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    Apparatus for preventing misplacement of a cassette pod onto a process machine
    1.
    发明授权
    Apparatus for preventing misplacement of a cassette pod onto a process machine 有权
    用于防止将盒式磁带盒放置到处理机器上的装置

    公开(公告)号：US06500261B1

    公开(公告)日：2002-12-31

    申请号：US10032344

    申请日：2001-12-21

    Applicant: Jun-Bo Chen ,  Kuo-Chen Lin ,  Chi-Pong Chiang

    Inventor： Jun-Bo Chen ,  Kuo-Chen Lin ,  Chi-Pong Chiang

    IPC: B05C1300

    CPC classification number: H01L21/67259 ,  Y10S414/135 ,  Y10S414/136

    Abstract: A method and an apparatus for preventing the misplacement of a cassette pod on the loadport of a process machine are described. In the method, a cassette pod that is equipped with an identification tag on a front panel is first provided, a process machine that is equipped with a loadport for receiving the cassette pod is then provided, at least one position verification block is mounted on the loadport at a first preset position, and then at least one position verification finger is mounted on the front panel of the cassette pod corresponding to the first preset position of the at least one position verification block such that when the cassette pod is placed on the loadport, the at least one position verification finger does not interfere with the at least one position verification block.

    Abstract translation: 描述了一种用于防止盒式录像带在加工机的加载端口上的错位的方法和装置。 在该方法中，首先提供在前面板上配备有识别标签的盒式盒，然后提供装备有用于接收盒式盒的装载端口的处理机，至少一个位置验证块安装在 然后至少一个位置验证手指安装在与所述至少一个位置验证块的第一预设位置相对应的盒式磁带盒的前面板上，使得当磁带盒被放置在载入端口上时 所述至少一个位置验证手指不干扰所述至少一个位置验证块。

    METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
    2.
    发明申请
    METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER 审中-公开
    使用CDO室进行PFC排放的方法和装置

    公开(公告)号：US20080003157A1

    公开(公告)日：2008-01-03

    申请号：US11673404

    申请日：2007-02-09

    Applicant: Sebastien Raoux ,  Kuo-Chen Lin ,  Robbert Vermeulen ,  Daniel Clark ,  Stephen Tsu ,  Mehran Moalem ,  Allen Fox ,  Monique McIntosh ,  Joshua Putz ,  Eric Rieske ,  Poh Lee

    Inventor： Sebastien Raoux ,  Kuo-Chen Lin ,  Robbert Vermeulen ,  Daniel Clark ,  Stephen Tsu ,  Mehran Moalem ,  Allen Fox ,  Monique McIntosh ,  Joshua Putz ,  Eric Rieske ,  Poh Lee

    IPC: B01D53/74 ,  C01B21/00 ,  C01B7/20 ,  C07C1/00

    CPC classification number: B01D53/8662 ,  B01D2257/2066 ,  C01B7/20 ,  Y02C20/30 ,  Y02P20/154

    Abstract: In at least one aspect, a controlled decomposition oxidation (CDO) system is provided for abating perfluorocarbons (PFCs) that includes (1) an upstream portion including a first conduit adapted to convey a gaseous waste stream; (2) a thermal reaction chamber having an inlet coupled to the first conduit, a catalyst bed adapted to abate PFCs, and an outlet; and (3) a downstream portion including a second conduit having a first end coupled to the outlet of the thermal reaction chamber and having a portion, downstream from the first end, positioned proximate to the first conduit. The second conduit is adapted to convey a gaseous waste stream heated within the thermal reaction chamber to enable a transfer of heat energy from the second conduit to the first conduit so as to pre-heat the gaseous waste stream in the first conduit. Numerous other aspects are provided.

    Abstract translation: 在至少一个方面，提供控制分解氧化（CDO）系统以减轻全氟化碳（PFCs），其包括（1）包括适于输送气态废物流的第一导管的上游部分; （2）具有连接到第一导管的入口的热反应室，适于消除PFC的催化剂床和出口; 和（3）包括第二导管的下游部分，第二导管具有联接到热反应室的出口的第一端，并且具有位于第一端的下游的部分，其位于第一导管附近。 第二导管适于传送在热反应室内加热的气态废物流，以便能够将热能从第二导管传递到第一导管，以便预热第一导管中的气体废物流。 提供了许多其他方面。

    Method for performing dynamic re-scheduling of fabrication plant
    4.
    发明授权
    Method for performing dynamic re-scheduling of fabrication plant 有权
    执行制造厂动态重新调度的方法

    公开(公告)号：US06434443B1

    公开(公告)日：2002-08-13

    申请号：US09313304

    申请日：1999-05-17

    Applicant: Kuo-Chen Lin

    Inventor： Kuo-Chen Lin

    IPC: G06F1900

    CPC classification number: G05B19/41865 ,  G05B2219/32256 ,  G05B2219/45031 ,  G06Q10/06 ,  Y02P90/20

    Abstract: A method/system for performing dynamic re-scheduling of priorities of work-in-process in a fabrication plant for manufacturing of a product is provided. It reads a key stage report for the work-in-process and a master production schedule for the work-in-process from stored data. It generates a master production schedule report from the key stage report and the master production schedule following only Due_Date data for the work-in-process, and generates a work-in-process distribution matrix for integrating the master production schedule report with work-in-process quantity data within a deliverable cycle time; allocates selected lots from the work-in-process distribution matrix using a snake pattern method to allocate the selected lots from the matrix, and changes the due date for the selected lots of the work-in-process selected by the snake pattern method. It generates a final re-scheduling table for the work-in-process including the selected lots.

    Abstract translation: 提供了一种用于在用于制造产品的制造工厂中执行对在工作中的工作的优先级的动态重新调度的方法/系统。 它从存储的数据读取关于工作在进程的关键阶段报告以及正在进行的工作的主生产计划。 它从关键阶段报告和主生产计划生成主生产计划报告，仅在工作中的Due_Date数据，并生成一个在制品分配矩阵，用于将主生产计划报告与工作集成 - 可交付周期内的过程数量数据; 使用蛇模式方法从工作在进程分配矩阵中分配所选批次，以从矩阵中分配所选批次，并更改由蛇模式方法选择的所选批次的工作进程的截止日期。 它生成包括所选批次在内的在制品的最终重新调度表。

    Paddle for securely mounting a wafer cassette holder thereto
    5.
    发明授权
    Paddle for securely mounting a wafer cassette holder thereto 有权
    用于将晶片盒架牢固地安装在其上的桨

    公开(公告)号：US07810645B2

    公开(公告)日：2010-10-12

    申请号：US10190054

    申请日：2002-07-03

    Applicant: Chih-Hung Huang ,  Ching-Chiang Chang ,  Yu-Yen Chang ,  Pei-Yi Kuo ,  Kuo-Chen Lin ,  Chung-Yi Lee

    Inventor： Chih-Hung Huang ,  Ching-Chiang Chang ,  Yu-Yen Chang ,  Pei-Yi Kuo ,  Kuo-Chen Lin ,  Chung-Yi Lee

    IPC: B65D85/00

    CPC classification number: H01L21/67775 ,  Y10S414/137 ,  Y10S414/141

    Abstract: A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, And a securing device mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform, the securing device may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.

    Abstract translation: 提供了一种用于在其上牢固地安装晶片盒座的平台，其包括具有平坦底表面和四个侧壁面板的晶片盒保持器，平台的平坦顶表面大于并用于配合到晶片的平坦底表面 盒式固定器，以及固定装置，安装在平台的平坦的上表面上，与晶片盒保持架的四个侧壁的每一侧并排，以防止保持器意外滑落平台，固定装置可包括多个接合 可滑动地接合晶片盒保持器的销，用于将支架牢固地保持在平台上，或者沿着平台的周边边缘安装的多个侧板，以防止支架从平台上滑落。

    Dynamic lot dispatching required turn rate factory control system and method of operation thereof
    7.
    发明授权
    Dynamic lot dispatching required turn rate factory control system and method of operation thereof 失效
    动态批量调度要求转速工厂控制系统及其运行方法

    公开(公告)号：US5818716A

    公开(公告)日：1998-10-06

    申请号：US735059

    申请日：1996-10-18

    Applicant: Wen-Cheng Chin ,  Jiann-Kwang Wang ,  Kuo-Chen Lin ,  Sheng-Rong Huang

    Inventor： Wen-Cheng Chin ,  Jiann-Kwang Wang ,  Kuo-Chen Lin ,  Sheng-Rong Huang

    IPC: G05B19/418 ,  H01L21/66 ,  G06F19/00

    CPC classification number: H01L22/20 ,  G05B19/41865 ,  G05B2219/31395 ,  G05B2219/31407 ,  G05B2219/31428 ,  G05B2219/32088 ,  G05B2219/32256 ,  G05B2219/32266 ,  G05B2219/32267 ,  Y02P90/20

    Abstract: In a semiconductor manufacturing fabrication plant with production to-order type operation, hundreds of devices and various processes are managed. To provide short cycle time and precise delivery to satisfy customer expectations is a major task. A dispatching algorithm named "Required Turn Rate (RTR)" functions according to the level of current wafers in process (WIP) algorithm revising the due date for every lot to satisfy the demand from Master Production Scheduling (MPS). Further the RTR algorithm calculates the RTR of each lot based on process flow to fulfill the delivery requirement. The RTR algorithm determines not only due date and production priority of each lot, but also provides RTR for local dispatching. The local dispatching systems of each working area dispatch the lots by using required turn rate to maximize output and machines utilization.

    Abstract translation: 在具有生产订单型操作的半导体制造制造工厂中，管理数百个装置和各种工艺。 提供短周期时间和精确交货以满足客户的期望是一项重大任务。 根据当前正在进行的晶片处理（WIP）算法的级别，“所需转速（RTR）”的调度算法修改了每个批次的到期日以满足主生产计划（MPS）的需求。 此外，RTR算法基于流程来计算每批的RTR以满足交付要求。 RTR算法不仅确定了每个批次的到期日期和生产优先级，还为本地调度提供了RTR。 每个工作区的本地调度系统通过使用所需的转弯率来调度批次，以最大限度地提高产量和机器利用率。

    Target generation system based on unlimited capacity allocation
    9.
    发明授权
    Target generation system based on unlimited capacity allocation 有权
    基于无限容量分配的目标生成系统

    公开(公告)号：US06654655B1

    公开(公告)日：2003-11-25

    申请号：US09636562

    申请日：2000-08-10

    Applicant: Kuo-Fong Chuang ,  Kuo-Chen Lin

    Inventor： Kuo-Fong Chuang ,  Kuo-Chen Lin

    IPC: G06F1900

    CPC classification number: G06Q10/06 ,  G05B19/41865 ,  G05B2219/32088 ,  G05B2219/32096 ,  Y02P90/14 ,  Y02P90/20

    Abstract: A method and system for production line target generation based on unlimited capacity allocation utilizing an algorithm that begins with setting the required delivery date (REQ_DATE) from the customer's purchase order and using the REQ_DATE to define other related requirements by backtracking the production line requirements to determine how many stages need to be passed before delivery, and to decide where and how to setup and arrange the production equipment, in order to complete and deliver the ordered goods on time. Particularly, the processing of each lot is monitored while passing through the processing stages by: calculating the days remaining, DR, by subtracting the present date from the initial delivery date, REQ_DATE−TODAY, for each lot; calculating the processing stages remaining for each lot to reach the last processing stage, to determine the remaining stages, Sg=last processing stage's number—the instant stage number; and dividing the remaining stages by the remaining days, Sg/DR, to derive the penetration stages per day required for each lot; and then, using the derived penetration stages to target for the movement of the lots through each remaining stage to achieve the production goal in a timely manner.

    Abstract translation: 一种基于无限容量分配的生产线目标生成方法和系统，该算法首先从客户的采购订单设定所需交货日期（REQ_DATE），并使用REQ_DATE通过回溯生产线要求来确定其他相关要求，以确定 交货前需要通过多少阶段，并决定在何处设置和安排生产设备，以便按时完成订购的货物。 特别地，通过以下步骤来监视每批的处理：通过从每个批次的REQ_DATE-TODAY的初始交货日期减去当前日期，从而计算剩余的天数D R ; 计算每个批次剩余的处理阶段以达到最后一个处理阶段，以确定剩余阶段，Sg =最后处理阶段的数量 - 即时阶段数; 并将剩余阶段除以剩余天数Sg / D R ，以得出每批所需的每天的渗透阶段; 然后，使用衍生的渗透阶段来瞄准批次在每个剩余阶段的移动，以及时实现生产目标。

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