公开(公告)号：US08563893B2

公开(公告)日：2013-10-22

申请号：US12096940

申请日：2006-12-12

申请人： Koji Kuno ,  Kenichi Muramatsu ,  Kazuhiro Atsumi ,  Tetsuya Osajima

发明人： Koji Kuno ,  Kenichi Muramatsu ,  Kazuhiro Atsumi ,  Tetsuya Osajima

IPC分类号： H01L21/78 ,  H01S3/13 ,  B23K26/00 ,  B23K26/06

CPC分类号： B23K26/048 ,  B23K26/046 ,  B23K26/0617 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser processing apparatus comprises a converging lens 31 for converging processing laser light and rangefinding laser light L2 toward a wafer 1, an actuator for actuating the lens 31, a shaping optical system 49 for adding astigmatism to reflected light L3 of the rangefinding laser light, a quadrant photodiode 42 for receiving the reflected light L3 and outputting voltage values corresponding to its light quantities, and a controller for regulating the actuator, and positions a converging point P2 of the rangefinding laser light L2 between a focal point P0 of the lens and the lens 31, so as to make it possible to form a modified region at a position deeper from the front face 3, thereby suppressing adverse effects due to the reflected light L3. The control is based on an arithmetic value subjected to a division by a sum of the voltage values, so as to prevent the arithmetic value from being changed by the quantity of reflected light.

摘要翻译： 激光加工装置包括用于会聚处理激光的聚光透镜31和朝向晶片1的测距激光L2，用于致动透镜31的致动器，用于对测距激光的反射光L3增加散光的整形光学系统49， 用于接收反射光L3并输出与其光量相对应的电压值的象限光电二极管42，以及用于调节致动器的控制器，并将测距激光L2的会聚点P2定位在透镜的焦点P0和 透镜31，从而能够在比正面3更深的位置形成改质区域，由此抑制由反射光L3引起的不利影响。 控制基于经过除以电压值之和的算术值，以防止算术值被反射光量改变。

公开(公告)号：US20090166342A1

公开(公告)日：2009-07-02

申请号：US12096940

申请日：2006-12-12

申请人： Koji Kuno ,  Kenichi Muramatsu ,  Kazuhiro Atsumi ,  Tetsuya Osajima

发明人： Koji Kuno ,  Kenichi Muramatsu ,  Kazuhiro Atsumi ,  Tetsuya Osajima

IPC分类号： B23K26/38

CPC分类号： B23K26/048 ,  B23K26/046 ,  B23K26/0617 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser processing apparatus comprises a converging lens 31 for converging processing laser light and rangefinding laser light L2 toward a wafer 1, an actuator for actuating the lens 31, a shaping optical system 49 for adding astigmatism to reflected light L3 of the rangefinding laser light, a quadrant photodiode 42 for receiving the reflected light L3 and outputting voltage values corresponding to its light quantities, and a controller for regulating the actuator, and positions a converging point P2 of the rangefinding laser light L2 between a focal point P0 of the lens and the lens 31, so as to make it possible to form a modified region at a position deeper from the front face 3, thereby suppressing adverse effects due to the reflected light L3. The control is based on an arithmetic value subjected to a division by a sum of the voltage values, so as to prevent the arithmetic value from being changed by the quantity of reflected light.

摘要翻译： 激光加工装置包括用于会聚处理激光的聚光透镜31和朝向晶片1的测距激光L2，用于致动透镜31的致动器，用于对测距激光的反射光L3增加散光的整形光学系统49， 用于接收反射光L3并输出与其光量相对应的电压值的象限光电二极管42，以及用于调节致动器的控制器，并将测距激光L2的会聚点P2定位在透镜的焦点P0和 透镜31，从而能够在比正面3更深的位置形成改质区域，由此抑制由反射光L3引起的不利影响。 控制基于经过除以电压值之和的算术值，以防止算术值被反射光量改变。

公开(公告)号：US20120196427A1

公开(公告)日：2012-08-02

申请号：US13362781

申请日：2012-01-31

申请人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

发明人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

IPC分类号： H01L21/78 ,  B23P11/00 ,  B23K26/00

CPC分类号： H01L21/78 ,  B23K26/0006 ,  B23K26/046 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0861 ,  B23K26/128 ,  B23K26/40 ,  B23K26/402 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/56 ,  B28D1/221 ,  B28D5/00 ,  C03B33/0222 ,  H01L23/544 ,  H01L2223/54453 ,  Y10T29/49826

摘要： An object is irradiated with a laser light modulated by a reflection type spatial light modulator such that aberration of the laser light converged inside the object becomes a predetermined aberration or less. Therefore, aberration of the laser light generated at a position on which a converging point of the laser light is located is made as small as possible, to enhance the energy density of the laser light at that position, which makes it possible to form a modified region with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator is used, it is possible to improve the utilization efficiency of the laser light as compared with a transmissive type spatial light modulator.

摘要翻译： 用由反射型空间光调制器调制的激光照射物体，使得会聚在物体内的激光的像差成为预定像差或更小。 因此，在激光的会聚点所在的位置处产生的激光的像差尽可能地小，以增强该位置处的激光的能量密度，这使得可以形成经修改的 具有高功能的区域作为切割的起点。 此外，由于使用反射型空间光调制器，与透射型空间光调制器相比，可以提高激光的利用效率。

公开(公告)号：US20100025386A1

公开(公告)日：2010-02-04

申请号：US12443045

申请日：2007-09-26

申请人： Koji Kuno ,  Tatsuya Suzuki ,  Norio Kurita ,  Tetsuya Osajima

发明人： Koji Kuno ,  Tatsuya Suzuki ,  Norio Kurita ,  Tetsuya Osajima

IPC分类号： B23K26/06 ,  B23K26/38

CPC分类号： B23K26/38 ,  B23K26/048 ,  B23K26/0624 ,  B23K26/0676 ,  B23K26/0853 ,  B23K26/0869 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： The time required for forming a modified region within an object to be processed is shortened. An apparatus 100 comprises a mount table 107, a light source 101 for emitting linearly polarized laser light L, a light source 41 for emitting laser light L3, a wave plate 51 for changing the polarization direction of the laser light L, a polarizing plate 52 for splitting the laser light L into a laser light component L1 having a polarization direction in an X direction and a laser light component L2 having a polarization direction in a Y direction, a wave plate 55 for orienting the polarization direction of the split laser light component L2 to the X direction, a lens 31 for converging the laser light components L1, L3, a lens 32 which is arranged in parallel with the lens 31 along the X direction and converges the laser light component L2 having the polarization direction oriented to the X direction, a control section 105 for controlling a device 29 such that a converging point of the laser light component L2 is located at a predetermined position with reference to a front face 3 by detecting a reflected light component L4, and a control section 115 for moving the mount table 107 along a line 5 while making the X direction substantially coincide with the line 5.

摘要翻译： 在待处理物体内形成改质区域所需的时间缩短。 装置100包括安装台107，用于发射线偏振激光L的光源101，用于发射激光L3的光源41，用于改变激光L的偏振方向的波片51，偏振片52 为了将激光L分割成具有X方向的偏振方向的激光成分L1和Y方向的偏光方向的激光成分L2，将分割的激光成分的偏振方向定向的波片55 L2到X方向，用于使激光成分L1，L3聚光的透镜31，与透镜31平行配置的透镜32沿X方向会聚，具有偏振方向的激光成分L2朝向X 方向，控制部分105，用于控制装置29，使得激光部件L2的会聚点相对于前表面3位于预定位置，通过 检测反射光分量L4;以及控制部分115，用于沿着线5移动安装台107，同时使X方向基本上与线5重合。

公开(公告)号：US08610028B2

公开(公告)日：2013-12-17

申请号：US12443045

申请日：2007-09-26

申请人： Koji Kuno ,  Tatsuya Suzuki ,  Norio Kurita ,  Tetsuya Osajima

发明人： Koji Kuno ,  Tatsuya Suzuki ,  Norio Kurita ,  Tetsuya Osajima

IPC分类号： B23K26/14 ,  B23K26/16 ,  B23K26/06

CPC分类号： B23K26/38 ,  B23K26/048 ,  B23K26/0624 ,  B23K26/0676 ,  B23K26/0853 ,  B23K26/0869 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： An apparatus comprises a table, a source emitting polarized laser light, a source emitting laser light, a plate changing the polarization direction of the laser light, a plate splitting the laser light into a laser light having polarization in an X direction and a laser light component having polarization in a Y direction, a plate orienting the polarization direction of the laser light to the X direction, a lens converging the laser light components, a lens arranged in parallel with the lens along the X direction and converges the laser light component, a control section controlling a device such that a converging point of the laser light component is located at a predetermined position with reference to a front face by detecting a reflected light, and a control section moving the table along a line while making the X direction substantially coincide with the line.

摘要翻译： 一种装置，包括台，源极发射激光，源发射激光，改变激光的偏振方向的板，将激光分解为具有在X方向上具有偏振的激光的激光和激光 在Y方向具有极化的部件，将激光的偏振方向定向为X方向的板，使激光成分会聚的透镜，沿着X方向平行配置的透镜，使激光成分会聚， 控制部，其通过检测反射光来控制所述激光成分的会聚点相对于前面位于预定位置;以及控制部，其使所述台沿着一条线移动，同时使X方向基本上 符合线条。

公开(公告)号：US09428413B2

公开(公告)日：2016-08-30

申请号：US13362781

申请日：2012-01-31

申请人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

发明人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

IPC分类号： B23K26/402 ,  C03B33/02 ,  B23K26/00 ,  B23K26/04 ,  B23K26/08 ,  B23K26/12 ,  B28D1/22 ,  B28D5/00 ,  B23K26/40

CPC分类号： H01L21/78 ,  B23K26/0006 ,  B23K26/046 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0861 ,  B23K26/128 ,  B23K26/40 ,  B23K26/402 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/56 ,  B28D1/221 ,  B28D5/00 ,  C03B33/0222 ,  H01L23/544 ,  H01L2223/54453 ,  Y10T29/49826

摘要： An object is irradiated with a laser light modulated by a reflection type spatial light modulator such that aberration of the laser light converged inside the object becomes a predetermined aberration or less. Therefore, aberration of the laser light generated at a position on which a converging point of the laser light is located is made as small as possible, to enhance the energy density of the laser light at that position, which makes it possible to form a modified region with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator is used, it is possible to improve the utilization efficiency of the laser light as compared with a transmissive type spatial light modulator.

摘要翻译： 用由反射型空间光调制器调制的激光照射物体，使得会聚在物体内的激光的像差成为预定像差或更小。 因此，在激光的会聚点所在的位置处产生的激光的像差尽可能地小，以增强该位置处的激光的能量密度，这使得可以形成经修改的 具有高功能的区域作为切割的起点。 此外，由于使用反射型空间光调制器，与透射型空间光调制器相比，可以提高激光的利用效率。

公开(公告)号：US20110000897A1

公开(公告)日：2011-01-06

申请号：US12671820

申请日：2008-07-28

申请人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

发明人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

IPC分类号： B23K26/00

CPC分类号： H01L21/78 ,  B23K26/0006 ,  B23K26/046 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0861 ,  B23K26/128 ,  B23K26/40 ,  B23K26/402 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/56 ,  B28D1/221 ,  B28D5/00 ,  C03B33/0222 ,  H01L23/544 ,  H01L2223/54453 ,  Y10T29/49826

摘要： An object to be processed 1 is irradiated with a laser light L modulated by a reflection type spatial light modulator 203 such that aberration of the laser light L converged inside the object 1 becomes a predetermined aberration or less. Therefore, aberration of the laser light L generated at a position on which a converging point P of the laser light L is located is made as small as possible, to enhance the energy density of the laser light L at that position, which makes it possible to form a modified region 7 with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator 203 is used, it is possible to improve the utilization efficiency of the laser light L as compared with a transmissive type spatial light modulator. Such improvement of the utilization efficiency of the laser light L is particularly important in the case in which the modified region 7 serving as a starting point for cutting is formed in the plate-shaped object 1.

摘要翻译： 用由反射型空间光调制器203调制的激光L照射待处理物体1，使得会聚在物体1内的激光L的像差成为预定像差或更小。 因此，在激光L的会聚点P所在的位置处产生的激光L的像差尽可能地小，以增强该位置处的激光L的能量密度，这使得它成为可能 形成作为切割起点的高功能的改质区域7。 此外，由于使用反射型空间光调制器203，与透射型空间光调制器相比，可以提高激光L的利用效率。 这样的激光L的利用效率的提高对于在板状物体1中形成作为切割起点的改质区域7的情况是特别重要的。

公开(公告)号：US08134099B2

公开(公告)日：2012-03-13

申请号：US12671820

申请日：2008-07-28

申请人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

发明人： Makoto Nakano ,  Koji Kuno ,  Tetsuya Osajima ,  Takashi Inoue ,  Masayoshi Kumagai

IPC分类号： B23K26/38 ,  B23K26/06

CPC分类号： H01L21/78 ,  B23K26/0006 ,  B23K26/046 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0861 ,  B23K26/128 ,  B23K26/40 ,  B23K26/402 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/56 ,  B28D1/221 ,  B28D5/00 ,  C03B33/0222 ,  H01L23/544 ,  H01L2223/54453 ,  Y10T29/49826

摘要： An object to be processed 1 is irradiated with a laser light L modulated by a reflection type spatial light modulator 203 such that aberration of the laser light L converged inside the object 1 becomes a predetermined aberration or less. Therefore, aberration of the laser light L generated at a position on which a converging point P of the laser light L is located is made as small as possible, to enhance the energy density of the laser light L at that position, which makes it possible to form a modified region 7 with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator 203 is used, it is possible to improve the utilization efficiency of the laser light L as compared with a transmissive type spatial light modulator. Such improvement of the utilization efficiency of the laser light L is particularly important in the case in which the modified region 7 serving as a starting point for cutting is formed in the plate-shaped object 1.

摘要翻译： 用由反射型空间光调制器203调制的激光L照射待处理物体1，使得会聚在物体1内的激光L的像差成为预定像差或更小。 因此，在激光L的会聚点P所在的位置处产生的激光L的像差尽可能地小，以增强该位置处的激光L的能量密度，这使得它成为可能 形成作为切割起点的高功能的改质区域7。 此外，由于使用反射型空间光调制器203，与透射型空间光调制器相比，可以提高激光L的利用效率。 这样的激光L的利用效率的提高对于在板状物体1中形成作为切割起点的改质区域7的情况是特别重要的。

公开(公告)号：US20080218735A1

公开(公告)日：2008-09-11

申请号：US10585343

申请日：2004-12-13

申请人： Kazuhiro Atsumi ,  Koji Kuno ,  Masayoshi Kusunoki ,  Tatsuya Suzuki ,  Kenshi Fukumitsu ,  Fumitsugu Fukuyo

发明人： Kazuhiro Atsumi ,  Koji Kuno ,  Masayoshi Kusunoki ,  Tatsuya Suzuki ,  Kenshi Fukumitsu ,  Fumitsugu Fukuyo

IPC分类号： G01N21/00 ,  G02B27/02

CPC分类号： B23K26/048 ,  B23K26/046 ,  B23K26/0648 ,  B23K26/38 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/56 ,  B28D5/0011 ,  H01L21/67092 ,  H01L21/78

摘要： A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam in end parts of an object to be processed is provided.This laser processing method comprises a preparatory step of holding a lens at an initial position set such that a converging point is located at a predetermined position within the object; a first processing step (S11 and S12) of emitting a first laser beam for processing while holding the lens at the initial position, and moving the lens and the object relative to each other along a main surface so as to form a modified region in one end part of a line to cut; and a second processing step (S13 and S14) of releasing the lens from being held at the initial position after forming the modified region in the one end part of the line to cut, and then moving the lens and the object relative to each other along the main surface while adjusting the gap between the lens and the main surface after the release, so as to form the modified region.

摘要翻译： 提供了一种可以有效地执行激光加工同时最小化激光束在待处理物体的端部中的会聚点的偏差的激光加工方法。 该激光加工方法包括：准备步骤，将透镜保持在初始位置，使得会聚点位于物体内的预定位置; 在将透镜保持在初始位置的同时发射用于处理的第一激光束并沿着主表面相对于彼此移动透镜和物体的第一处理步骤（S11和S12），以形成修改区域 在一端切割一条线; 以及在要切割的线的一个端部中形成修改区域之后将透镜释放保持在初始位置的第二处理步骤（S13和S14），然后相对于每个移动透镜和物体 另外沿着主表面，同时在释放之后调整透镜和主表面之间的间隙，从而形成改质区域。

公开(公告)号：US08624153B2

公开(公告)日：2014-01-07

申请号：US10585343

申请日：2004-12-13

申请人： Kazuhiro Atsumi ,  Koji Kuno ,  Masayoshi Kusunoki ,  Tatsuya Suzuki ,  Kenshi Fukumitsu ,  Fumitsugu Fukuyo

发明人： Kazuhiro Atsumi ,  Koji Kuno ,  Masayoshi Kusunoki ,  Tatsuya Suzuki ,  Kenshi Fukumitsu ,  Fumitsugu Fukuyo

IPC分类号： B23K26/14

CPC分类号： B23K26/048 ,  B23K26/046 ,  B23K26/0648 ,  B23K26/38 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/56 ,  B28D5/0011 ,  H01L21/67092 ,  H01L21/78

摘要： A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam in end parts of an object to be processed is provided.This laser processing method comprises a preparatory step of holding a lens at an initial position set such that a converging point is located at a predetermined position within the object; a first processing step (S11 and S12) of emitting a first laser beam for processing while holding the lens at the initial position, and moving the lens and the object relative to each other along a main surface so as to form a modified region in one end part of a line to cut; and a second processing step (S13 and S14) of releasing the lens from being held at the initial position after forming the modified region in the one end part of the line to cut, and then moving the lens and the object relative to each other along the main surface while adjusting the gap between the lens and the main surface after the release, so as to form the modified region.

摘要翻译： 提供了一种可以有效地执行激光加工同时最小化激光束在待处理物体的端部中的会聚点的偏差的激光加工方法。 该激光加工方法包括：准备步骤，将透镜保持在初始位置，使得会聚点位于物体内的预定位置; 第一处理步骤（S11和S12），其在将透镜保持在初始位置的同时发射用于处理的第一激光束，并且沿着主表面相对于彼此移动透镜和物体，以在一个主表面上形成改质区域 一段线切断; 以及第二处理步骤（S13和S14），其在形成要切割的线的一个端部中的改质区域之后，将透镜保持在初始位置，然后沿着彼此移动透镜和物体 主表面同时调整透镜与主表面之间的间隙释放后，形成改质区域。