Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor
    2.
    发明授权
    Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor 失效
    该静电致动器包括选择性地设置移动模式和第一和第二保持模式之一的开关电路及其驱动方法

    公开(公告)号:US07482728B2

    公开(公告)日:2009-01-27

    申请号:US11233091

    申请日:2005-09-23

    IPC分类号: H02N1/00 G02B7/04 G02B7/08

    CPC分类号: H02N1/004 H04N5/23287

    摘要: The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.

    摘要翻译: 本发明提供了具有小功耗的静电致动器,并且还提供了其驱动方法。 静电致动器包括分别形成有第一和第二定子电极的第一和第二基板以及布置在第一和第二定子电极之间的可动部分。 可移动部分具有分别定位成面对第一和第二定子电极的第一和第二表面。 在第一和第二移动模式中,响应于来自驱动电路的信号电压,可移动部分在第一和第二基板之间稍微移动。 此外,在保持模式中,可移动部分由第一和第二定子电极中的一个保持,并且在该状态下,将保持可动部分的定子电极和由定子电极保持的可动部分中的至少一个保持电 浮动

    Optical disk drive
    3.
    发明授权
    Optical disk drive 失效
    光盘驱动器

    公开(公告)号:US06633531B1

    公开(公告)日:2003-10-14

    申请号:US09635682

    申请日:2000-08-10

    IPC分类号: G11B700

    摘要: An optical disk drive having an optical disk that permits transmission of a laser beam, an optical disk holding mechanism configured to rotatably support the optical disk, a first laser beam irradiation mechanism disposed on one side of the optical disk, causing the first laser beam to be vertically incident on one surface of the optical disk, and a first evanescent optical system disposed on the other side of the optical disk. The first evanescent optical system is configured to receive the first laser beam which emanates from the laser beam irradiation mechanism and passes through the optical disk, and radiate the first evanescent wave to the other surface of the optical disk having at least one recording surface.

    摘要翻译: 一种光盘驱动器,具有允许激光束传输的光盘,配置为可旋转地支撑光盘的光盘保持机构,设置在光盘一侧的第一激光束照射机构,使第一激光束 垂直入射在光盘的一个表面上,并且第一瞬逝光学系统设置在光盘的另一侧。 第一瞬逝光学系统被配置为接收从激光束照射机构发出并穿过光盘的第一激光束,并且将第一瞬逝波辐射到具有至少一个记录表面的光盘的另一个表面。 / PTEXT>

    Capacitive pressure sensor
    5.
    发明授权
    Capacitive pressure sensor 失效
    电容式压力传感器

    公开(公告)号:US5186054A

    公开(公告)日:1993-02-16

    申请号:US619946

    申请日:1990-11-29

    申请人: Masayuki Sekimura

    发明人: Masayuki Sekimura

    IPC分类号: G01L9/12 B60C23/04 G01L9/00

    CPC分类号: B60C23/0408 G01L9/0072

    摘要: A capacitive pressure sensor includes a set of facing electrodes arranged with a cavity disposed therebetween and having insulation layers respectively formed on the surfaces thereof. The contact area between the facing electrodes varies directly with the applied pressure, and variation in the contact area causes variation in the capacitance which is detected as a pressure measurement. Since the capacitance variation is proportional to the applied pressure, a pressure signal which is substantially linear can be obtained. Therefore, the capacitive pressure sensor of this invention can measure pressure with high precision.

    Electrostatic actuator and method of driving the same
    6.
    发明授权
    Electrostatic actuator and method of driving the same 失效
    静电执行机构及其驱动方法

    公开(公告)号:US06806661B2

    公开(公告)日:2004-10-19

    申请号:US10619500

    申请日:2003-07-16

    IPC分类号: H02N100

    CPC分类号: H02N1/004

    摘要: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.

    摘要翻译: 第一定子设置有沿预定方向依次布置的定子电极。 延伸电极安装在布置成面对第一定子的第二定子上。 滑动件可移动地布置在第一和第二定子之间。 滑块设置有大量与定子电极相对布置的滑块电极和面向延伸电极的第二滑块电极。 滑块电极保持接地电位。 周期性地将第一和第二驱动电压施加到相位相对的定子电极和延伸电极,并且在接地电位和正驱动电压之间周期性地切换。 因此,滑块在被振动的同时移动。

    Semiconductor flow detector for detecting the flow rate and flowing
direction of fluid
    8.
    发明授权
    Semiconductor flow detector for detecting the flow rate and flowing direction of fluid 失效
    用于检测流体的流速和流动方向的半导体流量检测器

    公开(公告)号:US4637253A

    公开(公告)日:1987-01-20

    申请号:US733796

    申请日:1985-05-14

    IPC分类号: G01F1/698 G01F1/68 G01P5/10

    CPC分类号: G01F1/698

    摘要: Disclosed is a semiconductor flow detector, comprising a semiconductor flow detecting element including a heating element and a pair of temperature-measuring elements formed in the substrate, a detecting element for detecting the temperature of the fluid under measurement, a first driving circuit for heating the heating element to keep the temperature of the semiconductor flow detecting element higher by a prescribed level than the temperature of the fluid under measurement, an electric power detection circuit for detecting the electric power flowing through the heating element so as to generate an electric power detection signal, a second driving circuit for driving the pair of the temperature-measuring elements, a temperature difference detecting circuit for detecting the temperature difference between the pair of the temperature-measuring elements so as to generate a temperature difference signal, and an arithmetic circuit for performing prescribed arithmetic operations among the electric power detection signal and the temperature difference signal so as to determine the flow rate and flowing direction of the fluid.

    摘要翻译: 公开了一种半导体流量检测器,包括:半导体流量检测元件,包括加热元件和形成在基板中的一对温度测量元件;检测元件,用于检测被测流体的温度;第一驱动电路,用于加热 加热元件,以将半导体流量检测元件的温度保持在比测量的流体的温度高一个规定的水平;电力检测电路,用于检测流过加热元件的电力,以产生电力检测信号 用于驱动一对温度测量元件的第二驱动电路,用于检测一对温度测量元件之间的温度差以产生温度差信号的温度差检测电路,以及用于执行 规定的算术运算 电流检测信号和温度差信号,以确定流体的流速和流动方向。

    Deformable mirror device and apparatus for observing retina of eye
    9.
    发明授权
    Deformable mirror device and apparatus for observing retina of eye 失效
    用于观察眼睛视网膜的可变形镜装置和装置

    公开(公告)号:US07604353B2

    公开(公告)日:2009-10-20

    申请号:US11958725

    申请日:2007-12-18

    IPC分类号: A61B3/10 G02B7/188 G02B26/00

    CPC分类号: A61B3/12 G02B26/0825

    摘要: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

    摘要翻译: 可以改善“生成力(负载) - 偏转特性”的变化。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件,其设置在所述间隔件上方,并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜,其以间隔形成为与所述电极相对的方式设置,以覆盖所述开口,并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分,并且支撑部件设置在基板上,夹着电极膜,第一绝缘膜和间隔物。

    Electrostatic actuator and method of driving the same

    公开(公告)号:US06784594B2

    公开(公告)日:2004-08-31

    申请号:US10619569

    申请日:2003-07-16

    IPC分类号: H02N100

    CPC分类号: H02N1/004

    摘要: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.