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公开(公告)号：US20050271819A1
公开(公告)日：2005-12-08
申请号：US10859202
申请日：2004-06-03
申请人： Koichi Wago , Hong Wang , Nobuo Kurataka , Gennady Gauzner , Neil Deeman
发明人： Koichi Wago , Hong Wang , Nobuo Kurataka , Gennady Gauzner , Neil Deeman
CPC分类号： G11B5/855 , Y10T428/24802
摘要： A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material; (b) forming a layer of a mask material on the layer of non-magnetic material; (c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material; (d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material; (e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and (f) removing the topographically patterned layer of mask material.
摘要翻译： 制造图案化磁性层的方法包括以下顺序的步骤：（a）提供包括非磁性衬底的工件，覆盖在衬底的表面上的磁性材料层和覆盖层的非磁性材料层 的磁性材料; （b）在非磁性材料层上形成掩模材料层; （c）在所述掩模材料层中形成包括多个凹部的形貌图案; （d）选择性地去除所述凹陷的下部附近的非磁性材料层的部分，从而暴露所述磁性材料层的选定部分; （e）用液体处理磁性材料层的暴露部分以降低其磁特性; 和（f）去除掩模材料的地形图案层。
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公开(公告)号：US07378028B2
公开(公告)日：2008-05-27
申请号：US10859202
申请日：2004-06-03
申请人： Koichi Wago , HongYing Wang , Nobuo Kurataka , Gennady Gauzner , Neil Deeman
发明人： Koichi Wago , HongYing Wang , Nobuo Kurataka , Gennady Gauzner , Neil Deeman
IPC分类号： G11B11/00
CPC分类号： G11B5/855 , Y10T428/24802
摘要： A method of fabricating a patterned magnetic layer comprises sequential steps of:(a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material;(b) forming a layer of a mask material on the layer of non-magnetic material;(c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material;(d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material;(e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and(f) removing the topographically patterned layer of mask material.
摘要翻译： 制造图案化磁性层的方法包括以下顺序的步骤：（a）提供包括非磁性衬底的工件，覆盖在衬底表面上的一层磁性材料，以及覆盖该层的非磁性材料层 的磁性材料; （b）在非磁性材料层上形成掩模材料层; （c）在所述掩模材料层中形成包括多个凹部的形貌图案; （d）选择性地去除所述凹陷的下部附近的非磁性材料层的部分，从而暴露所述磁性材料层的选定部分; （e）用液体处理磁性材料层的暴露部分以降低其磁特性; 和（f）去除掩模材料的地形图案层。
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3.发明申请Dry passivation process for stamper/imprinter family making for patterned recording media 有权干式钝化工艺用于压模/印刷机家族制作图案化记录介质公开(公告)号：US20050082700A1
公开(公告)日：2005-04-21
申请号：US10685462
申请日：2003-10-16
申请人： Neil Deeman , Hong Wang , Gennady Gauzner , Nobuo Kurataka
发明人： Neil Deeman , Hong Wang , Gennady Gauzner , Nobuo Kurataka
摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.
摘要翻译： 一种制造用于记录介质图形化的压模/打印机的方法包括以下步骤：（a）提供基板/工件，该基板/工件包括地形图形表面，其包括对应于待形成的图案的多个凸起和凹陷 记录介质的表面; （b）通过干法形成与地形图形表面保形接触的薄释放层; （c）在地形图形表面上形成与薄钝化层保形接触的材料的较厚层; 以及（d）将厚层材料与地形图案化的表面分离以形成压模/打印机，其包括具有地形图形表面的负图像复制品的压印表面，较厚的材料层与地形图形表面的分离是 由通过干法形成的薄释放层促进。
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4.发明授权Utilizing permanent master for making stampers/imprinters for patterning of recording media 失效利用永久主人制作刻印机/打印机来记录媒体的图案化公开(公告)号：US07105280B1
公开(公告)日：2006-09-12
申请号：US10436057
申请日：2003-05-13
IPC分类号： G11B5/20
CPC分类号： G11B5/855 , B81C99/009
摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium, comprising sequential steps of: (a) providing a permanent master comprising a body of a substantially rigid material having a surface with a topographical pattern formed therein comprising a patterned plurality of spaced-apart recesses with a plurality of non-recessed areas therebetween, the topographical pattern corresponding to a pattern to be formed in a recording medium; (b) forming a layer of a substantially rigid material over the surface of the permanent master with the topographical pattern formed therein; (c) separating the layer of a substantially rigid material from the master, the layer of a substantially rigid material having an imprinting surface with a topographical pattern formed therein replicating the topographical pattern of the permanent master; and (d) repeating steps (b) and (c) multiple times with the permanent master provided in step (a) to form a plurality of stampers/imprinters.
摘要翻译： 一种用于制造用于记录介质图案化的压模/打印机的方法，包括以下顺序的步骤：（a）提供永久性主机，其包括具有形成在其中的形状图案的表面的基本刚性材料的主体，包括图案化多个 间隔开的凹部，其间具有多个非凹陷区域，所述形状图案对应于要在记录介质中形成的图案; （b）在永久性主体的表面上形成基本上刚性的材料层，其中形成有形貌图案; （c）将基本上刚性的材料层与主体分离，具有压印表面的基本刚性材料的层，其中形成有形成图形的图案，复制永久性主体的形貌图案; 和（d）用步骤（a）中提供的永久主机重复步骤（b）和（c）多次以形成多个冲压机/冲压机。
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公开(公告)号：US06617012B1
公开(公告)日：2003-09-09
申请号：US10112192
申请日：2002-03-29
申请人： HongYing Wang , Koichi Wago , Neil Deeman , Nobuo Kurataka
发明人： HongYing Wang , Koichi Wago , Neil Deeman , Nobuo Kurataka
IPC分类号： B32B702
CPC分类号： G11B5/855 , B32B27/06 , G11B5/59633 , G11B5/74 , G11B5/82 , Y10S428/90 , Y10S977/712 , Y10S977/838 , Y10S977/887 , Y10T428/249921 , Y10T428/31678
摘要： A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.
摘要翻译： 公开了一种用于在磁介质上形成伺服图案的系统和方法。 用苯乙烯 - 丙烯腈层涂覆的磁性薄膜印有镍压模，其在苯乙烯 - 丙烯腈上再现压模图案的负像。 离子然后被加速到苯乙烯 - 丙烯腈的表面，这阻止了苯乙烯 - 丙烯腈厚的区域中的离子，并允许离子穿透到苯乙烯 - 丙烯腈薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用，从而改变了磁层的结构，降低了矫顽力（Hc）和剩余力矩（Mrt）。 这就在磁性层上再现了印模的苯乙烯 - 丙烯腈图案。 然后通过氧等离子体蚀刻表面留下图案化的磁性介质来除去苯乙烯 - 丙烯腈。
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公开(公告)号：US06838227B2
公开(公告)日：2005-01-04
申请号：US10112214
申请日：2002-03-29
申请人： HongYing Wang , Neil Deeman , Koichi Wago , Nobuo Kurataka
发明人： HongYing Wang , Neil Deeman , Koichi Wago , Nobuo Kurataka
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/732 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , Y10S428/90 , Y10T428/249921 , Y10T428/31678
摘要： A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.
摘要翻译： 公开了一种用于在磁性介质上形成伺服图案的系统和方法。 涂覆有聚苯乙烯层的磁性薄膜上印有镍压模，其在聚苯乙烯上再现印模图案的负像。 离子然后被加速到聚苯乙烯的表面，聚苯乙烯的表面阻止聚苯乙烯厚的区域中的离子，并允许离子穿透到聚苯乙烯薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用，从而改变了磁层的结构，降低了矫顽力（Hc）和剩余力矩（Mrt）。 这再现了磁性层上的冲压聚苯乙烯图案。 然后通过氧等离子体蚀刻除去聚苯乙烯，留下图案化的磁性介质。
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公开(公告)号：US09278857B2
公开(公告)日：2016-03-08
申请号：US13362972
申请日：2012-01-31
申请人： Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
发明人： Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
CPC分类号： B05D3/12 , B05D1/26 , B05D3/10 , B29C33/62 , B29C59/022 , B29C59/026 , B29C2059/023 , B29K2883/00 , B29K2909/14 , B29L2009/005 , B29L2031/756 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/24802
摘要： The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.
摘要翻译： 实施方案公开了一种表面张力控制方法，以减少压印中的捕获的气泡，包括改变压印模板和基材的界面表面的化学方面以改变表面张力，区分界面表面张力以控制预处理的界面流动速率， 固化液体抗蚀剂并控制预固化液体抵抗界面流速以减少捕获气体并防止固化的印迹抗蚀剂中的捕获气泡缺陷。
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公开(公告)号：US08312609B2
公开(公告)日：2012-11-20
申请号：US12178416
申请日：2008-07-23
CPC分类号： G11B5/855 , G11B5/865 , Y10T29/49021 , Y10T29/49812 , Y10T29/49815 , Y10T29/49885 , Y10T29/49982
摘要： The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.
摘要翻译： 本发明涉及一种制造图案化介质Ni压模的方法，其包括沉积全氟癸基三氯硅烷释放层。 释放层消除了主压模界面处的接合。 还提供了用于制造图案化的介质压模的永久性主体。
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9.发明授权Dry passivation process for stamper/imprinter family making for patterned recording media 有权干式钝化工艺用于压模/印刷机家族制作图案化记录介质公开(公告)号：US07150844B2
公开(公告)日：2006-12-19
申请号：US10685462
申请日：2003-10-16
摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.
摘要翻译： 一种制造用于记录介质图形化的压模/打印机的方法包括以下步骤：（a）提供基板/工件，该基板/工件包括地形图形表面，其包括对应于待形成的图案的多个凸起和凹陷 记录介质的表面; （b）通过干法形成与地形图形表面保形接触的薄释放层; （c）在地形图形表面上形成与薄钝化层保形接触的材料的较厚层; 以及（d）将厚层材料与地形图案化的表面分离以形成压模/打印机，其包括具有地形图形表面的负图像复制品的压印表面，较厚的材料层与地形图形表面的分离是 由通过干法形成的薄释放层促进。
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公开(公告)号：US20110195276A1
公开(公告)日：2011-08-11
申请号：US12703887
申请日：2010-02-11
申请人： Wei Hu , Nobuo Kurataka , Yuan Xu , Gennady Gauzner
发明人： Wei Hu , Nobuo Kurataka , Yuan Xu , Gennady Gauzner
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： In an imprint lithography process, a carbon overcoat (COC) layer has nitrogen introduced into an upper surface region thereof before application of an adhesion layer to the COC/substrate combination. This results in the formation of a thin layer of nitrogenated carbon at the surface of the COC layer that promotes covalent bonding with the functional groups of the adhesion layer and, thus, significantly improves resist adhesion upon imprint template removal. Thus, an embodiment of an imprint lithography method comprises introducing nitrogen into an upper surface region of the COC layer, forming an adhesion layer on the nitrogenated COC layer, forming resist on the adhesion layer, contacting the resist with an imprint template having patterned features formed therein such that the resist fills the patterned features of the imprint template, and separating the imprint template from the resist such that a negative image of the patterned features is formed in the resist. An embodiment of an imprint structure comprises a substrate, a COC layer formed on the substrate, the COC layer having a nitrogenated upper surface region formed therein, and adhesion layer formed on the COC layer, and resist formed on the adhesion layer.
摘要翻译： 在压印光刻工艺中，在向COC /衬底组合施加粘附层之前，碳覆盖层（COC）层将氮气引入其上表面区域。 这导致在COC层的表面上形成薄层的氮化碳，其促进与粘合层的官能团的共价键，并且因此显着提高印模模板去除时的抗附着力。 因此，压印光刻方法的一个实施例包括将氮气引入COC层的上表面区域，在氮化COC层上形成粘合层，在粘合层上形成抗蚀剂，使抗蚀剂与形成图案的特征的印模模板接触 其中抗蚀剂填充压印模板的图案化特征，以及将印模模板与抗蚀剂分离，使得图案特征的负像形成在抗蚀剂中。 压印结构的实施例包括基板，形成在基板上的COC层，其中形成有氮化的上表面区域的COC层和形成在COC层上的粘合层，以及形成在粘合层上的抗蚀剂。
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