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公开(公告)号：US08163144B2
公开(公告)日：2012-04-24
申请号：US11205398
申请日：2005-08-17
IPC分类号： C23C14/00
CPC分类号： H01J37/34 , H01J37/32541 , H01J37/3438
摘要： The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.
摘要翻译： 磁控溅射装置及其制造方法技术领域本发明涉及一种磁控溅射装置及其制造方法，其特征在于，以高生产率将基板上的材料沉积在基板上，其中沉积膜具有预测的厚度分布，并且该装置能够连续且重复地操作非常长的 本发明通过减少循环时间实现了增加的生产。 通过将行星驱动系统与大阴极联接来实现涂层速率的提高。 阴极直径大于行星的直径，小于行星直径的两倍。 通过阴极处的较低的功率密度获得较低的缺陷率，其抑制电弧，同时径流通过阴极至行星几何形状而被最小化，而不使用掩模。
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公开(公告)号：US08094270B2
公开(公告)日：2012-01-10
申请号：US11564500
申请日：2006-11-29
IPC分类号： G02F1/1335 , G02F1/13
CPC分类号： H04N9/3167 , G02B1/115 , G02B5/3083 , G03B21/14 , G03B21/2073 , G03B33/12 , H04N9/3105
摘要： An oblique angle deposition is used to provide an A-plate optical retarder having at least one dense, form-birefringent layer. According to one embodiment, the dense, form-birefringent layer(s) are deposited as part of an FBAR stack to provide an all-dielectric full-function A/−C-plate trim retarder for LCD birefringence compensation. Advantageously, the dense structure of the full-function A/−C-plate trim retarder offers high durability and/or stability, thus making it well suited for providing polarization compensation in high light flux polarization-based projection systems.
摘要翻译： 使用斜角沉积来提供具有至少一个致密的双折射层的A板光学延迟器。 根据一个实施例，致密的成形双折射层作为FBAR堆叠的一部分沉积，以提供用于LCD双折射补偿的全介质全功能A / -C板修整延迟器。 有利地，全功能A / -C板微调延迟器的致密结构提供高耐久性和/或稳定性，因此使其非常适合于在高光通量极化基投影系统中提供偏振补偿。
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公开(公告)号：US07062122B2
公开(公告)日：2006-06-13
申请号：US10700193
申请日：2003-11-03
申请人： Adam Bergeron , Robert E. Klinger , Georg J. Ockenfuss , Markus K. Tilsch , Frederik Kevin Zernik
发明人： Adam Bergeron , Robert E. Klinger , Georg J. Ockenfuss , Markus K. Tilsch , Frederik Kevin Zernik
IPC分类号： G02B6/28
CPC分类号： G02B6/29361 , G02B6/29383 , G02B6/29395
摘要： A wavelength-tunable add/drop device for adding or dropping n channels having different center wavelengths is disclosed. A first multicavity variable optical filter for selectably operable to passing one channel while reflecting n−1 other channels depends upon a location where light is launched into an end of the multicavity optical filter. A broadband optical reflector is disposed directly adjacent to the multicavity variable optical filter and disposed between planes coincident with the first and second surfaces of the variable filter, the broadband reflector having a reflectivity that will reflect all n channels of light. Preferably, the broadband reflector is disposed distal from the bottom and top layers of the multicavity filter and is adjacent to the middle layers or near the middle of the multicavity filter layers.
摘要翻译： 公开了一种用于添加或丢弃具有不同中心波长的n个通道的波长可调加/减装置。 用于可选择地可操作以在反射n-1个其它通道的同时通过一个通道的第一多腔可变滤光器取决于将光发射到多腔滤光器的一端的位置。 宽带光学反射器直接设置在多重可变滤光器附近，并且设置在与可变滤光片的第一和第二表面重合的平面之间，宽带反射器具有将反射所有n个光通道的反射率。 优选地，宽带反射器设置在多腔过滤器的底层和顶层的远侧，并且与多层过滤层的中间层或中间附近相邻。
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公开(公告)号：US5858519A
公开(公告)日：1999-01-12
申请号：US378585
申请日：1995-01-27
CPC分类号： C03C17/3618 , C03C17/3435 , C03C17/3452 , C03C17/36 , C03C17/3649 , G02B1/116 , H01J29/896 , C03C2217/734 , Y10T428/24942 , Y10T428/31678
摘要： An absorbing anti-reflection coating which can be applied directly to the faceplate of a video display such as a cathode ray tube or a plasma display by physical or chemical vapor deposition comprises at least 3 materials: L, a low retractive index material such as the metal oxide SiO.sub.2 ; H, a high refractive index material such as the metal oxide Nb.sub.2 O.sub.5 ; and M, a metal or metallic alloy or metallic compound layer with a refractive index greater than 0.5 and extinction coefficient less than 5. Preferably the materials are used in the design MHLHL or HMHL. The design and materials provide broadband performance with a low layer count. The single metal layer design permits relatively low values of sheet resistance (high conductivity). Transmittance values are high, typically 70%.+-.5%. Reflectance typically is .ltoreq.0.6%.
摘要翻译： 可以通过物理或化学气相沉积直接施加到诸如阴极射线管或等离子体显示器的视频显示器的面板的吸收性抗反射涂层包括至少3种材料：L，低回缩率材料，例如 金属氧化物SiO2; H，高折射率材料如金属氧化物Nb 2 O 5; 和M，折射率大于0.5，消光系数小于5的金属或金属合金或金属化合物层。优选地，这些材料用于设计MHLHL或HMHL中。 设计和材料提供低层次的宽带性能。 单一金属层设计允许相对较低的薄层电阻值（高导电性）。 透光率高，通常为70％±5％。 反射率通常为
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公开(公告)号：US5154810A
公开(公告)日：1992-10-13
申请号：US647660
申请日：1991-01-29
CPC分类号： C23C14/08 , C23C14/54 , C23C14/568 , H01L31/02167 , Y02E10/52 , Y10S438/907
摘要： A system and process for forming optical quality, protective, relatively thick, thin film coatings on workpieces such as detectors or solar cells. The apparatus includes a rotary cylindrical sputtering system which incorporates separate deposition devices and at least one chemical reaction device for simultaneously (1) depositing materials which form tensile and compressive oxides and (2) oxidizing the deposited materials. The system also includes a stressometer system, preferably a cantilevered beam stressometer system which monitors the stress of the depositing film in-situ. The monitored stress levels are used to control the relative amounts of compressive and tensile materials which are deposited and, thus, control stress in the thin film coatings. In a preferred embodiment for forming protective covers on solar cells, the deposition devices are linear magnetron sputter cathode devices having silicon and aluminum targets, and the reaction device is a linear magnetron ion source oxidizer device. Film stress in the thin film coating is controlled by controlling power to the silicon and aluminum targets.
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公开(公告)号：US5334048A
公开(公告)日：1994-08-02
申请号：US41801
申请日：1993-04-01
CPC分类号： H01R12/7029 , H05K7/12
摘要： A panel mount connector (10) has a housing (20) with a first mounting surface or shoulder (42) and a mounting post (30) extending therefrom. The mounting post (30) has a deformable web (50) which is deformed as the housing (20) is inserted onto the panel (12), so that the deformable web (50) and first mounting surface (42) cooperate to maintain the connector (10) in position on the panel (12).
摘要翻译： 面板安装连接器（10）具有带有第一安装表面或肩部（42）的壳体（20）和从其延伸的安装柱（30）。 安装柱（30）具有可变形腹板（50），当框架（20）被插入到面板（12）上时，其变形，使得可变形腹板（50）和第一安装表面（42）协作以维持 连接器（10）在面板（12）上的适当位置。
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公开(公告)号：US06215924B1
公开(公告)日：2001-04-10
申请号：US09130137
申请日：1998-08-06
IPC分类号： G02B632
CPC分类号： G02B6/2937 , G02B6/2938
摘要： An optical coupler device is provided with gradient index first and second lenses, with each lens having an outer endface with one or more ports at a predetermined location defined by a waveguide such as an optical fiber. A narrow bandpass optical filter is disposed between inner endfaces of the first and second lenses. In one embodiment, the second lens is in coaxial mechanical alignment with the first lens so as to have a common optical axis. An input waveguide and an optional reflection waveguide are disposed on the outer endface of the first lens on opposite sides of the optical axis. A transmission waveguide is disposed on one side of the outer endface of the second lens and is positioned at a non-zero angle with respect to the optical axis in order to compensate for a previously unrecognized lateral beam displacement caused by the optical filter. In other embodiments, the input waveguide and optional reflection waveguide are angled, or the optical axis of the second lens is laterally offset from the optical axis of the first lens, to compensate for the lateral beam displacement and thereby improve coupling efficiency.
摘要翻译： 光耦合器件设置有梯度折射率第一透镜和第二透镜，每个透镜具有在由诸如光纤的波导限定的预定位置处具有一个或多个端口的外端面。 窄带通滤光器设置在第一和第二透镜的内端面之间。 在一个实施例中，第二透镜与第一透镜同轴地机械对准，以便具有共同的光轴。 输入波导和可选的反射波导设置在第一透镜的在光轴的相对侧上的外端面上。 传输波导设置在第二透镜的外端面的一侧上，并且相对于光轴以非零角度定位，以便补偿由光学滤波器引起的先前未识别的横向光束位移。 在其他实施例中，输入波导和可选反射波导是成角度的，或者第二透镜的光轴从第一透镜的光轴横向偏移，以补偿横向光束位移，从而提高耦合效率。
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公开(公告)号：US06785052B2
公开(公告)日：2004-08-31
申请号：US10004142
申请日：2001-11-14
申请人： Georg Ockenfuss , Robert E. Klinger
发明人： Georg Ockenfuss , Robert E. Klinger
IPC分类号： G02B528
摘要： A multilayer optical interference filter having a multiplicity of optical cavities separated by a dielectric reflector stacks to achieve either a very narrow passband region or sharp transition between the passband and reflective region is substantially free of stress to preserve the desired optical performance upon fabrication into miniature discrete filter elements. The substantial stress reduction is achieved by removing the filter from the substrate used in the deposition process in a controlled manner to preserve the structural integrity of the resulting free standing multilayer film structure. The structure can be further bonded or attached to other optical components to suppress a thermal shift in center wavelength without reintroducing stress or interposing a massive substrate in the optical path through the filter.
摘要翻译： 具有由介质反射器叠层隔开的多个光学空腔的多层光学干涉滤光器在通带和反射区域之间实现非常窄的通带区域或尖锐的转变，基本上没有应力以在制造成微型离散时保持所需的光学性能 过滤元件。 通过以受控的方式从用于沉积工艺的衬底中去除过滤器来实现显着的应力降低，以保持所得自立式多层膜结构的结构完整性。 该结构可以进一步结合或附着到其它光学部件上，以抑制中心波长的热偏移而不会再次引入应力或者通过滤光器将大块基片插入到光路中。
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