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公开(公告)号：US20150311664A1
公开(公告)日：2015-10-29
申请号：US14541071
申请日：2014-11-13
IPC分类号： H01S3/106 , H01S3/0941 , H01S3/07 , G02B26/00 , H01S3/16 , H01S3/13 , H01S3/105 , H01S3/0933 , H01S3/08
CPC分类号： H01S3/1053 , B81B2201/02 , B81B2201/042 , B81C1/00158 , B81C1/00634 , B81C2201/0194 , G01L1/24 , G01L9/0005 , G01L9/0072 , G01L11/02 , G02B26/001 , H01L29/84 , H01S3/07 , H01S3/08059 , H01S3/0933 , H01S3/094 , H01S3/0941 , H01S3/106 , H01S3/1305 , H01S3/16 , H01S3/1693
摘要： The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.
摘要翻译： 本公开涉及在无溶剂环境中微机电系统（“MEMS”）的微接触印刷的方法和装置。 所公开的实施方案使得能够在聚对二甲苯层上形成复合膜并将复合结构转移到接收结构以形成由复合膜覆盖的一个或多个微腔。 聚对二甲苯膜的厚度可以在约100nm-2微米的范围内; 200nm-1微米，200-300nm，300-500nm，500nm至1微米和1-30微米。 接下来，在聚对二甲苯之上形成一个或多个二次层以产生复合膜。 复合膜可以具有约100nm至700nm至几微米的厚度。 可以测量复合膜的响应于外力的偏转，以提供无接触检测器。 相反，可以使用外部偏压来致动复合膜，以产生与施加的偏压相称的偏转。 所公开的实施例的应用包括可调激光器，麦克风，微型扬声器，远程激活的无接触压力传感器等。
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公开(公告)号：US20160380404A1
公开(公告)日：2016-12-29
申请号：US15140282
申请日：2016-04-27
CPC分类号： H01S3/1053 , B81B2201/02 , B81B2201/042 , B81C1/00158 , B81C1/00634 , B81C2201/0194 , G01L1/24 , G01L9/0005 , G01L9/0072 , G01L11/02 , G02B26/001 , H01L29/84 , H01S3/07 , H01S3/08059 , H01S3/0933 , H01S3/094 , H01S3/0941 , H01S3/106 , H01S3/1305 , H01S3/16 , H01S3/1693
摘要： The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.
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公开(公告)号：US20160130138A1
公开(公告)日：2016-05-12
申请号：US14541065
申请日：2014-11-13
CPC分类号： B81C1/00158 , B81B2201/042 , B81C1/00182 , B81C1/00634 , B81C2201/0194 , G01L9/0005 , G01L9/0072 , G01L11/02 , G02B26/001 , G02B26/0825 , G02B26/0841 , H01L29/84 , H01S5/0607 , H01S5/1039 , H01S5/187
摘要： The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.
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