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公开(公告)号：US07410265B2
公开(公告)日：2008-08-12
申请号：US10675471
申请日：2003-09-30
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer , Wilhelm Egle , Bernhard Gellrich , Bernhard Geuppert
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer , Wilhelm Egle , Bernhard Gellrich , Bernhard Geuppert
IPC分类号： G02B5/08
CPC分类号： G03F7/70825 , B82Y10/00 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30 , G03F7/70058 , G03F7/70166 , G03F7/70175
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译： 用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光 （2）在第二焦点（200）。 收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。
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公开(公告)号：US07091505B2
公开(公告)日：2006-08-15
申请号：US10775037
申请日：2004-02-09
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
CPC分类号： B82Y10/00 , G02B5/09 , G02B7/182 , G02B17/006 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70358 , G03F7/70825 , G21K1/06 , G21K5/04
摘要： There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.
摘要翻译： 提供了沿着扫描方向以扫描模式操作的投影曝光系统。 投影曝光系统包括收集器，其收集波长<= 193nm的光并照亮平面中的区域。 平面由具有与扫描方向平行的y方向和垂直于扫描方向的x方向的局部坐标系限定。 收集器包括（a）第一镜壳，（b）第一镜壳内的第二镜壳，以及（c）用于紧固第一镜壳和第二镜壳的紧固装置。 镜壳基本上围绕公共旋转轴线旋转对称。 紧固装置具有在镜壳的径向方向上延伸的支撑辐条，并且当投影到平面中时支撑辐条产生不平行于y方向的突起。
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公开(公告)号：US20060291062A1
公开(公告)日：2006-12-28
申请号：US11416447
申请日：2006-05-02
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
IPC分类号： G02B27/10
CPC分类号： B82Y10/00 , G02B5/09 , G02B7/182 , G02B17/006 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70358 , G03F7/70825 , G21K1/06 , G21K5/04
摘要： There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength 193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.
摘要翻译： 提供了沿着扫描方向以扫描模式操作的投影曝光系统。 投影曝光系统包括：收集器，其接收波长为193nm的光并照射平面中的区域。 平面由具有与扫描方向平行的y方向和垂直于扫描方向的x方向的局部坐标系限定。 收集器包括（a）第一镜壳，（b）第一镜壳内的第二镜壳，以及（c）用于紧固第一镜壳和第二镜壳的紧固装置。 镜壳基本上围绕公共旋转轴线旋转对称。 紧固装置具有在镜壳的径向方向上延伸的支撑辐条，并且当投影到平面中时支撑辐条产生不平行于y方向的突起。
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公开(公告)号：US20080042079A1
公开(公告)日：2008-02-21
申请号：US11974718
申请日：2007-10-16
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
IPC分类号： G01J3/10
CPC分类号： B82Y10/00 , G02B5/09 , G02B7/182 , G02B17/006 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70358 , G03F7/70825 , G21K1/06 , G21K5/04
摘要： There is provided a system that includes a first optical sub-system contained in a first space, and a second optical sub-system contained in a second space. The first and said second spaces are separated by a structure selected from the group consisting of a diaphragm and a valve.
摘要翻译： 提供了一种包括包含在第一空间中的第一光学子系统和包含在第二空间中的第二光学子系统的系统。 第一和第二空间由选自隔膜和阀门的结构分开。
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公开(公告)号：US07321126B2
公开(公告)日：2008-01-22
申请号：US11416447
申请日：2006-05-02
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
IPC分类号： A61N5/00
CPC分类号： B82Y10/00 , G02B5/09 , G02B7/182 , G02B17/006 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70358 , G03F7/70825 , G21K1/06 , G21K5/04
摘要： There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.
摘要翻译： 提供了沿着扫描方向以扫描模式操作的投影曝光系统。 投影曝光系统包括收集器，其收集波长<= 193nm的光并照亮平面中的区域。 平面由具有与扫描方向平行的y方向和垂直于扫描方向的x方向的局部坐标系限定。 收集器包括（a）第一镜壳，（b）第一镜壳内的第二镜壳，以及（c）用于紧固第一镜壳和第二镜壳的紧固装置。 镜壳基本上围绕公共旋转轴线旋转对称。 紧固装置具有在镜壳的径向方向上延伸的支撑辐条，并且当投影到平面中时支撑辐条产生不平行于y方向的突起。
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公开(公告)号：US20080013680A1
公开(公告)日：2008-01-17
申请号：US11825078
申请日：2007-07-03
申请人： Wolfgang Singer , Wilhelm Egle , Markus Wiess , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Wiess , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.
摘要翻译： 有一个收藏家。 收集器包括位于具有倒角端的第二镜壳内的第一镜壳。
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7.发明授权Collector having unused region for illumination systems using a wavelength ≦193 nm 有权收集器具有使用波长<= 193nm的照明系统的未使用区域公开(公告)号：US07244954B2
公开(公告)日：2007-07-17
申请号：US11243403
申请日：2005-10-04
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
IPC分类号： G02B27/10
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
摘要翻译： 提供了一种用于具有波长<= 193nm的光的照明系统的收集器。 收集器包括（a）第一反射镜壳体，其围绕公共旋转轴线邻近第二反射镜壳体并位于其内部，其中第一和第二反射镜壳体旋转对称，以及（b）区域中的部件 在第一和第二镜壳之间。 收集器用于经由物体侧孔口接收来自光源的光并且用于照射图像侧平面中的区域，并且该区域不被光使用。
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公开(公告)号：US07460212B2
公开(公告)日：2008-12-02
申请号：US11825078
申请日：2007-07-03
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
IPC分类号： G21K1/06
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.
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9.发明申请Collector having unused region for illumination systems using a wavelength <193 nm 有权收集器具有使用波长<193nm的照明系统的未使用区域公开(公告)号：US20060097202A1
公开(公告)日：2006-05-11
申请号：US11243403
申请日：2005-10-04
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
IPC分类号： G01J3/10
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
摘要翻译： 提供了一种用于具有波长<= 193nm的光的照明系统的收集器。 收集器包括（a）第一反射镜壳体，其围绕公共旋转轴线邻近第二反射镜壳体并位于其内部，其中第一和第二反射镜壳体旋转对称，以及（b）区域中的部件 在第一和第二镜壳之间。 收集器用于经由物体侧孔口接收来自光源的光并且用于照射图像侧平面中的区域，并且该区域不被光使用。
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10.发明授权Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm 失效收集器具有使用波长小于或等于193nm的照明系统的未使用区域公开(公告)号：US07015489B2
公开(公告)日：2006-03-21
申请号：US10625254
申请日：2003-07-23
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
IPC分类号： G01G1/00
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
摘要翻译： 提供了一种用于具有波长<= 193nm的光的照明系统的收集器。 收集器包括（a）第一反射镜壳体，其围绕公共旋转轴线邻近第二反射镜壳体并位于其内部，其中第一和第二反射镜壳体旋转对称，以及（b）区域中的部件 在第一和第二镜壳之间。 收集器用于经由物体侧孔口接收来自光源的光并且用于照射图像侧平面中的区域，并且该区域不被光使用。
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