Method for fabricating patterned magnetic recording media
    1.
    发明授权
    Method for fabricating patterned magnetic recording media 失效
    图案化磁记录介质的制造方法

    公开(公告)号:US07378028B2

    公开(公告)日:2008-05-27

    申请号:US10859202

    申请日:2004-06-03

    IPC分类号: G11B11/00

    CPC分类号: G11B5/855 Y10T428/24802

    摘要: A method of fabricating a patterned magnetic layer comprises sequential steps of:(a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material;(b) forming a layer of a mask material on the layer of non-magnetic material;(c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material;(d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material;(e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and(f) removing the topographically patterned layer of mask material.

    摘要翻译: 制造图案化磁性层的方法包括以下顺序的步骤:(a)提供包括非磁性衬底的工件,覆盖在衬底表面上的一层磁性材料,以及覆盖该层的非磁性材料层 的磁性材料; (b)在非磁性材料层上形成掩模材料层; (c)在所述掩模材料层中形成包括多个凹部的形貌图案; (d)选择性地去除所述凹陷的下部附近的非磁性材料层的部分,从而暴露所述磁性材料层的选定部分; (e)用液体处理磁性材料层的暴露部分以降低其磁特性; 和(f)去除掩模材料的地形图案层。

    Method for fabricating patterned magnetic recording media
    2.
    发明申请
    Method for fabricating patterned magnetic recording media 失效
    图案化磁记录介质的制造方法

    公开(公告)号:US20050271819A1

    公开(公告)日:2005-12-08

    申请号:US10859202

    申请日:2004-06-03

    CPC分类号: G11B5/855 Y10T428/24802

    摘要: A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material; (b) forming a layer of a mask material on the layer of non-magnetic material; (c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material; (d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material; (e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and (f) removing the topographically patterned layer of mask material.

    摘要翻译: 制造图案化磁性层的方法包括以下顺序的步骤:(a)提供包括非磁性衬底的工件,覆盖在衬底的表面上的磁性材料层和覆盖层的非磁性材料层 的磁性材料; (b)在非磁性材料层上形成掩模材料层; (c)在所述掩模材料层中形成包括多个凹部的形貌图案; (d)选择性地去除所述凹陷的下部附近的非磁性材料层的部分,从而暴露所述磁性材料层的选定部分; (e)用液体处理磁性材料层的暴露部分以降低其磁特性; 和(f)去除掩模材料的地形图案层。

    Polystyrene as a resist for making patterned media
    3.
    发明授权
    Polystyrene as a resist for making patterned media 有权
    聚苯乙烯作为制作图案化介质的抗蚀剂

    公开(公告)号:US06838227B2

    公开(公告)日:2005-01-04

    申请号:US10112214

    申请日:2002-03-29

    摘要: A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.

    摘要翻译: 公开了一种用于在磁性介质上形成伺服图案的系统和方法。 涂覆有聚苯乙烯层的磁性薄膜上印有镍压模,其在聚苯乙烯上再现印模图案的负像。 离子然后被加速到聚苯乙烯的表面,聚苯乙烯的表面阻止聚苯乙烯厚的区域中的离子,并允许离子穿透到聚苯乙烯薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用,从而改变了磁层的结构,降低了矫顽力(Hc)和剩余力矩(Mrt)。 这再现了磁性层上的冲压聚苯乙烯图案。 然后通过氧等离子体蚀刻除去聚苯乙烯,留下图案化的磁性介质。

    Styrene-acrylonitrile as a resist for making patterned media
    4.
    发明授权
    Styrene-acrylonitrile as a resist for making patterned media 有权
    苯乙烯 - 丙烯腈作为制造图案化介质的抗蚀剂

    公开(公告)号:US06617012B1

    公开(公告)日:2003-09-09

    申请号:US10112192

    申请日:2002-03-29

    IPC分类号: B32B702

    摘要: A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.

    摘要翻译: 公开了一种用于在磁介质上形成伺服图案的系统和方法。 用苯乙烯 - 丙烯腈层涂覆的磁性薄膜印有镍压模,其在苯乙烯 - 丙烯腈上再现压模图案的负像。 离子然后被加速到苯乙烯 - 丙烯腈的表面,这阻止了苯乙烯 - 丙烯腈厚的区域中的离子,并允许离子穿透到苯乙烯 - 丙烯腈薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用,从而改变了磁层的结构,降低了矫顽力(Hc)和剩余力矩(Mrt)。 这就在磁性层上再现了印模的苯乙烯 - 丙烯腈图案。 然后通过氧等离子体蚀刻表面留下图案化的磁性介质来除去苯乙烯 - 丙烯腈。

    Heat-transfer-stamp process for thermal imprint lithography
    6.
    发明授权
    Heat-transfer-stamp process for thermal imprint lithography 失效
    用于热压印光刻的热转印印刷工艺

    公开(公告)号:US06949199B1

    公开(公告)日:2005-09-27

    申请号:US10087846

    申请日:2002-03-05

    摘要: A method of performing thermal imprint lithography of a surface of a thermoplastic layer-coated workpiece for forming a pattern therein comprises pre-heating the workpiece to a pre-selected high temperature prior to inserting the workpiece in a stamping/imprinting tool maintained at a predetermined lower temperature, whereby the interval for thermal cycling of the stamping/imprinting tool between higher and lower temperatures is eliminated or at least reduced. Applications of the method include forming servo patterns in disk-shaped substrates for hard disk recording media.

    摘要翻译: 对在其中形成图案的热塑性层涂覆的工件的表面进行热压印光刻的方法包括在将工件插入保持在预定的压印/压印工具之前将工件预加热到预选的高温 较低的温度,从而消除或至少减少了冲压/压印工具在较高和较低温度之间的热循环间隔。 该方法的应用包括在用于硬盘记录介质的盘形基底中形成伺服图案。

    Device and method for precision alignment and mounting of stamper/imprinter for contact patterning of magnetic recording media
    7.
    发明申请
    Device and method for precision alignment and mounting of stamper/imprinter for contact patterning of magnetic recording media 审中-公开
    用于精密对准和安装用于磁记录介质的接触图案的压模/打印机的装置和方法

    公开(公告)号:US20050083597A1

    公开(公告)日:2005-04-21

    申请号:US10684450

    申请日:2003-10-15

    IPC分类号: G11B5/82 G11B5/86

    摘要: A device for precisely aligning a stamper/imprinter for use in a process for contact printing of a magnetic pattern in a surface of a magnetic or magneto-optical (MO) recording medium, comprising: (a) a holding plate having opposed first and second major surfaces; (b) means for positioning and fixedly mounting a stamper/imprinter on the first major surface of the holding plate; (c) a mounting plate having opposed first and second major surfaces, the first major surface of the mounting plate facing the second major surface of the holding plate; and (d) mounting means for positioning and fixedly mounting the first major surface of the mounting plate in contact with the second major surface of the holding plate, including means for laterally moving the holding plate relative to the mounting plate.

    摘要翻译: 一种用于精密对准压模/打印机的装置,用于在磁性或磁光(MO)记录介质的表面中的磁性图案的接触印刷的工艺中,包括:(a)具有相对的第一和第二 主要表面; (b)用于将压模/打印机定位并固定在固定板的第一主表面上的装置; (c)具有相对的第一和第二主表面的安装板,安装板的第一主表面面向保持板的第二主表面; 和(d)用于将安装板的第一主表面定位和固定地与保持板的第二主表面接触的安装装置,包括用于相对于安装板横向移动保持板的装置。

    Ground rubber attached to substrate for contact magnetic printing
    10.
    发明申请
    Ground rubber attached to substrate for contact magnetic printing 审中-公开
    接地橡胶附着在基板上用于接触磁性印刷

    公开(公告)号:US20050270674A1

    公开(公告)日:2005-12-08

    申请号:US10860817

    申请日:2004-06-04

    IPC分类号: G11B5/86

    CPC分类号: G11B5/865

    摘要: An elastomer pad used in a system and method for servo formatting magnetic media using contact magnetic printing is disclosed. The elastomer pad includes a substrate substantially the same shape and size as the magnetic media and an elastomer material bonded to the substrate wherein the substrate provides support for the elastomer material. Further an apparatus for creating magnetic patterns on magnetic media, including the elastomer pad, is disclosed and includes a stamper having a pattern, a press for supplying a force to the stamper and the magnetic media, the elastomer pad including the substrate and bonded elastomer material, positioned between the stamper and the press for enabling the stamper to conform to the contours of the unflat stamper, and a magnet for supplying a magnetic field to the stamper and the magnetic media causing the pattern on the stamper to be transferred to the magnetic media.

    摘要翻译: 公开了一种用于使用接触磁性印刷伺服格式化磁性介质的系统和方法的弹性体垫。 弹性体垫包括基本上与磁性介质相同的形状和尺寸的衬底和结合到衬底的弹性体材料,其中衬底为弹性体材料提供支撑。 此外,公开了一种用于在包括弹性体垫的磁介质上产生磁图案的装置,其包括具有图案的压模,用于向压模和磁介质提供力的压力机,包括基板和粘合的弹性体材料的弹性体垫 ,定位在压模和压机之间,以使压模能够符合不平坦压模的轮廓;以及磁体,用于向压模和磁介质提供磁场,使压模上的图案转印到磁介质上 。