DUMMY SHOULDER STRUCTURE FOR LINE STRESS REDUCTION
    2.
    发明申请
    DUMMY SHOULDER STRUCTURE FOR LINE STRESS REDUCTION 有权
    用于线应力减少的双层结构

    公开(公告)号:US20110241207A1

    公开(公告)日:2011-10-06

    申请号:US12753272

    申请日:2010-04-02

    IPC分类号: H01L23/52 G06F17/50

    摘要: Semiconductor integrated circuit line structures for improving a process window in the vicinity of dense-to-isolated pattern transition areas and a technique to implement the line structures in the layout process are described in this disclosure. The disclosed structure includes a semiconductor substrate, and a material layer above the substrate. The material layer has a closely spaced dense line structure, an isolated line structure next to the dense line structure, and a dummy line shoulder structure formed in the vicinity of the dense line and the isolated line structures. One end of the dummy line shoulder structure connects to the isolated line structure and another end extends away from the isolated line structure in an orientation substantially perpendicular to the isolated line structure.

    摘要翻译: 在本公开中描述了用于改善密集到隔离图案转移区域附近的处理窗口的半导体集成电路线结构和在布局处理中实现线结构的技术。 所公开的结构包括半导体衬底和衬底上方的材料层。 材料层具有紧密间隔的密集线结构,紧密密集线结构旁边的隔离线结构,以及形成在密集线附近和隔离线结构处的虚拟线肩结构。 虚拟线肩结构的一端连接到隔离线结构,另一端以基本垂直于隔离线结构的方向远离隔离线结构延伸。

    Dummy shoulder structure for line stress reduction
    3.
    发明授权
    Dummy shoulder structure for line stress reduction 有权
    用于线应力降低的假肩结构

    公开(公告)号:US08692351B2

    公开(公告)日:2014-04-08

    申请号:US12753272

    申请日:2010-04-02

    IPC分类号: H01L21/70

    摘要: Semiconductor integrated circuit line structures for improving a process window in the vicinity of dense-to-isolated pattern transition areas and a technique to implement the line structures in the layout process are described in this disclosure. The disclosed structure includes a semiconductor substrate, and a material layer above the substrate. The material layer has a closely spaced dense line structure, an isolated line structure next to the dense line structure, and a dummy line shoulder structure formed in the vicinity of the dense line and the isolated line structures. One end of the dummy line shoulder structure connects to the isolated line structure and another end extends away from the isolated line structure in an orientation substantially perpendicular to the isolated line structure.

    摘要翻译: 在本公开中描述了用于改善密集到隔离图案转移区域附近的处理窗口的半导体集成电路线结构和在布局处理中实现线结构的技术。 所公开的结构包括半导体衬底和衬底上方的材料层。 材料层具有紧密间隔的密集线结构,紧密密集线结构旁边的隔离线结构,以及形成在密集线附近和隔离线结构处的虚拟线肩结构。 虚拟线肩结构的一端连接到隔离线结构,另一端以基本垂直于隔离线结构的方向远离隔离线结构延伸。