-
1.发明授权Grain growth of electrical interconnection for microelectromechanical systems (MEMS) 有权微机电系统（MEMS）电互连的晶粒生长公开(公告)号：US06516671B2
公开(公告)日：2003-02-11
申请号：US09755346
申请日：2001-01-05
IPC分类号： G01L912
CPC分类号： G01L9/0075 , B81B7/0006
摘要： A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.
摘要翻译： 传感器具有在第一和第二层之间的空腔中生长的电互连结合在一起。 导电晶粒生长材料被选择性地沉积在两个相互面对的导电膜互连区域中的至少一个上。 晶粒生长材料然后在预定条件下生长以形成两个互连区域之间的电互连。 沉积在空腔中的传感器元件通过互连电耦合在层之间。 晶粒生长材料可以是在层被结合之后被加热以生长互连导电膜的晶粒的钽。
-
公开(公告)号：US06520020B1
公开(公告)日：2003-02-18
申请号：US09478383
申请日：2000-01-06
申请人： Mark A. Lutz , Roger Frick , Fred C. Sittler , Adrian C. Toy
发明人： Mark A. Lutz , Roger Frick , Fred C. Sittler , Adrian C. Toy
IPC分类号： G01L700
CPC分类号： G01L9/0075
摘要： A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
摘要翻译： 压力传感器一体形成为围绕中心通道的梁的形状。 梁具有由流体加压的整体的盲端。 梁具有相对的端部，其形状设置成在阶梯形拐角的基部处提供间隙开口的阶梯形拐角，其中间隙与流体隔离。 与盲端相邻的通道中的感测膜具有随着压力变化的电参数，以及从通道延伸出间隙的电引线。 密封件填充引线周围的间隙，并且密封件填充阶梯形拐角的一部分。 该传感器优选通过直接结合单晶氧化铝层来形成。 应用包括工业压力变送器，航空航天和涡轮发动机压力传感。
-
公开(公告)号：US5221456A
公开(公告)日：1993-06-22
申请号：US781106
申请日：1991-10-22
IPC分类号： G01N27/30 , G01N27/333
CPC分类号： G01N27/333
摘要： A pH sensor has a core of an electrochemically inert insulating or semi-conductive material, and is coated with an electrically conductive, electrochemically sensitive coating. The preferred core is insulating and made of alumina, with a thin coating of iridium oxide deposited over at least a portion of the outer surface of the core. The coating is carried to a surface remote from the sensing surface and is used for making electrically conductive connections that lead to remote circuitry. The core is made in a form that can be supported and held in an insulating, electrochemically inert, deformable material that is sealed around the outer surface of the coating on the core to prevent leakage of chemicals being sensed. The body also permits sealing quite easily onto access ports on which the sensor housing is mounted. Various connections to the electrode coating can be made quite easily to provide for a unique sensor assembly.
摘要翻译： pH传感器具有电化学惰性绝缘或半导体材料的芯，并且涂覆有导电的电化学敏感性涂层。 优选的芯是绝缘的，由氧化铝制成，在芯的外表面的至少一部分上沉积有氧化铱的薄涂层。 涂层被传送到远离感测表面的表面，并用于制造导电远程电路的导电连接。 芯部制成的形式可以被支撑并保持在绝缘的，电化学惰性的可变形的材料中，该材料围绕芯上的涂层的外表面被密封，以防止感测到的化学物质泄漏。 车身还允许密封很容易到安装传感器外壳的进入口上。 可以非常容易地形成与电极涂层的各种连接以提供独特的传感器组件。
-
公开(公告)号：US4990236A
公开(公告)日：1991-02-05
申请号：US485772
申请日：1990-02-21
IPC分类号： G01N27/42
CPC分类号： G01N27/423
摘要： A solid state, thin film moisture sensing element is disclosed. The sensing element is fabricated by thin film deposition of at least a pair of two layer electrodes on an insulating surface. The active surface of the element is then coated with a layer of hygroscopic material and placed in a diffusion limiting housing to complete the sensing element assembly.
摘要翻译： 公开了一种固态薄膜湿度感测元件。 感测元件通过至少一对两层电极在绝缘表面上的薄膜沉积来制造。 然后将元件的活性表面涂覆有一层吸湿材料，并放置在扩散限制壳体中以完成感测元件组件。
-
5.发明授权Thin film platinum resistance thermometer with high temperature diffusion barrier 失效具有高温扩散阻挡层的薄膜铂电阻温度计
公开(公告)号：US4791398A
公开(公告)日：1988-12-13
申请号：US829279
申请日：1986-02-13
申请人： Fred C. Sittler , Adrian C. Toy
发明人： Fred C. Sittler , Adrian C. Toy
摘要： A thin film platinum resistance thermometer capable of operation at elevated temperatures includes a benign dielectric layer covering the thin film platinum resistance temperature sensing element and a barrier layer overlying the dielectric layer. The barrier layer, which is preferrably titanium dioxide, resists diffusion of contaminants which would alter the electrical characteristics of the sensing element, while permitting diffusion of oxygen through the barrier layer.
摘要翻译： 能够在高温下操作的薄膜铂电阻温度计包括覆盖薄膜铂电阻温度感测元件的良性介电层和覆盖在电介质层上的阻挡层。 优选二氧化钛的阻挡层抵抗将改变感测元件的电特性的污染物的扩散，同时允许氧气扩散通过阻挡层。
-
公开(公告)号：US07957708B2
公开(公告)日：2011-06-07
申请号：US11070860
申请日：2005-03-02
CPC分类号： G08C17/02 , G08C17/00 , Y02T10/166
摘要： A wireless field device is disclosed. The field device includes a wireless communications module and an energy conversion module. The wireless communications module is configured to wirelessly communicate process-related information with another device. The energy conversion module is coupled to the wireless communications module. The energy conversion module is configured to couple to a thermal source, and to generate electricity from thermal potential energy in the thermal source.
摘要翻译： 公开了一种无线现场设备。 现场设备包括无线通信模块和能量转换模块。 无线通信模块被配置为与另一设备无线地传送处理相关信息。 能量转换模块耦合到无线通信模块。 能量转换模块被配置为耦合到热源，并且从热源中的热势能发电。
-
公开(公告)号：US06082199A
公开(公告)日：2000-07-04
申请号：US277249
申请日：1999-03-26
CPC分类号： G01L9/0075 , G01L9/125 , Y10T29/49142
摘要： A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively controls the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.
摘要翻译： 过程控制系统中的变送器通过过程控制回路传送压力。 变送器包括I / O电路，补偿电路和绝对压力传感器。 I / O电路通过过程控制回路传输信息。 补偿电路接收与压力相关的信号，并且响应地控制I / O电路传送环路上的压力信息。 绝对压力传感器包括当传感器响应于施加的压力而偏转时变形的空腔。 空腔中的传感器响应于变形而将补偿电路的压力相关信号提供给补偿电路。
-
公开(公告)号：US6079276A
公开(公告)日：2000-06-27
申请号：US345165
申请日：1999-06-30
CPC分类号： G01L9/0075 , G01L9/125 , Y10T29/49142
摘要： A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively control's the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.
摘要翻译： 过程控制系统中的变送器通过过程控制回路传送压力。 变送器包括I / O电路，补偿电路和绝对压力传感器。 I / O电路通过过程控制回路传输信息。 补偿电路接收压力相关信号，并响应控制I / O电路传输环路上的压力信息。 绝对压力传感器包括当传感器响应于施加的压力而偏转时变形的空腔。 空腔中的传感器响应于变形而将补偿电路的压力相关信号提供给补偿电路。
-
公开(公告)号：US6089097A
公开(公告)日：2000-07-18
申请号：US807999
申请日：1997-03-03
CPC分类号： G01L9/0075 , G01L9/125 , Y10T29/49142
摘要： A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively controls the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.
摘要翻译： 过程控制系统中的变送器通过过程控制回路传送压力。 变送器包括I / O电路，补偿电路和绝对压力传感器。 I / O电路通过过程控制回路传输信息。 补偿电路接收与压力相关的信号，并且响应地控制I / O电路传送环路上的压力信息。 绝对压力传感器包括当传感器响应于施加的压力而偏转时变形的空腔。 空腔中的传感器响应于变形而将补偿电路的压力相关信号提供给补偿电路。
-
10.发明授权Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates 失效用于压力变送器的电容式压力传感器，其中电场基本上从板的背面发出
公开(公告)号：US5637802A
公开(公告)日：1997-06-10
申请号：US395778
申请日：1995-02-28
CPC分类号： G01L9/0075 , G01L9/125 , Y10T29/49142
摘要： A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively controls the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.
摘要翻译： 过程控制系统中的变送器通过过程控制回路传送压力。 变送器包括I / O电路，补偿电路和绝对压力传感器。 I / O电路通过过程控制回路传输信息。 补偿电路接收与压力相关的信号，并且响应地控制I / O电路传送环路上的压力信息。 绝对压力传感器包括当传感器响应于施加的压力而偏转时变形的空腔。 空腔中的传感器响应于变形而将补偿电路的压力相关信号提供给补偿电路。
-
-
-
-
-
-
-
-
-
搜索结果
10 条记录 (耗时 0.028 秒)
