-
公开(公告)号：US20060070877A1
公开(公告)日：2006-04-06
申请号：US11205398
申请日：2005-08-17
申请人： Markus Tilsch , Richard Seddon , Georg Ockenfuss , Jeremy Hayes , Robert Klinger
发明人： Markus Tilsch , Richard Seddon , Georg Ockenfuss , Jeremy Hayes , Robert Klinger
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.
摘要翻译： 磁控溅射装置及其制造方法技术领域本发明涉及一种磁控溅射装置及其制造方法，其特征在于，以高生产率将基板上的材料沉积在基板上，其中沉积膜具有预测的厚度分布，并且该装置能够连续且重复地操作非常长的 本发明通过减少循环时间实现了增加的生产。 通过将行星驱动系统与大阴极联接来实现涂层速率的提高。 阴极直径大于行星的直径，小于行星直径的两倍。 通过阴极处的较低的功率密度获得较低的缺陷率，其抑制电弧，同时径流通过阴极至行星几何形状而被最小化，而不使用掩模。
-
公开(公告)号：US20060049041A1
公开(公告)日：2006-03-09
申请号：US11074249
申请日：2005-03-07
申请人： Georg Ockenfuss , Markus Tilsch , Richard Seddon , Robert Hahn
发明人： Georg Ockenfuss , Markus Tilsch , Richard Seddon , Robert Hahn
IPC分类号： C23C14/00
CPC分类号： H01J37/3405 , H01J37/3438
摘要： A sputtering anode is disclosed wherein the anode is in the form of a container or vessel; and, wherein the conducting surface communicating with a cathode is the inside surface of the container or vessel. The anode can be mounted outside of a coating chamber having its opening communicating with the chamber or alternatively may be mounted within the chamber. The anode may be an inlet port for receiving inert gas for use in forming the plasma and for pressurizing the anode.
-
公开(公告)号：US20060049042A1
公开(公告)日：2006-03-09
申请号：US11177465
申请日：2005-07-08
申请人： Markus Tilsch , Georg Ockenfuss , Richard Seddon , Robert Hahn
发明人： Markus Tilsch , Georg Ockenfuss , Richard Seddon , Robert Hahn
IPC分类号： C23C14/00
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： A magnetron sputtering cathode for use in a vacuum deposition process is disclosed wherein the cathode is coated on its sides with an electrically insulating material such as alumina to prevent arcing, and wherein the first end surface of the cathode supports a material to be sputtered. The bottom of the cathode may also be coated with an electrically insulating coating or may be resting upon an insulating platform.
摘要翻译： 公开了一种用于真空沉积工艺中的磁控溅射阴极，其中阴极通过电绝缘材料如氧化铝在其侧面上涂覆以防止电弧，并且其中阴极的第一端面支撑待溅射的材料。 阴极的底部也可以涂覆有电绝缘涂层，或者可以搁置在绝缘平台上。
-
公开(公告)号：US06785052B2
公开(公告)日：2004-08-31
申请号：US10004142
申请日：2001-11-14
申请人： Georg Ockenfuss , Robert E. Klinger
发明人： Georg Ockenfuss , Robert E. Klinger
IPC分类号： G02B528
摘要： A multilayer optical interference filter having a multiplicity of optical cavities separated by a dielectric reflector stacks to achieve either a very narrow passband region or sharp transition between the passband and reflective region is substantially free of stress to preserve the desired optical performance upon fabrication into miniature discrete filter elements. The substantial stress reduction is achieved by removing the filter from the substrate used in the deposition process in a controlled manner to preserve the structural integrity of the resulting free standing multilayer film structure. The structure can be further bonded or attached to other optical components to suppress a thermal shift in center wavelength without reintroducing stress or interposing a massive substrate in the optical path through the filter.
摘要翻译： 具有由介质反射器叠层隔开的多个光学空腔的多层光学干涉滤光器在通带和反射区域之间实现非常窄的通带区域或尖锐的转变，基本上没有应力以在制造成微型离散时保持所需的光学性能 过滤元件。 通过以受控的方式从用于沉积工艺的衬底中去除过滤器来实现显着的应力降低，以保持所得自立式多层膜结构的结构完整性。 该结构可以进一步结合或附着到其它光学部件上，以抑制中心波长的热偏移而不会再次引入应力或者通过滤光器将大块基片插入到光路中。
-
公开(公告)号：US20060119797A1
公开(公告)日：2006-06-08
申请号：US11288568
申请日：2005-11-29
申请人： Georg Ockenfuss
发明人： Georg Ockenfuss
IPC分类号： G03B21/00
CPC分类号： G03B21/2073 , G03B21/206 , G03B33/08 , H04N9/3114 , H04N9/3117 , H04N9/315
摘要： The invention provides a two-panel color management system for projection display applications, wherein color sequencing is accomplished using achromatic beam switching and static color separation. In a preferred embodiment, a liquid-crystal polarization switch alternates a polarization of an input light beam between two orthogonal states. A polarization beam splitter directs the beam comprising three primary color components alternately along a first and second paths, wherein first and second different secondary color filters are disposed for forming first and second secondary colored beams, each having two different primary color components. A dichroic color separator alternately receives the first and second secondary colored beams, separates their primary color components and directs them to first and second imager panels. A beam combiner combines the first polarized primary color beam from the first imager and the second polarized primary color beam from the second imager to form a projection beam.
摘要翻译： 本发明提供了一种用于投影显示应用的双面板颜色管理系统，其中使用消色差光束切换和静态分色来完成色彩排序。 在优选实施例中，液晶偏振开关在两个正交状态之间交替输入光束的偏振。 偏振分束器沿着第一和第二路径交替地引导包括三个原色分量的光束，其中设置第一和第二不同次级滤色器以形成第一和第二次级着色光束，每个具有两个不同的原色分量。 二向色分离器交替地接收第一和第二二次着色光束，分离其原色成分并将其引导到第一和第二成像面板。 光束组合器将来自第一成像器的第一偏振原色光束和来自第二成像器的第二极化原色光束组合以形成投影光束。
-
公开(公告)号：US20050185267A1
公开(公告)日：2005-08-25
申请号：US10785384
申请日：2004-02-23
申请人： Georg Ockenfuss , Steven Oliver
发明人： Georg Ockenfuss , Steven Oliver
CPC分类号： G02B5/282
摘要： An infrared filter includes an optical filter stack disposed on a first surface of a substrate, the optical filter stack includes a plurality of dielectric layers and a plurality of metal layers alternating with the dielectric layers. and a transmission-enhancing coating. The infrared filter obtains an average transmission greater than or equal to 75% between 400 nm and 600 nm.
摘要翻译： 红外滤光器包括设置在基板的第一表面上的滤光片叠层，滤光片叠层包括多个电介质层和与电介质层交替的多个金属层。 和透射增强涂层。 红外滤光片在400nm至600nm之间获得大于或等于75％的平均透射率。
-
公开(公告)号：US07133197B2
公开(公告)日：2006-11-07
申请号：US10785384
申请日：2004-02-23
申请人： Georg Ockenfuss , Steven D. Oliver
发明人： Georg Ockenfuss , Steven D. Oliver
CPC分类号： G02B5/282
摘要： An infrared filter includes an optical filter stack disposed on a first surface of a substrate, the optical filter stack includes a plurality of dielectric layers and a plurality of metal layers alternating with the dielectric layers. and a transmission-enhancing coating. The infrared filter obtains an average transmission greater than or equal to 75% between 400 nm and 600 nm.
摘要翻译： 红外滤光器包括设置在基板的第一表面上的滤光片叠层，滤光片叠层包括多个电介质层和与电介质层交替的多个金属层。 和透射增强涂层。 红外滤光片在400nm至600nm之间获得大于或等于75％的平均透射率。
-
公开(公告)号：US07088510B2
公开(公告)日：2006-08-08
申请号：US10785589
申请日：2004-02-23
CPC分类号： G02B5/3016
摘要： An anti-aliasing filter includes a polymeric double-refraction plate (“DRP”). The DRP of the anti-aliasing filter has at least a first liquid photo-polymerization (“LPP”) layer disposed on the substrate, or on an intervening layer(s) disposed on the substrate, and a first liquid-crystal polymer (“LCP”) layer is disposed on the first LPP layer, the first DRP having a thickness selected so as to provide a selected separation of oridinary and extraordinary light rays.
摘要翻译： 抗混叠滤波器包括聚合双折射板（“DRP”）。 抗混叠滤光器的DRP至少具有设置在基板上的第一液态光聚合（“LPP”）层，或设置在基板上的中间层，以及第一液晶聚合物（“ LCP“）层设置在第一LPP层上，第一DRP具有选择的厚度，以便提供选择性的分离和非寻常的光线。
-
公开(公告)号：US20060119936A1
公开(公告)日：2006-06-08
申请号：US11288569
申请日：2005-11-29
申请人： Georg Ockenfuss
发明人： Georg Ockenfuss
IPC分类号： G03B21/56
CPC分类号： H04N9/3167 , G02B27/286 , G03B21/14 , G03B21/2066 , G03B21/2073 , H04N5/7441 , H04N9/3105 , H04N9/3111 , H04N9/3117
摘要： The invention relates to an apparatus and method for transforming white incident light into two mutually synchronized sequences of three colored light pulses over a frame interval, each light pulse having one of three primary color bands derived from the incident light, wherein only one of the three color bands is shared between the two color sequences, thereby providing all three paired combinations of the three color bands over the frame interval within the two light components. The two colored light sequences are used for illuminating two respective liquid-crystal-on-silicon imagers in a two-panel light engine to permit optimum active white balancing without reducing the duty cycle. A pure solid-state two-stage color and polarization switching apparatus is provided for generating the two colored light sequences using a combination of commercially available color/polarization filters and color/polarization switches.
摘要翻译： 本发明涉及一种用于将白色入射光在帧间隔上变换为三个有色光脉冲的两个相互同步的序列的装置和方法，每个光脉冲具有从入射光导出的三个基色带之一，其中三个 在两个颜色序列之间共享色带，从而在两个光分量内的帧间隔上提供三个色带的所有三个配对组合。 两个彩色光序列用于在双面板光引擎中照射两个相应的液晶在硅成像器，以允许最佳的有源白平衡而不减少占空比。 提供了一种纯固态二阶色彩和偏振切换装置，用于使用市售的彩色/偏振滤光器和彩色/偏振开关的组合产生两个彩色光序列。
-
10.发明授权High pressure magnetron cathode assembly and sputtering apparatus utilizing same 失效高压磁控管阴极组件及利用其的溅射装置
公开(公告)号：US6110336A
公开(公告)日：2000-08-29
申请号：US131488
申请日：1998-08-10
CPC分类号： H01J37/3447 , H01J37/3405
摘要： A magnetron cathode and sputtering system in which the cathode assembly includes a diaphragm arrangement with one or more diaphragms which overlie at least the edge of the cathode at the dark side region of the gas discharge so that plasmas cannot form between the diaphragm and target. An improved sputtering is thereby obtained in a high pressure mode of operation.
摘要翻译： 一种磁控管阴极和溅射系统，其中阴极组件包括具有一个或多个隔膜的隔膜装置，其在气体放电的暗侧区域至少覆盖阴极的边缘，使得等离子体不能在隔膜和靶之间形成。 由此在高压操作模式下获得改进的溅射。
-
-
-
-
-
-
-
-
-
搜索结果
12 条记录 (耗时 0.024 秒)
