-
公开(公告)号：US06948929B2
公开(公告)日：2005-09-27
申请号：US09962117
申请日：2001-09-26
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 燃烧式废气处理系统能够在使废气与辅助燃烧气体混合的结构有效地加热的同时，有效地分解危险的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US20070160946A1
公开(公告)日：2007-07-12
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US20050271988A1
公开(公告)日：2005-12-08
申请号：US11206104
申请日：2005-08-18
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US07607914B2
公开(公告)日：2009-10-27
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US06638343B1
公开(公告)日：2003-10-28
申请号：US09857024
申请日：2001-08-02
IPC分类号： B01D4706
CPC分类号： F23J15/06 , B01D47/06 , B01D47/08 , B01D53/68 , B01D53/78 , F23J15/003 , F23J15/006 , F23J15/04 , F23J2217/20 , F23J2217/50 , F23J2219/70
摘要： A waste gas treatment system has a primary cooling section provided at a stage subsequent to a decomposition treatment section in which a waste gas is subjected to decomposition treatment at high temperature. The primary cooling section has a liquid spray part for spraying a liquid on the treated gas from the decomposition treatment section. A secondary cooling section cools the treated gas sprayed with the liquid in the primary cooling section to reduce the volume of the treated gas. Further, a particle collecting section injects a liquid into the treated gas cooled in the secondary cooling section to collect fine particles contained in the treated gas.
摘要翻译： 废气处理系统具有在废气在高温下进行分解处理的分解处理部之后的阶段设置的主冷却部。 主冷却部具有用于从分解处理部喷射处理气体的液体的液体喷射部。 二次冷却部冷却在主冷却部中喷射了液体的处理气体，以减少处理气体的体积。 此外，颗粒收集部将液体注入到在二次冷却部中冷却的处理气体中，以收集处理气体中所含的微粒。
-
公开(公告)号：US07112060B2
公开(公告)日：2006-09-26
申请号：US10821980
申请日：2004-04-12
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译： 本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于燃烧由半导体制造系统排出的废气，特别是含有SiH 4和沉积气体的卤素基气体 在高效率的破坏下，使SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全等级。 燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭 。 废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。
-
公开(公告)号：US06736635B1
公开(公告)日：2004-05-18
申请号：US10111382
申请日：2002-05-01
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
IPC分类号： F23G706
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译： 本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于以高效率的破坏同时燃烧从半导体制造系统排出的废气，特别是含有SiH 4和卤素基气体的沉积气体， SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全水平。 燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭 。 废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。
-
公开(公告)号：US06797045B2
公开(公告)日：2004-09-28
申请号：US10290315
申请日：2002-11-08
申请人： Kazutaka Okuda , Kohtaro Kawamura , Takeshi Tsuji , Yuji Shirao , Yoshihiro Ueda
发明人： Kazutaka Okuda , Kohtaro Kawamura , Takeshi Tsuji , Yuji Shirao , Yoshihiro Ueda
IPC分类号： B01D4716
CPC分类号： B01D53/78 , B01D47/08 , B01D47/18 , B01D2257/204 , B01D2257/2066 , F23J15/022
摘要： A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A cleaning liquid discharge nozzle is positioned at the center of the impeller for spraying a cleaning liquid in the impeller. Also, a baffle member is spaced apart from and surrounds the impeller. A mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges on the baffle member. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller so as to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through a cylindrical wall thereof to discharge a cleaning liquid into the impeller.
摘要翻译： 一种洗涤器，包括具有排气入口和排气出口的壳体。 叶轮安装在壳体中，叶轮可以围绕其自身的轴线旋转。 可以通过壳体的废气入口将废气引入叶轮的中心。 清洁液体排放喷嘴位于叶轮的中心，用于将清洁液体喷射在叶轮中。 此外，挡板构件与叶轮间隔开并围绕叶轮。 排出的废气和离开叶轮的清洗液的混合物撞击挡板部件。 清洗液排出喷嘴设置在内部并刚性地连接到叶轮，以便与叶轮一起旋转。 喷嘴具有多个清洁液体排出孔，其径向延伸穿过其圆柱形壁，以将清洁液体排放到叶轮中。
-
公开(公告)号：US06969250B1
公开(公告)日：2005-11-29
申请号：US09857025
申请日：1999-11-29
申请人： Kotaro Kawamura , Rikiya Nakamura , Yuji Shirao , Yoshiro Takemura , Kazutaka Okuda , Takeshi Tsuji
发明人： Kotaro Kawamura , Rikiya Nakamura , Yuji Shirao , Yoshiro Takemura , Kazutaka Okuda , Takeshi Tsuji
CPC分类号： B01D53/46 , B01D53/68 , B01D53/70 , B01D2257/00 , B01D2257/20 , B01D2257/204 , B01D2257/206 , B01D2257/2064 , B01D2257/2066 , F23G5/32 , F23G7/06 , F23G7/065 , F23J3/02 , F23J2219/70 , F23M5/085 , F23M2900/05004
摘要： A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.
摘要翻译： 一种具有燃烧器部分和设置在燃烧器部分的下游侧的燃烧室的废气处理系统。 燃烧火焰从燃烧器部分朝向燃烧室形成，并且废气被引入到燃烧火焰中，从而氧化分解废气。 燃烧室由纤维增强陶瓷材料制成的内壁形成。 因此，由于热和腐蚀使内壁的磨损最小化，并且热应力开裂也降低。 因此，系统的使用寿命增加，可以提高设备成本和可用性因素。 另外，由于内壁没有催化效果，所以能够抑制热NOx的形成，能够实现环境保护，简化处理设备。
-
公开(公告)号：US20120244759A1
公开(公告)日：2012-09-27
申请号：US13420726
申请日：2012-03-15
申请人： Takeshi Tsuji
发明人： Takeshi Tsuji
IPC分类号： H01R4/18
摘要： A terminal fitting (10) includes a terminal main body (21) with a bottom wall (22) on which cores (71) of wires (70) are placed, and two side walls (23) that stand up from opposite lateral sides of the bottom wall (22). A welding portion (25) where the cores (71) are welded to the bottom wall (22) is formed at a front part of the terminal main body (21). A crimping portion (26) is formed at a rear part of the terminal main body (21) and has crimping pieces (27) projecting from upper ends of the side walls (23) for crimped connection to the wires (70). Cutouts (28AF, 28AR) are cut into the upper end of the side wall (23) of the crimping portion (26) at front and rear sides of the front crimping piece (27F) while retaining parts of the side wall (23L) below the cutouts (28AF, 28AR).
摘要翻译： 一种端子接头（10），具有端子主体（21），该端子主体（21）具有底壁（22），导线（70）的芯部（71）被放置在该底壁上，以及两个侧壁 底壁（22）。 在端子主体（21）的前部形成有将芯（71）焊接到底壁（22）的焊接部（25）。 在端子主体（21）的后部形成有压接部（26），并且具有从侧壁（23）的上端突出的压接片（27），用于与电线（70）的压接连接。 在前侧压接片（27F）的前侧和后侧将切口（28AF，28AR）切割到压接部分（26）的侧壁（23）的上端，同时将侧壁（23L）的部分保持在下方 切口（28AF，28AR）。
-
-
-
-
-
-
-
-
-
搜索结果
85 条记录 (耗时 0.043 秒)
