/002 , F01N3/0885 , F01N3/2033 , F01N3/2066 , F01N3/208 , F01N9/002 , F01N2550/02 , F01N2560/06 , F01N2610/03 , F02D41/1446 , F02D41/1447 , F02D2200/0804 , Y02T10/24 , Y02T10/47
摘要： A catalyst deterioration diagnosis system performs a diagnosis of deterioration of the oxidation catalyst based on a high-temperature-inflow-condition exhaust gas temperature and a low-temperature-inflow-condition exhaust gas temperature. The high-temperature-inflow-condition exhaust gas temperature is a temperature detected by a temperature sensor while the temperature of the exhaust gas that flows into the oxidation catalyst is in a high temperature region H while the reducing agent is supplied from the reducing agent supply means into the exhaust gas that flows into the oxidation catalyst. The low-temperature-inflow-condition exhaust gas temperature is a temperature detected by the temperature sensor while the temperature of the exhaust gas that flows into the oxidation catalyst is in a low temperature region L while the reducing agent is supplied from a reducing agent supply means into the exhaust gas that flows into the oxidation catalyst.
摘要翻译： 催化剂劣化诊断系统基于高温流入条件排气温度和低温流入条件排气温度来诊断氧化催化剂的劣化。 高温流入条件废气温度是由温度传感器检测的温度，而流入氧化催化剂的废气的温度处于高温区域H，同时还原剂从还原剂供给源供给 意味着流入氧化催化剂的废气。 低温流入条件废气温度是由温度传感器检测的温度，而流入氧化催化剂的废气的温度处于低温区域L，而还原剂由还原剂供给源 意味着流入氧化催化剂的废气。
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公开(公告)号：US20100319318A1
公开(公告)日：2010-12-23
申请号：US12521710
申请日：2008-06-04
申请人： Yuji Miyoshi , Daisuke Shibata
发明人： Yuji Miyoshi , Daisuke Shibata
IPC分类号： F01N11/00
CPC分类号： F01N3/2033 , F01N3/103 , F01N3/106 , F01N11/002 , F01N2550/02 , F01N2560/06 , F01N2560/14 , F02D41/0235 , F02D41/1441 , F02D41/1446 , Y02T10/26 , Y02T10/47
摘要： A temperature increasing degree of the catalytic outflow exhaust temperature at the time the exhaust air-fuel ratio is changed to the rich side is found in respect to each of a plurality of the catalytic inflow exhaust temperatures. A grade (S) of the temperature increasing degree is found based upon the inflow exhaust temperature and the temperature increasing degree to determine degradation of the catalyst based upon at least one of a maximum value (Smax) of the grade and the inflow exhaust temperature (Tinmax) corresponding to the maximum value. An accurate catalyst degradation diagnosis can be carried out since not only the temperature increasing degree but also the inflow exhaust temperature are taken into account.
摘要翻译： 关于多个催化剂流入排气温度中的每一个，发现排气空燃比变为浓侧时的催化流出排气温度的升高程度。 基于流入排气温度和升温程度来确定升温度的等级（S），以根据等级的最大值（Smax）和流入排气温度（Smax）中的至少一个来确定催化剂的降解 Tinmax）对应于最大值。 可以进行精确的催化剂劣化诊断，因为不仅考虑了升温程度，还考虑了流入排气温度。
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