公开(公告)号：US5952014A

公开(公告)日：1999-09-14

申请号：US840447

申请日：1997-04-18

申请人： Kenya Wada ,  Hisayoshi Ichikawa ,  Takahisa Ishida

发明人： Kenya Wada ,  Hisayoshi Ichikawa ,  Takahisa Ishida

IPC分类号： G11B5/84

CPC分类号： B23K26/0823 ,  G11B5/8404

摘要： An apparatus for forming a textured zone in a predetermined surface area on a magnetic data recording disc, which is capable of precisely controlling the position and range of the texturing zone. Bumps 4 are formed on a CSS zone on the inner peripheral side of a magnetic recording disc 1 by the use of a spindle means 6 and a laser beam bombarding means 7. The spindle means 6 is provided with a chuck mechanism 13 with opposingly confronting tapered surfaces 18a and 21a to hold a disc 1 in a centered position in alignment with the rotational axis of a spindle shaft 10. On the other hand, the laser beam bombarding means 7 has part of component parts of its optical system, from a laser energy source 34 up to an electromagnetic shutter 39, mounted on its main casing 7a, and has a reflector mirror 40 and an objective lens 41 accommodated in a movable housing 31 which is movable in the direction of its optical axis to displace a laser spot position on the surface of the disc 1 in a radial direction thereof.

摘要翻译： 一种用于在磁数据记录盘上的预定表面区域中形成纹理区域的装置，其能够精确地控制纹理区域的位置和范围。 通过使用主轴装置6和激光束轰击装置7，在磁记录盘1的内周侧的CSS区域上形成凸起4。主轴装置6设置有卡盘机构13，该卡盘机构13具有相对面对的锥形 表面18a和21a将盘1保持在与主轴10的旋转轴线对准的居中位置。另一方面，激光束轰击装置7具有其激光能量的一部分光学系统的组成部分 光源34直到安装在其主壳体7a上的电磁快门39，并且具有容纳在可移动壳体31中的反射镜40和物镜41，该可移动壳体31可沿其光轴方向移动以将激光点位置置于 盘1的表面在其径向方向上。

公开(公告)号：US08034277B2

公开(公告)日：2011-10-11

申请号：US12571513

申请日：2009-10-01

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B29C59/00

CPC分类号： G11B7/263 ,  B29C59/022 ,  B29C2059/023 ,  B29L2017/005 ,  Y10S425/81

摘要： An apparatus for transferring a pattern of minute surface structures, using a pair of press members which are located opposingly for movements toward and away from each other. One press member is adapted to support thereon a mold having on a transfer surface a master pattern of minute structures to be transferred, while the other press member is adapted to support thereon an annular substrate plate having a curable resin layer coated thereon and to press the resin layer against the transfer surface of the mold to transfer said minute structures to the resin layer. The mold is provided with a circular center hole defining at least three small-diameter segments and three large-diameter segments alternately and at uniform angular intervals along an inner periphery of the mold. The annular substrate plate has an inside diameter exactly matching with the small-diameter segments at the inner periphery of the mold.

摘要翻译： 一种用于转印微小表面结构图案的装置，使用一对相对于彼此相对移动并相对移动的按压构件。 一个按压构件适于在其上支撑具有在转印表面上具有要转印的微小结构的主图案的模具，而另一个压力构件适于在其上支撑具有涂覆在其上的可固化树脂层的环形基板，并且将 树脂层抵靠模具的转移表面，以将所述微小结构转移到树脂层。 模具设置有圆形中心孔，其沿着模具的内周交替地且以均匀的角度间隔限定至少三个小直径段和三个大直径段。 环形基板具有与模具内周边的小直径段精确匹配的内径。

公开(公告)号：US20100015380A1

公开(公告)日：2010-01-21

申请号：US12571513

申请日：2009-10-01

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B32B3/02 ,  B29D17/00

CPC分类号： G11B7/263 ,  B29C59/022 ,  B29C2059/023 ,  B29L2017/005 ,  Y10S425/81

摘要： An apparatus for transferring a pattern of minute surface structures, using a pair of press members which are located opposingly for movements toward and away from each other. One press member is adapted to support thereon a mold having on a transfer surface a master pattern of minute structures to be transferred, while the other press member is adapted to support thereon an annular substrate plate having a curable resin layer coated thereon and to press the resin layer against the transfer surface of the mold to transfer said minute structures to the resin layer. The mod is provided with a circular center hole defining at least three small-diameter segments and three large-diameter segments alternately and at uniform angular intervals along an inner periphery of the mold. The annular substrate plate has an inside diameter exactly matching with the small-diameter segments at the inner periphery of the mold. A chuck mechanism is provided inside of the lower press member, the chuck mechanism having at least three chuck pawls located in uniformly spaced positions along inner periphery of the substrate plate. The chuck pawls are radially displaceable to take either an operative position or a receded position, and are adapted to grip the inner periphery of the substrate together the small-diameter segments of the center hole of the mold at the time of setting the substrate plate in alignment with the mold, and to grip the inner periphery of said substrate plate alone, at spaced positions from the large-diameter segments of the center hole of the mold, at the time of separating the substrate plate from said mold.

摘要翻译： 一种用于转印微小表面结构图案的装置，使用一对相对于彼此相对移动并相对移动的按压构件。 一个按压构件适于在其上支撑具有在转印表面上具有要转印的微小结构的主图案的模具，而另一个压力构件适于在其上支撑具有涂覆在其上的可固化树脂层的环形基板，并且将 树脂层抵靠模具的转移表面，以将所述微小结构转移到树脂层。 模具设置有圆形中心孔，沿着模具的内周边交替地且以均匀的角度间隔限定至少三个小直径段和三个大直径段。 环形基板具有与模具内周边的小直径段精确匹配的内径。 夹紧机构设置在下压件的内部，卡盘机构具有至少三个卡盘爪，位于沿着基板的内周均匀间隔的位置。 卡盘棘爪可径向移动以采取操作位置或后退位置，并且适于在将基板设置在模具中时将模具的中心孔的小直径段夹持在基板的内周 与模具对准，并且在将基板与模具分离时，在与模具的中心孔的大直径段的间隔位置处单独地夹持所述基板的内周。

公开(公告)号：US20070289530A1

公开(公告)日：2007-12-20

申请号：US11752337

申请日：2007-05-23

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B05B3/02

CPC分类号： G03F7/162 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： Method and apparatus for coating a surface of a work with a thin resin or plastic film suitable for use in imprinting a pattern by impressing a master pattern on a transfer surface of a mold on the coated resin film. A curable resin liquid is coated on a work by the use of an inkjet feed means having a plural number of inkjet nozzle holes in a row or rows on a nozzle assembly, in association with actuators to propel droplets of resin liquid from the respective inkjet nozzle holes in controlled timings while moving the inkjet feed means and the work relative to each other.

摘要翻译： 用于通过在涂覆的树脂膜上的模具的转印表面上压印母版图案，用适于用于印刷图案的薄树脂或塑料薄膜来涂覆工件表面的方法和设备。 通过使用具有多个喷嘴喷嘴孔的喷墨进给装置将一种可固化树脂液体涂覆在工件上，该喷墨喷嘴孔与喷嘴组件一行或一列，与致动器相关联以从相应的喷墨喷嘴推动树脂液体的液滴 同时移动喷墨进给装置和相对于彼此的工件的受控定时的孔。

公开(公告)号：US5879576A

公开(公告)日：1999-03-09

申请号：US852291

申请日：1997-05-07

申请人： Kenya Wada ,  Kazuhiko Gonmori ,  Hisayoshi Ichikawa ,  Nobuo Morita ,  Hiroshi Fukuda

发明人： Kenya Wada ,  Kazuhiko Gonmori ,  Hisayoshi Ichikawa ,  Nobuo Morita ,  Hiroshi Fukuda

IPC分类号： B05C11/08 ,  G03F7/30 ,  H01L21/00 ,  H01L21/687 ,  B44C1/22

CPC分类号： H01L21/6715 ,  B05C11/08 ,  G03F7/3021 ,  H01L21/67023 ,  H01L21/67051 ,  H01L21/68721 ,  H01L21/6875 ,  H01L21/68778

摘要： Method and apparatus for processing substrates through a number of wet treatments. A substrate is set on a substrate rotating means for rotation in a horizontal face-up position, within a housing which is open on its top side. By a treating liquid feed means having a treating liquid feed nozzle member, at least one kind of treating liquid is supplied onto upper surfaces of the substrate being rotated by the substrate rotating means. The treating liquid feed nozzle member is supported on a movable arm for displacement to and from an operative position vertically confronting the substrate and a receded standby position away from the substrate on the substrate rotating means. Located face to face with lower surfaces of the substrate is a nozzle means which supplies a fluid to the lower side of the substrate.

摘要翻译： 通过多次湿处理处理基材的方法和装置。 基板被设置在基板旋转装置上，用于在水平面向上的位置，在其顶侧开口的壳体内旋转。 通过具有处理液体供给喷嘴构件的处理液体进料装置，至少一种处理液体被供给到通过基板旋转装置旋转的基板的上表面上。 处理液体供给喷嘴构件被支撑在可移动臂上，用于位于与基板垂直相对的操作位置和离开基板旋转装置上的基板的后退待机位置。 与基板的下表面面对面地设置有向基板的下侧供给流体的喷嘴装置。

公开(公告)号：US20100156006A1

公开(公告)日：2010-06-24

申请号：US12719890

申请日：2010-03-09

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B29C35/08

CPC分类号： G11B7/261 ,  Y10S977/887

摘要： Disclosed herein is a method for transferring a pattern of minute dents and projections to an energy ray-setting resin layer coated on a substrate plate by pressing a master pattern on a transfer mold, followed by irradiation of energy rays. The pattern transfer method comprises the steps of pressing a master pattern on a transfer mold against the resin layer under a predetermined imprinting pressure, irradiating the resin layer under the imprinting pressure with energy rays, interrupting the irradiation of energy rays and at the same time cancelling application of the imprinting pressure and holding the resin layer and the transfer mold in a non-pressed state to relieve the resin layer of internal stresses, and recommencing irradiation of the resin layer with energy rays to complete hardening of the resin layer which is held in contact with the transfer mold in a non-pressed state.

摘要翻译： 本发明公开了一种通过将转印模具上的母版图形按压，然后照射能量射线，将微小凹凸图案转印到涂敷在基板上的能量射线固化树脂层的方法。 图案转印方法包括以下步骤：在预定的压印压力下将转印模具上的母版按压在树脂层上，用能量射线照射压印树脂层，中断能量射线的照射，同时取消 施加压印压力并将树脂层和转印模具保持在非压制状态以减轻树脂层的内应力，并用能量射线重新开始树脂层的照射，以完成树脂层的硬化，该树脂层保持在 在非压制状态下与转移模具接触。

公开(公告)号：US20100092684A1

公开(公告)日：2010-04-15

申请号：US12640676

申请日：2009-12-17

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B05D1/02

CPC分类号： G03F7/162 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： Method and apparatus for coating a surface of a work with a thin resin or plastic film suitable for use in imprinting a pattern by impressing a master pattern on a transfer surface of a mold on the coated resin film. A curable resin liquid is coated on a work by the use of an inkjet feed means having a plural number of inkjet nozzle holes in a row or rows on a nozzle assembly, in association with actuators to propel droplets of resin liquid from the respective inkjet nozzle holes in controlled timings while moving the inkjet feed means and the work relative to each other.

摘要翻译： 用于通过在涂覆的树脂膜上的模具的转印表面上压印母版图案，用适于用于印刷图案的薄树脂或塑料薄膜来涂覆工件表面的方法和设备。 通过使用具有多个喷嘴喷嘴孔的喷墨进给装置将一种可固化树脂液体涂覆在工件上，该喷墨喷嘴孔与喷嘴组件一行或一列，与致动器相关联以从相应的喷墨喷嘴推动树脂液体的液滴 同时移动喷墨进给装置和相对于彼此的工件的受控定时的孔。

公开(公告)号：US20080018024A1

公开(公告)日：2008-01-24

申请号：US11780077

申请日：2007-07-19

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： H01J37/30

CPC分类号： G11B7/261 ,  Y10S977/887

摘要： Disclosed herein is a method for transferring a pattern of minute dents and projections to an energy ray-setting resin layer coated on a substrate plate by pressing a master pattern on a transfer mold, followed by irradiation of energy rays. The pattern transfer method comprises the steps of pressing a master pattern on a transfer mold against the resin layer under a predetermined imprinting pressure, irradiating the resin layer under the imprinting pressure with energy rays, interrupting the irradiation of energy rays and at the same time cancelling application of the imprinting pressure and holding the resin layer and the transfer mold in a non-pressed state to relieve the resin layer of internal stresses, and recommencing irradiation of the resin layer with energy rays to complete hardening of the resin layer which is held in contact with the transfer mold in a non-pressed state.

摘要翻译： 本发明公开了一种通过将转印模具上的母版图形按压，然后照射能量射线，将微小凹凸图案转印到涂敷在基板上的能量射线固化树脂层的方法。 图案转印方法包括以下步骤：在预定的压印压力下将转印模具上的母版按压在树脂层上，用能量射线照射压印树脂层，中断能量射线的照射，同时取消 施加压印压力并将树脂层和转印模具保持在非压制状态以减轻树脂层的内应力，并用能量射线重新开始树脂层的照射，以完成树脂层的硬化，该树脂层保持在 在非压制状态下与转移模具接触。

公开(公告)号：US07600993B2

公开(公告)日：2009-10-13

申请号：US11840280

申请日：2007-08-17

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B29C59/00 ,  B29D17/00

CPC分类号： G11B7/263 ,  B29C59/022 ,  B29C2059/023 ,  B29L2017/005 ,  Y10S425/81

摘要： An apparatus for transferring a pattern of minute surface structures, using a pair of press members which are located opposingly for movements toward and away from each other. One press member is adapted to support thereon a mold having on a transfer surface a master pattern of minute structures to be transferred, while the other press member is adapted to support thereon an annular substrate plate having a curable resin layer coated thereon and to press the resin layer against the transfer surface of the mold to transfer said minute structures to the resin layer. The mod is provided with a circular center hole defining at least three small-diameter segments and three large-diameter segments alternately and at uniform angular intervals along an inner periphery of the mold. The annular substrate plate has an inside diameter exactly matching with the small-diameter segments at the inner periphery of the mold. A chuck mechanism is provided inside of the lower press member, the chuck mechanism having at least three chuck pawls located in uniformly spaced positions along inner periphery of the substrate plate. The chuck pawls are radially displaceable to take either an operative position or a receded position, and are adapted to grip the inner periphery of the substrate together the small-diameter segments of the center hole of the mold at the time of setting the substrate plate in alignment with the mold, and to grip the inner periphery of said substrate plate alone, at spaced positions from the large-diameter segments of the center hole of the mold, at the time of separating the substrate plate from said mold.

摘要翻译： 一种用于转印微小表面结构图案的装置，使用一对相对于彼此相对移动并相对移动的按压构件。 一个按压构件适于在其上支撑具有在转印表面上具有要转印的微小结构的主图案的模具，而另一个压力构件适于在其上支撑具有涂覆在其上的可固化树脂层的环形基板，并且将 树脂层抵靠模具的转移表面，以将所述微小结构转移到树脂层。 模具设置有圆形中心孔，沿着模具的内周边交替地且以均匀的角度间隔限定至少三个小直径段和三个大直径段。 环形基板具有与模具内周边的小直径段精确匹配的内径。 夹紧机构设置在下压件的内部，卡盘机构具有至少三个卡盘爪，位于沿着基板的内周均匀间隔的位置。 卡盘棘爪可径向移动以采取操作位置或后退位置，并且适于在将基板设置在模具中时将模具的中心孔的小直径段夹持在基板的内周 与模具对准，并且在将基板与模具分离时，在与模具的中心孔的大直径段的间隔位置处单独地夹持所述基板的内周。

公开(公告)号：US20080075908A1

公开(公告)日：2008-03-27

申请号：US11840280

申请日：2007-08-17

申请人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

发明人： Hideaki Kataho ,  Hiroshi Okada ,  Kenya Wada ,  Hisayoshi Ichikawa

IPC分类号： B32B3/30

CPC分类号： G11B7/263 ,  B29C59/022 ,  B29C2059/023 ,  B29L2017/005 ,  Y10S425/81

摘要： An apparatus for transferring a pattern of minute surface structures, using a pair of press members which are located opposingly for movements toward and away from each other. One press member is adapted to support thereon a mold having on a transfer surface a master pattern of minute structures to be transferred, while the other press member is adapted to support thereon an annular substrate plate having a curable resin layer coated thereon and to press the resin layer against the transfer surface of the mold to transfer said minute structures to the resin layer. The mod is provided with a circular center hole defining at least three small-diameter segments and three large-diameter segments alternately and at uniform angular intervals along an inner periphery of the mold. The annular substrate plate has an inside diameter exactly matching with the small-diameter segments at the inner periphery of the mold. A chuck mechanism is provided inside of the lower press member, the chuck mechanism having at least three chuck pawls located in uniformly spaced positions along inner periphery of the substrate plate. The chuck pawls are radially displaceable to take either an operative position or a receded position, and are adapted to grip the inner periphery of the substrate together the small-diameter segments of the center hole of the mold at the time of setting the substrate plate in alignment with the mold, and to grip the inner periphery of said substrate plate alone, at spaced positions from the large-diameter segments of the center hole of the mold, at the time of separating the substrate plate from said mold.

摘要翻译： 一种用于转印微小表面结构图案的装置，使用一对相对于彼此相对移动并相对移动的按压构件。 一个按压构件适于在其上支撑具有在转印表面上具有要转印的微小结构的主图案的模具，而另一个压力构件适于在其上支撑具有涂覆在其上的可固化树脂层的环形基板，并且将 树脂层抵靠模具的转移表面，以将所述微小结构转移到树脂层。 模具设置有圆形中心孔，沿着模具的内周边交替地且以均匀的角度间隔限定至少三个小直径段和三个大直径段。 环形基板具有与模具内周边的小直径段精确匹配的内径。 夹紧机构设置在下压件的内部，卡盘机构具有至少三个卡盘爪，位于沿着基板的内周均匀间隔的位置。 卡盘棘爪可径向移动以采取操作位置或后退位置，并且适于在将基板设置在模具中时将模具的中心孔的小直径段夹持在基板的内周 与模具对准，并且在将基板与模具分离时，在与模具的中心孔的大直径段的间隔位置处单独地夹持所述基板的内周。