Charged particle beam apparatus
    1.
    发明申请
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号:US20060016990A1

    公开(公告)日:2006-01-26

    申请号:US11183906

    申请日:2005-07-19

    Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.

    Abstract translation: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元,用于存储带电粒子光学系统的形状,位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元,用于计算带电粒子束路径附近的电磁场的电磁场计算单元,用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元,存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。

    Charged particle beam apparatus
    2.
    发明申请

    公开(公告)号:US20070241278A1

    公开(公告)日:2007-10-18

    申请号:US11808376

    申请日:2007-06-08

    Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.

    Charged particle beam apparatus
    3.
    发明授权
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号:US07435960B2

    公开(公告)日:2008-10-14

    申请号:US11808376

    申请日:2007-06-08

    Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.

    Abstract translation: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元,用于存储带电粒子光学系统的形状,位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元,用于计算带电粒子束路径附近的电磁场的电磁场计算单元,用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元,存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。

    Charged particle beam apparatus
    4.
    发明授权
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号:US07241996B2

    公开(公告)日:2007-07-10

    申请号:US11183906

    申请日:2005-07-19

    Abstract: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.

    Abstract translation: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元,用于存储带电粒子光学系统的形状,位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元,用于计算带电粒子束路径附近的电磁场的电磁场计算单元,用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元,存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。

    Charged particle beam apparatus and method for stably obtaining charged particle beam image
    5.
    发明授权
    Charged particle beam apparatus and method for stably obtaining charged particle beam image 失效
    带电粒子束装置和稳定获得带电粒子束图像的方法

    公开(公告)号:US08536540B2

    公开(公告)日:2013-09-17

    申请号:US13381953

    申请日:2010-05-14

    Abstract: Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the outer circumferential portion and the center portion of the sample to be inspected. A sample cover is provided in the outer circumferential portion of a sample holder on which the sample to be inspected is placed. Charging characteristics of the sample cover are changed according to charging characteristics of the sample to be inspected. Consequently, uniform charged states can be formed in the outer circumferential portion and the center portion of the sample. Inspection/observation of the outer circumferential portion of the sample can be realized at higher sensitivity than in the past.

    Abstract translation: 由于待检查样品的外周部分和中心部分的充电特性不同,所以待检样品的外周部分和中心部分不能获得相同的检查灵敏度。 在待检测样品放置的样品架的外周部设置有样品盖。 样品盖的充电特性根据待检样品的充电特性而改变。 因此,可以在样品的外周部分和中心部分形成均匀的带电状态。 可以以比以往更高的灵敏度实现样品的外周部的检查/观察。

    CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR STABLY OBTAINING CHARGED PARTICLE BEAM IMAGE
    6.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR STABLY OBTAINING CHARGED PARTICLE BEAM IMAGE 失效
    充电颗粒光束装置和用于稳定获取的粒子束图像的方法

    公开(公告)号:US20120126118A1

    公开(公告)日:2012-05-24

    申请号:US13381953

    申请日:2010-05-14

    Abstract: Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the outer circumferential portion and the center portion of the sample to be inspected. A sample cover is provided in the outer circumferential portion of a sample holder on which the sample to be inspected is placed. Charging characteristics of the sample cover are changed according to charging characteristics of the sample to be inspected. Consequently, uniform charged states can be formed in the outer circumferential portion and the center portion of the sample. Inspection/observation of the outer circumferential portion of the sample can be realized at higher sensitivity than in the past.

    Abstract translation: 由于待检查样品的外周部分和中心部分的充电特性不同,所以待检样品的外周部分和中心部分不能获得相同的检查灵敏度。 在待检测样品放置的样品架的外周部设置有样品盖。 样品盖的充电特性根据待检样品的充电特性而改变。 因此,可以在样品的外周部分和中心部分形成均匀的带电状态。 可以以比以往更高的灵敏度实现样品的外周部的检查/观察。

    Medium circulating apparatus for improving startability and warm up ability
    8.
    发明授权
    Medium circulating apparatus for improving startability and warm up ability 失效
    中等循环设备,提高启动性和预热能力

    公开(公告)号:US08047165B2

    公开(公告)日:2011-11-01

    申请号:US11922141

    申请日:2006-06-05

    CPC classification number: F01M5/02 F01P9/00 F16H57/0412 F16N39/00

    Abstract: A medium circulating apparatus of engine oil, which improves startability and warm up ability of an internal combustion engine, includes a microbubble generator that generates microbubbles and mixes the microbubbles into the circulating engine oil. Further, the medium circulating apparatus includes a medium temperature acquiring unit that acquires a temperature of the engine oil. The microbubbles are generated by the microbubble generator when the temperature of the engine oil is less than or equal to a predetermined value in order to decrease a viscosity, a heat conductivity, and a heat capacity of the engine oil in which the microbubbles are mixed.

    Abstract translation: 发动机油的介质循环装置,其提高内燃机的起动性和预热能力,包括产生微泡并将微泡混入循环发动机油的微泡发生器。 此外,介质循环装置包括获取发动机油的温度的介质温度获取单元。 为了降低混合微泡的发动机油的粘度,导热性和热容量,当发动机机油的温度小于或等于预定值时,微泡由微泡发生器产生。

    Digital broadcast receiver and backup method
    9.
    发明授权
    Digital broadcast receiver and backup method 失效
    数字广播接收机和备份方式

    公开(公告)号:US08024757B2

    公开(公告)日:2011-09-20

    申请号:US10432659

    申请日:2002-09-20

    Abstract: A digital broadcast receiver capable of reducing time and labor to back-up contents recorded on one recording medium to another recording medium. A digital broadcast receiver extracts the contents recorded, out of order, on a first recording medium by an extracting unit according to the titles or genres recorded in a content list, and automatically rearranges the extracted contents using an arranging unit according to video-recording date-and-hour recorded in the content list, for recording as a content list onto a second recording medium (300).

    Abstract translation: 一种数字广播接收机,其能够减少记录在一个记录介质上的内容备份到另一个记录介质的时间和人力。 数字广播接收机根据记录在内容列表中的标题或类型,通过提取单元在第一记录介质上提取记录在第一记录介质上的内容,并且使用根据视频记录日期的排列单元自动重新排列所提取的内容 记录在内容列表中的小时,用于作为内容列表记录到第二记录介质(300)上。

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