摘要:
Discussed is a display device and a fabricating method thereof according to an embodiment, in which an organic-inorganic composite film is patterned without a mask by using an anti-film layer, and a residual anti-film layer protects a pad portion. The display device comprises a lower substrate; pixels arranged on a display area of the lower substrate; pads arranged on a non-display area of the lower substrate; an encapsulation layer arranged on the pixels; and an anti-film layer arranged on the pads as a molecular layer having a thickness of a single molecule. Also, the fabricating method of the display device comprises the steps of forming pads on a non-display area of a lower substrate and forming pixels on a display area; and forming an anti-film layer on the pixels as a molecular layer having a thickness of a single molecule.
摘要:
The present disclosure relates to a superhydrophobic coating material and a method for manufacturing the superhydrophobic coating material. The superhydrophobic coating material according to the present disclosure includes a substrate provided with a three-dimensional nano structure; and a coating layer comprising a rare earth metal oxide formed on the three-dimensional nano structure. The method for manufacturing the superhydrophobic coating material according to the present disclosure includes preparing a substrate provided with a three-dimensional nano structure; and forming a coating layer comprising a rare earth metal oxide on the three-dimensional nano structure by supplying a precursor including a rare earth metal and an oxidant one by one onto the substrate, and the temperature of the substrate is controlled in the forming step so that an atomic ratio of a carbon element in the coating layer is less than 1% to form the coating layer with superhydrophobic property.
摘要:
The present invention relates to a semiconductor device and a method for manufacturing the same. Disclosed is a semiconductor device including a substrate, a conductive line on the substrate, and a seed layer between the substrate and the conductive line, the seed layer including cobalt titanium nitride.
摘要:
Example embodiments of the inventive concept relate to a method of forming a metal sulfide alloy. The method may include forming a metal oxide alloy on a substrate using an ALD process and transforming the metal oxide alloy to a metal sulfide alloy.
摘要:
Disclosed are a transition metal dichalcogenide alloy and a method of manufacturing the same. A method of manufacturing a transition metal dichalcogenide alloy according to an embodiment of the present disclosure includes a step of depositing transition metal dichalcogenide on a substrate using atomic layer deposition (ALD); and a step of forming a transition metal dichalcogenide alloy by thermally treating the transition metal dichalcogenide with a sulfur compound.
摘要:
Provided are a gas sensor and a method of manufacturing the same. The gas sensor may include a transition metal chalcogenide layer on a substrate, a metal nano material on the transition metal chalcogenide layer, and an electrode on the transition metal chalcogenide layer with the metal nano material.
摘要:
Disclosed is a carbon thin-film device and method for manufacturing the same. The method includes forming a functional group on a surface of a substrate and functionalizing the substrate, and depositing a carbon thin film through ALD on the substrate in which the functional group is formed.
摘要:
Disclosed is a method for synthesizing a transition metal chalcogenide, in which a transition metal chalcogenide is synthesized on a substrate by atomic layer deposition to sequentially supply a precursor of the transition metal chalcogenide and a reactant so as to have a predetermined synthesis thickness, the transition metal chalcogenide is synthesized at a process temperature of 450° C. or higher and 1000° C. or lower, and the transition metal chalcogenide is synthesized at a process temperature corresponding to the predetermined synthesis thickness.
摘要:
Provided is a method of removing native oxide from a substrate, the method including exposing the substrate to trimethyl aluminum (TMA) or dicyclopentadienyl magnesium (MgCp2) for a predetermined time.
摘要:
Provided are methods for synthesizing a halogen-functionalized carbon material and for fabricating an electronic device employing the same. The synthesizing method of the halogen-functionalized carbon material may include thermally treating a transition metal material at a first temperature in a hydrogen atmosphere and thermally treating the transition metal material at a second temperature, which is lower than or equal to the first temperature, while further supplying halocarbon on the transition metal material.