Device management apparatus, device management method and device management program
    6.
    发明授权
    Device management apparatus, device management method and device management program 有权
    设备管理装置,设备管理方法和设备管理程序

    公开(公告)号:US08321602B2

    公开(公告)日:2012-11-27

    申请号:US12551124

    申请日:2009-08-31

    申请人: Shinya Nakagawa

    发明人: Shinya Nakagawa

    IPC分类号: G06F3/00 G06F13/12

    摘要: A device management apparatus may include, but is not limited to, a device controller that controls a device, a communication controller, a management unit, and a monitoring unit. The communication controller controls a communication between the device and the device controller. The management unit manages the device controller and the communication controller. The monitoring unit is disposed between the device controller and the communication controller. The monitoring unit formats data that is transmitted between the device controller and the communication controller so as to create formatted data. The monitoring unit supplies the formatted data to the management unit.

    摘要翻译: 设备管理设备可以包括但不限于控制设备,通信控制器,管理单元和监视单元的设备控制器。 通信控制器控制设备和设备控制器之间的通信。 管理单元管理设备控制器和通信控制器。 监视单元设置在设备控制器和通信控制器之间。 监视单元格式化设备控制器和通信控制器之间传输的数据,以便创建格式化的数据。 监视单元将格式化的数据提供给管理单元。

    Exposure method and exposure apparatus
    7.
    发明授权
    Exposure method and exposure apparatus 失效
    曝光方法和曝光装置

    公开(公告)号:US4974018A

    公开(公告)日:1990-11-27

    申请号:US288971

    申请日:1988-12-23

    摘要: The invention deals with an exposure apparatus which detects environmental conditions such as atmospheric pressure, temperature and humidity in which the exposure apparatus is placed, and which maintains the projected magnification constant at all times based upon the detected values, so that the pattern can be reproduced precisely. Concretely, the apparatus comprises a detector to detect at least one of the tube temperature of the optical projecting system, humidity or atmospheric pressure near the optical system, and a control unit which controls optical characteristics based upon the signals detected by the detector. Namely, the control unit adjusts the optical characteristics depending upon the environmental conditions thereby to adjust variation in the projecting magnification and/or variation in the focal position. Thus, variation in the optical characteristics is adjusted to transfer the pattern maintaining high precision.

    LIGHT SENSOR
    10.
    发明申请
    LIGHT SENSOR 审中-公开
    光传感器

    公开(公告)号:US20100102410A1

    公开(公告)日:2010-04-29

    申请号:US12604717

    申请日:2009-10-23

    IPC分类号: H01L31/0216 H01L31/18

    摘要: A light sensor includes an element forming region having a light detection region. The element forming region excluding the light detection region is covered with a conductive film having a light shielding property, and the light detection region is covered with a conductive film having a light transmissive property. A method for preventing electromagnetic noise from entering a light sensor includes applying an electromagnetic shield conductive film to the light sensor and removing the electromagnetic shield conductive film at a region of the light sensor facing a light detection region.

    摘要翻译: 光传感器包括具有光检测区域的元件形成区域。 除了光检测区域之外的元件形成区域被具有遮光性的导电膜覆盖,并且光检测区域被具有透光性的导电膜覆盖。 一种防止电磁噪声进入光传感器的方法,包括:在光传感器的面向光检测区域的光传感器的区域上施加电磁屏蔽导电膜到光传感器并去除电磁屏蔽导电膜。