Structure and process flow for fabrication of dual gate floating body integrated MOS transistors
    2.
    发明授权
    Structure and process flow for fabrication of dual gate floating body integrated MOS transistors 有权
    用于制造双栅极浮体集成MOS晶体管的结构和工艺流程

    公开(公告)号:US06392271B1

    公开(公告)日:2002-05-21

    申请号:US09342022

    申请日:1999-06-28

    IPC分类号: H01L2976

    摘要: A dual gate transistor device and method for fabricating the same. First, a doped substrate is prepared with a patterned oxide layer on the doped substrate defining a channel. Next, a silicon layer is deposited to form the channel, with a gate oxide layer then grown adjacent the channel. Subsequently, a plurality of gate electrodes are formed next to the gate oxide layer and a drain is formed on the channel. After the drain is formed, an ILD layer sited. This ILD layer is etched to form a source region contact, a drain region contact, a first gate electrode contact, and a second gate electrode contact.

    摘要翻译: 一种双栅极晶体管器件及其制造方法。 首先,在掺杂衬底上的图案化氧化物层上制备掺杂衬底,其限定沟道。 接下来,沉积硅层以形成沟道,然后栅极氧化层在沟道附近生长。 随后,在栅氧化层旁边形成多个栅电极,在沟道上形成漏极。 在形成漏极之后,设置ILD层。 该ILD层被蚀刻以形成源极区接触,漏极区接触,第一栅电极接触和第二栅电极接触。

    Silicide agglomeration fuse device
    3.
    发明授权
    Silicide agglomeration fuse device 有权
    硅化物凝聚保险丝装置

    公开(公告)号:US06258700B1

    公开(公告)日:2001-07-10

    申请号:US09313830

    申请日:1999-05-18

    IPC分类号: H01L21326

    摘要: A fusible link device disposed on a semiconductor substrate for providing discretionary electrical connections. The fusible link device of the invention includes a silicide layer and a polysilicon layer formed on the silicide layer and has a first un-programmed resistance. The silicide layer agglomerates to form an electrical discontinuity in response to a predetermined programming potential being applied across the suicide layer, such that the resistance of the fusible link device can be selectively increased to a second programmed resistance.

    摘要翻译: 一种设置在半导体衬底上用于提供任意电连接的可熔连接装置。 本发明的可熔连接装置包括硅化物层和形成在硅化物层上并具有第一非编程电阻的多晶硅层。 硅化物层聚集形成响应于在硅化物层上施加的预定编程电位的电中断,使得可熔接线器件的电阻可以选择性地增加到第二编程电阻。

    Silicide agglomeration device
    4.
    发明授权
    Silicide agglomeration device 失效
    硅化物凝聚装置

    公开(公告)号:US5969404A

    公开(公告)日:1999-10-19

    申请号:US895325

    申请日:1997-07-16

    CPC分类号: H01L23/5256 H01L2924/0002

    摘要: A fusible link device disposed on a semiconductor substrate for providing discretionary electrical connections. The fusible link device of the invention includes a silicide layer and a polysilicon layer formed on the silicide layer and has a first unprogrammed resistance. The silicide layer agglomerates to form an electrical discontinuity in response to a predetermined programming potential being applied across the silicide layer, such that the resistance of the fusible link device can be selectively increased to a second programmed resistance

    摘要翻译: 一种设置在半导体衬底上用于提供任意电连接的可熔连接装置。 本发明的熔断连接装置包括在硅化物层上形成的硅化物层和多晶硅层,并具有第一未编程电阻。 硅化物层聚集形成响应于跨越硅化物层施加的预定编程电位的电中断,使得可熔接头装置的电阻可以选择性地增加到第二编程电阻

    Silicide agglomeration fuse device
    5.
    发明授权
    Silicide agglomeration fuse device 失效
    硅化物凝聚保险丝装置

    公开(公告)号:US5708291A

    公开(公告)日:1998-01-13

    申请号:US537283

    申请日:1995-09-29

    CPC分类号: H01L23/5256 H01L2924/0002

    摘要: A fusible link device disposed on a semiconductor substrate for providing discretionary electrical connections. The fusible link device of the invention includes a silicide layer and a polysilicon layer formed on the silicide layer and has a first un-programmed resistance. The silicide layer agglomerates to form an electrical discontinuity in response to a predetermined programming potential being applied across the silicide layer, such that the resistance of the fusible link device can be selectively increased to a second programmed resistance.

    摘要翻译: 一种设置在半导体衬底上用于提供任意电连接的可熔连接装置。 本发明的可熔连接装置包括硅化物层和形成在硅化物层上并具有第一非编程电阻的多晶硅层。 硅化物层聚集形成响应于跨过硅化物层施加的预定编程电位的电中断,使得熔丝连接装置的电阻可以选择性地增加到第二编程电阻。

    Silicide agglomeration fuse device with notches to enhance programmability
    6.
    发明授权
    Silicide agglomeration fuse device with notches to enhance programmability 失效
    具有凹口的硅化物凝聚保险丝装置,以提高可编程性

    公开(公告)号:US06337507B1

    公开(公告)日:2002-01-08

    申请号:US08769152

    申请日:1996-12-18

    IPC分类号: H01L2900

    摘要: A fusible link device disposed on a semiconductor substrate for providing discretionary changes in resistance. The fusible link device of the invention includes a polysilicon layer having a first resistance. A silicide layer formed on the polysilicon layer has a second, lower resistance and includes a fuse region having a first notched region narrower than the center of the fuse region, a first contact region electrically coupled to one end of the fuse region and a second contact region electrically coupled to an opposite end of the fuse region. The silicide layer agglomerates to form an electrical discontinuity in the fuse region (usually in the notched region) in response to a current greater than or equal to a predetermined programming current flowing between the contact regions, such that the resistance of the fusible link device can be selectively increased.

    摘要翻译: 一种设置在半导体衬底上的可熔连接装置,用于提供任意改变的电阻。 本发明的熔断连接装置包括具有第一电阻的多晶硅层。 形成在多晶硅层上的硅化物层具有第二较低电阻,并且包括具有比熔丝区域的中心窄的第一缺口区域的熔丝区域,电耦合到熔丝区域的一端的第一接触区域和第二接触点 区域电耦合到保险丝区域的相对端。 硅化物层响应于大于或等于在接触区域之间流动的预定编程电流的电流而聚集在熔丝区域(通常在缺口区域中)形成电中断,使得可熔连接装置的电阻可以 有选择地增加。