摘要:
The microelectromechanical system (MEMS) element (101) comprises a first electrode (310 that is present on a surface of sustate(30) an a movable element (40). This overlies at least partially the first electrode (31) and comprises a piezo-electric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation voltage between a first and a second position, in which first position it is separated from the substrate (30) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer (25) that is on opposite surfaces provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path between through the MEMS element (101) comprises the piezoelectric layer (25) and the tunable gap.
摘要:
The present invention relates to a transducer arrangement, particularly a transducer arrangement for acquiring tissue information, a method for using a transducer arrangement for acquiring tissue information and a glove which comprises a transducer arrangement. The transducer arrangement 21 for analysing material 40 comprises: a first transducer element 51 for inducing and receiving mechanical displacements in the material to be analysed 40; and an analysing unit 30. The transducer arrangement is arranged such as to be flexible in order to conform with a curved surface of the material to be analysed 40; and the transducer arrangement 21 is adapted to derive a first signal from a low frequency spectrum of mechanical displacements which first signal correlates to sono-elastographical properties of a material to be analysed 40; and the transducer arrangement 21 is adapted to derive a second signal from a high frequency spectrum of mechanical displacements received by the first transducer element 51 which second signal correlates to ultrasonic properties of a material to be analysed 40. With a transducer arrangement according to the invention it may be possible to generate information about the topographical anatomy and information about elastical properties of the material to be analyzed in parallel, whereby the transducer arrangement may be adapted to the unevenness of the material's surface optimally due to its flexibility which may allow the examiner or user of the transducer arrangement to analyze regions which normally may have an uneven surface profile, which may only be reached with difficulty or whose examination may cause inconvenience to the examiner as well as to the person that is being examined.
摘要:
The integrated capacitor structure comprises a first branch with a first capacitor (60) and a second branch with a second capacitor (70). The second capacitor (70) has a higher capacitance density and a lower breakdown voltage than the first capacitor (60). The first branch has a shorter RC time constant than the second branch, such that a voltage peak will substantially follow the first branch. This first capacitor (60) has a sufficient capacity to store the charge of the voltage peak. In one embodiment, the second capacitor (70) is a stacked capacitor. The structure is suitable for ESD-protection and may, to this end, additionally comprise diodes (21) and resistors (22).
摘要:
The integrated capacitor structure comprises a first branch with a first capacitor (60) and a second branch with a second capacitor (70). The second capacitor (70) has a higher capacitance density and a lower breakdown voltage than the first capacitor (60). The first branch has a shorter RC time constant than the second branch, such that a voltage peak will substantially follow the first branch. This first capacitor (60) has a sufficient capacity to store the charge of the voltage peak. In one embodiment, the second capacitor (70) is a stacked capacitor. The structure is suitable for ESD-protection and may, to this end, additionally comprise diodes (21) and resistors (22).
摘要:
The present invention relates to a transducer (11) comprising—a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17), —a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion, —first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18), —support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output pressure at the support side than at the opposite side. The invention also relates to a method of forming such a transducer, and an array comprising at least one transducer of the like.
摘要:
The present invention relates to a transducer (11) comprising—a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17),—a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion,—first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18),—support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output pressure at the support side than at the opposite side. The invention also relates to a method of forming such a transducer, and an array comprising at least one transducer of the like.
摘要:
The invention proposes to equip the tip of a surgical instrument such as a needle or catheter or any other instrument with an ultrasound transducer array to measure flow just in front of the tip by means of time and frequency differences between the sent and received pulses. Since no image is required, only a few transducer elements are required. The transducer elements generate a pressure pulses in specific directions and receives its echo's without the use of imaging techniques and complex driving electronics. Using the frequency shift and time delay of the received signals the proximity and lateral direction of the blood flow may be detected, thus identifying blood vessels.
摘要:
The invention relates to a membrane system which is particular suitable for oxygen generation. It comprises a membrane (14), and a porous substrate (12) for supporting the membrane (14), wherein the substrate (12) comprises pillars (15) and defined channels (16) for bringing a gas in controlled contact with the membrane (14). This membrane system (10) allows a gas flux and is furthermore applicable for small and light devices.
摘要:
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
摘要:
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.