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15 条记录 (耗时 0.028 秒)

    Oil-less differential pressure sensor
    1.
    发明授权
    Oil-less differential pressure sensor 有权
    无油差压传感器

    公开(公告)号：US06425290B2

    公开(公告)日：2002-07-30

    申请号：US09780033

    申请日：2001-02-09

    申请人： Charles R. Willcox ,  Mark A. Lutz ,  Mark G. Romo ,  Stanley E. Rud, Jr.

    发明人： Charles R. Willcox ,  Mark A. Lutz ,  Mark G. Romo ,  Stanley E. Rud, Jr.

    IPC分类号： G01L708

    CPC分类号： G01L9/0007 ,  G01L9/0055 ,  G01L9/0072 ,  G01L9/0073 ,  G01L9/0075 ,  G01L9/0076 ,  G01L11/02 ,  G01L13/026

    摘要： A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.

    摘要翻译： 提供了用于测量不需要隔离流体的两种流体之间的压力差的压力传感器。 压力传感器包括具有外周边的隔膜支撑构件和与其连接的隔膜。 隔膜的移动是可移动构件的运动。 可以感测运动以确定施加的压差。 联接构件与腹板连接到外周。 腹板从外周的相对的向外的表面凹陷，并且设置在隔膜支撑构件的相对侧上的第一和第二隔膜。 每个隔膜连接到外周和联接构件。

    Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
    2.
    发明授权
    Grain growth of electrical interconnection for microelectromechanical systems (MEMS) 有权
    微机电系统（MEMS）电互连的晶粒生长

    公开(公告)号：US06516671B2

    公开(公告)日：2003-02-11

    申请号：US09755346

    申请日：2001-01-05

    申请人： Mark G. Romo ,  Stanley E. Rud, Jr. ,  Mark A. Lutz ,  Fred C. Sittler ,  Adrian C. Toy

    发明人： Mark G. Romo ,  Stanley E. Rud, Jr. ,  Mark A. Lutz ,  Fred C. Sittler ,  Adrian C. Toy

    IPC分类号： G01L912

    CPC分类号： G01L9/0075 ,  B81B7/0006

    摘要： A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.

    摘要翻译： 传感器具有在第一和第二层之间的空腔中生长的电互连结合在一起。 导电晶粒生长材料被选择性地沉积在两个相互面对的导电膜互连区域中的至少一个上。 晶粒生长材料然后在预定条件下生长以形成两个互连区域之间的电互连。 沉积在空腔中的传感器元件通过互连电耦合在层之间。 晶粒生长材料可以是在层被结合之后被加热以生长互连导电膜的晶粒的钽。

    Twin film strain gauge system
    3.
    发明授权
    Twin film strain gauge system 失效
    双膜应变计系统

    公开(公告)号：US4777826A

    公开(公告)日：1988-10-18

    申请号：US23962

    申请日：1987-03-10

    申请人： Stanley E. Rud, Jr. ,  Mark G. Romo ,  Robert C. Bohara ,  Thomas A. Knecht

    发明人： Stanley E. Rud, Jr. ,  Mark G. Romo ,  Robert C. Bohara ,  Thomas A. Knecht

    IPC分类号： G01L1/22 ,  G01L9/00 ,  G01L9/04 ,  G01L19/04

    CPC分类号： G01L9/0051 ,  G01L1/2281 ,  G01L9/0055 ,  G01L9/045

    摘要： A strain gauge sensor for providing an electrical output responsive to a parameter applied to a substrate. A homogenous thin film circuit is deposited on an insulating layer which is deposited on a substrate of single-crystal material. The thin film circuit includes a strain gauge responsive to strain transferred through the insulating layer from the substrate and resistance trimming networks trimmed by removal of thin film material from the trimming networks to adjust zero and gain. A diaphragm is etched in the substrate to form a pressure sensor. An optional support layer may be added to the sensor for mounting the sensor to a surface.

    摘要翻译： 一种应变计传感器，用于响应于施加到衬底的参数提供电输出。 均匀的薄膜电路沉积在沉积在单晶材料的衬底上的绝缘层上。 薄膜电路包括响应于从衬底传输通过绝缘层的应变的应变计和通过从修整网络去除薄膜材料而修整的电阻修剪网络，以调整零和增益。 在衬底中蚀刻隔膜以形成压力传感器。 可以向传感器添加可选的支撑层，以将传感器安装到表面。

    Interchangeable differential, absolute and gage type of pressure transmitter
    6.
    发明授权
    Interchangeable differential, absolute and gage type of pressure transmitter 有权
    可互换的差压，绝对和量规型压力变送器

    公开(公告)号：US06473711B1

    公开(公告)日：2002-10-29

    申请号：US09373930

    申请日：1999-08-13

    申请人： Fred C. Sittler ,  Stanley E. Rud, Jr. ,  Carl R. Gansen

    发明人： Fred C. Sittler ,  Stanley E. Rud, Jr. ,  Carl R. Gansen

    IPC分类号： G01L1300

    CPC分类号： G01L15/00 ,  Y10T137/87249

    摘要： A pressure transmitter with first and second absolute pressure sensors receives process pressures from corresponding first and second process inlets. A transmitter circuit coupled to the first and second absolute pressure sensors generates a differential pressure type output. A third absolute pressure sensor coupled to the transmitter circuit receives atmospheric pressure from a third inlet. The transmitter circuit generates a second type of transmitter output that can be a gage or absolute pressure type. Single crystal. sapphire pressure sensors are preferred to provide enough accuracy for measuring accurately over 200:1 pressure range.

    摘要翻译： 具有第一和第二绝对压力传感器的压力变送器接收来自相应的第一和第二进程入口的过程压力。 耦合到第一和第二绝对压力传感器的发射器电路产生压差型输出。 耦合到发射器电路的第三绝对压力传感器从第三入口接收大气压力。 发射机电路产生可以是量规或绝对压力类型的第二类型的发射器输出。 单晶。 优选的蓝宝石压力传感器提供足够的精度用于精确测量超过200：1的压力范围。

    Multiple range transition method and apparatus for process control sensors
    7.
    发明授权
    Multiple range transition method and apparatus for process control sensors 失效
    用于过程控制传感器的多范围转换方法和装置

    公开(公告)号：US6047244A

    公开(公告)日：2000-04-04

    申请号：US986047

    申请日：1997-12-05

    申请人： Stanley E. Rud, Jr.

    发明人： Stanley E. Rud, Jr.

    IPC分类号： G01D3/024 ,  G01L19/02 ,  G05B19/042 ,  G01P21/00 ,  H04L27/04

    CPC分类号： G05B19/0423 ,  G01D3/024 ,  G01L19/02

    摘要： A sensor system includes a first sensor for sensing a parameter in a first sensing range and providing a first sensor signal indicative of the parameter. A second sensor senses the parameter in a second sensing range and provides a second sensor signal indicative of the parameter. The second sensing range is larger than the first sensing range and the first and second sensing ranges overlap in a transition overlap region. A sensor output device provides a sensor output signal based on the first and second sensor signals by blending components of the first and second sensor signals according to a blending function such that the sensor output signal is single valued, has no induced hysteresis and is continuously differentiable.

    摘要翻译： 传感器系统包括用于感测第一感测范围中的参数并提供指示参数的第一传感器信号的第一传感器。 第二传感器在第二感测范围内感测参数，并提供指示参数的第二传感器信号。 第二感测范围大于第一感测范围，并且第一和第二感测范围在过渡重叠区域中重叠。 传感器输出装置通过根据混合功能混合第一和第二传感器信号的分量来提供基于第一和第二传感器信号的传感器输出信号，使得传感器输出信号是单值的，没有感应滞后并且是连续可微分的 。

    Transmitter with fill fluid loss detection
    9.
    发明授权
    Transmitter with fill fluid loss detection 失效
    变送器带有补液损失检测

    公开(公告)号：US5760310A

    公开(公告)日：1998-06-02

    申请号：US770916

    申请日：1996-12-20

    申请人： Stanley E. Rud, Jr. ,  William E. Petrich ,  Bennett L. Louwagie ,  Terrance F. Krouth

    发明人： Stanley E. Rud, Jr. ,  William E. Petrich ,  Bennett L. Louwagie ,  Terrance F. Krouth

    IPC分类号： G01L9/00 ,  G01L19/00 ,  G01L19/06 ,  G01M3/16

    CPC分类号： G01L19/0672 ,  G01L19/0092 ,  G01L19/0645 ,  G01M3/16

    摘要： A pressure transmitter has a pressure sensor coupled to an isolator diaphragm by a fill fluid such as oil. According to the invention, means are provided for measuring the position of the isolator diaphragm and comparing the measured position with an expected position to give an indication of fill fluid leakage. Non-contact arrangements such as capacitive and ultrasonic techniques are disclosed for measuring isolator diaphragm position, as well as contacting arrangements such as switches. The fill fluid loss arrangement can be incorporated into a two-wire transmitter, which transmitter can be made to send a warning signal to a control unit when fill fluid loss is detected.

    摘要翻译： 压力变送器具有通过诸如油的填充液体耦合到隔离膜的压力传感器。 根据本发明，提供了用于测量隔离膜片的位置并将测量位置与预期位置进行比较的装置，以给出填充流体泄漏的指示。 公开了诸如电容和超声波技术的非接触布置用于测量隔离膜的位置以及诸如开关的接触布置。 填充流体损失布置可以并入双线式发射器中，当检测到填充液体损失时，该发射器可以被发送给控制单元的警告信号。