Compositions and methods for modifying a surface suited for semiconductor fabrication
    1.
    发明授权
    Compositions and methods for modifying a surface suited for semiconductor fabrication 有权
    用于修改适合于半导体制造的表面的组合物和方法

    公开(公告)号:US08092707B2

    公开(公告)日:2012-01-10

    申请号:US11839329

    申请日:2007-08-15

    IPC分类号: C09K13/00

    摘要: The disclosure pertains to compositions and methods for modifying or refining the surface of a wafer suited for semiconductor fabrication. The compositions include working liquids useful in modifying a surface of a wafer suited for fabrication of a semiconductor device. In some embodiments, the working liquids are aqueous solutions of initial components substantially free of loose abrasive particles, the components including water, a surfactant, and a pH buffer exhibiting at least one pKa greater than 7. In certain embodiments, the pH buffer includes a basic pH adjusting agent and an acidic complexing agent, and the working liquid exhibits a pH from about 7 to about 12. In further embodiments, the disclosure provides a fixed abrasive article comprising a surfactant suitable for modifying the surface of a wafer, and a method of making the fixed abrasive article. Additional embodiments describe methods that may be used to modify a wafer surface.

    摘要翻译: 本公开涉及用于改性或精制适于半导体制造的晶片表面的组合物和方法。 组合物包括可用于改性适于制造半导体器件的晶片表面的工作液体。 在一些实施方案中,工作液体是基本上不含松散磨料颗粒的初始组分的水溶液,组分包括水,表面活性剂和显示出至少一个pKa大于7的pH缓冲液。在某些实施方案中,pH缓冲剂包括 碱性pH调节剂和酸性络合剂,并且工作液体的pH为约7至约12.在另外的实施方案中,本公开提供了包含适于改性晶片表面的表面活性剂的固定磨料制品,以及方法 制造固定的磨料制品。 另外的实施例描述了可用于修改晶片表面的方法。

    Method of planarizing the upper surface of a semiconductor wafer
    2.
    发明授权
    Method of planarizing the upper surface of a semiconductor wafer 失效
    平面化半导体晶片的上表面的方法

    公开(公告)号:US06194317B1

    公开(公告)日:2001-02-27

    申请号:US09091932

    申请日:1998-06-24

    IPC分类号: H01L21302

    摘要: This invention pertains to a method of modifying or refining a surface of a wafer suited for semiconductor fabrication. This method may be used to modify a wafer having an unmodified, exposed surface comprised of a layer of a second material deployed over at least one discrete feature of a first material attached to the wafer. A first step of this method comprises contacting and relatively moving the exposed surface of the wafer with respect to an abrasive article, wherein the abrasive article comprises an exposed surface of a plurality of three-dimensional abrasive composites comprising a plurality of abrasive particles fixed and dispersed in a binder and maintaining contact to effect removal of the second material. In a second step, the contact and relative motion are continued until an exposed surface of the wafer has at least one area of exposed first material and at least one area of exposed second material.

    摘要翻译: 本发明涉及一种修改或精制适合半导体制造的晶片表面的方法。 该方法可以用于修改具有未修饰的暴露表面的晶片,该表面包括由连接到晶片的第一材料的至少一个离散特征部分的第二材料层。 该方法的第一步包括相对于磨料制品接触和相对移动晶片的暴露表面,其中磨料制品包括多个固定和分散的多个磨料颗粒的多个三维磨料复合材料的暴露表面 在粘合剂中并保持接触以实现第二材料的去除。 在第二步骤中,接触和相对运动继续进行,直到晶片的暴露表面具有暴露的第一材料的至少一个区域和暴露的第二材料的至少一个区域。

    Acid functional fluoropolymer membranes and method of manufacture
    3.
    发明授权
    Acid functional fluoropolymer membranes and method of manufacture 失效
    酸官能含氟聚合物膜及其制造方法

    公开(公告)号:US06423784B1

    公开(公告)日:2002-07-23

    申请号:US09464337

    申请日:1999-12-15

    IPC分类号: C08F800

    摘要: Methods are provided to make acid functional fluoropolymers by: a) dehydrofluorinating a starting fluoropolymer with a dehydrofluorinating agent to form an unsaturated fluoropolymer; b) adding an acidifiable nucleophilic functionalizing agent to a double bond of the unsaturated fluoropolymer; and c) acidifying the added acidifiable function. Acid functional fluoropolymers and ion conducting membranes thereof are also provided, including acid functional fluoropolymer having pendent groups according to the formula: —X—Ar—An, wherein X is selected from O, S or NR, where R is selected from H and C1-C30 alkyl or aryl, which are optionally substituted, wherein Ar is a C6-C30 aromatic group, which is optionally substituted, wherein A is an acidic function or salt thereof, wherein a can be independently chosen to be 1, 2 or 3.

    摘要翻译: 提供通过以下方式制备酸官能含氟聚合物的方法:a)用脱氟化氢剂使起始含氟聚合物脱氟化氢以形成不饱和含氟聚合物; b)将可酸化的亲核官能化剂加入到不饱和含氟聚合物的双键中; 和c)酸化所添加的酸化功能。 还提供了酸官能含氟聚合物及其离子传导膜,包括具有根据下式的侧基的酸官能含氟聚合物:-X-Ar-An,其中X选自O,S或NR,其中R选自H和C1 -C 30烷基或芳基,其任选被取代,其中Ar是任选取代的C 6 -C 30芳族基团,其中A是酸性官能团或其盐,其中a可以独立地选择为1,2或3。

    Acid functional fluoropolymer membranes and method of manufacture
    4.
    发明授权
    Acid functional fluoropolymer membranes and method of manufacture 有权
    酸官能含氟聚合物膜及其制造方法

    公开(公告)号:US07160928B2

    公开(公告)日:2007-01-09

    申请号:US10984031

    申请日:2004-11-09

    IPC分类号: C08J5/20

    摘要: Methods are provided to make acid functional fluoropolymers by: a) dehydrofluorinating a starting fluoropolymer with a dehydrofluorinating agent to form an unsaturated fluoropolymer; b) adding an acidifiable nucleophilic functionalizing agent to a double bond of the unsaturated fluoropolymer; and c) acidifying the added acidifiable function. Acid functional fluoropolymers and ion conducting membranes thereof are also provided, including acid functional fluoropolymer having pendent groups according to the formula: —X—Ar—An, wherein X is selected from O, S or NR, where R is selected from H and C1–C30 alkyl or aryl, which are optionally substituted, wherein Ar is a C6–C30 aromatic group, which is optionally substituted, wherein A is an acidic function or salt thereof, wherein a can be independently chosen to be 1, 2 or 3.

    摘要翻译: 提供通过以下方式制备酸官能含氟聚合物的方法:a)用脱氟化氢剂使起始含氟聚合物脱氟化氢以形成不饱和含氟聚合物; b)将可酸化的亲核官能化剂加入到不饱和含氟聚合物的双键中; 和c)酸化所添加的酸化功能。 还提供了酸官能含氟聚合物及其离子传导膜,包括具有下式的侧基的酸官能含氟聚合物:-X-Ar-A N,其中X选自O,S或NR, 其中R选自H和任选取代的C 1 -C 30烷基或芳基,其中Ar是任选取代的C 6 -C 30芳族基团,其中A是酸性官能团或其盐,其中a可以独立地选自 为1,2或3。

    Counterelectrode layer
    5.
    发明授权
    Counterelectrode layer 失效
    反电极层

    公开(公告)号:US5919571A

    公开(公告)日:1999-07-06

    申请号:US891902

    申请日:1997-07-14

    IPC分类号: G02F1/155 B32B17/00

    CPC分类号: G02F1/155 G02F2001/1555

    摘要: Electrochromic devices are disclosed in which the counterelectrode layer is a gamma phase Li.sub.x V.sub.2 O.sub.5 layer in which x is between about 0.7 and 2.0. In addition, methods of producing electrochromic devices are disclosed including such counterelectrode layers which are heat treated at temperatures of greater than about 260.degree. C. to convert the counterelectrode layer into such a gamma phase Li.sub.x V.sub.2 O.sub.5 layer.

    摘要翻译: 公开了电致变色装置,其中反电极层是γ相LixV2O5层,其中x在约0.7和2.0之间。 此外,公开了制造电致变色器件的方法,其包括在大于约260℃的温度下进行热处理的反电极层,以将反电极层转换成这样的γ相LixV2O5层。

    Catalyst containing cobalt boron and oxygen and optionally aluminum of
preparation and process
    7.
    发明授权
    Catalyst containing cobalt boron and oxygen and optionally aluminum of preparation and process 失效
    含钴硼和氧的催化剂和任选的铝的制备和工艺

    公开(公告)号:US4863888A

    公开(公告)日:1989-09-05

    申请号:US187836

    申请日:1988-04-29

    摘要: The preparation, structure, and properties of solid inorganic materials containing cobalt, boron, oxygen and, optionally, aluminum, is described. Also described is the use of such materials in catalytic compositions for the conversion of organic compounds. In particular, the new material Co(BO.sub.2)OH is described as well as the use of such material in various catalyzed processes including oxidation of organic compound processes. A particularly useful process is a heterogeneous catalyzed partial oxidation of an alkylaromatic followed by complete oxidation to an aromatic polycarboxlic acid in a water phase.

    摘要翻译: 描述了含有钴,硼,氧和任选的铝的固体无机材料的制备,结构和性质。 还描述了这样的材料在催化组合物中用于有机化合物转化的用途。 特别地,描述了新材料Co(BO 2)OH以及这种材料在各种催化方法中的应用,包括有机化合物工艺的氧化。 特别有用的方法是烷基芳族化合物的非均相催化部分氧化,然后在水相中完全氧化成芳族多羧酸。

    CONTROLLED RELEASE COMPOSITION AND PROCESS
    8.
    发明申请
    CONTROLLED RELEASE COMPOSITION AND PROCESS 审中-公开
    控制释放组成和过程

    公开(公告)号:US20100028420A1

    公开(公告)日:2010-02-04

    申请号:US12519258

    申请日:2007-12-18

    申请人: L. Charles Hardy

    发明人: L. Charles Hardy

    摘要: A composition for encapsulation and controlled release comprises a water-insoluble matrix comprising a host molecule that is non-covalently crosslinked by multi-valent cations, that is non-polymeric, that has more than one carboxy functional group, that has at least partial aromatic or heteroaromatic character, and that comprises at least one pterin or 5-substituted pterin moiety. The composition can further comprise a guest molecule (for example, a drug) that can be encapsulated within the matrix and subsequently released.

    摘要翻译: 用于包封和控制释放的组合物包括水不溶性基质,其包含由多价阳离子非共价交联的主体分子,所述多价阳离子是非聚合的,其具有多于一个羧基官能团,所述羧基官能团具有至少部分芳族 或杂芳族字符,并且其包含至少一个蝶呤或5-取代的蝶呤部分。 组合物还可以包含可以封装在基质内并随后释放的客体分子(例如药物)。

    Acid functional fluoropolymer membranes and method of manufacture
    10.
    发明授权
    Acid functional fluoropolymer membranes and method of manufacture 有权
    酸官能含氟聚合物膜及其制造方法

    公开(公告)号:US06833412B2

    公开(公告)日:2004-12-21

    申请号:US10195221

    申请日:2002-07-15

    IPC分类号: C08F834

    摘要: Methods are provided to make acid functional fluoropolymers by: a) dehydrofluorinating a starting fluoropolymer with a dehydrofluorinating agent to form an unsaturated fluoropolymer; b) adding an acidifiable nucleophilic functionalizing agent to a double bond of the unsaturated fluoropolymer; and c) acidifying the added acidifiable function. Acid functional fluoropolymers and ion conducting membranes thereof are also provided, including acid functional fluoropolymer having pendent groups according to the formula: —X—Ar—An, wherein X is selected from O, S or NR, where R is selected from H and C1-C30 alkyl or aryl, which are optionally substituted, wherein Ar is a C6-C30 aromatic group, which is optionally substituted, wherein A is an acidic function or salt thereof, wherein a can be independently chosen to be 1, 2 or 3.

    摘要翻译: 提供通过以下方式制备酸官能含氟聚合物的方法:a)用脱氟化氢剂使起始含氟聚合物脱氟化氢以形成不饱和含氟聚合物; b)将可酸化的亲核官能化剂加入到不饱和含氟聚合物的双键中; 和c)酸化所添加的酸化功能。 还提供了酸官能含氟聚合物及其离子传导膜,包括具有根据下式的侧基的酸官能含氟聚合物:-X-Ar-An,其中X选自O,S或NR,其中R选自H和C1 -C30烷基或芳基,其任选被取代,其中Ar是任选取代的C 6 -C 30芳族基团,其中A是酸性官能团或其盐,其中A可以独立地选择为1,2或3。