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1.发明授权Charged particle beam apparatus and method for stably obtaining charged particle beam image 失效带电粒子束装置和稳定获得带电粒子束图像的方法公开(公告)号：US08536540B2
公开(公告)日：2013-09-17
申请号：US13381953
申请日：2010-05-14
Applicant: Makoto Suzuki , Kenji Tanimoto , Takuma Yamamoto
Inventor： Makoto Suzuki , Kenji Tanimoto , Takuma Yamamoto
IPC: H01J37/26
CPC classification number: H01J37/28 , H01J37/026 , H01J37/20 , H01J2237/004 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the outer circumferential portion and the center portion of the sample to be inspected. A sample cover is provided in the outer circumferential portion of a sample holder on which the sample to be inspected is placed. Charging characteristics of the sample cover are changed according to charging characteristics of the sample to be inspected. Consequently, uniform charged states can be formed in the outer circumferential portion and the center portion of the sample. Inspection/observation of the outer circumferential portion of the sample can be realized at higher sensitivity than in the past.
Abstract translation: 由于待检查样品的外周部分和中心部分的充电特性不同，所以待检样品的外周部分和中心部分不能获得相同的检查灵敏度。 在待检测样品放置的样品架的外周部设置有样品盖。 样品盖的充电特性根据待检样品的充电特性而改变。 因此，可以在样品的外周部分和中心部分形成均匀的带电状态。 可以以比以往更高的灵敏度实现样品的外周部的检查/观察。
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2.发明申请CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR STABLY OBTAINING CHARGED PARTICLE BEAM IMAGE 失效充电颗粒光束装置和用于稳定获取的粒子束图像的方法公开(公告)号：US20120126118A1
公开(公告)日：2012-05-24
申请号：US13381953
申请日：2010-05-14
Applicant: Makoto Suzuki , Kenji Tanimoto , Takuma Yamamoto
Inventor： Makoto Suzuki , Kenji Tanimoto , Takuma Yamamoto
CPC classification number: H01J37/28 , H01J37/026 , H01J37/20 , H01J2237/004 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the outer circumferential portion and the center portion of the sample to be inspected. A sample cover is provided in the outer circumferential portion of a sample holder on which the sample to be inspected is placed. Charging characteristics of the sample cover are changed according to charging characteristics of the sample to be inspected. Consequently, uniform charged states can be formed in the outer circumferential portion and the center portion of the sample. Inspection/observation of the outer circumferential portion of the sample can be realized at higher sensitivity than in the past.
Abstract translation: 由于待检查样品的外周部分和中心部分的充电特性不同，所以待检样品的外周部分和中心部分不能获得相同的检查灵敏度。 在待检测样品放置的样品架的外周部设置有样品盖。 样品盖的充电特性根据待检样品的充电特性而改变。 因此，可以在样品的外周部分和中心部分形成均匀的带电状态。 可以以比以往更高的灵敏度实现样品的外周部的检查/观察。
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公开(公告)号：US20060016990A1
公开(公告)日：2006-01-26
申请号：US11183906
申请日：2005-07-19
Applicant: Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
Inventor： Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
IPC: H01J37/28 , H01J37/256
CPC classification number: H01J37/21 , H01J37/265 , H01J37/28 , H01J2237/216 , H01J2237/24592 , H01J2237/2487 , H01J2237/2817 , H01J2237/2826
Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.
Abstract translation: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元，用于存储带电粒子光学系统的形状，位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元，用于计算带电粒子束路径附近的电磁场的电磁场计算单元，用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元，存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。
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公开(公告)号：US20070241278A1
公开(公告)日：2007-10-18
申请号：US11808376
申请日：2007-06-08
Applicant: Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
Inventor： Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
IPC: G01N23/00
CPC classification number: H01J37/21 , H01J37/265 , H01J37/28 , H01J2237/216 , H01J2237/24592 , H01J2237/2487 , H01J2237/2817 , H01J2237/2826
Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.
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公开(公告)号：US07435960B2
公开(公告)日：2008-10-14
申请号：US11808376
申请日：2007-06-08
Applicant: Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
Inventor： Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
IPC: H01J37/28 , H01J37/256
CPC classification number: H01J37/21 , H01J37/265 , H01J37/28 , H01J2237/216 , H01J2237/24592 , H01J2237/2487 , H01J2237/2817 , H01J2237/2826
Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.
Abstract translation: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元，用于存储带电粒子光学系统的形状，位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元，用于计算带电粒子束路径附近的电磁场的电磁场计算单元，用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元，存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。
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Patent Agency Ranking
公开(公告)号：US07241996B2
公开(公告)日：2007-07-10
申请号：US11183906
申请日：2005-07-19
Applicant: Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
Inventor： Makoto Suzuki , Kenji Tanimoto , Yuko Sasaki
IPC: H01J37/28 , H01J37/256
CPC classification number: H01J37/21 , H01J37/265 , H01J37/28 , H01J2237/216 , H01J2237/24592 , H01J2237/2487 , H01J2237/2817 , H01J2237/2826
Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.
Abstract translation: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元，用于存储带电粒子光学系统的形状，位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元，用于计算带电粒子束路径附近的电磁场的电磁场计算单元，用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元，存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。
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7.发明授权Image forming apparatus having a drawer unit with a paper-feeding conveying path therein 有权图像形成装置具有其中具有送纸输送路径的抽屉单元公开(公告)号：US09176462B2
公开(公告)日：2015-11-03
申请号：US14102747
申请日：2013-12-11
Applicant: Yoshihide Ohta , Joh Ebara , Hiroshi Ishii , Junichi Kawase , Kohta Takenaka , Tetsuji Nishikawa , Kohta Hirakawa , Toshihiro Shimada , Yusuke Funayama , Tsuyoshi Endo , Yusuke Masu , Makoto Suzuki
Inventor： Yoshihide Ohta , Joh Ebara , Hiroshi Ishii , Junichi Kawase , Kohta Takenaka , Tetsuji Nishikawa , Kohta Hirakawa , Toshihiro Shimada , Yusuke Funayama , Tsuyoshi Endo , Yusuke Masu , Makoto Suzuki
CPC classification number: G03G21/1623 , G03G15/6502 , G03G21/1638 , G03G21/1647 , G03G21/1695 , G03G2215/00544 , G03G2215/00713 , G03G2221/1675
Abstract: An image forming apparatus having a drawer unit that includes therein a paper-feeding conveying path for conveying a recording medium conveyed from a paper feeding unit on which the recording media are stacked to an image forming unit and/or a discharge conveying path for conveying the recording medium on which an image has been formed to a discharging unit, and be drawn out from an apparatus main body; a lock unit that locks the drawer unit to the apparatus main body; a straddle detecting unit that detects whether the recording medium straddles a conveying path in the apparatus main body and a conveying path in the drawer unit; and a controller that controls the lock unit to lock the drawer unit to the apparatus main body when the straddle detecting unit detects the straddle.
Abstract translation: 一种具有抽屉单元的图像形成装置，其中包括一个送纸传送路径，用于将从其上叠放有记录介质的供纸单元输送的记录介质传送到图像形成单元和/或排出传送路径，用于传送 已经形成图像的记录介质到排出单元，并从设备主体被拉出; 锁定单元，其将抽屉单元锁定到设备主体; 跨越检测单元，其检测记录介质是否跨越所述设备主体中的传送路径和所述抽屉单元中的传送路径; 以及控制器，当所述跨骑式检测单元检测到所述跨骑时，所述控制器控制所述锁定单元将所述抽屉单元锁定到所述装置主体。
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8.发明授权公开(公告)号：US08047165B2
公开(公告)日：2011-11-01
申请号：US11922141
申请日：2006-06-05
Applicant: Yasushi Ito , Makoto Suzuki , Kenichi Yamada , Rentaro Kuroki , Tomohiro Shinagawa
Inventor： Yasushi Ito , Makoto Suzuki , Kenichi Yamada , Rentaro Kuroki , Tomohiro Shinagawa
IPC: F01P9/00
CPC classification number: F01M5/02 , F01P9/00 , F16H57/0412 , F16N39/00
Abstract: A medium circulating apparatus of engine oil, which improves startability and warm up ability of an internal combustion engine, includes a microbubble generator that generates microbubbles and mixes the microbubbles into the circulating engine oil. Further, the medium circulating apparatus includes a medium temperature acquiring unit that acquires a temperature of the engine oil. The microbubbles are generated by the microbubble generator when the temperature of the engine oil is less than or equal to a predetermined value in order to decrease a viscosity, a heat conductivity, and a heat capacity of the engine oil in which the microbubbles are mixed.
Abstract translation: 发动机油的介质循环装置，其提高内燃机的起动性和预热能力，包括产生微泡并将微泡混入循环发动机油的微泡发生器。 此外，介质循环装置包括获取发动机油的温度的介质温度获取单元。 为了降低混合微泡的发动机油的粘度，导热性和热容量，当发动机机油的温度小于或等于预定值时，微泡由微泡发生器产生。
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公开(公告)号：US08024757B2
公开(公告)日：2011-09-20
申请号：US10432659
申请日：2002-09-20
Applicant: Kaoru Nara , Makoto Suzuki
Inventor： Kaoru Nara , Makoto Suzuki
CPC classification number: H04H60/47 , G11B27/032 , G11B27/034 , G11B27/105 , G11B27/34 , G11B27/36 , G11B2220/20 , G11B2220/455 , G11B2220/90 , H04H60/27 , H04N5/76 , H04N5/765 , H04N5/775 , H04N5/781
Abstract: A digital broadcast receiver capable of reducing time and labor to back-up contents recorded on one recording medium to another recording medium. A digital broadcast receiver extracts the contents recorded, out of order, on a first recording medium by an extracting unit according to the titles or genres recorded in a content list, and automatically rearranges the extracted contents using an arranging unit according to video-recording date-and-hour recorded in the content list, for recording as a content list onto a second recording medium (300).
Abstract translation: 一种数字广播接收机，其能够减少记录在一个记录介质上的内容备份到另一个记录介质的时间和人力。 数字广播接收机根据记录在内容列表中的标题或类型，通过提取单元在第一记录介质上提取记录在第一记录介质上的内容，并且使用根据视频记录日期的排列单元自动重新排列所提取的内容 记录在内容列表中的小时，用于作为内容列表记录到第二记录介质（300）上。
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10.发明授权公开(公告)号：US07960305B2
公开(公告)日：2011-06-14
申请号：US11884941
申请日：2006-02-21
Applicant: Makoto Suzuki , Yoshihisa Inoue , Tadahito Nobori , Yoshihiro Yamamoto
Inventor： Makoto Suzuki , Yoshihisa Inoue , Tadahito Nobori , Yoshihiro Yamamoto
CPC classification number: C08F10/00 , C08F4/00 , C08F4/26 , C08F4/40 , C08F112/08 , C08F120/14 , C08F120/18
Abstract: A polymerization catalyst composition for a radically polymerizable monomer of the present invention comprises a transition metal-containing phosphazenium composition which is produced by mixing a phosphazenium compound with a compound of a transition metal belonging to Groups 4 to 12 in the periodic table and an organic halogen compound.
Abstract translation: 本发明的自由基聚合性单体的聚合催化剂组合物含有通过将磷氮烯基鏻化合物与属于周期表中第4〜12族的过渡金属的化合物和有机卤素 复合。
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