Universal reticle transfer system
    1.
    发明申请
    Universal reticle transfer system 失效
    通用标线转印系统

    公开(公告)号:US20060177287A1

    公开(公告)日:2006-08-10

    申请号:US10506861

    申请日:2003-06-12

    IPC分类号: H01L21/677

    摘要: A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF pod (20) may be interrogated to determine the particular type of reticle cassette (36) or reticle holder (132) carried therein. A reticle transfer system (50) receives a pair of such SMIF pods (20), interrogates each of the SMIF pods (20) to ascertain which type of reticle cassette (36) or reticle holder (132) the SMIF pod (20) carries, and automatically moves reticles (42) through a controlled environment from one reticle cassette (36) or reticle holder (32) to another reticle cassette (36) or reticle holder (132). A reticle reorienter (56) includable in the system (50) also permits automatically exchanging reticles (42) between a reticle carrier (144) and a reticle cassette (36) or reticle holder (132).

    摘要翻译: 专门适应的SMIF盒(20)接收并保持从其数十种不同配置中选择的一种特定类型的标线盒(36)或标线架支架(132)。 可以询问SMIF盒(20)以确定其中承载的标线盒(36)或标线架(132)的特定类型。 标线片传送系统(50)接收一对这样的SMIF盒(20),询问每个SMIF盒(20)以确定SMIF盒(20)携带的哪种类型的标线盒(36)或标线架(132) 并且自动将标线片(42)通过受控的环境从一个标线盒(36)或标线保持器(32)移动到另一个标线盒(36)或标线架支架(132)。 可在系统(50)中包括的标线重新定向器(56)还允许自动交换标线片载体(144)和标线片盒(36)或标线架支架(132)之间的标线(42)。

    Universal reticle transfer system
    2.
    发明授权
    Universal reticle transfer system 失效
    通用标线转印系统

    公开(公告)号:US07318697B2

    公开(公告)日:2008-01-15

    申请号:US10506861

    申请日:2003-06-12

    IPC分类号: H01J5/02

    摘要: A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF pod (20) may be interrogated to determine the particular type of reticle cassette (36) or reticle holder (132) carried therein. A reticle transfer system (50) receives a pair of such SMIF pods (20), interrogates each of the SMIF pods (20) to ascertain which type of reticle cassette (36) or reticle holder (132) the SMIF pod (20) carries, and automatically moves reticles (42) through a controlled environment from one reticle cassette (36) or reticle holder (32) to another reticle cassette (36) or reticle holder (132). A reticle reorienter (56) includable in the system (50) also permits automatically exchanging reticles (42) between a reticle carrier (144) and a reticle cassette (36) or reticle holder (132).

    摘要翻译: 专门适应的SMIF盒(20)接收并保持从其数十种不同配置中选择的一种特定类型的标线盒(36)或标线架支架(132)。 可以询问SMIF盒(20)以确定其中承载的标线盒(36)或标线架(132)的特定类型。 标线片传送系统(50)接收一对这样的SMIF盒(20),询问每个SMIF盒(20)以确定SMIF盒(20)携带的哪种类型的标线盒(36)或标线架(132) 并且自动将标线片(42)通过受控的环境从一个标线盒(36)或标线保持器(32)移动到另一个标线盒(36)或标线架支架(132)。 可在系统(50)中包括的标线重新定向器(56)还允许自动交换标线片载体(144)和标线片盒(36)或标线架支架(132)之间的标线(42)。

    Method of fabricating solar cell
    3.
    发明授权
    Method of fabricating solar cell 有权
    制造太阳能电池的方法

    公开(公告)号:US08124535B2

    公开(公告)日:2012-02-28

    申请号:US12658663

    申请日:2010-02-11

    摘要: A method of fabricating a solar cell is provided. A saw damage removal process is performed on a silicon substrate. A dry surface treatment is performed to a surface of the silicon substrate on form an irregular surface. A metal-activated selective oxidation is performed to the irregular surface. By using an aqueous solution, the irregular surface is etched to form a nanotexturized surface of the silicon substrate. A dopant diffusion process is performed on the silicon substrate to form a P-N junction. An anti-reflection layer is formed on the silicon substrate. An electrode is formed on the silicon substrate.

    摘要翻译: 提供一种制造太阳能电池的方法。 在硅衬底上进行锯损坏去除工艺。 对硅衬底的表面进行干表面处理,形成不规则表面。 对不规则表面进行金属活化的选择性氧化。 通过使用水溶液,蚀刻不规则表面以形成硅衬底的纳米增塑表面。 在硅衬底上进行掺杂剂扩散处理以形成P-N结。 在硅衬底上形成防反射层。 在硅衬底上形成电极。

    Wafer-mapping method of wafer load port equipment
    4.
    发明授权
    Wafer-mapping method of wafer load port equipment 失效
    晶圆负载端口设备的晶圆映射方法

    公开(公告)号:US06452201B1

    公开(公告)日:2002-09-17

    申请号:US09619087

    申请日:2000-07-19

    IPC分类号: G01N2188

    CPC分类号: H01L21/67265 Y10S414/136

    摘要: This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.

    摘要翻译: 本发明使用基于模式的信号来加速评估过程,作为替代复杂计算过程的手段。 通过实施绝对坐标来构建本发明,通过位置和两个光学传感器信号产生基于图案的信号,并且通过进行特征提取处理。 该过程产生了侧向和重叠问题的特征信号。 此外,通过转换信号,特征信号可以由数字数据处理器处理。 因此,本发明可以实现晶片映射的三个主要目的。

    Digital non-contact blade position detection apparatus
    5.
    发明授权
    Digital non-contact blade position detection apparatus 失效
    数字非接触刀片位置检测装置

    公开(公告)号:US06348943B1

    公开(公告)日:2002-02-19

    申请号:US09182629

    申请日:1998-10-30

    IPC分类号: H04N718

    CPC分类号: B23D59/002 G01D5/342

    摘要: A digital non-contact blade position detection apparatus is provided for use on a wafer dicing machine for blade position detection so as to correct the position of the cutting blade. The apparatus includes a light source for generating a light beam; a light converging optical unit for converting the light beam from the light source to a preset converging point; light diverting means for diverting the beam light from the light converging optical unit to a preset optical path in which the blade is interdisposed; a light diverging optical unit for diverging the diverted light beam from the light diverting means; a CCD position detector, disposed at a third predetermined distance from the light diverging optical unit, for detecting a displacament of a diffractive part of the light beam passing through the optical path between the first and second that is partly blocked out by the blade; an analog-to-digital converter for converting the analog displacement signal from the CCD position detector into digital data; and computer means for processing the digital data to thereby determine the required correction in the position of the blade due to wear to the blade. This apparatus has the benefits of performing the blade position detection in a non-contact manner, enhancing the resolving power to submicron level; allowing the detection to be unaffected by alien particles; and performing the blade position detection with quick response and high precision.

    摘要翻译: 提供了一种用于刀片位置检测的晶片切割机上的数字非接触刀片位置检测装置,以便校正切割刀片的位置。 该装置包括用于产生光束的光源; 用于将来自光源的光束转换为预设会聚点的聚光光学单元; 光转向装置,用于将来自聚光光学单元的光束转向预定的光路,其中叶片被插入其中; 光发散光学单元,用于使所述转向光束从所述光转向装置发散; CCD位置检测器,设置在距发光光学单元第三预定距离处,用于检测通过第一和第二光路之间的光束的衍射部分的位置,该光路部分被叶片阻挡; 用于将来自CCD位置检测器的模拟位移信号转换成数字数据的模拟 - 数字转换器; 以及用于处理数字数据的计算机装置,从而由​​于刀片的磨损而确定刀片位置所需的校正。 该装置具有以非接触方式执行叶片位置检测的优点,将分辨能力提高到亚微米级; 允许检测不受外来颗粒的影响; 并具有快速响应和高精度执行刀片位置检测。

    Method for producing silicon substrate for solar cells
    7.
    发明申请
    Method for producing silicon substrate for solar cells 有权
    太阳能电池用硅基板的制造方法

    公开(公告)号:US20090311821A1

    公开(公告)日:2009-12-17

    申请号:US12214183

    申请日:2008-06-16

    IPC分类号: H01L31/0236

    摘要: A method for producing a silicon substrate for solar cells is provided. The method includes performing a saw damage removal (SDR) and surface macro-texturing on a silicon substrate with acids solution, so that a surface of the silicon substrate becomes an irregular surface. Thereafter, a metal-activated selective oxidation is performed on the irregular surface with an aqueous solution containing an oxidant and a metal salt, in which the oxidant is one selected from persulfate ion, permanganate ion, bichromate ion, and a mixture thereof. Afterwards, the irregular surface is etched with an aqueous solution containing HF and H2O2 so as to form a nano-texturized silicon substrate.

    摘要翻译: 提供一种太阳能电池用硅基板的制造方法。 该方法包括用酸溶液在硅衬底上进行锯损坏去除(SDR)和表面宏纹理,使得硅衬底的表面变成不规则表面。 此后,用含有氧化剂和金属盐的水溶液对不规则表面进行金属活化选择性氧化,其中氧化剂选自过硫酸根离子,高锰酸根离子,重铬酸根离子及其混合物。 然后,用含有HF和H 2 O 2的水溶液蚀刻不规则表面,以形成纳米组织化的硅衬底。

    SOLAR CELL AND METHOD FOR FORMING THE SAME
    8.
    发明申请
    SOLAR CELL AND METHOD FOR FORMING THE SAME 审中-公开
    太阳能电池及其形成方法

    公开(公告)号:US20090050202A1

    公开(公告)日:2009-02-26

    申请号:US11969225

    申请日:2008-01-04

    IPC分类号: H01L31/0224 H01L31/04

    CPC分类号: H01L31/022425 Y02E10/50

    摘要: The invention is directed to a solar cell. The solar cell comprises a silicon layer, a front side electrode and a back side electrode. The silicon layer has a first surface and a second surface. The front side electrode is located on the first surface of the silicon layer. The back side electrode is located on the second surface of the silicon layer. Further, the back side electrode comprises a passivation layer, a first conductive layer and a second conductive layer. The passivation layer is located on the second surface of the silicon layer and has a plurality of holes penetrating through the passivation layer. The first conductive layer is located on the passivation layer and is electrically connected to the silicon layer through the holes. The second conductive layer is located on the first conductive layer.

    摘要翻译: 本发明涉及一种太阳能电池。 太阳能电池包括硅层,前侧电极和背面电极。 硅层具有第一表面和第二表面。 前侧电极位于硅层的第一表面上。 背面电极位于硅层的第二表面上。 此外,背面电极包括钝化层,第一导电层和第二导电层。 钝化层位于硅层的第二表面上,并且具有贯穿钝化层的多个孔。 第一导电层位于钝化层上,并通过该孔与硅层电连接。 第二导电层位于第一导电层上。

    Radio frequency identification device
    9.
    发明授权
    Radio frequency identification device 失效
    射频识别装置

    公开(公告)号:US06616034B2

    公开(公告)日:2003-09-09

    申请号:US10007106

    申请日:2001-12-10

    IPC分类号: G06F1700

    摘要: An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

    摘要翻译: 一种用于在制造设施内跟踪晶片载体的识别系统。 该系统使用智能卡技术,其中在每个晶片载体上放置识别卡。 智能卡具有用于存储关于晶片载体的信息的存储器。 电力与数据一起传输到卡,以便智能卡不需要单独的电源。 用于与智能卡通信的设备可以是静止的,或者它们可以是便携式手持设备。 网络将读卡器连接到中央数据库。

    Method for producing silicon substrate for solar cells
    10.
    发明授权
    Method for producing silicon substrate for solar cells 有权
    太阳能电池用硅基板的制造方法

    公开(公告)号:US08053270B2

    公开(公告)日:2011-11-08

    申请号:US12214183

    申请日:2008-06-16

    IPC分类号: H01L31/0236

    摘要: A method for producing a silicon substrate for solar cells is provided. The method includes performing a saw damage removal (SDR) and surface macro-texturing on a silicon substrate with acids solution, so that a surface of the silicon substrate becomes an irregular surface. Thereafter, a metal-activated selective oxidation is performed on the irregular surface with an aqueous solution containing an oxidant and a metal salt, in which the oxidant is one selected from persulfate ion, permanganate ion, bichromate ion, and a mixture thereof. Afterwards, the irregular surface is etched with an aqueous solution containing HF and H2O2 so as to form a nano-texturized silicon substrate.

    摘要翻译: 提供一种太阳能电池用硅基板的制造方法。 该方法包括用酸溶液在硅衬底上进行锯损坏去除(SDR)和表面宏纹理,使得硅衬底的表面变成不规则表面。 此后,用含有氧化剂和金属盐的水溶液对不规则表面进行金属活化选择性氧化,其中氧化剂选自过硫酸根离子,高锰酸根离子,重铬酸根离子及其混合物。 然后,用含有HF和H 2 O 2的水溶液蚀刻不规则表面,以形成纳米组织化的硅衬底。