公开(公告)号：US5877529A

公开(公告)日：1999-03-02

申请号：US978667

申请日：1997-11-26

申请人： Koon Chong So ,  Danny Chi Nim ,  Fwu-Iuan Hshieh ,  Yan Man Tsui ,  True-Lon Lin ,  Shu-Hui Cheng

发明人： Koon Chong So ,  Danny Chi Nim ,  Fwu-Iuan Hshieh ,  Yan Man Tsui ,  True-Lon Lin ,  Shu-Hui Cheng

IPC分类号： H01L29/06 ,  H01L29/10 ,  H01L29/78 ,  H01L29/76 ,  H01L23/58 ,  H01L29/94

CPC分类号： H01L29/1095 ,  H01L29/0619 ,  H01L29/7811 ,  H01L29/0696 ,  H01L2924/0002

摘要： Improved power MOSFET structure, and fabrication process are disclosed in this invention to achieve higher breakdown voltage and improved device ruggedness. The power transistor includes a core cell area which includes a plurality of power transistor cells and a termination area. The power transistor further includes an outer pickup guarding ring, disposed in the termination area guarding the core cell area, for picking up free charged-particles generated in the termination area for preventing the free charged particles from entering the core cell area. In another preferred embodiment, the power transistor further includes an inner pickup guarding fence and blocks, disposed between the termination area and the core cell area for picking up free charged-particles not yet picked up by the outer pickup guarding ring for preventing the free charged particles from entering the core cell area.

摘要翻译： 在本发明中公开了改进的功率MOSFET结构和制造工艺，以实现更高的击穿电压和改进的器件耐用性。 功率晶体管包括包含多个功率晶体管单元和端接区域的核心单元区域。 功率晶体管还包括外部拾波器保护环，设置在保护核心单元区域的端接区域中，用于拾取终止区域中产生的免费带电粒子，以防止自由带电粒子进入核心单元区域。 在另一个优选实施例中，功率晶体管还包括内部拾取器防护栅栏和块，其设置在终端区域和核心单元区域之间，用于拾取由外部拾音器保护环尚未拾取的免费带电粒子，以防止自由充电 颗粒进入核心区域。

公开(公告)号：US5895951A

公开(公告)日：1999-04-20

申请号：US628493

申请日：1996-04-05

申请人： Koon Chong So ,  Yan Man Tsui ,  Fwu-Iuan Hshieh ,  True-Lon Lin ,  Danny Chi Nim

发明人： Koon Chong So ,  Yan Man Tsui ,  Fwu-Iuan Hshieh ,  True-Lon Lin ,  Danny Chi Nim

IPC分类号： H01L21/336 ,  H01L29/06 ,  H01L29/08 ,  H01L29/10 ,  H01L29/40 ,  H01L29/78 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

CPC分类号： H01L29/7813 ,  H01L29/1095 ,  H01L29/407 ,  H01L29/0696 ,  H01L29/0847

摘要： This invention discloses a MOSFET device which includes a plurality of vertical cells each includes a source, a drain, and a channel for conducting source-to-drain current therethrough. Each of the vertical cells is surrounded by a polysilicon layer acting as a gate for controlling the source-to-drain current through the channel. The MOSFET device further include a plurality of doping trenches filled with trench-filling materials, The MOSFET device further includes a plurality of deep-doped regions disposed underneath the doping trenches wherein the deep-doped region extends downwardly to a depth which is substantially a sum of an implant depth of the deep-doped region and a vertical diffusion depth below a bottom of the doping trenches.

摘要翻译： 本发明公开了一种MOSFET器件，其包括多个垂直单元，每个垂直单元包括源极，漏极和用于通过其传导源极 - 漏极电流的沟道。 每个垂直单元被用作控制通过通道的源极 - 漏极电流的栅极的多晶硅层包围。 MOSFET器件还包括填充有沟槽填充材料的多个掺杂沟槽。MOSFET器件还包括设置在掺杂沟槽下方的多个深掺杂区域，其中深掺杂区域向下延伸到基本上为总和的深度 的深掺杂区域的注入深度和在掺杂沟槽的底部下方的垂直扩散深度。

公开(公告)号：US5729037A

公开(公告)日：1998-03-17

申请号：US638639

申请日：1996-04-26

申请人： Fwu-Iuan Hshieh ,  Yan Man Tsui ,  True-Lon Lin ,  Danny Chi Nim ,  Koon Chong So

发明人： Fwu-Iuan Hshieh ,  Yan Man Tsui ,  True-Lon Lin ,  Danny Chi Nim ,  Koon Chong So

IPC分类号： H01L21/336 ,  H01L29/36 ,  H01L29/78 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

CPC分类号： H01L29/66712 ,  H01L29/086 ,  H01L29/1095 ,  H01L29/7811 ,  H01L29/36

摘要： Improved power MOSFET structure, and fabrication process are disclosed in this invention to achieve a low threshold voltage. The improved MOSFET device is formed in a semiconductor substrate with a drain region formed near a bottom surface of the substrate supporting a plurality of double-diffused vertical cells thereon wherein each of the vertical cells including a pn-junction having a body region surrounding a source region and each of the vertical cell further including a gate above the pn-junction. Each of the vertical cells further includes a source-dopant segregation reduction layer for reducing a surface segregation between the source region and an oxide layer underneath the gate whereby the body surface peak dopant concentration near an interface between the source region and the body region is reduced for reducing a threshold voltage of the MOSFET device. In another preferred embodiment, the source-dopant segregation reduction layer includes a LPCVD nitride layer formed on top of the polysilicon gates.

摘要翻译： 在本发明中公开了改进的功率MOSFET结构和制造工艺以实现低阈值电压。 改进的MOSFET器件形成在半导体衬底中，其中在衬底的底表面附近形成有漏极区域，该漏极区域支撑多个双扩散垂直电池，其中每个垂直单元包括具有围绕源极的体区的pn结 区域，并且每个垂直单元还包括在pn结上方的栅极。 每个垂直单元还包括用于减少源极区域和栅极之下的氧化物层之间的表面偏析的源极 - 掺杂剂偏析还原层，从而源极区域和体区域之间的界面附近的体表面峰值掺杂剂浓度降低 用于降低MOSFET器件的阈值电压。 在另一个优选的实施方案中，源 - 掺杂剂分离还原层包括形成在多晶硅栅极顶部的LPCVD氮化物层。

公开(公告)号：US5923065A

公开(公告)日：1999-07-13

申请号：US661952

申请日：1996-06-12

申请人： Koon Chong So ,  Danny Chi Nim ,  True-Lon Lin ,  Fwu-Iuan Hshieh ,  Yan Man Tsui

发明人： Koon Chong So ,  Danny Chi Nim ,  True-Lon Lin ,  Fwu-Iuan Hshieh ,  Yan Man Tsui

IPC分类号： H01L21/336 ,  H01L29/10 ,  H01L29/76

CPC分类号： H01L29/66712 ,  H01L29/1095 ,  H01L29/7811 ,  H01L29/0619 ,  H01L29/0638 ,  H01L29/402

摘要： This invention discloses a MOSFET device in a semiconductor chip with a top surface and a bottom surface. The MOSFET device includes a drain region, doped with impurities of a first conductivity type, formed in the semiconductor chip near the bottom surface. The MOSFET device further includes a vertical pn-junction region, which includes a lower-outer body region, doped with impurities of a second conductivity type, formed on top of the drain region. The pn-junction region further includes a source region, doped with impurities of the first conductivity type, formed on top of the lower-outer body region wherein the lower-outer body region defining a channel region extending from the source region to the drain region near the top surface. The MOSFET device further includes a gate formed on top of the channel region on the top surface. The gate includes a thin insulative bottom layer for insulating from the channel region. The gate is provided for applying a voltage thereon for controlling a current flowing from the source region to the drain region via the channel region. The MOSFET device further includes a deep heavily doped body-dopant region disposed immediately below the source region in the lower-outer body region. It is implanted with a higher concentration of dopant than the lower-outer body region whereby a device ruggedness of the MOSFET device is improved. The deep heavily-doped body-dopant region having a body-dopant concentration profile defined by a diffusion of the body-dopant from an implant depth about twice as that of a source implant-depth whereby the deep heavily-doped body dopant region is kept at a distance away from the channel region.

摘要翻译： 本发明公开了一种具有顶表面和底表面的半导体芯片中的MOSFET器件。 MOSFET器件包括在底表面附近形成在半导体芯片中的掺杂有第一导电类型的杂质的漏极区域。 MOSFET器件还包括垂直pn结区域，其包括形成在漏极区域的顶部上的掺杂有第二导电类型的杂质的下外部体区域。 pn结区域还包括掺杂有第一导电类型的杂质的源区，形成在下外体区域的顶部，其中下外体体区限定从源区延伸到漏区的沟道区 靠近顶面。 MOSFET器件还包括形成在顶表面上的沟道区域的顶部上的栅极。 栅极包括用于与沟道区绝缘的薄绝缘底层。 栅极用于在其上施加电压以控制经由沟道区域从源极区域流到漏极区域的电流。 MOSFET器件还包括深下部重掺杂体 - 掺杂区域，其设置在下外体区域中的源极区域的正下方。 注入比下外体区域更高浓度的掺杂剂，从而提高MOSFET器件的器件耐用性。 深掺杂的体 - 掺杂剂区域具有由植入深度约为原始植入深度的两倍的体掺杂物的扩散所限定的体 - 掺杂物浓度分布，从而保留深重掺杂体掺杂区域 距离通道区域一定距离。

公开(公告)号：US5668026A

公开(公告)日：1997-09-16

申请号：US611745

申请日：1996-03-06

申请人： True-Lon Lin ,  Fwu-Iuan Hshieh ,  Danny Chi Nim ,  Koon Chong So ,  Yan Man Tsui

发明人： True-Lon Lin ,  Fwu-Iuan Hshieh ,  Danny Chi Nim ,  Koon Chong So ,  Yan Man Tsui

IPC分类号： H01L21/265 ,  H01L21/336 ,  H01L29/08 ,  H01L29/10 ,  H01L29/78

CPC分类号： H01L29/7802 ,  H01L21/26586 ,  H01L29/1095 ,  H01L29/66712 ,  H01L29/7813 ,  H01L29/0847 ,  H01L29/41766

摘要： A new DMOS fabrication process is disclosed. The fabrication process includes the steps of (a) growing an oxide layer on the substrate; (b) applying a first mask to define an active area and for selectively patterning the oxide layer for keeping a plurality of source implant blocking stumps near a plurality source regions wherein the blocking stumps being formed with width greater than twice a diffusion length of a source dopant and with width less than twice a diffusion length of the body dopant whereby the body regions merging together in the body diffusion becoming a single body region underneath the blocking stumps; (c) applying a second mask for forming a plurality of gates covering a portion of areas between the blocking stumps defining an implant window; (d) implanting a body dopant through the implant window followed by a body diffusion for forming a body region underneath the blocking stumps; (e) implanting the source dopant through the implant window over the source implant blocking stumps following by a source diffusion for forming separate source regions underneath the blocking stumps; (f) depositing an insulating dielectric BPSG/PSG layer; (g) employing a contact mask for etching through the insulating dielectric BPSG/PSG layer and the source implant blocking stumps to define contact windows; (h) depositing a metal layer to form a contact layer through the contact window; and (i) patterning the metal layer with a metal contact to define a plurality of contacts whereby the transistor is fabricated with a four masks process.

摘要翻译： 公开了一种新的DMOS制造工艺。 制造工艺包括以下步骤：（a）在衬底上生长氧化物层; （b）施加第一掩模以限定有源区域并且用于选择性地图案化氧化物层，以便在多个源区域附近保持多个源注入阻挡块，其中形成的阻挡树脂的宽度大于源的扩散长度的两倍 掺杂剂并且具有小于体掺杂物的扩散长度的两倍的宽度，从而身体区域在体扩散中合并在一起成为阻塞树桩下方的单个体区域; （c）施加第二掩模以形成覆盖限定植入窗口的阻挡树脂之间的区域的一部分的多个栅极; （d）通过植入窗口植入体内掺杂剂，随后进行体扩散，以形成阻挡树脂下面的体区; （e）在源极注入之后，通过源极扩散将源极掺杂剂注入到植入物窗口上，随后通过源极扩散在阻挡树脂下方形成分离的源区; （f）沉积绝缘介电BPSG / PSG层; （g）使用接触掩模通过绝缘电介质BPSG / PSG层和源极注入阻挡块蚀刻以限定接触窗口; （h）沉积金属层以通过所述接触窗形成接触层; 和（i）用金属接触图案化金属层以限定多个触点，由此通过四个掩模工艺制造晶体管。

公开(公告)号：US6048759A

公开(公告)日：2000-04-11

申请号：US21879

申请日：1998-02-11

申请人： Fwu-Iuan Hshieh ,  Koon Chong So ,  Yan Man Tsui ,  Danny Chi Nim

发明人： Fwu-Iuan Hshieh ,  Koon Chong So ,  Yan Man Tsui ,  Danny Chi Nim

IPC分类号： H01L21/336 ,  H01L29/10 ,  H01L29/423 ,  H01L29/78 ,  H01L21/8238

CPC分类号： H01L29/66712 ,  H01L29/1095 ,  H01L29/42368 ,  H01L29/7802 ,  H01L29/0638

摘要： This invention discloses a DMOS power device supported on a substrate of a first conductivity type functioning as a drain. The DMOS power device includes a polysilicon-over-double-gate-oxide gate disposed on the substrate includes a polysilicon layer disposed over a double-gate-oxide structure having a central thick-gate-oxide segment surrounded by a thin-gate-oxide layer with a thickness of about one-fourth to one-half of a thickness of the thick-gate-oxide segment. The DMOS power device further includes a body region of a second conductivity type disposed in the substrate underneath the thin-gate-oxide layer around edges of the central thick-gate-oxide segment the body region extending out laterally to a neighboring device circuit element. The DMOS power device further includes a source region of the first conductivity type disposed in the substrate encompassed in the body region having a portion extending laterally underneath the thin-gate-oxide layer. The DMOS power device further includes an insulation layer covering the polysilicon-over-double-gate-oxide gate with contact openings above the substrate exposing the source region and the body region.

摘要翻译： 本发明公开了一种DMOS功率器件，其被支撑在用作漏极的第一导电类型的衬底上。 DMOS功率器件包括设置在衬底上的多晶硅 - 双栅极氧化物栅极，其包括设置在双栅极 - 氧化物结构上的多晶硅层，其具有由薄栅氧化物围绕的中心厚栅氧化层段 厚度为厚栅极 - 氧化物段的厚度的大约四分之一到一半的层。 DMOS功率器件还包括第二导电类型的主体区域，其设置在薄栅氧化层下方的衬底中，围绕中心厚栅氧化物段的边缘，主体区域横向延伸到相邻的器件电路元件。 DMOS功率器件还包括设置在基体中的第一导电类型的源极区域，该基极包含在具有在薄栅氧化层下方横向延伸的部分的主体区域中。 DMOS功率器件还包括覆盖多晶硅超双栅极氧化物栅极的绝缘层，其具有暴露源极区域和体区域的衬底上方的接触开口。

公开(公告)号：US5883410A

公开(公告)日：1999-03-16

申请号：US874357

申请日：1997-06-13

申请人： Koon Chong So ,  Fwu-Iuan Hshieh ,  Danny Chi Nim ,  Yan Man Tsui

发明人： Koon Chong So ,  Fwu-Iuan Hshieh ,  Danny Chi Nim ,  Yan Man Tsui

IPC分类号： H01L29/423 ,  H01L29/78 ,  H01L29/79 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

CPC分类号： H01L29/4238 ,  H01L29/7811 ,  H01L29/0638 ,  H01L29/402

摘要： The present invention discloses a power transistor disposed on a substrate. The power device includes a core cell area comprising a plurality of power transistor cells each having drain and a source. Each of the power transistor cells further having a polycrystalline silicon gate formed on the substrate as part of a polycrystalline silicon gate layer overlaying the substrate. The polycrystalline silicon gate layer includes a plurality of polycrystalline gate-layer-extension extending to gate contact areas for forming gate contacts with a contact metal disposed thereon. The power transistor further includes a plurality of contact-metal-resistant pad each includes a thick oxide pad disposed below the gate contact areas underneath the polycrystalline gate layer extension whereby the contact-metal resistant pads resists the contact metal from penetrating therethrough and short to the substrate disposed thereunder.

摘要翻译： 本发明公开了一种设置在基板上的功率晶体管。 功率器件包括核心单元区域，其包括多个功率晶体管单元，每个功率晶体管单元具有漏极和源极。 每个功率晶体管单元还具有形成在衬底上的多晶硅栅极，作为覆盖衬底的多晶硅栅极层的一部分。 多晶硅栅极层包括延伸到栅极接触区域的多个多晶栅极层延伸部分，用于与设置在其上的接触金属形成栅极接触。 功率晶体管还包括多个耐接触金属焊盘，每个包括设置在多晶栅极层延伸下方的栅极接触区下方的厚氧化物焊盘，由此接触金属电阻焊盘抵抗接触金属穿透其中并且短于 底物置于其下。

公开(公告)号：US5883416A

公开(公告)日：1999-03-16

申请号：US792226

申请日：1997-01-31

申请人： True-Lon Lin ,  Koon Chong So ,  Fwu-Iuan Hshieh ,  Yan Man Tsui

发明人： True-Lon Lin ,  Koon Chong So ,  Fwu-Iuan Hshieh ,  Yan Man Tsui

IPC分类号： H01L29/06 ,  H01L29/423 ,  H01L29/78 ,  H01L23/485 ,  H01L23/48

CPC分类号： H01L29/42368 ,  H01L29/7811 ,  H01L29/0696 ,  H01L29/42372 ,  H01L29/4238 ,  H01L2924/0002

摘要： The present invention discloses a power transistor disposed on a substrate. The power device includes a core cell area comprising a plurality of power transistor cells each having drain and a source. Each of the power transistor cells further having a polycrystalline silicon gate formed on the substrate as part of a polycrystalline silicon gate layer overlaying the substrate. The polycrystalline silicon gate layer includes a plurality of polycrystalline gate-layer-extension extending to gate contact areas for forming gate contacts with a contact metal disposed thereon. The power transistor further includes a plurality of contact-metal-resistant pad each includes a thick oxide pad disposed below the gate contact areas underneath the polycrystalline gate layer extension whereby the contact-metal resistant pads resists the contact metal from penetrating therethrough and short to the substrate disposed thereunder.

摘要翻译： 本发明公开了一种设置在基板上的功率晶体管。 功率器件包括核心单元区域，其包括多个功率晶体管单元，每个功率晶体管单元具有漏极和源极。 每个功率晶体管单元还具有形成在衬底上的多晶硅栅极，作为覆盖衬底的多晶硅栅极层的一部分。 多晶硅栅极层包括延伸到栅极接触区域的多个多晶栅极层延伸部分，用于与设置在其上的接触金属形成栅极接触。 功率晶体管还包括多个耐接触金属焊盘，每个包括设置在多晶栅极层延伸下方的栅极接触区下方的厚氧化物焊盘，由此接触金属电阻焊盘抵抗接触金属穿透其中并且短于 底物置于其下。

公开(公告)号：US5763915A

公开(公告)日：1998-06-09

申请号：US607715

申请日：1996-02-27

申请人： Fwu-Juan Hshieh ,  True-Lon Lin ,  Danny Chi Nim ,  Koon Chong So ,  Yan Man Tsui

发明人： Fwu-Juan Hshieh ,  True-Lon Lin ,  Danny Chi Nim ,  Koon Chong So ,  Yan Man Tsui

IPC分类号： H01L21/336 ,  H01L29/06 ,  H01L29/40 ,  H01L29/423 ,  H01L29/78 ,  H01L29/76 ,  H01L29/94

CPC分类号： H01L29/7813 ,  H01L29/4236 ,  H01L29/42372 ,  H01L29/66734 ,  H01L29/7811 ,  H01L29/0619 ,  H01L29/0638 ,  H01L29/402 ,  H01L29/4238

摘要： Improved power MOSFET structure, and fabrication process are disclosed in this invention to achieve cost savings by simplified device structure and fabrication processes, and also by reducing the required die size. Specifically, in a novel MOSFET device, insulation of mobile ions are achieved by extending the poly gate and metal contacts such that the passivation layer is no longer required and the fabrication process is simplified such that the MOSFET device can be manufactured at a lower price. Furthermore, in another MOSFET device, the gate runner is used to replace the field plate such that the requirement of a field plate as that in a conventional MOSFET device is also eliminated and, by reducing the die size, the cost of manufacture is further reduced.

摘要翻译： 在本发明中公开了改进的功率MOSFET结构和制造工艺，以通过简化的器件结构和制造工艺以及通过减少所需的管芯尺寸来实现成本节约。 具体地说，在新颖的MOSFET器件中，通过延长多晶硅栅极和金属触点来实现移动离子的绝缘，从而不再需要钝化层，并且简化了制造工艺，使得可以以更低的价格制造MOSFET器件。 此外，在另一个MOSFET器件中，栅极流道用于替代现场板，使得现场板的需求与常规MOSFET器件中的要求也被消除，并且通过减小管芯尺寸，制造成本进一步降低 。

公开(公告)号：US06548860B1

公开(公告)日：2003-04-15

申请号：US09515335

申请日：2000-02-29

申请人： Fwu-Iuan Hshieh ,  Koon Chong So ,  Yan Man Tsui

发明人： Fwu-Iuan Hshieh ,  Koon Chong So ,  Yan Man Tsui

IPC分类号： H01L2976

CPC分类号： H01L29/7813 ,  H01L29/0626 ,  H01L29/0865 ,  H01L29/1095 ,  H01L29/7811

摘要： A trench DMOS transistor structure is provided that includes at least three individual trench DMOS transistor cells formed on a substrate of a first conductivity type. The plurality of individual DMOS transistor cells is dividable into peripheral transistor cells and interior transistor cells. Each of the individual transistor cells includes a body region located on the substrate, which has a second conductivity type. At least one trench extends through the body region and the substrate. An insulating layer lines the trench. A conductive electrode is located in the trench, which overlies the insulating layer. Interior transistor cells, but not the peripheral transistor cells, each further include a source region of the first conductivity type in the body region adjacent to the trench.

摘要翻译： 提供沟槽DMOS晶体管结构，其包括形成在第一导电类型的衬底上的至少三个单独沟槽DMOS晶体管单元。 多个独立的DMOS晶体管单元可分为外围晶体管单元和内部晶体管单元。 每个单独的晶体管单元包括位于基板上的体区，其具有第二导电类型。 至少一个沟槽延伸穿过身体区域和衬底。 绝缘层对沟槽进行排列。 导电电极位于沟槽中，覆盖绝缘层。 内部晶体管单元，但不是外围晶体管单元，每个还包括与沟槽相邻的体区中的第一导电类型的源极区域。