公开(公告)号：US06520020B1

公开(公告)日：2003-02-18

申请号：US09478383

申请日：2000-01-06

申请人： Mark A. Lutz ,  Roger Frick ,  Fred C. Sittler ,  Adrian C. Toy

发明人： Mark A. Lutz ,  Roger Frick ,  Fred C. Sittler ,  Adrian C. Toy

IPC分类号： G01L700

CPC分类号： G01L9/0075

摘要： A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.

摘要翻译： 压力传感器一体形成为围绕中心通道的梁的形状。 梁具有由流体加压的整体的盲端。 梁具有相对的端部，其形状设置成在阶梯形拐角的基部处提供间隙开口的阶梯形拐角，其中间隙与流体隔离。 与盲端相邻的通道中的感测膜具有随着压力变化的电参数，以及从通道延伸出间隙的电引线。 密封件填充引线周围的间隙，并且密封件填充阶梯形拐角的一部分。 该传感器优选通过直接结合单晶氧化铝层来形成。 应用包括工业压力变送器，航空航天和涡轮发动机压力传感。

公开(公告)号：US06516671B2

公开(公告)日：2003-02-11

申请号：US09755346

申请日：2001-01-05

申请人： Mark G. Romo ,  Stanley E. Rud, Jr. ,  Mark A. Lutz ,  Fred C. Sittler ,  Adrian C. Toy

发明人： Mark G. Romo ,  Stanley E. Rud, Jr. ,  Mark A. Lutz ,  Fred C. Sittler ,  Adrian C. Toy

IPC分类号： G01L912

CPC分类号： G01L9/0075 ,  B81B7/0006

摘要： A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.

摘要翻译： 传感器具有在第一和第二层之间的空腔中生长的电互连结合在一起。 导电晶粒生长材料被选择性地沉积在两个相互面对的导电膜互连区域中的至少一个上。 晶粒生长材料然后在预定条件下生长以形成两个互连区域之间的电互连。 沉积在空腔中的传感器元件通过互连电耦合在层之间。 晶粒生长材料可以是在层被结合之后被加热以生长互连导电膜的晶粒的钽。

公开(公告)号：US20090165424A1

公开(公告)日：2009-07-02

申请号：US12005871

申请日：2007-12-28

申请人： Mark A. Lutz

发明人： Mark A. Lutz

IPC分类号： B65B7/14

CPC分类号： G01L19/0007 ,  G01L13/025 ,  G01L19/0645 ,  Y10T29/53039

摘要： A crimping system for a fill tube of an industrial process transmitter system comprises a collar, a fill tube and crimp jaws. The collar comprises a passageway for receiving the fill tube, and a seat surrounding the passageway. The fill tube extends through the passageway and seat of the collar. The crimp jaws are positioned within the seat to surround the fill tube, and are inserted into the seat to crimp the fill tube.

摘要翻译： 用于工业过程变送器系统的填充管的压接系统包括套环，填充管和压接钳口。 套环包括用于接收填充管的通道和围绕通道的座。 填充管延伸穿过套环的通道和座。 压接爪位于座内以包围填充管，并且插入座中以压紧填充管。

公开(公告)号：US5333504A

公开(公告)日：1994-08-02

申请号：US938954

申请日：1992-09-01

申请人： Mark A. Lutz ,  William B. Krueger

发明人： Mark A. Lutz ,  William B. Krueger

IPC分类号： G01L7/08 ,  G01L9/00 ,  G01L9/06 ,  G01L9/12 ,  G01L19/06

CPC分类号： G01L19/0618 ,  G01L9/0042

摘要： A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.

摘要翻译： 低范围压力传感器包括脆性材料基板和安装在基板上并围绕基板的周边密封的隔膜板。 引入压力以使隔膜朝向基板偏转，并且通过应变计感测隔膜的偏转以提供压力的指示。 隔膜在面向基板的一侧设置有多个单独的支撑柱，使得当隔膜在高超压力下朝向基板偏转时，支撑柱将支撑隔膜以防止运动，以避免隔膜的故障或断裂 。 支持职位的数量可以根据需要变化。 在本发明的优选形式中，基板设置有非常薄的二氧化硅层，其是良好的电绝缘体，并且还用于帮助支撑柱接触基板的表面时的轻微移动 以减轻隔膜中的压力增加。

公开(公告)号：US08099856B2

公开(公告)日：2012-01-24

申请号：US12005871

申请日：2007-12-28

申请人： Mark A. Lutz

发明人： Mark A. Lutz

IPC分类号： B23P21/00 ,  B65B7/14

CPC分类号： G01L19/0007 ,  G01L13/025 ,  G01L19/0645 ,  Y10T29/53039

摘要： A crimping system for a fill tube of an industrial process transmitter system comprises a collar, a fill tube and crimp jaws. The collar comprises a passageway for receiving the fill tube, and a seat surrounding the passageway. The fill tube extends through the passageway and seat of the collar. The crimp jaws are positioned within the seat to surround the fill tube, and are inserted into the seat to crimp the fill tube.

摘要翻译： 用于工业过程变送器系统的填充管的压接系统包括套环，填充管和压接钳口。 套环包括用于接收填充管的通道和围绕通道的座。 填充管延伸穿过套环的通道和座。 压接爪位于座内以包围填充管，并且插入座中以压紧填充管。

公开(公告)号：US06425290B2

公开(公告)日：2002-07-30

申请号：US09780033

申请日：2001-02-09

申请人： Charles R. Willcox ,  Mark A. Lutz ,  Mark G. Romo ,  Stanley E. Rud, Jr.

发明人： Charles R. Willcox ,  Mark A. Lutz ,  Mark G. Romo ,  Stanley E. Rud, Jr.

IPC分类号： G01L708

CPC分类号： G01L9/0007 ,  G01L9/0055 ,  G01L9/0072 ,  G01L9/0073 ,  G01L9/0075 ,  G01L9/0076 ,  G01L11/02 ,  G01L13/026

摘要： A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.

摘要翻译： 提供了用于测量不需要隔离流体的两种流体之间的压力差的压力传感器。 压力传感器包括具有外周边的隔膜支撑构件和与其连接的隔膜。 隔膜的移动是可移动构件的运动。 可以感测运动以确定施加的压差。 联接构件与腹板连接到外周。 腹板从外周的相对的向外的表面凹陷，并且设置在隔膜支撑构件的相对侧上的第一和第二隔膜。 每个隔膜连接到外周和联接构件。