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公开(公告)号：US4543242A
公开(公告)日：1985-09-24
申请号：US651944
申请日：1984-09-19
IPC分类号： C01B21/083
CPC分类号： C01B21/0835
摘要： NF.sub.3 is prepared with good yields by reaction between fluorine gas and an ammonium complex of a metal fluoride, such as (NH.sub.4).sub.3 AlF.sub.6, in solid phase. The metal flouride ammonium complex may be one additionally containing an alkali metal, such as (NH.sub.4).sub.2 NaAlF.sub.6. The gas-solid reaction is carried out preferably at temperatures above 80.degree. C. and at relatively low partial pressures of fluorine in the gas phase of the reaction system, so that the reaction is easy to control.
摘要翻译： 通过氟气与诸如（NH 4）3 AlF 6等金属氟化物的铵络合物的固相反应制备NF 3。 金属氟化铵络合物可以另外含有碱金属如（NH 4）2 NaAlF 6。 气固反应优选在高于80℃的温度和在反应体系的气相中相对较低的氟分压下进行，使得反应易于控制。
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公开(公告)号：US5017499A
公开(公告)日：1991-05-21
申请号：US330898
申请日：1989-03-31
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suenaga , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
CPC分类号： H01S3/104 , G01N31/005 , G01N33/0052 , H01S3/225 , Y10T436/12 , Y10T436/19 , Y10T436/204998 , Y10T436/207497
摘要： The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alakli metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
摘要翻译： 混合气体如准分子激光气体中的分子氟的浓度可以通过使混合气体通过填充有不含卤素原子并与氟反应的碱金属或碱土金属化合物的柱而容易，准确地测定 与分子氧和/或二氧化碳一起形成固体氟化物，并测量从填充塔流出的无氟气体中的氧气或二氧化碳的浓度。 如果混合气体最初含有分子氧或二氧化碳，则在将氟固定在填充有形成氟化物的元素的另一柱中后，分别测量其浓度。 该分析方法可以用于反馈控制系统，用于在激光器的操作期间控制准分子激光气体中的氟浓度，从而稳定激光输出功率。
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3.发明授权
公开(公告)号：US4863762A
公开(公告)日：1989-09-05
申请号：US169834
申请日：1988-03-18
CPC分类号： B05D1/60
摘要： In forming a coating film of a fluororesin, e.g. polytetrafluoroethylene, on a metallic or nonmetallic surface by a physical vapor deposition technique, problems attributed to the necessity of intensely heating or bombarding the fluororesin as the evaporating source or target material are solved by using a molecular weight reduced fluororesin not higher than 5000 in molecular weight. It is best to use a low molecular weight fluororesin powder obtained by heating a high molecular weight fluororesin in presence of a fluorine source and precipitating the molecular weight reduced polymer from the reaction gas.
摘要翻译： 在形成氟树脂的涂膜时，例如， 聚四氟乙烯通过物理气相沉积技术在金属或非金属表面上，通过使用分子量不高于5000的分子量降低的氟树脂来解决归因于强烈加热或轰击氟树脂作为蒸发源或靶材料的问题 。 最好使用通过在氟源存在下加热高分子量氟树脂而得到的低分子量氟树脂粉末，并从反应气体中沉淀分子量降低的聚合物。
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公开(公告)号：US4964137A
公开(公告)日：1990-10-16
申请号：US466930
申请日：1990-01-18
摘要： A laser gas used in a rare gas fluoride excimer laser is efficiently refined with little loss of the principal rare gas such as Ar, Kr or Xe by sequential contact of the laser gas first with a reactive metal, e.g. Si or Fe, for conversion of the fluorine source gas such as F.sub.2 or NF.sub.3 to a metal fluoride, then with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of gaseous fluorides to solid metal fluorides, next with zeolite which is adsorbent of most of the remaining impurities and finally with an alkaline metal, e.g. Ca or Na, for decomposition of CF.sub.4 to form a solid metal fluoride and carbon. CF.sub.4 is formed during operation of the excimer laser by reaction of fluorine with a fluororesin used as electrical insulator in the laser apparatus, and accumulation of CF.sub.4 in the laser gas caused significal lowering of the laser output power.
摘要翻译： 在稀有气体氟化物准分子激光器中使用的激光气体通过先将激光气体与活性金属例如反应性金属顺序接触而有效地精制而不损失诸如Ar，Kr或Xe的主要稀有气体。 Si或Fe，用于将氟源气体如F2或NF3转化为金属氟化物，然后用固体碱性化合物，例如， Ca（OH）2，用于将气态氟化物转化为固体金属氟化物，接下来是沸石，其是大部分剩余杂质的吸附剂，最后是碱金属，例如碱金属。 Ca或Na，用于分解CF4以形成固体金属氟化物和碳。 在激光装置中通过氟与用作电绝缘体的氟树脂反应而在准分子激光器的操作期间形成CF4，并且CF4在激光气体中的积聚导致激光输出功率的显着降低。
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公开(公告)号：US5149659A
公开(公告)日：1992-09-22
申请号：US666691
申请日：1991-03-05
申请人： Kohzo Hakuta , Minoru Aramaki , Takashi Suen. A , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
发明人： Kohzo Hakuta , Minoru Aramaki , Takashi Suen. A , Mitsuo Kodama , Hisaji Nakano , Shinsuke Nakagawa
CPC分类号： H01S3/104 , G01N31/005 , G01N33/0052 , H01S3/225 , Y10T436/12 , Y10T436/19 , Y10T436/204998 , Y10T436/207497
摘要： The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
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公开(公告)号：US5817284A
公开(公告)日：1998-10-06
申请号：US738588
申请日：1996-10-29
CPC分类号： B01D53/70 , B01D53/68 , B01D2251/306 , B01D2251/604 , Y02C20/30
摘要： The present invention relates to a method for decomposing any of chlorocarbons, chlorofluorocarbons, perfluorocarbons and SF.sub.6 contained in a gas. This method includes the step of bringing the gas into contact, at a temperature of at least 300.degree. C., with a first mixture consisting essentially of 0.05-40 wt % of potassium hydroxide and at least one compound selected from the group consisting of alkali-earth-metal oxides and alkali-earth-metal hydroxides, for decomposing the at least one halide compound. When the halide compound-containing gas further contains oxygen, this gas may be brought into contact, at a temperature of at least 500.degree. C., with at least one first substance selected from the group consisting of active carbon, iron powder and nickel powder, for removing the oxygen from the gas, prior to the halide compound decomposition. When the halide compound-containing gas still further contains a strong oxidizing gas (e.g., fluorine), this gas may be brought into contact, at a temperature of at least 300.degree. C., with at least one second substance selected from the group consisting of Si, Ti, Ge, W, Mo, Fe, Mn, Co, Zn, Sn, B, Zr and compounds of these elements, except oxides of these elements, such that the oxidizing gas turns into a compound that is not reactive with the at least one first substance. According to this method, it is possible to decompose halide compounds contained within a gas, using a smaller equipment, at a lower temperature, as compared with conventional methods.
摘要翻译： 本发明涉及分解气体中所含的氯碳烃，氯氟烃，全氟化碳和SF 6中的任何一种的方法。 该方法包括在至少300℃的温度下使气体与基本上由0.05-40重量％的氢氧化钾和至少一种选自碱金属的化合物组成的第一混合物接触的步骤 - 金属氧化物和碱土金属氢氧化物，用于分解至少一种卤化物。 当含卤化物的气体还含有氧气时，该气体可以在至少500℃的温度下与至少一种选自活性炭，铁粉和镍粉末的第一物质接触 用于在卤化物分解之前从气体中除去氧气。 当含卤化物的气体还含有强氧化气体（例如氟）时，该气体可以在至少300℃的温度下与至少一种选自以下的第二物质接触： Si，Ti，Ge，W，Mo，Fe，Mn，Co，Zn，Sn，B，Zr和这些元素的化合物，除了这些元素的氧化物以外，使得氧化气体变成与 所述至少一种第一物质。 根据该方法，与常规方法相比，可以使用较小的设备在较低温度下分解包含在气体中的卤化物化合物。
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公开(公告)号：US4590316A
公开(公告)日：1986-05-20
申请号：US650986
申请日：1984-09-14
申请人： Yasushi Kita , Hisaji Nakano , Shiro Moroi , Akira Sakanoue
发明人： Yasushi Kita , Hisaji Nakano , Shiro Moroi , Akira Sakanoue
CPC分类号： C01B31/005
摘要： A method of preparing graphite fluoride such as (CF).sub.n or (C.sub.2 F).sub.n by heterogeneous contact reaction between a carbon material such as graphite or petroleum coke and fluorine gas at about 200.degree.-550.degree. C. In the gas phase of the reaction system, the total concentration of higher fluorocarbons having more than four carbon atoms formed by side reactions is controlled so as not to become above 3% by volume by, for example, condensation or catalytic decomposition of at least a portion of the higher fluorocarbons in the gas flowed out of the reaction chamber for recirculation. Such control is highly effective for prevention of rapid and violent decomposition of the graphite fluoride existing in the solid phase of the reaction system induced by sudden decomposition of the higher fluorocarbons in the reaction system to lower fluorocarbons.
摘要翻译： 一种在约200〜-550℃之间的碳材料如石墨或石油焦炭与氟气之间的非均相接触反应制备（CF）n或（C 2 F）n的氟化石墨的方法。在反应的气相 通过副反应形成的具有多于四个碳原子的高级碳氟化合物的总浓度被控制为通过例如至少一部分较高碳氟化合物的冷凝或催化分解而不会变成高于3体积％ 气体从反应室流出，用于再循环。 这种控制对于防止由反应体系中的较高碳氟化合物突然分解成低碳氟化合物引起的反应体系固相中存在的氟化石墨的快速和剧烈分解是非常有效的。
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公开(公告)号：US4500678A
公开(公告)日：1985-02-19
申请号：US514792
申请日：1983-07-18
申请人： Yasushi Kita , Shirou Moroi , Akira Sakanoue , Hisaji Nakano
发明人： Yasushi Kita , Shirou Moroi , Akira Sakanoue , Hisaji Nakano
IPC分类号： H01M4/583 , C01B31/00 , C01B31/04 , C10M103/02 , C10M111/04 , C10M125/02 , C10N50/08 , C10N70/00 , C10M7/04 , C10M1/10
CPC分类号： C10M111/04 , C01B31/005 , C10M103/02 , C10M125/02 , C10M2201/00 , C10M2201/041 , C10M2201/0413 , C10M2201/042 , C10M2201/0423 , C10M2201/061 , C10M2201/16 , C10M2201/18 , C10M2205/003 , C10M2205/022 , C10M2205/14 , C10M2209/084 , C10M2209/101 , C10M2211/06 , C10M2211/08 , C10M2213/02 , C10M2213/062 , C10M2217/044 , C10M2217/045 , C10N2250/10
摘要： A lubricant comprising a partially defluorinated graphite fluoride obtained by exposing a dispersion of raw material graphite fluoride to electromagnetic radiation, followed by the separation of the resulting partially degraded graphite fluoride. The partially defluorinated graphite fluoride is not only excellent in lubricating properties but also has excellent compatibilities with resins, greases and oils. The excellent compatibilities of the partially defluorinated graphite fluoride are effective in preventing the unfavorable deposition of the graphite fluoride in a liquid lubricant composition and advantageously lead to improvement in the moldability of any graphite fluoride-resin composition, thereby enabling the ultimate composition to exhibit excellent lubricating properties.
摘要翻译： 一种润滑剂，其包含通过将原料石墨氟化物的分散体暴露于电磁辐射而获得的部分脱氟氟化石墨氟化物，然后分离所得部分降解的氟化石墨。 部分脱氟石墨氟化物不仅具有优异的润滑性能，而且与树脂，油脂和油具有优异的相容性。 部分氟化氟化石墨氟化物的优异相容性对于防止氟化石墨在液体润滑剂组合物中的不利沉积是有效的，并且有利地改善了任何氟化石墨树脂组合物的成型性，从而使最终组合物显示出优异的润滑性 属性。
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