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    Capacitive micromechanical sensor structure and micromechanical accelerometer
    1.
    发明授权
    Capacitive micromechanical sensor structure and micromechanical accelerometer 有权
    电容式微机械传感器结构和微机械加速度计

    公开(公告)号：US09547020B2

    公开(公告)日：2017-01-17

    申请号：US14314243

    申请日：2014-06-25

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Matti Liukku ,  Ville Pekka Rytkönen

    IPC分类号： G01P15/125 ,  B81B3/00 ,  G01P15/18 ,  G01P15/13 ,  G01P15/08

    CPC分类号： G01P15/125 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/033 ,  G01P15/0802 ,  G01P15/131 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0871

    摘要： The invention relates to a capacitive micromechanical sensor structure comprising a stator structure rigidly anchored to a substrate and a rotor structure movably anchored by means of spring structures to the substrate. The stator structure has a plurality of stator finger support beams and the rotor structure has a plurality of rotor finger support beams. Stator fingers along the stator finger support beam of the stator structure extend into rotor gaps along the rotor finger support beam of the rotor structure, and rotor fingers along the rotor finger support beam of the rotor structure extend into stator gaps along the stator finger support beam of the stator structure.

    摘要翻译： 本发明涉及一种电容微机械传感器结构，其包括刚性地锚定到基底的定子结构和通过弹簧结构可移动地锚定到基底的转子结构。 定子结构具有多个定子指状支撑梁，转子结构具有多个转子手指支撑梁。 沿着定子结构的定子指状支撑梁的定子指状物沿着转子结构的转子指状支撑梁延伸到转子间隙中，沿着转子结构的转子指状支撑梁的转子指状物沿着定子指状支撑梁延伸到定子间隙中 的定子结构。

    Microelectromechanical structure with frames
    3.
    发明授权
    Microelectromechanical structure with frames 有权

    公开(公告)号：US10429406B2

    公开(公告)日：2019-10-01

    申请号：US14630780

    申请日：2015-02-25

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Ville Pekka Rytkönen

    IPC分类号： G01P15/125 ,  B81B3/00 ,  B81B7/00 ,  G01P15/08

    摘要： A robust microelectromechanical structure that is less prone to internal or external electrical disturbances. The structure includes a mobile element with a rotor suspended to a support, a first frame anchored to the support and circumscribing the mobile element, and a second frame anchored to the support and circumscribing the mobile element between the mobile element and the first frame, electrically isolated from the first frame. The rotor and the second frame are galvanically coupled to have a same electric potential.

    Quadrature compensation
    4.
    发明授权
    Quadrature compensation 有权

    公开(公告)号：US09897447B2

    公开(公告)日：2018-02-20

    申请号：US14525272

    申请日：2014-10-28

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Anssi Blomqvist ,  Ville Pekka Rytkönen ,  Tommi Piirainen

    IPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/5726

    CPC分类号： G01C19/5719 ,  G01C19/56 ,  G01C19/5726

    摘要： A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.